{"id":2048,"date":"2026-04-01T05:59:16","date_gmt":"2026-04-01T05:59:16","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2048"},"modified":"2026-04-01T06:04:59","modified_gmt":"2026-04-01T06:04:59","slug":"microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing\/","title":{"rendered":"Thi\u1ebft b\u1ecb laser vi l\u01b0u ch\u1ea5t d\u00f9ng trong gia c\u00f4ng t\u1ea5m b\u00e1n d\u1eabn v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao"},"content":{"rendered":"<p data-start=\"245\" data-end=\"828\"><img decoding=\"async\" class=\"alignright wp-image-2054 size-thumbnail\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-150x150.png\" alt=\"\" width=\"150\" height=\"150\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing-100x100.png 100w\" sizes=\"(max-width: 150px) 100vw, 150px\" \/>Thi\u1ebft b\u1ecb laser vi l\u01b0u s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 laser tia n\u01b0\u1edbc vi m\u00f4 ti\u00ean ti\u1ebfn \u0111\u1ec3 mang l\u1ea1i kh\u1ea3 n\u0103ng gia c\u00f4ng v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 \u00edt g\u00e2y h\u01b0 h\u1ea1i nhi\u1ec7t cho c\u00e1c t\u1ea5m b\u00e1n d\u1eabn c\u0169ng nh\u01b0 c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng, gi\u00f2n ho\u1eb7c c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng. B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p tia n\u01b0\u1edbc c\u00f3 k\u00edch th\u01b0\u1edbc d\u01b0\u1edbi micromet v\u1edbi ch\u00f9m tia laser, h\u1ec7 th\u1ed1ng h\u01b0\u1edbng n\u0103ng l\u01b0\u1ee3ng laser ch\u00ednh x\u00e1c \u0111\u1ebfn b\u1ec1 m\u1eb7t v\u1eadt li\u1ec7u gia c\u00f4ng, trong khi d\u00f2ng n\u01b0\u1edbc li\u00ean t\u1ee5c l\u00e0m m\u00e1t v\u00e0 lo\u1ea1i b\u1ecf c\u00e1c m\u1ea3nh v\u1ee5n. C\u00f4ng ngh\u1ec7 n\u00e0y gi\u1ea3i quy\u1ebft hi\u1ec7u qu\u1ea3 c\u00e1c th\u00e1ch th\u1ee9c ph\u1ed5 bi\u1ebfn c\u1ee7a gia c\u00f4ng laser v\u00e0 c\u01a1 h\u1ecdc truy\u1ec1n th\u1ed1ng, bao g\u1ed3m t\u1ed5n th\u01b0\u01a1ng nhi\u1ec7t, v\u1ebft n\u1ee9t vi m\u00f4, nhi\u1ec5m b\u1ea9n, \u0111\u1ed9 d\u1ed1c v\u00e0 bi\u1ebfn d\u1ea1ng.<\/p>\n<h2 data-section-id=\"1bqk1w5\" data-start=\"835\" data-end=\"856\"><span role=\"text\"><strong data-start=\"838\" data-end=\"854\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2055 alignleft\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-300x274.png\" alt=\"\" width=\"300\" height=\"274\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-300x274.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-13x12.png 13w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55-600x548.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing55.png 641w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/strong><\/span><\/h2>\n<ul data-start=\"857\" data-end=\"1548\">\n<li data-section-id=\"1vikzsj\" data-start=\"857\" data-end=\"984\"><strong data-start=\"859\" data-end=\"874\">Lo\u1ea1i laser:<\/strong> Laser Nd:YAG tr\u1ea1ng th\u00e1i r\u1eafn b\u01a1m b\u1eb1ng \u0111i\u1ed1t, b\u01b0\u1edbc s\u00f3ng 532\/1064 nm, \u0111\u1ed9 r\u1ed9ng xung t\u00ednh b\u1eb1ng \u03bcs\/ns, c\u00f4ng su\u1ea5t trung b\u00ecnh 10\u2013200 W<\/li>\n<li data-section-id=\"1huhii5\" data-start=\"985\" data-end=\"1128\"><strong data-start=\"987\" data-end=\"1008\">H\u1ec7 th\u1ed1ng phun n\u01b0\u1edbc \u00e1p l\u1ef1c cao:<\/strong> N\u01b0\u1edbc l\u1ecdc, kh\u1eed ion, \u00e1p su\u1ea5t th\u1ea5p; v\u00f2i phun si\u00eau m\u1ecbn ch\u1ec9 ti\u00eau th\u1ee5 1 l\u00edt\/gi\u1edd \u1edf \u00e1p su\u1ea5t 300 bar, l\u1ef1c t\u00e1c \u0111\u1ed9ng kh\u00f4ng \u0111\u00e1ng k\u1ec3 (&lt;0,1 N)<\/li>\n<li data-section-id=\"6bpefa\" data-start=\"1129\" data-end=\"1211\"><strong data-start=\"1131\" data-end=\"1142\">\u0110\u1ea7u phun:<\/strong> Ng\u1ecdc b\u00edch ho\u1eb7c kim c\u01b0\u01a1ng, \u0111\u01b0\u1eddng k\u00ednh 30\u2013150 \u03bcm \u0111\u1ec3 \u0111\u1ecbnh h\u01b0\u1edbng laser ch\u00ednh x\u00e1c<\/li>\n<li data-section-id=\"1kl8vyj\" data-start=\"1212\" data-end=\"1313\"><strong data-start=\"1214\" data-end=\"1235\">H\u1ec7 th\u1ed1ng ph\u1ee5 tr\u1ee3:<\/strong> B\u01a1m \u00e1p su\u1ea5t cao v\u00e0 c\u00e1c thi\u1ebft b\u1ecb x\u1eed l\u00fd n\u01b0\u1edbc \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t phun \u1ed5n \u0111\u1ecbnh<\/li>\n<li data-section-id=\"xrg2jd\" data-start=\"1314\" data-end=\"1396\"><strong data-start=\"1316\" data-end=\"1330\">\u0110\u1ed9 ch\u00ednh x\u00e1c:<\/strong> \u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb \u00b15 \u03bcm, \u0111\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb l\u1eb7p l\u1ea1i \u00b12 \u03bcm<\/li>\n<li data-section-id=\"17g1bmx\" data-start=\"1397\" data-end=\"1548\"><strong data-start=\"1399\" data-end=\"1425\">Kh\u1ea3 n\u0103ng x\u1eed l\u00fd:<\/strong> \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t Ra \u2264 1,2\u20131,6 \u03bcm, t\u1ed1c \u0111\u1ed9 c\u1eaft tuy\u1ebfn t\u00ednh \u2265 50 mm\/s, t\u1ed1c \u0111\u1ed9 m\u1edf \u2265 1,25 mm\/s, t\u1ed1c \u0111\u1ed9 c\u1eaft theo chu vi \u2265 6 mm\/s<\/li>\n<\/ul>\n<h2 data-section-id=\"10oaxfc\" data-start=\"1555\" data-end=\"1588\"><span role=\"text\"><strong data-start=\"1558\" data-end=\"1586\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"1590\" data-end=\"2259\">\n<thead data-start=\"1590\" data-end=\"1629\">\n<tr data-start=\"1590\" data-end=\"1629\">\n<th class=\"\" data-start=\"1590\" data-end=\"1606\" data-col-size=\"sm\">Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<th class=\"\" data-start=\"1606\" data-end=\"1617\" data-col-size=\"sm\">L\u1ef1a ch\u1ecdn 1<\/th>\n<th class=\"\" data-start=\"1617\" data-end=\"1629\" data-col-size=\"sm\">L\u1ef1a ch\u1ecdn 2<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1670\" data-end=\"2259\">\n<tr data-start=\"1670\" data-end=\"1724\">\n<td data-start=\"1670\" data-end=\"1695\" data-col-size=\"sm\">Th\u1ec3 t\u00edch m\u1eb7t b\u00e0n (mm)<\/td>\n<td data-col-size=\"sm\" data-start=\"1695\" data-end=\"1709\">300 \u00d7 300 \u00d7 150<\/td>\n<td data-col-size=\"sm\" data-start=\"1709\" data-end=\"1724\">400 \u00d7 400 \u00d7 200<\/td>\n<\/tr>\n<tr data-start=\"1725\" data-end=\"1773\">\n<td data-start=\"1725\" data-end=\"1742\" data-col-size=\"sm\">Tr\u1ee5c tuy\u1ebfn t\u00ednh XY<\/td>\n<td data-col-size=\"sm\" data-start=\"1742\" data-end=\"1757\">\u0110\u1ed9ng c\u01a1 tuy\u1ebfn t\u00ednh<\/td>\n<td data-col-size=\"sm\" data-start=\"1757\" data-end=\"1773\">\u0110\u1ed9ng c\u01a1 tuy\u1ebfn t\u00ednh<\/td>\n<\/tr>\n<tr data-start=\"1774\" data-end=\"1803\">\n<td data-start=\"1774\" data-end=\"1790\" data-col-size=\"sm\">Tr\u1ee5c tuy\u1ebfn t\u00ednh Z<\/td>\n<td data-col-size=\"sm\" data-start=\"1790\" data-end=\"1796\">150<\/td>\n<td data-col-size=\"sm\" data-start=\"1796\" data-end=\"1803\">200<\/td>\n<\/tr>\n<tr data-start=\"1804\" data-end=\"1843\">\n<td data-start=\"1804\" data-end=\"1832\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb (\u03bcm)<\/td>\n<td data-col-size=\"sm\" data-start=\"1832\" data-end=\"1837\">\u00b15<\/td>\n<td data-col-size=\"sm\" data-start=\"1837\" data-end=\"1843\">\u00b15<\/td>\n<\/tr>\n<tr data-start=\"1844\" data-end=\"1892\">\n<td data-start=\"1844\" data-end=\"1881\" data-col-size=\"sm\">\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111\u1ecbnh v\u1ecb l\u1eb7p l\u1ea1i (\u03bcm)<\/td>\n<td data-col-size=\"sm\" data-start=\"1881\" data-end=\"1886\">\u00b12<\/td>\n<td data-col-size=\"sm\" data-start=\"1886\" data-end=\"1892\">\u00b12<\/td>\n<\/tr>\n<tr data-start=\"1893\" data-end=\"1924\">\n<td data-start=\"1893\" data-end=\"1912\" data-col-size=\"sm\">L\u1ef1c gia t\u1ed1c (G)<\/td>\n<td data-col-size=\"sm\" data-start=\"1912\" data-end=\"1916\">1<\/td>\n<td data-col-size=\"sm\" data-start=\"1916\" data-end=\"1924\">0.29<\/td>\n<\/tr>\n<tr data-start=\"1925\" data-end=\"1998\">\n<td data-start=\"1925\" data-end=\"1945\" data-col-size=\"sm\">\u0110i\u1ec1u khi\u1ec3n s\u1ed1<\/td>\n<td data-col-size=\"sm\" data-start=\"1945\" data-end=\"1971\">3 tr\u1ee5c \/ 3+1 tr\u1ee5c \/ 3+2 tr\u1ee5c<\/td>\n<td data-col-size=\"sm\" data-start=\"1971\" data-end=\"1998\">3 tr\u1ee5c \/ 3+1 tr\u1ee5c \/ 3+2 tr\u1ee5c<\/td>\n<\/tr>\n<tr data-start=\"1999\" data-end=\"2040\">\n<td data-start=\"1999\" data-end=\"2017\" data-col-size=\"sm\">B\u01b0\u1edbc s\u00f3ng (nm)<\/td>\n<td data-col-size=\"sm\" data-start=\"2017\" data-end=\"2028\">532\/1064<\/td>\n<td data-col-size=\"sm\" data-start=\"2028\" data-end=\"2040\">532\/1064<\/td>\n<\/tr>\n<tr data-start=\"2041\" data-end=\"2086\">\n<td data-start=\"2041\" data-end=\"2059\" data-col-size=\"sm\">C\u00f4ng su\u1ea5t \u0111\u1ecbnh m\u1ee9c (W)<\/td>\n<td data-col-size=\"sm\" data-start=\"2059\" data-end=\"2072\">50\/100\/200<\/td>\n<td data-col-size=\"sm\" data-start=\"2072\" data-end=\"2086\">50\/100\/200<\/td>\n<\/tr>\n<tr data-start=\"2087\" data-end=\"2133\">\n<td data-start=\"2087\" data-end=\"2114\" data-col-size=\"sm\">\u00c1p su\u1ea5t tia n\u01b0\u1edbc (bar)<\/td>\n<td data-col-size=\"sm\" data-start=\"2114\" data-end=\"2123\">50\u2013100<\/td>\n<td data-col-size=\"sm\" data-start=\"2123\" data-end=\"2133\">50\u2013600<\/td>\n<\/tr>\n<tr data-start=\"2134\" data-end=\"2172\">\n<td data-start=\"2134\" data-end=\"2153\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc v\u00f2i phun (\u03bcm)<\/td>\n<td data-col-size=\"sm\" data-start=\"2153\" data-end=\"2162\">30\u2013150<\/td>\n<td data-col-size=\"sm\" data-start=\"2162\" data-end=\"2172\">30\u2013150<\/td>\n<\/tr>\n<tr data-start=\"2173\" data-end=\"2234\">\n<td data-start=\"2173\" data-end=\"2199\" data-col-size=\"sm\">K\u00edch th\u01b0\u1edbc m\u00e1y (mm)<\/td>\n<td data-col-size=\"sm\" data-start=\"2199\" data-end=\"2216\">1445\u00d71944\u00d72260<\/td>\n<td data-col-size=\"sm\" data-start=\"2216\" data-end=\"2234\">1700 \u00d7 1500 \u00d7 2120<\/td>\n<\/tr>\n<tr data-start=\"2235\" data-end=\"2259\">\n<td data-start=\"2235\" data-end=\"2248\" data-col-size=\"sm\">Tr\u1ecdng l\u01b0\u1ee3ng (T)<\/td>\n<td data-col-size=\"sm\" data-start=\"2248\" data-end=\"2254\">2.5<\/td>\n<td data-col-size=\"sm\" data-start=\"2254\" data-end=\"2259\">3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"3f2aoc\" data-start=\"2266\" data-end=\"2287\"><span role=\"text\"><strong data-start=\"2269\" data-end=\"2285\">\u1ee8ng d\u1ee5ng<\/strong><\/span><\/h2>\n<ol data-start=\"2289\" data-end=\"3456\">\n<li data-section-id=\"uspqzy\" data-start=\"2289\" data-end=\"2611\"><strong data-start=\"2292\" data-end=\"2318\">C\u1eaft v\u00e0 chia mi\u1ebfng wafer<\/strong>\n<ul data-start=\"2324\" data-end=\"2611\">\n<li data-section-id=\"15n5kv\" data-start=\"2324\" data-end=\"2427\">V\u1eadt li\u1ec7u: Silic (Si), cacbua silic (SiC), nitrua gali (GaN) v\u00e0 c\u00e1c t\u1ea5m wafer c\u1ee9ng\/d\u1ec5 v\u1ee1 kh\u00e1c<\/li>\n<li data-section-id=\"4o8wnm\" data-start=\"2431\" data-end=\"2611\">\u01afu \u0111i\u1ec3m: Thay th\u1ebf c\u00e1c l\u01b0\u1ee1i c\u1eaft kim c\u01b0\u01a1ng truy\u1ec1n th\u1ed1ng, gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng g\u00e3y m\u00e9p (20 \u03bcm), t\u0103ng t\u1ed1c \u0111\u1ed9 c\u1eaft l\u00ean 30%, cho ph\u00e9p c\u1eaft \u1ea9n \u0111\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer si\u00eau m\u1ecfng (&lt;50 \u03bcm)<\/li>\n<\/ul>\n<\/li>\n<li data-section-id=\"1yejyyv\" data-start=\"2613\" data-end=\"2857\"><strong data-start=\"2616\" data-end=\"2656\">Khoan chip v\u00e0 gia c\u00f4ng l\u1ed7 si\u00eau nh\u1ecf<\/strong>\n<ul data-start=\"2662\" data-end=\"2857\">\n<li data-section-id=\"dt0vh3\" data-start=\"2662\" data-end=\"2758\">\u1ee8ng d\u1ee5ng: Khoan l\u1ed7 xuy\u00ean silicon (TSV), m\u1ea3ng l\u1ed7 vi m\u00f4 t\u1ea3n nhi\u1ec7t cho c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t<\/li>\n<li data-section-id=\"13sb21p\" data-start=\"2762\" data-end=\"2857\">\u0110\u1eb7c \u0111i\u1ec3m: \u0110\u01b0\u1eddng k\u00ednh l\u1ed7 10\u2013200 \u03bcm, t\u1ef7 l\u1ec7 chi\u1ec1u s\u00e2u tr\u00ean chi\u1ec1u r\u1ed9ng l\u00ean \u0111\u1ebfn 10:1, \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t Ra &lt;0,5 \u03bcm<\/li>\n<\/ul>\n<\/li>\n<li data-section-id=\"lwpk87\" data-start=\"2859\" data-end=\"3031\"><strong data-start=\"2862\" data-end=\"2884\">C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn<\/strong>\n<ul data-start=\"2890\" data-end=\"3031\">\n<li data-section-id=\"c5ajme\" data-start=\"2890\" data-end=\"2963\">\u1ee8ng d\u1ee5ng: C\u1ed5ng k\u1ebft n\u1ed1i RDL, \u0111\u00f3ng g\u00f3i c\u1ea5p wafer (Fan-Out WLP)<\/li>\n<li data-section-id=\"xf24nc\" data-start=\"2967\" data-end=\"3031\">L\u1ee3i \u00edch: Gi\u1ea3m thi\u1ec3u t\u00e1c \u0111\u1ed9ng c\u01a1 h\u1ecdc, n\u00e2ng cao n\u0103ng su\u1ea5t l\u00ean tr\u00ean 99,51%<\/li>\n<\/ul>\n<\/li>\n<li data-section-id=\"1drgwht\" data-start=\"3033\" data-end=\"3250\"><strong data-start=\"3036\" data-end=\"3073\">C\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/strong>\n<ul data-start=\"3079\" data-end=\"3250\">\n<li data-section-id=\"s1h4sg\" data-start=\"3079\" data-end=\"3140\">V\u1eadt li\u1ec7u: GaN, SiC v\u00e0 c\u00e1c ch\u1ea5t b\u00e1n d\u1eabn khe n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng kh\u00e1c<\/li>\n<li data-section-id=\"1vpfptr\" data-start=\"3144\" data-end=\"3250\">C\u00e1c t\u00ednh n\u0103ng: Kh\u1eafc r\u00e3nh c\u1ed5ng, \u1ee7 b\u1eb1ng laser, ki\u1ec3m so\u00e1t n\u0103ng l\u01b0\u1ee3ng ch\u00ednh x\u00e1c \u0111\u1ec3 ng\u0103n ng\u1eeba s\u1ef1 ph\u00e2n h\u1ee7y nhi\u1ec7t<\/li>\n<\/ul>\n<\/li>\n<li data-section-id=\"l1d0bs\" data-start=\"3252\" data-end=\"3456\"><strong data-start=\"3255\" data-end=\"3286\">S\u1eeda ch\u1eefa l\u1ed7i v\u00e0 tinh ch\u1ec9nh<\/strong>\n<ul data-start=\"3292\" data-end=\"3456\">\n<li data-section-id=\"qf6wq6\" data-start=\"3292\" data-end=\"3386\">\u1ee8ng d\u1ee5ng: H\u00e0n laser cho m\u1ea1ch b\u1ed9 nh\u1edb, \u0111i\u1ec1u ch\u1ec9nh m\u1ea3ng th\u1ea5u k\u00ednh vi m\u00f4 cho c\u1ea3m bi\u1ebfn quang h\u1ecdc<\/li>\n<li data-section-id=\"1n1j7rx\" data-start=\"3390\" data-end=\"3456\">\u0110\u1ed9 ch\u00ednh x\u00e1c: Ki\u1ec3m so\u00e1t n\u0103ng l\u01b0\u1ee3ng \u00b11%, sai s\u1ed1 \u0111\u1ecbnh v\u1ecb khi s\u1eeda ch\u1eefa &lt;0,1 \u03bcm<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n<p><img decoding=\"async\" class=\"wp-image-2056 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing66.png\" alt=\"\" width=\"680\" height=\"145\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing66.png 680w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing66-300x64.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing66-18x4.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Microfluidic-Laser-Equipment-For-Semiconductor-Wafer-Processing66-600x128.png 600w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\n<h2 data-section-id=\"pf3kxk\" data-start=\"3463\" data-end=\"3495\"><span role=\"text\"><strong data-start=\"3466\" data-end=\"3493\">\u0110i\u1ec3m n\u1ed5i b\u1eadt &amp; \u01afu \u0111i\u1ec3m<\/strong><\/span><\/h2>\n<ul data-start=\"3496\" data-end=\"3989\">\n<li data-section-id=\"rm9qtv\" data-start=\"3496\" data-end=\"3584\">Quy tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p, trong m\u00f4i tr\u01b0\u1eddng s\u1ea1ch s\u1ebd v\u00e0 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd gi\u00fap gi\u1ea3m thi\u1ec3u t\u1ed1i \u0111a t\u1ed5n th\u01b0\u01a1ng do nhi\u1ec7t, c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng thu h\u1eb9p<\/li>\n<li data-section-id=\"11s5pkb\" data-start=\"3585\" data-end=\"3669\">Tia n\u01b0\u1edbc si\u00eau m\u1ecbn \u0111\u1ea3m b\u1ea3o h\u01b0\u1edbng d\u1eabn laser ch\u00ednh x\u00e1c v\u00e0 lo\u1ea1i b\u1ecf m\u1ea3nh v\u1ee5n hi\u1ec7u qu\u1ea3<\/li>\n<li data-section-id=\"kr28gm\" data-start=\"3670\" data-end=\"3786\">Th\u00edch h\u1ee3p cho c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng, gi\u00f2n v\u00e0 trong su\u1ed1t nh\u01b0 SiC, GaN, kim c\u01b0\u01a1ng, LTCC v\u00e0 tinh th\u1ec3 quang \u0111i\u1ec7n<\/li>\n<li data-section-id=\"i2ose\" data-start=\"3787\" data-end=\"3911\">T\u01b0\u01a1ng th\u00edch v\u1edbi quy tr\u00ecnh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn, linh ki\u1ec7n h\u00e0ng kh\u00f4ng v\u0169 tr\u1ee5 v\u00e0 vi \u0111i\u1ec7n t\u1eed<\/li>\n<li data-section-id=\"1f3ldb6\" data-start=\"3912\" data-end=\"3989\">T\u0103ng n\u0103ng su\u1ea5t, gi\u1ea3m l\u00e3ng ph\u00ed nguy\u00ean li\u1ec7u v\u00e0 duy tr\u00ec c\u00e1c t\u00ednh ch\u1ea5t c\u1ee7a nguy\u00ean li\u1ec7u<\/li>\n<\/ul>\n<h2 data-section-id=\"1yvhc7a\" data-start=\"3996\" data-end=\"4031\"><span role=\"text\"><strong data-start=\"3999\" data-end=\"4029\">Ch\u1ee9ng nh\u1eadn &amp; Tu\u00e2n th\u1ee7<\/strong><\/span><\/h2>\n<ul data-start=\"4032\" data-end=\"4173\">\n<li data-section-id=\"vmmuwx\" data-start=\"4032\" data-end=\"4050\">Tu\u00e2n th\u1ee7 RoHS<\/li>\n<li data-section-id=\"1drd7dj\" data-start=\"4051\" data-end=\"4109\">\u0110\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u00e0nh cho c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/li>\n<li data-section-id=\"1kx7imt\" data-start=\"4110\" data-end=\"4173\">H\u1ed7 tr\u1ee3 quy tr\u00ecnh x\u1eed l\u00fd c\u00f3 th\u1ec3 t\u00e1i t\u1ea1o, l\u1eb7p l\u1ea1i v\u00e0 t\u1ef1 \u0111\u1ed9ng h\u00f3a<\/li>\n<\/ul>\n<h2 data-section-id=\"1fngur7\" data-start=\"78\" data-end=\"90\"><span role=\"text\"><strong data-start=\"81\" data-end=\"88\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/span><\/h2>\n<p data-start=\"92\" data-end=\"539\"><strong data-start=\"92\" data-end=\"174\">1. C\u00f3 th\u1ec3 gia c\u00f4ng nh\u1eefng lo\u1ea1i v\u1eadt li\u1ec7u n\u00e0o b\u1eb1ng thi\u1ebft b\u1ecb laser vi l\u01b0u?<\/strong><br data-start=\"174\" data-end=\"177\" \/>C\u00f4ng ngh\u1ec7 laser vi l\u01b0u c\u00f3 th\u1ec3 gia c\u00f4ng ch\u00ednh x\u00e1c c\u00e1c v\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u1ee9ng, gi\u00f2n v\u00e0 c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, bao g\u1ed3m silicon (Si), cacbua silic (SiC), nitrua gali (GaN), kim c\u01b0\u01a1ng, \u0111\u1ebf g\u1ed1m carbon LTCC, tinh th\u1ec3 quang \u0111i\u1ec7n v\u00e0 c\u00e1c v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn kh\u00e1c. C\u00f4ng ngh\u1ec7 n\u00e0y r\u1ea5t l\u00fd t\u01b0\u1edfng cho c\u00e1c \u1ee9ng d\u1ee5ng y\u00eau c\u1ea7u m\u1ee9c \u0111\u1ed9 h\u01b0 h\u1ecfng do nhi\u1ec7t t\u1ed1i thi\u1ec3u v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t cao.<\/p>\n<p data-start=\"541\" data-end=\"931\"><strong data-start=\"541\" data-end=\"625\">2. C\u00f4ng ngh\u1ec7 laser tia si\u00eau nh\u1ecf gi\u00fap c\u1ea3i thi\u1ec7n quy tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m b\u00e1n d\u1eabn nh\u01b0 th\u1ebf n\u00e0o?<\/strong><br data-start=\"625\" data-end=\"628\" \/>B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p tia n\u01b0\u1edbc c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c d\u01b0\u1edbi micromet v\u1edbi ch\u00f9m tia laser, c\u00f4ng ngh\u1ec7 n\u00e0y \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ch\u00ednh x\u00e1c d\u01b0\u1edbi micromet \u0111\u1ed3ng th\u1eddi gi\u1ea3m thi\u1ec3u v\u00f9ng ch\u1ecbu \u1ea3nh h\u01b0\u1edfng nhi\u1ec7t, \u00f4 nhi\u1ec5m v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng g\u00e3y m\u00e9p. C\u00f4ng ngh\u1ec7 n\u00e0y thay th\u1ebf c\u00e1c l\u01b0\u1ee1i dao c\u01a1 h\u1ecdc truy\u1ec1n th\u1ed1ng trong c\u00e1c quy tr\u00ecnh c\u1eaft l\u00e1t, khoan v\u00e0 t\u1ea1o c\u1ea5u tr\u00fac vi m\u00f4, t\u1eeb \u0111\u00f3 n\u00e2ng cao hi\u1ec7u su\u1ea5t v\u00e0 gi\u1ea3m thi\u1ec3u l\u00e3ng ph\u00ed v\u1eadt li\u1ec7u.<\/p>\n<p data-start=\"933\" data-end=\"1044\"><strong data-start=\"933\" data-end=\"1006\">3. Thi\u1ebft b\u1ecb laser vi l\u01b0u ch\u1ea5t ph\u00f9 h\u1ee3p nh\u1ea5t v\u1edbi nh\u1eefng \u1ee9ng d\u1ee5ng n\u00e0o?<\/strong><br data-start=\"1006\" data-end=\"1009\" \/>Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n<ul data-start=\"1045\" data-end=\"1352\">\n<li data-section-id=\"2ulyh7\" data-start=\"1045\" data-end=\"1110\">C\u1eaft mi\u1ebfng wafer v\u00e0 c\u1eaft mi\u1ebfng wafer si\u00eau m\u1ecfng (&lt;50 \u03bcm) theo ph\u01b0\u01a1ng ph\u00e1p &quot;stealth&quot;<\/li>\n<li data-section-id=\"o1ga99\" data-start=\"1111\" data-end=\"1199\">K\u1ef9 thu\u1eadt khoan l\u1ed7 xuy\u00ean silicon (TSV) v\u00e0 m\u1ea3ng l\u1ed7 si\u00eau nh\u1ecf cho m\u1ea1ch t\u00edch h\u1ee3p 3D v\u00e0 thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t<\/li>\n<li data-section-id=\"skkgwb\" data-start=\"1200\" data-end=\"1352\">C\u00e1c c\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn, ch\u1eb3ng h\u1ea1n nh\u01b0 m\u1edf c\u1eeda s\u1ed5 RDL, \u0111\u00f3ng g\u00f3i c\u1ea5p t\u1ea5m wafer (Fan-Out WLP) v\u00e0 qu\u00e1 tr\u00ecnh kh\u1eafc c\u1ed5ng\/nung b\u1eb1ng laser cho c\u00e1c ch\u1ea5t b\u00e1n d\u1eabn GaN v\u00e0 SiC<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Thi\u1ebft b\u1ecb laser vi l\u01b0u s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 laser tia vi m\u00f4 ti\u00ean ti\u1ebfn \u0111\u1ec3 th\u1ef1c hi\u1ec7n gia c\u00f4ng v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao v\u00e0 \u00edt g\u00e2y h\u01b0 h\u1ea1i nhi\u1ec7t cho c\u00e1c t\u1ea5m wafer b\u00e1n d\u1eabn c\u0169ng nh\u01b0 c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng, gi\u00f2n ho\u1eb7c c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>","protected":false},"featured_media":2049,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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