{"id":2030,"date":"2026-03-27T01:57:48","date_gmt":"2026-03-27T01:57:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2030"},"modified":"2026-03-27T02:00:00","modified_gmt":"2026-03-27T02:00:00","slug":"semi-automatic-room-temperature-wafer-bonding-machine-for-2-to-12-inch-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/semi-automatic-room-temperature-wafer-bonding-machine-for-2-to-12-inch-wafer-processing\/","title":{"rendered":"M\u00e1y h\u00e0n wafer b\u00e1n t\u1ef1 \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng d\u00e0nh cho vi\u1ec7c gia c\u00f4ng wafer c\u00f3 k\u00edch th\u01b0\u1edbc t\u1eeb 2 \u0111\u1ebfn 12 inch"},"content":{"rendered":"

\"\"M\u00e1y h\u00e0n wafer b\u00e1n t\u1ef1 \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao d\u00e0nh cho qu\u00e1 tr\u00ecnh h\u00e0n \u1edf c\u1ea5p \u0111\u1ed9 wafer v\u00e0 c\u1ea5p \u0111\u1ed9 chip. B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p \u00e1p l\u1ef1c c\u01a1 h\u1ecdc v\u1edbi c\u00f4ng ngh\u1ec7 k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t t\u1ea1i ch\u1ed7, m\u00e1y cho ph\u00e9p th\u1ef1c hi\u1ec7n h\u00e0n v\u0129nh vi\u1ec5n \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng (20\u201330\u00b0C) m\u00e0 kh\u00f4ng c\u1ea7n s\u1eed d\u1ee5ng ch\u1ea5t k\u1ebft d\u00ednh hay x\u1eed l\u00fd nhi\u1ec7t \u0111\u1ed9 cao. \u0110i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m thi\u1ec3u \u1ee9ng su\u1ea5t nhi\u1ec7t v\u00e0 bi\u1ebfn d\u1ea1ng v\u1eadt li\u1ec7u, khi\u1ebfn m\u00e1y tr\u1edf th\u00e0nh gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho c\u00e1c v\u1eadt li\u1ec7u nh\u1ea1y c\u1ea3m v\u1edbi nhi\u1ec7t v\u00e0 v\u1eadt li\u1ec7u d\u1ecb ch\u1ea5t. M\u00e1y h\u1ed7 tr\u1ee3 c\u00e1c k\u00edch th\u01b0\u1edbc wafer t\u1eeb 2 inch \u0111\u1ebfn 12 inch v\u00e0 ph\u00f9 h\u1ee3p cho nghi\u00ean c\u1ee9u, s\u1ea3n xu\u1ea5t th\u1eed nghi\u1ec7m v\u00e0 s\u1ea3n xu\u1ea5t quy m\u00f4 nh\u1ecf \u0111\u1ebfn trung b\u00ecnh.<\/p>\n

\"\"C\u00e1c t\u00ednh n\u0103ng ch\u00ednh<\/strong><\/h2>\n
    \n
  1. D\u00e1n \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng<\/strong> \u2013 Ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 25 \u00b1 5\u00b0C \u0111\u1ec3 tr\u00e1nh s\u1ef1 ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9 v\u00e0 hi\u1ec7n t\u01b0\u1ee3ng cong v\u00eanh c\u1ee7a t\u1ea5m wafer.<\/li>\n
  2. K\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t<\/strong> \u2013 K\u00edch ho\u1ea1t b\u1eb1ng plasma ho\u1eb7c h\u00f3a h\u1ecdc gi\u00fap t\u0103ng c\u01b0\u1eddng \u0111\u1ed9 b\u00e1m d\u00ednh; qu\u00e1 tr\u00ecnh ph\u00fan x\u1ea1 (t\u00f9y ch\u1ecdn) gi\u00fap n\u00e2ng cao ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t ti\u1ebfp x\u00fac.<\/li>\n
  3. C\u0103n ch\u1ec9nh \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/strong> \u2013 H\u1ec7 th\u1ed1ng c\u0103n ch\u1ec9nh h\u00ecnh \u1ea3nh v\u00e0 b\u1ec7 chuy\u1ec3n \u0111\u1ed9ng ch\u00ednh x\u00e1c v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u00b10,5 \u03bcm.<\/li>\n
  4. Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u<\/strong> \u2013 H\u1ed7 tr\u1ee3 Si, SiC, GaAs, GaN, InP, ng\u1ecdc b\u00edch, th\u1ee7y tinh, LiNbO\u2083, LiTaO\u2083, kim c\u01b0\u01a1ng v\u00e0 m\u1ed9t s\u1ed1 lo\u1ea1i polymer nh\u1ea5t \u0111\u1ecbnh.<\/li>\n
  5. Ho\u1ea1t \u0111\u1ed9ng b\u00e1n t\u1ef1 \u0111\u1ed9ng<\/strong> \u2013 T\u1ea3i t\u1ea5m wafer th\u1ee7 c\u00f4ng k\u1ebft h\u1ee3p v\u1edbi quy tr\u00ecnh h\u00e0n t\u1ef1 \u0111\u1ed9ng; c\u00e1c c\u00f4ng th\u1ee9c c\u00f3 th\u1ec3 l\u1eadp tr\u00ecnh \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o k\u1ebft qu\u1ea3 \u1ed5n \u0111\u1ecbnh.<\/li>\n
  6. M\u00f4i tr\u01b0\u1eddng s\u1ea1ch s\u1ebd v\u00e0 \u1ed5n \u0111\u1ecbnh<\/strong> \u2013 H\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch ti\u00eau chu\u1ea9n Class 100 t\u00edch h\u1ee3p \u0111\u1ea3m b\u1ea3o m\u1ee9c \u0111\u1ed9 \u00f4 nhi\u1ec5m th\u1ea5p v\u00e0 t\u1ef7 l\u1ec7 l\u1ed7 r\u1ed7ng t\u1ea1i b\u1ec1 m\u1eb7t ti\u1ebfp x\u00fac <0,11 TP3T.<\/li>\n<\/ol>\n

    Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    Tham s\u1ed1<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
    K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n2\u2033 \u2013 12\u2033, t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c m\u1eabu kh\u00f4ng \u0111\u1ec1u<\/td>\n<\/tr>\n
    Nhi\u1ec7t \u0111\u1ed9 k\u1ebft d\u00ednh<\/td>\n20\u201330\u00b0C<\/td>\n<\/tr>\n
    \u00c1p su\u1ea5t t\u1ed1i \u0111a<\/td>\n80 kN<\/td>\n<\/tr>\n
    Ki\u1ec3m so\u00e1t \u00e1p su\u1ea5t<\/td>\nC\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh t\u1eeb 0\u20135000 N, \u0111\u1ed9 ph\u00e2n gi\u1ea3i \u00b11 N<\/td>\n<\/tr>\n
    \u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a vi\u1ec7c c\u0103n ch\u1ec9nh<\/td>\n\u00b10,5 \u03bcm<\/td>\n<\/tr>\n
    \u0110\u1ed9 b\u00e1m d\u00ednh<\/td>\n\u22652,0 J\/m\u00b2<\/td>\n<\/tr>\n
    X\u1eed l\u00fd b\u1ec1 m\u1eb7t<\/td>\nK\u00edch ho\u1ea1t t\u1ea1i ch\u1ed7 + l\u1eafng \u0111\u1ecdng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p ph\u00fan x\u1ea1<\/td>\n<\/tr>\n
    Ch\u1ebf \u0111\u1ed9 cho \u0103n<\/td>\nH\u01b0\u1edbng d\u1eabn s\u1eed d\u1ee5ng<\/td>\n<\/tr>\n
    M\u1ee9c \u0111\u1ed9 s\u1ea1ch s\u1ebd<\/td>\nL\u1edbp 100<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    C\u00f4ng ngh\u1ec7 c\u1ed1t l\u00f5i<\/strong><\/h2>\n
      \n
    1. H\u00e0n tr\u1ef1c ti\u1ebfp \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng<\/strong> \u2013 C\u00e1c b\u1ec1 m\u1eb7t \u0111\u00e3 \u0111\u01b0\u1ee3c k\u00edch ho\u1ea1t ti\u1ebfp x\u00fac v\u1edbi nhau d\u01b0\u1edbi \u00e1p su\u1ea5t \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t, t\u1ea1o th\u00e0nh c\u00e1c li\u00ean k\u1ebft \u1ed5n \u0111\u1ecbnh m\u00e0 kh\u00f4ng c\u1ea7n nung nhi\u1ec7t.<\/li>\n
    2. K\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t<\/strong> \u2013 T\u0103ng n\u0103ng l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t, lo\u1ea1i b\u1ecf c\u00e1c t\u1ea1p ch\u1ea5t v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a li\u00ean k\u1ebft gi\u1eefa c\u00e1c v\u1eadt li\u1ec7u.<\/li>\n<\/ol>\n

      \"\"\u1ee8ng d\u1ee5ng<\/strong><\/h2>\n
        \n
      1. C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/strong> \u2013 X\u1ebfp ch\u1ed3ng IC 3D, h\u00e0n TSV, t\u00edch h\u1ee3p d\u1ecb ch\u1ea5t gi\u1eefa chip logic v\u00e0 chip b\u1ed9 nh\u1edb.<\/li>\n
      2. S\u1ea3n xu\u1ea5t MEMS<\/strong> \u2013 \u0110\u00f3ng g\u00f3i ch\u00e2n kh\u00f4ng \u1edf c\u1ea5p \u0111\u1ed9 wafer cho c\u00e1c c\u1ea3m bi\u1ebfn nh\u01b0 c\u1ea3m bi\u1ebfn gia t\u1ed1c v\u00e0 c\u1ea3m bi\u1ebfn con quay h\u1ed3i chuy\u1ec3n.<\/li>\n
      3. Quang \u0111i\u1ec7n t\u1eed v\u00e0 M\u00e0n h\u00ecnh<\/strong> \u2013 H\u00e0n LED, h\u00e0n ch\u1ea5t n\u1ec1n sapphire v\u00e0 th\u1ee7y tinh, l\u1eafp r\u00e1p m\u00f4-\u0111un quang h\u1ecdc AR\/VR.<\/li>\n
      4. C\u00f4ng ngh\u1ec7 vi l\u01b0u ch\u1ea5t v\u00e0 chip sinh h\u1ecdc<\/strong> \u2013 K\u1ebft d\u00ednh PDMS v\u00e0 th\u1ee7y tinh m\u00e0 v\u1eabn gi\u1eef nguy\u00ean ho\u1ea1t t\u00ednh sinh h\u1ecdc.<\/li>\n
      5. Nghi\u00ean c\u1ee9u v\u00e0 c\u00e1c thi\u1ebft b\u1ecb m\u1edbi<\/strong> \u2013 Thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed linh ho\u1ea1t, thi\u1ebft b\u1ecb l\u01b0\u1ee3ng t\u1eed v\u00e0 t\u00edch h\u1ee3p v\u1eadt li\u1ec7u d\u1ecb ch\u1ea5t.<\/li>\n<\/ol>\n

        D\u1ecbch v\u1ee5 v\u00e0 H\u1ed7 tr\u1ee3<\/strong><\/h2>\n
          \n
        1. Ph\u00e1t tri\u1ec3n quy tr\u00ecnh<\/strong> \u2013 T\u1ed1i \u01b0u h\u00f3a c\u00e1c th\u00f4ng s\u1ed1 li\u00ean k\u1ebft v\u00e0 c\u00e1c gi\u1ea3i ph\u00e1p k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t cho c\u00e1c lo\u1ea1i v\u1eadt li\u1ec7u kh\u00e1c nhau.<\/li>\n
        2. T\u00f9y ch\u1ec9nh thi\u1ebft b\u1ecb<\/strong> \u2013 C\u00e1c m\u00f4-\u0111un c\u0103n ch\u1ec9nh c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao, bu\u1ed3ng ch\u00e2n kh\u00f4ng ho\u1eb7c bu\u1ed3ng kh\u00ed \u0111i\u1ec1u khi\u1ec3n.<\/li>\n
        3. \u0110\u00e0o t\u1ea1o k\u1ef9 thu\u1eadt<\/strong> \u2013 H\u01b0\u1edbng d\u1eabn v\u1eadn h\u00e0nh t\u1ea1i ch\u1ed7 v\u00e0 kh\u1eafc ph\u1ee5c s\u1ef1 c\u1ed1 quy tr\u00ecnh.<\/li>\n
        4. D\u1ecbch v\u1ee5 h\u1eadu m\u00e3i<\/strong> \u2013 B\u1ea3o h\u00e0nh 12 th\u00e1ng, thay th\u1ebf nhanh ch\u00f3ng c\u00e1c b\u1ed9 ph\u1eadn ch\u00ednh, ch\u1ea9n \u0111o\u00e1n t\u1eeb xa v\u00e0 c\u1eadp nh\u1eadt ph\u1ea7n m\u1ec1m.<\/li>\n<\/ol>\n

          C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/h2>\n

          H\u1ecfi: \u01afu \u0111i\u1ec3m ch\u00ednh c\u1ee7a ph\u01b0\u01a1ng ph\u00e1p d\u00e1n \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng l\u00e0 g\u00ec?
          A: N\u00f3 gi\u00fap lo\u1ea1i b\u1ecf \u1ee9ng su\u1ea5t nhi\u1ec7t v\u00e0 cho ph\u00e9p li\u00ean k\u1ebft ch\u1eafc ch\u1eafn c\u00e1c v\u1eadt li\u1ec7u nh\u1ea1y c\u1ea3m v\u1edbi nhi\u1ec7t v\u00e0 c\u00e1c v\u1eadt li\u1ec7u kh\u00e1c nhau.<\/p>\n

          H\u1ecfi: Nh\u1eefng v\u1eadt li\u1ec7u n\u00e0o c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c d\u00e1n l\u1ea1i v\u1edbi nhau?
          A: Silic, cacbua silic, nitrua gali, arsenua gali, photphua indi, ng\u1ecdc b\u00edch, th\u1ee7y tinh, niobat liti, kim c\u01b0\u01a1ng v\u00e0 m\u1ed9t s\u1ed1 lo\u1ea1i polymer.<\/p>","protected":false},"excerpt":{"rendered":"

          M\u00e1y h\u00e0n wafer b\u00e1n t\u1ef1 \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao d\u00e0nh cho qu\u00e1 tr\u00ecnh h\u00e0n \u1edf c\u1ea5p \u0111\u1ed9 wafer v\u00e0 c\u1ea5p \u0111\u1ed9 chip. B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p \u00e1p l\u1ef1c c\u01a1 h\u1ecdc v\u1edbi c\u00f4ng ngh\u1ec7 k\u00edch ho\u1ea1t b\u1ec1 m\u1eb7t t\u1ea1i ch\u1ed7, h\u1ec7 th\u1ed1ng n\u00e0y cho ph\u00e9p th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh h\u00e0n v\u0129nh vi\u1ec5n \u1edf nhi\u1ec7t \u0111\u1ed9 ph\u00f2ng (20\u201330\u00b0C) m\u00e0 kh\u00f4ng c\u1ea7n s\u1eed d\u1ee5ng ch\u1ea5t k\u1ebft d\u00ednh hay x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao.<\/p>","protected":false},"featured_media":2031,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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