{"id":1968,"date":"2026-03-23T06:01:20","date_gmt":"2026-03-23T06:01:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=1968"},"modified":"2026-03-23T06:03:52","modified_gmt":"2026-03-23T06:03:52","slug":"lpcvd-oxidation-furnace","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/lpcvd-oxidation-furnace\/","title":{"rendered":"L\u00f2 oxy h\u00f3a LPCVD 6\/8\/12 inch: L\u1edbp m\u00e0ng m\u1ecfng c\u00f3 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u cao cho s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn"},"content":{"rendered":"

L\u00f2 oxy h\u00f3a LPCVD 6\/8\/12 inch l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng m\u1ed9t c\u00e1ch ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u. Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong vi\u1ec7c t\u1ea1o ra c\u00e1c l\u1edbp polysilicon, nitrua silic v\u00e0 oxit silic ch\u1ea5t l\u01b0\u1ee3ng cao tr\u00ean c\u00e1c t\u1ea5m wafer, \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh cho c\u00e1c linh ki\u1ec7n b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t, ch\u1ea5t n\u1ec1n ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao kh\u00e1c.<\/p>\n

Thi\u1ebft b\u1ecb n\u00e0y k\u1ebft h\u1ee3p c\u00f4ng ngh\u1ec7 l\u1eafng \u0111\u1ecdng \u00e1p su\u1ea5t th\u1ea5p ti\u00ean ti\u1ebfn, h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9 th\u00f4ng minh v\u00e0 thi\u1ebft k\u1ebf quy tr\u00ecnh si\u00eau s\u1ea1ch \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u01b0\u1ee3t tr\u1ed9i c\u1ee7a m\u00e0ng m\u1ecfng c\u00f9ng n\u0103ng su\u1ea5t cao. C\u1ea5u tr\u00fac l\u00f2 ph\u1ea3n \u1ee9ng d\u1ea1ng \u0111\u1ee9ng c\u1ee7a thi\u1ebft b\u1ecb cho ph\u00e9p x\u1eed l\u00fd theo l\u00f4 hi\u1ec7u qu\u1ea3, trong khi quy tr\u00ecnh l\u1eafng \u0111\u1ecdng nhi\u1ec7t gi\u00fap tr\u00e1nh \u0111\u01b0\u1ee3c h\u01b0 h\u1ecfng do plasma g\u00e2y ra, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c quy tr\u00ecnh quan tr\u1ecdng nh\u01b0 h\u00ecnh th\u00e0nh l\u1edbp \u0111i\u1ec7n m\u00f4i c\u1ed5ng, l\u1edbp \u0111\u1ec7m \u1ee9ng su\u1ea5t v\u00e0 c\u00e1c l\u1edbp oxit b\u1ea3o v\u1ec7.<\/p>\n

\"\"<\/p>\n

\n

Nh\u1eefng \u01b0u \u0111i\u1ec3m n\u1ed5i b\u1eadt<\/strong><\/span><\/h2>\n
    \n
  • Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng c\u00f3 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u cao:<\/strong> M\u00f4i tr\u01b0\u1eddng \u00e1p su\u1ea5t th\u1ea5p (0,1\u201310 Torr) \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u gi\u1eefa c\u00e1c t\u1ea5m wafer v\u00e0 trong c\u00f9ng m\u1ed9t t\u1ea5m wafer \u1edf m\u1ee9c \u00b11,51 TP3T, y\u1ebfu t\u1ed1 quan tr\u1ecdng \u0111\u1ed1i v\u1edbi vi\u1ec7c s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb hi\u1ec7u su\u1ea5t cao.<\/li>\n
  • Thi\u1ebft k\u1ebf l\u00f2 ph\u1ea3n \u1ee9ng th\u1eb3ng \u0111\u1ee9ng:<\/strong> X\u1eed l\u00fd \u0111\u01b0\u1ee3c 150\u2013200 t\u1ea5m wafer m\u1ed7i m\u1ebb, gi\u00fap n\u00e2ng cao n\u0103ng su\u1ea5t v\u00e0 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o b\u00e1n d\u1eabn quy m\u00f4 c\u00f4ng nghi\u1ec7p.<\/li>\n
  • Quy tr\u00ecnh l\u1eafng \u0111\u1ecdng nhi\u1ec7t (500\u2013900\u00b0C):<\/strong> Cung c\u1ea5p qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng nh\u1eb9 nh\u00e0ng, kh\u00f4ng s\u1eed d\u1ee5ng plasma \u0111\u1ec3 b\u1ea3o v\u1ec7 c\u00e1c ch\u1ea5t n\u1ec1n nh\u1ea1y c\u1ea3m v\u00e0 duy tr\u00ec ch\u1ea5t l\u01b0\u1ee3ng m\u00e0ng cao.<\/li>\n
  • \u0110i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9 th\u00f4ng minh:<\/strong> Gi\u00e1m s\u00e1t v\u00e0 \u0111i\u1ec1u ch\u1ec9nh theo th\u1eddi gian th\u1ef1c v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u00b11\u00b0C \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o k\u1ebft qu\u1ea3 \u1ed5n \u0111\u1ecbnh v\u00e0 l\u1eb7p l\u1ea1i \u0111\u01b0\u1ee3c.<\/li>\n
  • Bu\u1ed3ng x\u1eed l\u00fd si\u00eau s\u1ea1ch:<\/strong> Gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m h\u1ea1t, ph\u00f9 h\u1ee3p v\u1edbi SiC v\u00e0 c\u00e1c v\u1eadt li\u1ec7u t\u1ea5m wafer ti\u00ean ti\u1ebfn kh\u00e1c.<\/li>\n
  • C\u1ea5u h\u00ecnh c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh:<\/strong> Thi\u1ebft k\u1ebf linh ho\u1ea1t \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u quy tr\u00ecnh kh\u00e1c nhau, bao g\u1ed3m qu\u00e1 tr\u00ecnh oxy h\u00f3a kh\u00f4 ho\u1eb7c \u01b0\u1edbt v\u00e0 c\u00e1c k\u00edch th\u01b0\u1edbc t\u1ea5m wafer kh\u00e1c nhau.<\/li>\n<\/ul>\n

    Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n
    T\u00ednh n\u0103ng<\/th>\nTh\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n
    K\u00edch th\u01b0\u1edbc t\u1ea5m wafer<\/td>\n6\/8\/12 inch<\/td>\n<\/tr>\n
    C\u00e1c v\u1eadt li\u1ec7u t\u01b0\u01a1ng th\u00edch<\/td>\nPolysilicon, nitrua silic, oxit silic<\/td>\n<\/tr>\n
    Lo\u1ea1i oxy h\u00f3a<\/td>\nOxy kh\u00f4 \/ Oxy \u01b0\u1edbt (DCE, HCl)<\/td>\n<\/tr>\n
    Ph\u1ea1m vi nhi\u1ec7t \u0111\u1ed9 qu\u00e1 tr\u00ecnh<\/td>\n500\u00b0C\u2013900\u00b0C<\/td>\n<\/tr>\n
    Khu v\u1ef1c nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh<\/td>\n\u2265800 mm<\/td>\n<\/tr>\n
    \u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a h\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9<\/td>\n\u00b11\u00b0C<\/td>\n<\/tr>\n
    Ki\u1ec3m so\u00e1t h\u1ea1t<\/td>\n0,32 \u03bcm), 0,32 \u03bcm), 0,226 \u03bcm)<\/td>\n<\/tr>\n
    \u0110\u1ed9 d\u00e0y m\u00e0ng<\/td>\nNIT1500 \u00b150 \u00c5<\/td>\n<\/tr>\n
    T\u00ednh \u0111\u1ed3ng nh\u1ea5t<\/td>\nTrong c\u00f9ng m\u1ed9t t\u1ea5m wafer <2.5%, gi\u1eefa c\u00e1c t\u1ea5m wafer <2.5%, gi\u1eefa c\u00e1c l\u00f4 <2%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \u0110\u1eb7c \u0111i\u1ec3m s\u1ea3n ph\u1ea9m<\/strong><\/span><\/h2>\n
      \n
    • Vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer t\u1ef1 \u0111\u1ed9ng \u0111\u1ea3m b\u1ea3o m\u1ee9c \u0111\u1ed9 an to\u00e0n cao v\u00e0 hi\u1ec7u qu\u1ea3 v\u1eadn h\u00e0nh.<\/li>\n
    • Bu\u1ed3ng x\u1eed l\u00fd si\u00eau s\u1ea1ch gi\u00fap gi\u1ea3m thi\u1ec3u nguy c\u01a1 nhi\u1ec5m b\u1ea9n v\u00e0 duy tr\u00ec ch\u1ea5t l\u01b0\u1ee3ng m\u00e0ng \u1ed5n \u0111\u1ecbnh.<\/li>\n
    • \u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y m\u00e0ng cao gi\u00fap h\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn.<\/li>\n
    • Ch\u1ee9c n\u0103ng \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9 v\u00e0 \u00e1p su\u1ea5t th\u00f4ng minh theo th\u1eddi gian th\u1ef1c cho ph\u00e9p \u0111i\u1ec1u ch\u1ec9nh quy tr\u00ecnh m\u1ed9t c\u00e1ch ch\u00ednh x\u00e1c.<\/li>\n
    • Gi\u00e1 \u0111\u1ee1 t\u1ea5m wafer SiC gi\u00fap gi\u1ea3m ma s\u00e1t v\u00e0 s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c h\u1ea1t b\u1ee5i, t\u1eeb \u0111\u00f3 k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a t\u1ea5m wafer.<\/li>\n
    • Thi\u1ebft k\u1ebf m\u00f4-\u0111un cho ph\u00e9p t\u00f9y ch\u1ec9nh \u0111\u1ec3 ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng v\u00e0 nhu c\u1ea7u quy tr\u00ecnh \u0111a d\u1ea1ng.<\/li>\n<\/ul>\n

      Nguy\u00ean l\u00fd c\u1ee7a qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng\"\"<\/strong><\/span><\/h2>\n
        \n
      1. Gi\u1edbi thi\u1ec7u v\u1ec1 kh\u00ed:<\/strong> C\u00e1c kh\u00ed ph\u1ea3n \u1ee9ng \u0111\u01b0\u1ee3c \u0111\u01b0a v\u00e0o \u1ed1ng trong \u0111i\u1ec1u ki\u1ec7n \u00e1p su\u1ea5t th\u1ea5p (0,25\u20131 Torr).<\/li>\n
      2. S\u1ef1 khu\u1ebfch t\u00e1n b\u1ec1 m\u1eb7t:<\/strong> C\u00e1c ph\u00e2n t\u1eed khu\u1ebfch t\u00e1n t\u1ef1 do tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer, \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u.<\/li>\n
      3. H\u1ea5p ph\u1ee5:<\/strong> C\u00e1c ch\u1ea5t ph\u1ea3n \u1ee9ng b\u00e1m d\u00ednh v\u00e0o b\u1ec1 m\u1eb7t t\u1ea5m wafer tr\u01b0\u1edbc khi x\u1ea3y ra ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc.<\/li>\n
      4. Ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc:<\/strong> Qu\u00e1 tr\u00ecnh ph\u00e2n h\u1ee7y nhi\u1ec7t t\u1ea1o ra l\u1edbp m\u00e0ng m\u1ecfng mong mu\u1ed1n tr\u1ef1c ti\u1ebfp tr\u00ean ch\u1ea5t n\u1ec1n.<\/li>\n
      5. Lo\u1ea1i b\u1ecf s\u1ea3n ph\u1ea9m ph\u1ee5:<\/strong> C\u00e1c kh\u00ed kh\u00f4ng ph\u1ea3n \u1ee9ng \u0111\u01b0\u1ee3c h\u00fat h\u1ebft ra ngo\u00e0i \u0111\u1ec3 duy tr\u00ec \u0111\u1ed9 tinh khi\u1ebft v\u00e0 ng\u0103n ng\u1eeba s\u1ef1 can thi\u1ec7p.<\/li>\n
      6. Qu\u00e1 tr\u00ecnh h\u00ecnh th\u00e0nh m\u00e0ng:<\/strong> C\u00e1c s\u1ea3n ph\u1ea9m ph\u1ea3n \u1ee9ng d\u1ea7n d\u1ea7n t\u00edch t\u1ee5 l\u1ea1i, t\u1ea1o th\u00e0nh m\u1ed9t l\u1edbp m\u00e0ng m\u1ecfng \u0111\u1ed3ng nh\u1ea5t v\u00e0 \u1ed5n \u0111\u1ecbnh.<\/li>\n<\/ol>\n

        \u1ee8ng d\u1ee5ng<\/strong><\/span><\/h2>\n
          \n
        • L\u1edbp oxit c\u00e1ch \u0111i\u1ec7n:<\/strong> B\u1ea3o v\u1ec7 c\u00e1c t\u1ea5m silicon kh\u1ecfi b\u1ecb nhi\u1ec5m b\u1ea9n v\u00e0 gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng d\u1eabn ion trong qu\u00e1 tr\u00ecnh pha t\u1ea1p.<\/li>\n<\/ul>\n

          \"\"<\/p>\n

            \n
          • L\u1edbp oxit pad:<\/strong> Ho\u1ea1t \u0111\u1ed9ng nh\u01b0 m\u1ed9t l\u1edbp \u0111\u1ec7m ch\u1ed1ng \u1ee9ng su\u1ea5t gi\u1eefa c\u00e1c l\u1edbp silicon v\u00e0 nitrit silicon, gi\u00fap ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng n\u1ee9t t\u1ea5m wafer v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t s\u1ea3n xu\u1ea5t.<\/li>\n<\/ul>\n

            \"\"<\/p>\n

              \n
            • L\u1edbp oxit c\u1ed5ng:<\/strong> T\u1ea1o th\u00e0nh l\u1edbp \u0111i\u1ec7n m\u00f4i trong c\u00e1c c\u1ea5u tr\u00fac MOS, \u0111\u1ea3m b\u1ea3o s\u1ef1 d\u1eabn \u0111i\u1ec7n ch\u00ednh x\u00e1c v\u00e0 ki\u1ec3m so\u00e1t hi\u1ec7u \u1ee9ng tr\u01b0\u1eddng.<\/li>\n<\/ul>\n

              \"\"<\/p>\n

              C\u1ea5u h\u00ecnh h\u1ec7 th\u1ed1ng<\/strong><\/span><\/h2>\n
                \n
              • LPCVD theo ph\u01b0\u01a1ng th\u1eb3ng \u0111\u1ee9ng:<\/strong> Kh\u00ed x\u1eed l\u00fd ch\u1ea3y t\u1eeb tr\u00ean xu\u1ed1ng d\u01b0\u1edbi, gi\u00fap \u0111\u1ea3m b\u1ea3o l\u1edbp ph\u1ee7 \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean t\u1ea5t c\u1ea3 c\u00e1c t\u1ea5m wafer trong m\u1ed9t m\u1ebb.<\/li>\n<\/ul>\n

                \"\"<\/p>\n

                  \n
                • LPCVD ngang:<\/strong> Kh\u00ed l\u01b0u chuy\u1ec3n d\u1ecdc theo chi\u1ec1u d\u00e0i c\u1ee7a c\u00e1c t\u1ea5m n\u1ec1n, ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t li\u00ean t\u1ee5c v\u1edbi kh\u1ed1i l\u01b0\u1ee3ng l\u1edbn, m\u1eb7c d\u00f9 \u0111\u1ed9 d\u00e0y l\u1edbp l\u1eafng \u0111\u1ecdng c\u00f3 th\u1ec3 thay \u0111\u1ed5i nh\u1eb9 \u1edf khu v\u1ef1c g\u1ea7n ph\u00eda \u0111\u1ea7u v\u00e0o.<\/li>\n<\/ul>\n

                  \"\"<\/p>\n

                  C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/strong><\/span><\/h2>\n

                  C\u00e2u h\u1ecfi 1: LPCVD ch\u1ee7 y\u1ebfu \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 l\u00e0m g\u00ec?<\/strong>
                  A: LPCVD l\u00e0 m\u1ed9t quy tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng \u00e1p su\u1ea5t th\u1ea5p \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn \u0111\u1ec3 l\u1eafng \u0111\u1ecdng polysilicon, nitrua silic v\u00e0 oxit silic, gi\u00fap t\u1ea1o ra c\u00e1c l\u1edbp m\u00e0ng \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng cao ph\u1ee5c v\u1ee5 cho vi\u1ec7c ch\u1ebf t\u1ea1o c\u00e1c thi\u1ebft b\u1ecb ti\u00ean ti\u1ebfn.<\/p>\n

                  C\u00e2u h\u1ecfi 2: LPCVD kh\u00e1c v\u1edbi PECVD nh\u01b0 th\u1ebf n\u00e0o?<\/strong>
                  A: Ph\u01b0\u01a1ng ph\u00e1p LPCVD d\u1ef1a v\u00e0o qu\u00e1 tr\u00ecnh k\u00edch ho\u1ea1t nhi\u1ec7t \u1edf \u00e1p su\u1ea5t th\u1ea5p \u0111\u1ec3 t\u1ea1o ra c\u00e1c l\u1edbp m\u00e0ng c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao, trong khi ph\u01b0\u01a1ng ph\u00e1p PECVD s\u1eed d\u1ee5ng plasma \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p h\u01a1n \u0111\u1ec3 t\u0103ng t\u1ed1c \u0111\u1ed9 l\u1eafng \u0111\u1ecdng, nh\u01b0ng ch\u1ea5t l\u01b0\u1ee3ng l\u1edbp m\u00e0ng th\u01b0\u1eddng th\u1ea5p h\u01a1n m\u1ed9t ch\u00fat.<\/p>\n

                  C\u00e2u h\u1ecfi 3: C\u00e1c k\u00edch th\u01b0\u1edbc v\u00e0 v\u1eadt li\u1ec7u wafer n\u00e0o t\u01b0\u01a1ng th\u00edch v\u1edbi l\u00f2 oxy h\u00f3a LPCVD n\u00e0y?<\/strong>
                  A: L\u00f2 nung n\u00e0y h\u1ed7 tr\u1ee3 c\u00e1c t\u1ea5m wafer c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch, 8 inch v\u00e0 12 inch, \u0111\u1ed3ng th\u1eddi t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c lo\u1ea1i t\u1ea5m wafer polysilicon, nitrua silic, oxit silic v\u00e0 SiC, mang l\u1ea1i s\u1ef1 linh ho\u1ea1t cho nhi\u1ec1u \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn kh\u00e1c nhau.<\/p>\n

                  C\u00e2u h\u1ecfi 4: L\u00f2 oxy h\u00f3a LPCVD c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c t\u00f9y ch\u1ec9nh cho c\u00e1c quy tr\u00ecnh c\u1ee5 th\u1ec3 kh\u00f4ng?<\/strong>
                  A: \u0110\u00fang v\u1eady, h\u1ec7 th\u1ed1ng n\u00e0y cung c\u1ea5p c\u00e1c c\u1ea5u h\u00ecnh m\u00f4-\u0111un, bao g\u1ed3m c\u00e1c v\u00f9ng nhi\u1ec7t \u0111\u1ed9 c\u00f3 th\u1ec3 \u0111i\u1ec1u ch\u1ec9nh, \u0111i\u1ec1u khi\u1ec3n l\u01b0u l\u01b0\u1ee3ng kh\u00ed v\u00e0 c\u00e1c ch\u1ebf \u0111\u1ed9 oxy h\u00f3a (kh\u00f4 ho\u1eb7c \u01b0\u1edbt), gi\u00fap \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u quy tr\u00ecnh \u0111a d\u1ea1ng cho c\u1ea3 nghi\u00ean c\u1ee9u v\u00e0 s\u1ea3n xu\u1ea5t quy m\u00f4 c\u00f4ng nghi\u1ec7p.<\/p>","protected":false},"excerpt":{"rendered":"

                  L\u00f2 oxy h\u00f3a LPCVD (Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc \u00e1p su\u1ea5t th\u1ea5p) k\u00edch th\u01b0\u1edbc 6\/8\/12 inch l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 th\u1ef1c hi\u1ec7n qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng m\u1ed9t c\u00e1ch ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ed3ng \u0111\u1ec1u. Thi\u1ebft b\u1ecb n\u00e0y \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong vi\u1ec7c t\u1ea1o ra c\u00e1c l\u1edbp polysilicon, nitrua silic v\u00e0 oxit silic ch\u1ea5t l\u01b0\u1ee3ng cao tr\u00ean c\u00e1c t\u1ea5m wafer, \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t \u1ed5n \u0111\u1ecbnh cho c\u00e1c linh ki\u1ec7n b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t, ch\u1ea5t n\u1ec1n ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao kh\u00e1c.<\/p>","protected":false},"featured_media":1969,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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