![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_growth_furnace_pvt_method_6inch_8inch_12_inch_low_energy_consumption1-300x300.webp\")
L\u00f2 nu\u00f4i c\u1ea5y SiC (ph\u01b0\u01a1ng ph\u00e1p PVT) l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c tinh th\u1ec3 \u0111\u01a1n silicon carbide (SiC) c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch, 8 inch v\u00e0 12 inch.<\/p>\n
S\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 gia nhi\u1ec7t c\u1ea3m \u1ee9ng ti\u00ean ti\u1ebfn, l\u00f2 nung n\u00e0y mang l\u1ea1i kh\u1ea3 n\u0103ng gia nhi\u1ec7t nhanh, ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 ti\u00eau th\u1ee5 n\u0103ng l\u01b0\u1ee3ng th\u1ea5p, khi\u1ebfn n\u00f3 tr\u1edf th\u00e0nh gi\u1ea3i ph\u00e1p l\u00fd t\u01b0\u1edfng cho qu\u00e1 tr\u00ecnh nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC quy m\u00f4 c\u00f4ng nghi\u1ec7p.<\/p>\n
N\u00f3 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong s\u1ea3n xu\u1ea5t c\u00e1c t\u1ea5m n\u1ec1n SiC cho \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t, thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn th\u1ebf h\u1ec7 m\u1edbi.<\/p>\n
H\u1ec7 th\u1ed1ng gia nhi\u1ec7t c\u1ea3m \u1ee9ng
Ph\u01b0\u01a1ng ph\u00e1p gia nhi\u1ec7t \u0111i\u1ec7n t\u1eeb tr\u1ef1c ti\u1ebfp cho n\u1ed3i nung than ch\u00ec \u0111\u1ea3m b\u1ea3o hi\u1ec7u su\u1ea5t cao v\u00e0 ph\u1ea3n \u1ee9ng nhi\u1ec7t nhanh ch\u00f3ng<\/p>\n<\/li>\n
Ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 si\u00eau ch\u00ednh x\u00e1c
\u0110\u1ed9 ch\u00ednh x\u00e1c l\u00ean \u0111\u1ebfn \u00b11\u00b0C, \u0111\u1ea3m b\u1ea3o \u0111i\u1ec1u ki\u1ec7n ph\u00e1t tri\u1ec3n tinh th\u1ec3 \u1ed5n \u0111\u1ecbnh<\/p>\n<\/li>\n
Ti\u00eau th\u1ee5 n\u0103ng l\u01b0\u1ee3ng th\u1ea5p
Thi\u1ebft k\u1ebf nhi\u1ec7t \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 chi ph\u00ed v\u1eadn h\u00e0nh<\/p>\n<\/li>\n
\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh cao & M\u1ee9c \u0111\u1ed9 nhi\u1ec5m b\u1ea9n th\u1ea5p
S\u01b0\u1edfi \u1ea5m kh\u00f4ng ti\u1ebfp x\u00fac k\u1ebft h\u1ee3p v\u1edbi m\u00f4i tr\u01b0\u1eddng kh\u00ed tr\u01a1 gi\u00fap gi\u1ea3m thi\u1ec3u t\u1ea1p ch\u1ea5t<\/p>\n<\/li>\n
C\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng cho c\u00e1c tinh th\u1ec3 c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn
H\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 SiC k\u00edch th\u01b0\u1edbc 6\u2033, 8\u2033 v\u00e0 12\u2033<\/p>\n<\/li>\n<\/ul>\n
| Tham s\u1ed1<\/th>\n | Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|
| K\u00edch th\u01b0\u1edbc (D\u00e0i \u00d7 R\u1ed9ng \u00d7 Cao)<\/td>\n | 3200 \u00d7 1150 \u00d7 3600 mm (c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh)<\/td>\n<\/tr>\n |
| \u0110\u01b0\u1eddng k\u00ednh bu\u1ed3ng l\u00f2<\/td>\n | 400 mm<\/td>\n<\/tr>\n |
| Nhi\u1ec7t \u0111\u1ed9 cao nh\u1ea5t<\/td>\n | 2.400\u00b0C<\/td>\n<\/tr>\n |
| Ph\u1ea1m vi nhi\u1ec7t \u0111\u1ed9<\/td>\n | 900\u20133000\u00b0C<\/td>\n<\/tr>\n |
| \u0110\u1ed9 ch\u00ednh x\u00e1c nhi\u1ec7t \u0111\u1ed9<\/td>\n | \u00b11\u00b0C<\/td>\n<\/tr>\n |
| Ph\u01b0\u01a1ng ph\u00e1p s\u01b0\u1edfi \u1ea5m<\/td>\n | S\u01b0\u1edfi \u1ea5m c\u1ea3m \u1ee9ng<\/td>\n<\/tr>\n |
| Ngu\u1ed3n \u0111i\u1ec7n<\/td>\n | 40 kW, 8\u201312 kHz<\/td>\n<\/tr>\n |
| M\u1ee9c ch\u00e2n kh\u00f4ng<\/td>\n | 5 \u00d7 10\u207b\u2074 Pa<\/td>\n<\/tr>\n |
| D\u1ea3i \u00e1p su\u1ea5t<\/td>\n | 1\u2013700 mbar<\/td>\n<\/tr>\n |
| \u0110o nhi\u1ec7t \u0111\u1ed9<\/td>\n | H\u1ed3ng ngo\u1ea1i hai m\u00e0u<\/td>\n<\/tr>\n |
| Ph\u01b0\u01a1ng ph\u00e1p n\u1ea1p<\/td>\n | N\u1ea1p t\u1eeb ph\u00eda d\u01b0\u1edbi<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n\u01afu \u0111i\u1ec3m v\u1ec1 thi\u1ebft k\u1ebf<\/span><\/h2>\nT\u01b0\u01a1ng th\u00edch v\u1edbi qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 SiC b\u00e1n c\u00e1ch \u0111i\u1ec7n v\u00e0 d\u1eabn \u0111i\u1ec7n<\/p>\n<\/li>\n H\u1ec7 th\u1ed1ng xoay l\u00f2 nung gi\u00fap c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a nhi\u1ec7t \u0111\u1ed9<\/p>\n<\/li>\n Vi\u1ec7c \u0111i\u1ec1u ch\u1ec9nh l\u1ef1c n\u00e2ng c\u1ee7a cu\u1ed9n c\u1ea3m gi\u00fap gi\u1ea3m thi\u1ec3u nhi\u1ec5u nhi\u1ec7t<\/p>\n<\/li>\n Bu\u1ed3ng th\u1ea1ch anh l\u00e0m m\u00e1t b\u1eb1ng n\u01b0\u1edbc hai l\u1edbp gi\u00fap k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd thi\u1ebft b\u1ecb<\/p>\n<\/li>\n Gi\u00e1m s\u00e1t nhi\u1ec7t \u0111\u1ed9 t\u1ea1i hai \u0111i\u1ec3m theo th\u1eddi gian th\u1ef1c<\/p>\n<\/li>\n Nhi\u1ec1u ch\u1ebf \u0111\u1ed9 \u0111i\u1ec1u khi\u1ec3n: c\u00f4ng su\u1ea5t kh\u00f4ng \u0111\u1ed5i \/ d\u00f2ng \u0111i\u1ec7n kh\u00f4ng \u0111\u1ed5i \/ nhi\u1ec7t \u0111\u1ed9 kh\u00f4ng \u0111\u1ed5i<\/p>\n<\/li>\n Kh\u1edfi \u0111\u1ed9ng th\u00f4ng minh ch\u1ec9 v\u1edbi m\u1ed9t c\u00fa nh\u1ea5p chu\u1ed9t \u0111\u1ec3 v\u1eadn h\u00e0nh t\u1ef1 \u0111\u1ed9ng<\/p>\n<\/li>\n C\u1ea5u tr\u00fac g\u1ecdn g\u00e0ng gi\u00fap b\u1ed1 tr\u00ed nh\u00e0 m\u00e1y hi\u1ec7u qu\u1ea3<\/p>\n<\/li>\n Ki\u1ec3m so\u00e1t \u00e1p su\u1ea5t v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao (l\u00ean \u0111\u1ebfn \u00b11 Pa)<\/p>\n<\/li>\n<\/ul>\n Hi\u1ec7u su\u1ea5t & \u1ee8ng d\u1ee5ng<\/span><\/h2>\nMOSFET SiC<\/p>\n<\/li>\n \u0110i\u1ed1t Schottky<\/p>\n<\/li>\n Thi\u1ebft b\u1ecb RF<\/p>\n<\/li>\n Xe \u0111i\u1ec7n (m\u00f4-\u0111un ngu\u1ed3n \u0111i\u1ec7n EV)<\/p>\n<\/li>\n Bi\u1ebfn t\u1ea7n n\u0103ng l\u01b0\u1ee3ng m\u1eb7t tr\u1eddi<\/p>\n<\/li>\n H\u1ec7 th\u1ed1ng truy\u1ec1n th\u00f4ng 5G<\/p>\n<\/li>\n<\/ul>\n V\u1edbi kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111i\u1ec1u ki\u1ec7n sinh tr\u01b0\u1edfng \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a, h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ea3m b\u1ea3o n\u0103ng su\u1ea5t cao, t\u00ednh \u1ed5n \u0111\u1ecbnh v\u00e0 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng cho s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p.<\/p>\n
N\u0103ng l\u1ef1c c\u1ee7a ch\u00fang t\u00f4i (ZMSH)<\/span><\/h2>\n
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![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/SiC-Growth-Furnace5.png\")
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