{"id":1948,"date":"2026-03-17T07:21:48","date_gmt":"2026-03-17T07:21:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1948"},"modified":"2026-03-20T07:22:42","modified_gmt":"2026-03-20T07:22:42","slug":"sic-crystal-growth-furnace-pvt-lpe-ht-cvd-for-high-quality-silicon-carbide-single-crystal-production","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/sic-crystal-growth-furnace-pvt-lpe-ht-cvd-for-high-quality-silicon-carbide-single-crystal-production\/","title":{"rendered":"L\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC (PVT \/ LPE \/ HT-CVD) d\u00f9ng \u0111\u1ec3 s\u1ea3n xu\u1ea5t tinh th\u1ec3 \u0111\u01a1n tinh th\u1ec3 cacbua silic ch\u1ea5t l\u01b0\u1ee3ng cao"},"content":{"rendered":"<p data-start=\"204\" data-end=\"416\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-1950 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-300x259.webp\" alt=\"\" width=\"300\" height=\"259\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-300x259.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-14x12.webp 14w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-600x518.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>L\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb quan tr\u1ecdng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c tinh th\u1ec3 \u0111\u01a1n ch\u1ea5t silicon carbide (SiC) ch\u1ea5t l\u01b0\u1ee3ng cao, \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t, thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n<p data-start=\"418\" data-end=\"489\">H\u1ec7 th\u1ed1ng c\u1ee7a ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 nhi\u1ec1u c\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n ph\u1ed5 bi\u1ebfn, bao g\u1ed3m:<\/p>\n<ul data-start=\"491\" data-end=\"612\">\n<li data-section-id=\"12iy5p3\" data-start=\"491\" data-end=\"525\">\n<p data-start=\"493\" data-end=\"525\">V\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT)<\/p>\n<\/li>\n<li data-section-id=\"yxgf5n\" data-start=\"526\" data-end=\"556\">\n<p data-start=\"528\" data-end=\"556\">Ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tr\u00ean ch\u1ea5t l\u1ecfng (LPE)<\/p>\n<\/li>\n<li data-section-id=\"ch2v4w\" data-start=\"557\" data-end=\"612\">\n<p data-start=\"559\" data-end=\"612\">Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed \u1edf nhi\u1ec7t \u0111\u1ed9 cao (HT-CVD)<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"614\" data-end=\"833\">V\u1edbi kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c nhi\u1ec7t \u0111\u1ed9 cao, \u00e1p su\u1ea5t ch\u00e2n kh\u00f4ng v\u00e0 l\u01b0u l\u01b0\u1ee3ng kh\u00ed, l\u00f2 nung n\u00e0y cho ph\u00e9p s\u1ea3n xu\u1ea5t \u1ed5n \u0111\u1ecbnh c\u00e1c tinh th\u1ec3 SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao v\u00e0 t\u1ef7 l\u1ec7 khuy\u1ebft t\u1eadt th\u1ea5p v\u1edbi k\u00edch th\u01b0\u1edbc 4\u20136 inch, \u0111\u1ed3ng th\u1eddi c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh \u0111\u1ec3 s\u1ea3n xu\u1ea5t c\u00e1c tinh th\u1ec3 c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n.<\/p>\n<h2 data-section-id=\"z1sk7h\" data-start=\"840\" data-end=\"883\"><span role=\"text\">C\u00e1c ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC \u0111\u01b0\u1ee3c h\u1ed7 tr\u1ee3<\/span><\/h2>\n<h3 data-section-id=\"kspzpi\" data-start=\"885\" data-end=\"926\"><span role=\"text\">1. V\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT)<\/span><\/h3>\n<p data-start=\"928\" data-end=\"1108\">Nguy\u00ean t\u1eafc quy tr\u00ecnh:<br data-start=\"950\" data-end=\"953\" \/><img decoding=\"async\" class=\"size-medium wp-image-1953 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-300x130.jpg\" alt=\"\" width=\"300\" height=\"130\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-300x130.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-18x8.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-600x261.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5.jpg 679w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>B\u1ed9t SiC \u0111\u01b0\u1ee3c th\u0103ng hoa \u1edf nhi\u1ec7t \u0111\u1ed9 tr\u00ean 2000\u00b0C. C\u00e1c h\u1ea1t h\u01a1i \u0111\u01b0\u1ee3c v\u1eadn chuy\u1ec3n d\u1ecdc theo gradient nhi\u1ec7t \u0111\u1ed9 v\u00e0 t\u00e1i k\u1ebft tinh tr\u00ean m\u1ed9t tinh th\u1ec3 h\u1ea1t gi\u1ed1ng.<\/p>\n<p data-start=\"1110\" data-end=\"1127\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh:<\/p>\n<ul data-start=\"1128\" data-end=\"1374\">\n<li data-section-id=\"1m5h759\" data-start=\"1128\" data-end=\"1177\">\n<p data-start=\"1130\" data-end=\"1177\">Ch\u1ea3o nung v\u00e0 gi\u00e1 \u0111\u1ee1 h\u1ea1t b\u1eb1ng than ch\u00ec c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/p>\n<\/li>\n<li data-section-id=\"obcs2k\" data-start=\"1178\" data-end=\"1239\">\n<p data-start=\"1180\" data-end=\"1239\">H\u1ec7 th\u1ed1ng gi\u00e1m s\u00e1t nhi\u1ec7t \u0111\u1ed9 t\u00edch h\u1ee3p c\u1ea3m bi\u1ebfn nhi\u1ec7t \u0111i\u1ec7n v\u00e0 h\u1ed3ng ngo\u1ea1i<\/p>\n<\/li>\n<li data-section-id=\"1ahok9n\" data-start=\"1240\" data-end=\"1284\">\n<p data-start=\"1242\" data-end=\"1284\">H\u1ec7 th\u1ed1ng \u0111i\u1ec1u khi\u1ec3n l\u01b0u l\u01b0\u1ee3ng kh\u00ed ch\u00e2n kh\u00f4ng v\u00e0 kh\u00ed tr\u01a1<\/p>\n<\/li>\n<li data-section-id=\"ltafbu\" data-start=\"1285\" data-end=\"1324\">\n<p data-start=\"1287\" data-end=\"1324\">\u0110i\u1ec1u khi\u1ec3n qu\u00e1 tr\u00ecnh t\u1ef1 \u0111\u1ed9ng d\u1ef1a tr\u00ean PLC<\/p>\n<\/li>\n<li data-section-id=\"1ubyld1\" data-start=\"1325\" data-end=\"1374\">\n<p data-start=\"1327\" data-end=\"1374\">T\u00edch h\u1ee3p h\u1ec7 th\u1ed1ng l\u00e0m m\u00e1t v\u00e0 x\u1eed l\u00fd kh\u00ed th\u1ea3i<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1376\" data-end=\"1391\">\u01afu \u0111i\u1ec3m:<\/p>\n<ul data-start=\"1392\" data-end=\"1507\">\n<li data-section-id=\"1skc6sa\" data-start=\"1392\" data-end=\"1432\">\n<p data-start=\"1394\" data-end=\"1432\">C\u00f4ng ngh\u1ec7 \u0111\u00e3 \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n ho\u00e0n thi\u1ec7n v\u00e0 \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng r\u1ed9ng r\u00e3i<\/p>\n<\/li>\n<li data-section-id=\"696hi4\" data-start=\"1433\" data-end=\"1466\">\n<p data-start=\"1435\" data-end=\"1466\">Chi ph\u00ed thi\u1ebft b\u1ecb t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p<\/p>\n<\/li>\n<li data-section-id=\"4ihzdk\" data-start=\"1467\" data-end=\"1507\">\n<p data-start=\"1469\" data-end=\"1507\">Th\u00edch h\u1ee3p \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC s\u1ed1 l\u01b0\u1ee3ng l\u1edbn<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1509\" data-end=\"1526\">\u1ee8ng d\u1ee5ng:<\/p>\n<ul data-start=\"1527\" data-end=\"1590\">\n<li data-section-id=\"16plruj\" data-start=\"1527\" data-end=\"1590\">\n<p data-start=\"1529\" data-end=\"1590\">S\u1ea3n xu\u1ea5t c\u00e1c ch\u1ea5t n\u1ec1n SiC b\u00e1n c\u00e1ch \u0111i\u1ec7n v\u00e0 d\u1eabn \u0111i\u1ec7n<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"1lkfnea\" data-start=\"1597\" data-end=\"1659\"><span role=\"text\">2. Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha h\u01a1i \u1edf nhi\u1ec7t \u0111\u1ed9 cao (HT-CVD)<\/span><\/h3>\n<p data-start=\"1661\" data-end=\"1794\"><img decoding=\"async\" class=\"size-medium wp-image-1954 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-300x96.jpg\" alt=\"\" width=\"300\" height=\"96\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-300x96.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-18x6.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-600x192.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6.jpg 669w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Nguy\u00ean t\u1eafc quy tr\u00ecnh:<br data-start=\"1683\" data-end=\"1686\" \/>C\u00e1c lo\u1ea1i kh\u00ed c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao (v\u00ed d\u1ee5: SiH\u2084 + C\u2082H\u2084 \/ C\u2083H\u2088) ph\u00e2n h\u1ee7y \u1edf nhi\u1ec7t \u0111\u1ed9 1800\u20132300\u00b0C v\u00e0 t\u1ea1o th\u00e0nh l\u1edbp SiC tr\u00ean tinh th\u1ec3 h\u1ea1t gi\u1ed1ng.<\/p>\n<p data-start=\"1796\" data-end=\"1813\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh:<\/p>\n<ul data-start=\"1814\" data-end=\"2010\">\n<li data-section-id=\"136qfh6\" data-start=\"1814\" data-end=\"1864\">\n<p data-start=\"1816\" data-end=\"1864\">S\u01b0\u1edfi \u1ea5m c\u1ea3m \u1ee9ng th\u00f4ng qua s\u1ef1 gh\u00e9p n\u1ed1i \u0111i\u1ec7n t\u1eeb<\/p>\n<\/li>\n<li data-section-id=\"a59yxr\" data-start=\"1865\" data-end=\"1919\">\n<p data-start=\"1867\" data-end=\"1919\">H\u1ec7 th\u1ed1ng cung c\u1ea5p kh\u00ed \u1ed5n \u0111\u1ecbnh (kh\u00ed mang He \/ H\u2082)<\/p>\n<\/li>\n<li data-section-id=\"1cbw0ya\" data-start=\"1920\" data-end=\"1980\">\n<p data-start=\"1922\" data-end=\"1980\">\u0110\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9 \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t \u0111\u1ec3 ng\u01b0ng t\u1ee5 tinh th\u1ec3<\/p>\n<\/li>\n<li data-section-id=\"xx40zc\" data-start=\"1981\" data-end=\"2010\">\n<p data-start=\"1983\" data-end=\"2010\">Kh\u1ea3 n\u0103ng pha t\u1ea1p ch\u00ednh x\u00e1c<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2012\" data-end=\"2027\">\u01afu \u0111i\u1ec3m:<\/p>\n<ul data-start=\"2028\" data-end=\"2102\">\n<li data-section-id=\"xejhn5\" data-start=\"2028\" data-end=\"2050\">\n<p data-start=\"2030\" data-end=\"2050\">M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p<\/p>\n<\/li>\n<li data-section-id=\"126pemv\" data-start=\"2051\" data-end=\"2074\">\n<p data-start=\"2053\" data-end=\"2074\">\u0110\u1ed9 tinh khi\u1ebft cao<\/p>\n<\/li>\n<li data-section-id=\"u0lupt\" data-start=\"2075\" data-end=\"2102\">\n<p data-start=\"2077\" data-end=\"2102\">Ki\u1ec3m so\u00e1t n\u1ed3ng \u0111\u1ed9 ch\u1ea5t pha t\u1ea1p linh ho\u1ea1t<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2104\" data-end=\"2121\">\u1ee8ng d\u1ee5ng:<\/p>\n<ul data-start=\"2122\" data-end=\"2185\">\n<li data-section-id=\"1b8jolu\" data-start=\"2122\" data-end=\"2185\">\n<p data-start=\"2124\" data-end=\"2185\">T\u1ea5m wafer SiC hi\u1ec7u su\u1ea5t cao d\u00e0nh cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"1gxz1d4\" data-start=\"2192\" data-end=\"2229\"><span role=\"text\">3. Ph\u00e9p m\u1ecdc tinh th\u1ec3 pha l\u1ecfng (LPE)<\/span><\/h3>\n<p data-start=\"2231\" data-end=\"2390\"><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-1955 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-300x133.jpg\" alt=\"\" width=\"300\" height=\"133\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-300x133.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-18x8.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-600x266.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Nguy\u00ean t\u1eafc quy tr\u00ecnh:<br data-start=\"2253\" data-end=\"2256\" \/>Si v\u00e0 C h\u00f2a tan trong dung d\u1ecbch \u1edf nhi\u1ec7t \u0111\u1ed9 cao (~1800\u00b0C), v\u00e0 SiC k\u1ebft tinh t\u1eeb dung d\u1ecbch n\u00f3ng ch\u1ea3y qu\u00e1 b\u00e3o h\u00f2a trong qu\u00e1 tr\u00ecnh l\u00e0m ngu\u1ed9i c\u00f3 ki\u1ec3m so\u00e1t.<\/p>\n<p data-start=\"2392\" data-end=\"2409\">C\u00e1c t\u00ednh n\u0103ng ch\u00ednh:<\/p>\n<ul data-start=\"2410\" data-end=\"2570\">\n<li data-section-id=\"1l354m9\" data-start=\"2410\" data-end=\"2449\">\n<p data-start=\"2412\" data-end=\"2449\">Qu\u00e1 tr\u00ecnh h\u00ecnh th\u00e0nh l\u1edbp epitaksi ch\u1ea5t l\u01b0\u1ee3ng cao<\/p>\n<\/li>\n<li data-section-id=\"1f5uz6v\" data-start=\"2450\" data-end=\"2488\">\n<p data-start=\"2452\" data-end=\"2488\">M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p v\u00e0 \u0111\u1ed9 tinh khi\u1ebft cao<\/p>\n<\/li>\n<li data-section-id=\"1da15oj\" data-start=\"2489\" data-end=\"2531\">\n<p data-start=\"2491\" data-end=\"2531\">Y\u00eau c\u1ea7u v\u1ec1 thi\u1ebft b\u1ecb t\u01b0\u01a1ng \u0111\u1ed1i kh\u00f4ng cao<\/p>\n<\/li>\n<li data-section-id=\"apgmow\" data-start=\"2532\" data-end=\"2570\">\n<p data-start=\"2534\" data-end=\"2570\">C\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng cho s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2572\" data-end=\"2587\">\u01afu \u0111i\u1ec3m:<\/p>\n<ul data-start=\"2588\" data-end=\"2646\">\n<li data-section-id=\"1lh17wx\" data-start=\"2588\" data-end=\"2609\">\n<p data-start=\"2590\" data-end=\"2609\">Gi\u1ea3m chi ph\u00ed ph\u00e1t tri\u1ec3n<\/p>\n<\/li>\n<li data-section-id=\"7sa3sd\" data-start=\"2610\" data-end=\"2646\">\n<p data-start=\"2612\" data-end=\"2646\">Ch\u1ea5t l\u01b0\u1ee3ng l\u1edbp epitactic \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2648\" data-end=\"2665\">\u1ee8ng d\u1ee5ng:<\/p>\n<ul data-start=\"2666\" data-end=\"2761\">\n<li data-section-id=\"u4ixfp\" data-start=\"2666\" data-end=\"2710\">\n<p data-start=\"2668\" data-end=\"2710\">S\u1ef1 ph\u00e1t tri\u1ec3n l\u1edbp epitaxial tr\u00ean ch\u1ea5t n\u1ec1n SiC<\/p>\n<\/li>\n<li data-section-id=\"5zhtvl\" data-start=\"2711\" data-end=\"2761\">\n<p data-start=\"2713\" data-end=\"2761\">S\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n hi\u1ec7u su\u1ea5t cao<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"1ttn0lq\" data-start=\"2768\" data-end=\"2795\"><span role=\"text\">\u01afu \u0111i\u1ec3m k\u1ef9 thu\u1eadt<\/span><\/h2>\n<ul data-start=\"2797\" data-end=\"3035\">\n<li data-section-id=\"js25p8\" data-start=\"2797\" data-end=\"2837\">\n<p data-start=\"2799\" data-end=\"2837\">Ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao (&gt;2000\u00b0C)<\/p>\n<\/li>\n<li data-section-id=\"1jqlm2f\" data-start=\"2838\" data-end=\"2876\">\n<p data-start=\"2840\" data-end=\"2876\">Ki\u1ec3m so\u00e1t \u1ed5n \u0111\u1ecbnh l\u01b0u l\u01b0\u1ee3ng ch\u00e2n kh\u00f4ng v\u00e0 kh\u00ed<\/p>\n<\/li>\n<li data-section-id=\"gf25zn\" data-start=\"2877\" data-end=\"2911\">\n<p data-start=\"2879\" data-end=\"2911\">H\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a PLC ti\u00ean ti\u1ebfn<\/p>\n<\/li>\n<li data-section-id=\"1oe212f\" data-start=\"2912\" data-end=\"2974\">\n<p data-start=\"2914\" data-end=\"2974\">Thi\u1ebft k\u1ebf l\u00f2 nung c\u00f3 th\u1ec3 t\u00f9y ch\u1ec9nh (k\u00edch th\u01b0\u1edbc, c\u1ea5u h\u00ecnh, quy tr\u00ecnh)<\/p>\n<\/li>\n<li data-section-id=\"1qtodg6\" data-start=\"2975\" data-end=\"3035\">\n<p data-start=\"2977\" data-end=\"3035\">T\u01b0\u01a1ng th\u00edch v\u1edbi qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 SiC c\u00f3 k\u00edch th\u01b0\u1edbc 4\u20136 inch (c\u00f3 th\u1ec3 m\u1edf r\u1ed9ng)<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"i1urdn\" data-start=\"3042\" data-end=\"3065\"><span role=\"text\">N\u0103ng l\u1ef1c c\u1ee7a ch\u00fang t\u00f4i<\/span><\/h2>\n<h3 data-section-id=\"1euwnkw\" data-start=\"3067\" data-end=\"3094\"><span role=\"text\">1. Cung c\u1ea5p thi\u1ebft b\u1ecb<\/span><\/h3>\n<p data-start=\"3095\" data-end=\"3164\">Ch\u00fang t\u00f4i cung c\u1ea5p c\u00e1c l\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf v\u00e0 ch\u1ebf t\u1ea1o ho\u00e0n ch\u1ec9nh, d\u00e0nh cho:<\/p>\n<ul data-start=\"3165\" data-end=\"3275\">\n<li data-section-id=\"o9p6qu\" data-start=\"3165\" data-end=\"3200\">\n<p data-start=\"3167\" data-end=\"3200\">SiC b\u00e1n d\u1eabn c\u00e1ch \u0111i\u1ec7n c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/p>\n<\/li>\n<li data-section-id=\"11vwiq6\" data-start=\"3201\" data-end=\"3238\">\n<p data-start=\"3203\" data-end=\"3238\">S\u1ea3n xu\u1ea5t tinh th\u1ec3 SiC d\u1eabn \u0111i\u1ec7n<\/p>\n<\/li>\n<li data-section-id=\"10vy7s\" data-start=\"3239\" data-end=\"3275\">\n<p data-start=\"3241\" data-end=\"3275\">Y\u00eau c\u1ea7u v\u1ec1 s\u1ea3n xu\u1ea5t theo l\u00f4<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"phctqp\" data-start=\"3282\" data-end=\"3323\"><span role=\"text\">2. Nguy\u00ean li\u1ec7u th\u00f4 v\u00e0 ngu\u1ed3n cung c\u1ea5p tinh th\u1ec3<\/span><\/h3>\n<p data-start=\"3324\" data-end=\"3334\">Ch\u00fang t\u00f4i cung c\u1ea5p:<\/p>\n<ul data-start=\"3335\" data-end=\"3401\">\n<li data-section-id=\"1ggi3jo\" data-start=\"3335\" data-end=\"3359\">\n<p data-start=\"3337\" data-end=\"3359\">Nguy\u00ean li\u1ec7u th\u00f4 SiC<\/p>\n<\/li>\n<li data-section-id=\"h3kpam\" data-start=\"3360\" data-end=\"3377\">\n<p data-start=\"3362\" data-end=\"3377\">Tinh th\u1ec3 h\u1ea1t gi\u1ed1ng<\/p>\n<\/li>\n<li data-section-id=\"1rb4g8j\" data-start=\"3378\" data-end=\"3401\">\n<p data-start=\"3380\" data-end=\"3401\">V\u1eadt t\u01b0 ti\u00eau hao trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"3403\" data-end=\"3479\">T\u1ea5t c\u1ea3 c\u00e1c nguy\u00ean li\u1ec7u \u0111\u1ec1u ph\u1ea3i tr\u1ea3i qua quy tr\u00ecnh ki\u1ec3m tra ch\u1ea5t l\u01b0\u1ee3ng nghi\u00eam ng\u1eb7t \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n<h3 data-section-id=\"lzu290\" data-start=\"3486\" data-end=\"3531\"><span role=\"text\">3. Ph\u00e1t tri\u1ec3n v\u00e0 t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh<\/span><\/h3>\n<p data-start=\"3532\" data-end=\"3562\">\u0110\u1ed9i ng\u0169 k\u1ef9 s\u01b0 c\u1ee7a ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3:<\/p>\n<ul data-start=\"3563\" data-end=\"3669\">\n<li data-section-id=\"1hou4gz\" data-start=\"3563\" data-end=\"3593\">\n<p data-start=\"3565\" data-end=\"3593\">Ph\u00e1t tri\u1ec3n quy tr\u00ecnh theo y\u00eau c\u1ea7u<\/p>\n<\/li>\n<li data-section-id=\"1t2cez5\" data-start=\"3594\" data-end=\"3627\">\n<p data-start=\"3596\" data-end=\"3627\">T\u1ed1i \u01b0u h\u00f3a c\u00e1c th\u00f4ng s\u1ed1 t\u0103ng tr\u01b0\u1edfng<\/p>\n<\/li>\n<li data-section-id=\"1bd6gqh\" data-start=\"3628\" data-end=\"3669\">\n<p data-start=\"3630\" data-end=\"3669\">N\u00e2ng cao n\u0103ng su\u1ea5t v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"sd0tuu\" data-start=\"3676\" data-end=\"3715\"><span role=\"text\">4. \u0110\u00e0o t\u1ea1o v\u00e0 H\u1ed7 tr\u1ee3 k\u1ef9 thu\u1eadt<\/span><\/h3>\n<p data-start=\"3716\" data-end=\"3725\">Ch\u00fang t\u00f4i cung c\u1ea5p:<\/p>\n<ul data-start=\"3726\" data-end=\"3832\">\n<li data-section-id=\"8xwlms\" data-start=\"3726\" data-end=\"3755\">\n<p data-start=\"3728\" data-end=\"3755\">\u0110\u00e0o t\u1ea1o t\u1ea1i ch\u1ed7 \/ \u0111\u00e0o t\u1ea1o t\u1eeb xa<\/p>\n<\/li>\n<li data-section-id=\"113ldb5\" data-start=\"3756\" data-end=\"3788\">\n<p data-start=\"3758\" data-end=\"3788\">H\u01b0\u1edbng d\u1eabn v\u1eadn h\u00e0nh thi\u1ebft b\u1ecb<\/p>\n<\/li>\n<li data-section-id=\"19iv12h\" data-start=\"3789\" data-end=\"3832\">\n<p data-start=\"3791\" data-end=\"3832\">H\u1ed7 tr\u1ee3 b\u1ea3o tr\u00ec v\u00e0 kh\u1eafc ph\u1ee5c s\u1ef1 c\u1ed1<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"elc90z\" data-start=\"3839\" data-end=\"3849\"><span role=\"text\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p<\/span><\/h2>\n<p data-start=\"3851\" data-end=\"4022\">C\u00e2u h\u1ecfi 1: C\u00e1c ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u00e0 g\u00ec?<br data-start=\"3904\" data-end=\"3907\" \/>A: C\u00e1c ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh bao g\u1ed3m PVT, HT-CVD v\u00e0 LPE, m\u1ed7i ph\u01b0\u01a1ng ph\u00e1p \u0111\u1ec1u ph\u00f9 h\u1ee3p v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng v\u00e0 m\u1ee5c ti\u00eau s\u1ea3n xu\u1ea5t kh\u00e1c nhau.<\/p>\n<p data-start=\"4024\" data-end=\"4230\">C\u00e2u h\u1ecfi 2: Ph\u00e2n t\u1eed l\u1edbp m\u1ecfng pha l\u1ecfng (LPE) l\u00e0 g\u00ec?<br data-start=\"4067\" data-end=\"4070\" \/>A: LPE l\u00e0 m\u1ed9t ph\u01b0\u01a1ng ph\u00e1p ph\u00e1t tri\u1ec3n d\u1ef1a tr\u00ean dung d\u1ecbch, trong \u0111\u00f3 dung d\u1ecbch n\u00f3ng ch\u1ea3y b\u00e3o h\u00f2a \u0111\u01b0\u1ee3c l\u00e0m l\u1ea1nh t\u1eeb t\u1eeb \u0111\u1ec3 th\u00fac \u0111\u1ea9y qu\u00e1 tr\u00ecnh k\u1ebft tinh tr\u00ean ch\u1ea5t n\u1ec1n, t\u1eeb \u0111\u00f3 t\u1ea1o ra c\u00e1c l\u1edbp epitactic ch\u1ea5t l\u01b0\u1ee3ng cao.<\/p>\n<h2 data-section-id=\"1wz3rnt\" data-start=\"4237\" data-end=\"4278\"><span role=\"text\">T\u1ea1i sao n\u00ean ch\u1ecdn l\u00f2 nu\u00f4i c\u1ea5y SiC c\u1ee7a ch\u00fang t\u00f4i?<\/span><\/h2>\n<ul data-start=\"4280\" data-end=\"4496\">\n<li data-section-id=\"1nz5fyj\" data-start=\"4280\" data-end=\"4330\">\n<p data-start=\"4282\" data-end=\"4330\">C\u00f3 kinh nghi\u1ec7m k\u1ef9 thu\u1eadt \u0111\u00e3 \u0111\u01b0\u1ee3c ch\u1ee9ng minh trong l\u0129nh v\u1ef1c thi\u1ebft b\u1ecb SiC<\/p>\n<\/li>\n<li data-section-id=\"dw2cfr\" data-start=\"4331\" data-end=\"4382\">\n<p data-start=\"4333\" data-end=\"4382\">T\u01b0\u01a1ng th\u00edch v\u1edbi nhi\u1ec1u ph\u01b0\u01a1ng ph\u00e1p (PVT \/ HT-CVD \/ LPE)<\/p>\n<\/li>\n<li data-section-id=\"xciqsn\" data-start=\"4383\" data-end=\"4435\">\n<p data-start=\"4385\" data-end=\"4435\">C\u00e1c gi\u1ea3i ph\u00e1p t\u00f9y ch\u1ec9nh cho c\u00e1c quy m\u00f4 s\u1ea3n xu\u1ea5t kh\u00e1c nhau<\/p>\n<\/li>\n<li data-section-id=\"s3dika\" data-start=\"4436\" data-end=\"4496\">\n<p data-start=\"4438\" data-end=\"4496\">H\u1ed7 tr\u1ee3 to\u00e0n b\u1ed9 chu tr\u00ecnh (thi\u1ebft b\u1ecb + v\u1eadt li\u1ec7u + quy tr\u00ecnh)<\/p>\n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p data-start=\"204\" data-end=\"416\">L\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u00e0 m\u1ed9t thi\u1ebft b\u1ecb quan tr\u1ecdng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c tinh th\u1ec3 \u0111\u01a1n ch\u1ea5t silicon carbide (SiC) ch\u1ea5t l\u01b0\u1ee3ng cao, \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t, thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n<p data-start=\"418\" data-end=\"489\">H\u1ec7 th\u1ed1ng c\u1ee7a ch\u00fang t\u00f4i h\u1ed7 tr\u1ee3 nhi\u1ec1u c\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n ph\u1ed5 bi\u1ebfn, bao g\u1ed3m:<\/p>","protected":false},"featured_media":1949,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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