![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/pl204262693-sic_single_crystal_resistance_heating_crystal_growth_furnace_for_6inch_8inch_12inch_sic_wafers_manufacture-300x199.webp\")
<\/p>\n<\/p>\n
L\u00f2 nung tinh th\u1ec3 \u0111\u01a1n silicon carbide (SiC) b\u1eb1ng \u0111i\u1ec7n tr\u1edf ZMSH l\u00e0 h\u1ec7 th\u1ed1ng t\u0103ng tr\u01b0\u1edfng tinh th\u1ec3 nhi\u1ec7t \u0111\u1ed9 cao \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf chuy\u00ean bi\u1ec7t cho s\u1ea3n xu\u1ea5t tinh th\u1ec3 \u0111\u01a1n silicon carbide c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn, h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t wafer SiC c\u00f3 k\u00edch th\u01b0\u1edbc 6 inch, 8 inch v\u00e0 12 inch.<\/p>\n
<\/p>\n
uring.<\/p>\n
L\u00f2 nung \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf d\u1ef1a tr\u00ean nguy\u00ean l\u00fd t\u0103ng tr\u01b0\u1edfng tinh th\u1ec3 b\u1eb1ng v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT), t\u00edch h\u1ee3p ki\u1ec3m so\u00e1t gia nhi\u1ec7t b\u1eb1ng \u0111i\u1ec7n tr\u1edf ch\u00ednh x\u00e1c, ph\u00e2n b\u1ed1 tr\u01b0\u1eddng nhi\u1ec7t \u1ed5n \u0111\u1ecbnh, qu\u1ea3n l\u00fd m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng cao v\u00e0 \u0111i\u1ec1u ch\u1ec9nh \u00e1p su\u1ea5t ch\u00ednh x\u00e1c.
C\u1ea5u h\u00ecnh n\u00e0y cho ph\u00e9p s\u1ea3n xu\u1ea5t c\u00e1c tinh th\u1ec3 SiC \u0111\u01a1n tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao v\u00e0 m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p, ph\u00f9 h\u1ee3p cho c\u00e1c \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t cao v\u00e0 thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed ti\u00ean ti\u1ebfn.<\/p>\n
H\u1ec7 th\u1ed1ng \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n \u0111\u1ec3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u s\u1ea3n xu\u1ea5t c\u00f4ng nghi\u1ec7p, \u0111\u1ea3m b\u1ea3o t\u00ednh \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh, t\u00ednh l\u1eb7p l\u1ea1i v\u00e0 \u0111\u1ed9 tin c\u1eady ho\u1ea1t \u0111\u1ed9ng l\u00e2u d\u00e0i trong m\u00f4i tr\u01b0\u1eddng nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC quy m\u00f4 l\u1edbn.<\/p>\n
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<\/p>\n
L\u00f2 nung s\u1eed d\u1ee5ng c\u1ea5u tr\u00fac gia nhi\u1ec7t kh\u00e1ng \u0111a v\u00f9ng \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c ph\u00e2n b\u1ed1 nhi\u1ec7t \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u theo tr\u1ee5c v\u00e0 b\u00e1n k\u00ednh. \u0110i\u1ec1u n\u00e0y gi\u00fap gi\u1ea3m thi\u1ec3u \u0111\u1ed9 ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9, gi\u1ea3m \u1ee9ng su\u1ea5t b\u00ean trong v\u00e0 c\u1ea3i thi\u1ec7n t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac tinh th\u1ec3 trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n.<\/p>\n
Nhi\u1ec7t \u0111\u1ed9 ho\u1ea1t \u0111\u1ed9ng t\u1ed1i \u0111a l\u00ean \u0111\u1ebfn 2500\u00b0C<\/p>\n<\/li>\n
\u0110\u1ed9 ch\u00ednh x\u00e1c \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9: \u00b11\u00b0C<\/p>\n<\/li>\n
D\u1ea3i \u0111i\u1ec1u ch\u1ec9nh \u00e1p su\u1ea5t r\u1ed9ng: 1\u2013700 mbar<\/p>\n<\/li>\n<\/ul>\n
C\u00e1c th\u00f4ng s\u1ed1 n\u00e0y cung c\u1ea5p m\u1ed9t m\u00f4i tr\u01b0\u1eddng nhi\u1ec7t \u0111\u1ed9ng l\u1ef1c h\u1ecdc \u1ed5n \u0111\u1ecbnh, c\u1ea7n thi\u1ebft cho qu\u00e1 tr\u00ecnh bay h\u01a1i c\u00f3 ki\u1ec3m so\u00e1t, v\u1eadn chuy\u1ec3n h\u01a1i v\u00e0 t\u00e1i tinh th\u1ec3 h\u00f3a tinh th\u1ec3 trong qu\u00e1 tr\u00ecnh t\u0103ng tr\u01b0\u1edfng SiC.<\/p>\n
V\u1edbi \u0111\u01b0\u1eddng k\u00ednh ch\u1ea3o n\u1ea5u 900 mm, h\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c th\u1ecfi SiC th\u1ebf h\u1ec7 m\u1edbi c\u00f3 k\u00edch th\u01b0\u1edbc 8 inch v\u00e0 12 inch, gi\u00fap c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t m\u1edf r\u1ed9ng quy m\u00f4 s\u1ea3n xu\u1ea5t \u0111\u1ed3ng th\u1eddi n\u00e2ng cao hi\u1ec7u su\u1ea5t v\u00e0 \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t c\u1ee7a wafer.<\/p>\n
L\u00f2 nung duy tr\u00ec bu\u1ed3ng t\u0103ng tr\u01b0\u1edfng ch\u00e2n kh\u00f4ng cao, r\u00f2 r\u1ec9 th\u1ea5p, \u0111\u1ea3m b\u1ea3o gi\u1ea3m thi\u1ec3u r\u1ee7i ro \u00f4 nhi\u1ec5m, n\u00e2ng cao \u0111\u1ed9 tinh khi\u1ebft c\u1ee7a tinh th\u1ec3 v\u00e0 ho\u1ea1t \u0111\u1ed9ng \u1ed5n \u0111\u1ecbnh trong th\u1eddi gian d\u00e0i.<\/p>\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/pl204262670-sic_single_crystal_resistance_heating_crystal_growth_furnace_for_6inch_8inch_12inch_sic_wafers_manufacture-300x300.webp\")
<\/h2>\n<\/p>\n
V\u1eadt li\u1ec7u n\u1ec1n cho linh ki\u1ec7n b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t<\/p>\n<\/li>\n
M\u00f4-\u0111un ngu\u1ed3n cho xe \u0111i\u1ec7n<\/p>\n<\/li>\n
Thi\u1ebft b\u1ecb MOSFET v\u00e0 \u0111i\u1ed1t \u0111i\u1ec7n \u00e1p cao<\/p>\n<\/li>\n
H\u1ec7 th\u1ed1ng chuy\u1ec3n \u0111\u1ed5i n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o<\/p>\n<\/li>\n
C\u00e1c linh ki\u1ec7n \u0111i\u1ec7n t\u1eed t\u1ea7n s\u1ed1 cao v\u00e0 t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF)<\/p>\n<\/li>\n
\u0110i\u1ec7n t\u1eed c\u00f4ng nghi\u1ec7p<\/p>\n<\/li>\n<\/ul>\n
<\/p>\n
<\/p>\n
| S\u1ed1.<\/th>\n | Th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt<\/th>\n | Chi ti\u1ebft<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|---|
| 1<\/td>\n | M\u00f4 h\u00ecnh<\/td>\n | PVT-RS-40<\/td>\n<\/tr>\n |
| 2<\/td>\n | K\u00edch th\u01b0\u1edbc l\u00f2 (D\u00e0i \u00d7 R\u1ed9ng \u00d7 Cao)<\/td>\n | 2500 \u00d7 2400 \u00d7 3456 mm<\/td>\n<\/tr>\n |
| 3<\/td>\n | \u0110\u01b0\u1eddng k\u00ednh l\u00f2 nung<\/td>\n | 900 mm<\/td>\n<\/tr>\n |
| 4<\/td>\n | \u00c1p su\u1ea5t ch\u00e2n kh\u00f4ng t\u1ed1i \u0111a<\/td>\n | 6 \u00d7 10\u207b\u2074 Pa (sau 1,5 gi\u1edd ch\u00e2n kh\u00f4ng)<\/td>\n<\/tr>\n |
| 5<\/td>\n | T\u1ef7 l\u1ec7 r\u00f2 r\u1ec9<\/td>\n | \u22645 Pa \/ 12 gi\u1edd (qu\u00e1 tr\u00ecnh s\u1ea5y kh\u00f4)<\/td>\n<\/tr>\n |
| 6<\/td>\n | \u0110\u01b0\u1eddng k\u00ednh tr\u1ee5c quay<\/td>\n | 50 mm<\/td>\n<\/tr>\n |
| 7<\/td>\n | T\u1ed1c \u0111\u1ed9 quay<\/td>\n | 0,5\u20135 v\u00f2ng\/ph\u00fat<\/td>\n<\/tr>\n |
| 8<\/td>\n | Ph\u01b0\u01a1ng ph\u00e1p s\u01b0\u1edfi \u1ea5m<\/td>\n | S\u01b0\u1edfi \u1ea5m b\u1eb1ng \u0111i\u1ec7n tr\u1edf<\/td>\n<\/tr>\n |
| 9<\/td>\n | Nhi\u1ec7t \u0111\u1ed9 t\u1ed1i \u0111a c\u1ee7a l\u00f2<\/td>\n | 2500\u00b0C<\/td>\n<\/tr>\n |
| 10<\/td>\n | C\u00f4ng su\u1ea5t s\u01b0\u1edfi \u1ea5m<\/td>\n | 40 kW \u00d7 2 + 20 kW<\/td>\n<\/tr>\n |
| 11<\/td>\n | \u0110o nhi\u1ec7t \u0111\u1ed9<\/td>\n | Pyrometer h\u1ed3ng ngo\u1ea1i hai m\u00e0u<\/td>\n<\/tr>\n |
| 12<\/td>\n | Ph\u1ea1m vi nhi\u1ec7t \u0111\u1ed9<\/td>\n | 900\u20133000\u00b0C<\/td>\n<\/tr>\n |
| 13<\/td>\n | \u0110\u1ed9 ch\u00ednh x\u00e1c nhi\u1ec7t \u0111\u1ed9<\/td>\n | \u00b11\u00b0C<\/td>\n<\/tr>\n |
| 14<\/td>\n | D\u1ea3i \u00e1p su\u1ea5t<\/td>\n | 1\u2013700 mbar<\/td>\n<\/tr>\n |
| 15<\/td>\n | \u0110\u1ed9 ch\u00ednh x\u00e1c \u0111i\u1ec1u khi\u1ec3n \u00e1p su\u1ea5t<\/td>\n | \u00b10.5% to\u00e0n thang \u0111o<\/td>\n<\/tr>\n |
| 16<\/td>\n | Lo\u1ea1i ho\u1ea1t \u0111\u1ed9ng<\/td>\n | T\u1ea3i t\u1eeb ph\u00eda d\u01b0\u1edbi, ch\u1ebf \u0111\u1ed9 an to\u00e0n th\u1ee7 c\u00f4ng ho\u1eb7c t\u1ef1 \u0111\u1ed9ng<\/td>\n<\/tr>\n |
| 17<\/td>\n | C\u00e1c t\u00f9y ch\u1ecdn c\u1ea5u h\u00ecnh<\/td>\n | H\u1ec7 th\u1ed1ng s\u01b0\u1edfi \u1ea5m \u0111a v\u00f9ng, gi\u00e1m s\u00e1t nhi\u1ec7t \u0111\u1ed9 k\u00e9p<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/h2>\n |