{"id":1636,"date":"2026-03-17T07:52:18","date_gmt":"2026-03-17T07:52:18","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1636"},"modified":"2026-03-20T07:39:36","modified_gmt":"2026-03-20T07:39:36","slug":"6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/vi\/product\/6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop\/","title":{"rendered":"D\u00e2y chuy\u1ec1n t\u1ef1 \u0111\u1ed9ng \u0111\u00e1nh b\u00f3ng b\u1ed1n m\u1eb7t cho wafer silicon v\u00e0 SiC k\u00edch th\u01b0\u1edbc 6\u20138 inch, bao g\u1ed3m quy tr\u00ecnh l\u00e0m s\u1ea1ch v\u00e0 l\u1eafp l\u1ea1i."},"content":{"rendered":"<h2 data-start=\"323\" data-end=\"346\">T\u1ed5ng quan v\u1ec1 s\u1ea3n ph\u1ea9m<\/h2>\n<p data-start=\"348\" data-end=\"597\">D\u00e2y chuy\u1ec1n t\u1ef1 \u0111\u1ed9ng \u0111\u00e1nh b\u00f3ng b\u1ed1n m\u1eb7t cho t\u1ea5m wafer silicon v\u00e0 SiC k\u00edch th\u01b0\u1edbc 6\u20138 inch, t\u00edch h\u1ee3p v\u00f2ng l\u1eb7p l\u00e0m s\u1ea1ch v\u00e0 l\u1eafp l\u1ea1i, l\u00e0 m\u1ed9t n\u1ec1n t\u1ea3ng quy tr\u00ecnh sau \u0111\u00e1nh b\u00f3ng ho\u00e0n to\u00e0n t\u00edch h\u1ee3p, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t t\u1ea5m wafer silicon v\u00e0 silicon carbide.<\/p>\n<p data-start=\"599\" data-end=\"886\">H\u1ec7 th\u1ed1ng n\u00e0y t\u00edch h\u1ee3p c\u00e1c c\u00f4ng \u0111o\u1ea1n \u0111\u00e1nh b\u00f3ng b\u1ed1n \u0111\u1ea7u, th\u00e1o wafer t\u1ef1 \u0111\u1ed9ng, x\u1eed l\u00fd khay g\u1ed1m, l\u00e0m s\u1ea1ch khay v\u00e0 l\u1eafp l\u1ea1i wafer ch\u00ednh x\u00e1c th\u00e0nh m\u1ed9t quy tr\u00ecnh li\u00ean t\u1ee5c theo v\u00f2ng k\u00edn, lo\u1ea1i b\u1ecf vi\u1ec7c thao t\u00e1c th\u1ee7 c\u00f4ng v\u00e0 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh, \u0111\u1ed9 l\u1eb7p l\u1ea1i v\u00e0 n\u0103ng su\u1ea5t t\u1ed1i \u0111a cho quy tr\u00ecnh.<\/p>\n<p data-start=\"888\" data-end=\"1066\">S\u1ea3n ph\u1ea9m n\u00e0y \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a cho c\u00e1c t\u1ea5m b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t, ch\u1ea5t n\u1ec1n SiC v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn, n\u01a1i \u0111\u1ed9 ph\u1eb3ng, t\u00ednh to\u00e0n v\u1eb9n b\u1ec1 m\u1eb7t v\u00e0 ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 quan tr\u1ecdng.<\/p>\n<p data-start=\"888\" data-end=\"1066\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-1646 size-full\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg\" alt=\"\" width=\"800\" height=\"515\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg 800w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-300x193.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-768x494.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-600x386.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/p>\n<h2 data-start=\"1073\" data-end=\"1107\">Kh\u00e1i ni\u1ec7m v\u1ec1 quy tr\u00ecnh v\u00f2ng k\u00edn<\/h2>\n<p data-start=\"1109\" data-end=\"1218\">Kh\u00e1c v\u1edbi c\u00e1c d\u00e2y chuy\u1ec1n \u0111\u00e1nh b\u00f3ng b\u00e1n t\u1ef1 \u0111\u1ed9ng truy\u1ec1n th\u1ed1ng, h\u1ec7 th\u1ed1ng n\u00e0y ho\u1ea1t \u0111\u1ed9ng theo chu tr\u00ecnh v\u1eadn chuy\u1ec3n kh\u00e9p k\u00edn th\u1ef1c s\u1ef1:<\/p>\n<p data-start=\"1220\" data-end=\"1292\">\u0110\u00e1nh b\u00f3ng \u2192 Th\u00e1o ra \u2192 V\u1ec7 sinh gi\u00e1 \u0111\u1ee1 \u2192 L\u1eafp l\u1ea1i \u2192 \u0110\u00e1nh b\u00f3ng<\/p>\n<p data-start=\"1294\" data-end=\"1508\">C\u00e1c khay g\u1ed1m di chuy\u1ec3n t\u1ef1 \u0111\u1ed9ng b\u00ean trong h\u1ec7 th\u1ed1ng, trong khi c\u00e1c t\u1ea5m wafer \u0111\u01b0\u1ee3c th\u00e1o ra v\u00e0 l\u1eafp l\u1ea1i m\u1ed9t c\u00e1ch ch\u00ednh x\u00e1c trong \u0111i\u1ec1u ki\u1ec7n \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd.<br data-start=\"1440\" data-end=\"1443\" \/>Ki\u1ebfn tr\u00fac n\u00e0y \u0111\u1ea3m b\u1ea3o r\u1eb1ng m\u1ed7i chu k\u1ef3 \u0111\u00e1nh b\u00f3ng \u0111\u1ec1u b\u1eaft \u0111\u1ea7u b\u1eb1ng:<\/p>\n<ul data-start=\"1509\" data-end=\"1622\">\n<li data-start=\"1509\" data-end=\"1538\">\n<p data-start=\"1511\" data-end=\"1538\">B\u1ec1 m\u1eb7t gi\u00e1 \u0111\u1ee1 s\u1ea1ch<\/p>\n<\/li>\n<li data-start=\"1539\" data-end=\"1573\">\n<p data-start=\"1541\" data-end=\"1573\">M\u1ed9t t\u1ea5m wafer \u0111\u01b0\u1ee3c \u0111\u1ecbnh v\u1ecb ch\u00ednh x\u00e1c<\/p>\n<\/li>\n<li data-start=\"1574\" data-end=\"1622\">\n<p data-start=\"1576\" data-end=\"1622\">M\u1ed9t giao di\u1ec7n l\u1eafp \u0111\u1eb7t \u1ed5n \u0111\u1ecbnh v\u00e0 c\u00f3 th\u1ec3 l\u1eb7p l\u1ea1i<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1624\" data-end=\"1733\">K\u1ebft qu\u1ea3 l\u00e0 gi\u1ea3m thi\u1ec3u t\u00ecnh tr\u1ea1ng v\u1ee1 t\u1ea5m wafer, c\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 t\u0103ng t\u00ednh nh\u1ea5t qu\u00e1n gi\u1eefa c\u00e1c l\u00f4 s\u1ea3n ph\u1ea9m.<\/p>\n<p data-start=\"1624\" data-end=\"1733\"><img decoding=\"async\" class=\"aligncenter wp-image-1647 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/6\u2013D\u00e2y chuy\u1ec1n t\u1ef1 \u0111\u1ed9ng \u0111\u00e1nh b\u00f3ng b\u1ed1n m\u1eb7t cho t\u1ea5m silicon SiC 8 inch k\u00e8m v\u00f2ng l\u1eb7p l\u00e0m s\u1ea1ch v\u00e0 l\u1eafp l\u1ea1i \u2013 1024x1024.jpg\" alt=\"\" width=\"1024\" height=\"1024\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<h2 data-start=\"1740\" data-end=\"1782\">Thi\u1ebft k\u1ebf k\u1ef9 thu\u1eadt quan tr\u1ecdng \u0111\u1ed1i v\u1edbi quy tr\u00ecnh<\/h2>\n<h3 data-start=\"1784\" data-end=\"1817\">X\u1eed l\u00fd wafer \u00edt g\u00e2y c\u0103ng th\u1eb3ng<\/h3>\n<p data-start=\"1818\" data-end=\"1951\">C\u00e1c \u0111\u01b0\u1eddng cong chuy\u1ec3n \u0111\u1ed9ng \u0111\u1eb7c bi\u1ec7t v\u00e0 qu\u1ef9 \u0111\u1ea1o th\u00e1o r\u1eddi \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111i\u1ec1u khi\u1ec3n gia t\u1ed1c, l\u1ef1c ti\u1ebfp x\u00fac v\u00e0 g\u00f3c t\u00e1ch r\u1eddi, gi\u00fap gi\u1ea3m thi\u1ec3u:<\/p>\n<ul data-start=\"1952\" data-end=\"2019\">\n<li data-start=\"1952\" data-end=\"1969\">\n<p data-start=\"1954\" data-end=\"1969\">S\u1ee9t m\u1ebb m\u00e9p<\/p>\n<\/li>\n<li data-start=\"1970\" data-end=\"1986\">\n<p data-start=\"1972\" data-end=\"1986\">C\u00e1c v\u1ebft n\u1ee9t nh\u1ecf<\/p>\n<\/li>\n<li data-start=\"1987\" data-end=\"2019\">\n<p data-start=\"1989\" data-end=\"2019\">S\u1ef1 cong v\u00eanh c\u1ee7a t\u1ea5m wafer do c\u0103ng th\u1eb3ng g\u00e2y ra<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2021\" data-end=\"2136\">\u0110i\u1ec1u n\u00e0y \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer SiC, v\u1ed1n c\u1ee9ng, gi\u00f2n v\u00e0 r\u1ea5t nh\u1ea1y c\u1ea3m v\u1edbi c\u00e1c t\u00e1c \u0111\u1ed9ng c\u01a1 h\u1ecdc.<\/p>\n<h3 data-start=\"2143\" data-end=\"2185\">T\u00e1i ch\u1ebf ch\u1ea5t mang si\u00eau s\u1ea1ch<\/h3>\n<p data-start=\"2186\" data-end=\"2365\">Tr\u01b0\u1edbc m\u1ed7i chu k\u1ef3 l\u1eafp l\u1ea1i, c\u00e1c t\u1ea5m g\u1ed1m \u0111\u01b0\u1ee3c l\u00e0m s\u1ea1ch \u0111\u1ec3 tr\u1edf v\u1ec1 tr\u1ea1ng th\u00e1i b\u1ec1 m\u1eb7t s\u1eb5n s\u00e0ng cho qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t b\u1eb1ng c\u00e1ch lo\u1ea1i b\u1ecf c\u1eb7n b\u00f9n, c\u00e1c h\u1ea1t m\u1ecbn v\u00e0 l\u1edbp m\u00e0ng h\u00f3a ch\u1ea5t.<br data-start=\"2348\" data-end=\"2351\" \/>\u0110i\u1ec1u n\u00e0y gi\u00fap ng\u0103n ch\u1eb7n:<\/p>\n<ul data-start=\"2366\" data-end=\"2458\">\n<li data-start=\"2366\" data-end=\"2396\">\n<p data-start=\"2368\" data-end=\"2396\">V\u1ebft x\u01b0\u1edbc do h\u1ea1t g\u00e2y ra<\/p>\n<\/li>\n<li data-start=\"2397\" data-end=\"2431\">\n<p data-start=\"2399\" data-end=\"2431\">S\u1ef1 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng c\u1ee5c b\u1ed9<\/p>\n<\/li>\n<li data-start=\"2432\" data-end=\"2458\">\n<p data-start=\"2434\" data-end=\"2458\">C\u00e1c khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t ng\u1eabu nhi\u00ean<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2460\" data-end=\"2527\">\u0111\u00e2y l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 ch\u00ednh g\u00e2y gi\u1ea3m n\u0103ng su\u1ea5t trong c\u00e1c quy tr\u00ecnh m\u00e0i CMP v\u00e0 m\u00e0i b\u1ed1n m\u1eb7t.<\/p>\n<h3 data-start=\"2534\" data-end=\"2585\">L\u1eafp l\u1ea1i ch\u00ednh x\u00e1c \u0111\u1ec3 \u0111\u00e1nh b\u00f3ng \u0111\u1ed3ng \u0111\u1ec1u<\/h3>\n<p data-start=\"2586\" data-end=\"2616\">B\u1ed9 \u0111i\u1ec1u khi\u1ec3n l\u1eafp l\u1ea1i:<\/p>\n<ul data-start=\"2617\" data-end=\"2697\">\n<li data-start=\"2617\" data-end=\"2638\">\n<p data-start=\"2619\" data-end=\"2638\">\u00c1p l\u1ef1c ng\u00e0y c\u00e0ng gia t\u0103ng<\/p>\n<\/li>\n<li data-start=\"2639\" data-end=\"2658\">\n<p data-start=\"2641\" data-end=\"2658\">C\u0103n ch\u1ec9nh t\u1ea5m wafer<\/p>\n<\/li>\n<li data-start=\"2659\" data-end=\"2697\">\n<p data-start=\"2661\" data-end=\"2697\">\u0110\u1ed9 ph\u1eb3ng tr\u00ean to\u00e0n b\u1ed9 t\u1ea5m n\u1ec1n<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2699\" data-end=\"2822\">\u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o r\u1eb1ng t\u1ea5t c\u1ea3 c\u00e1c t\u1ea5m wafer \u0111\u1ec1u ch\u1ecbu \u00e1p l\u1ef1c \u0111\u00e1nh b\u00f3ng \u0111\u1ed3ng \u0111\u1ec1u trong chu k\u1ef3 \u0111\u00e1nh b\u00f3ng b\u1ed1n m\u1eb7t ti\u1ebfp theo, d\u1eabn \u0111\u1ebfn:<\/p>\n<ul data-start=\"2823\" data-end=\"2926\">\n<li data-start=\"2823\" data-end=\"2867\">\n<p data-start=\"2825\" data-end=\"2867\">Ch\u1ec9 s\u1ed1 TTV (\u0110\u1ed9 bi\u1ebfn thi\u00ean t\u1ed5ng \u0111\u1ed9 d\u00e0y) \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/p>\n<\/li>\n<li data-start=\"2868\" data-end=\"2896\">\n<p data-start=\"2870\" data-end=\"2896\">\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t t\u1ed1t h\u01a1n<\/p>\n<\/li>\n<li data-start=\"2897\" data-end=\"2926\">\n<p data-start=\"2899\" data-end=\"2926\">N\u0103ng su\u1ea5t t\u1ea5m wafer c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng cao h\u01a1n<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"2933\" data-end=\"2962\">T\u00ednh linh ho\u1ea1t trong s\u1ea3n xu\u1ea5t<\/h2>\n<p data-start=\"2964\" data-end=\"3062\">H\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 nhi\u1ec1u c\u1ea5u h\u00ecnh t\u1ea5m wafer v\u00e0 \u0111\u1ebf, cho ph\u00e9p c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip \u0111i\u1ec1u ch\u1ec9nh d\u00e2y chuy\u1ec1n \u0111\u1ec3:<\/p>\n<ul data-start=\"3063\" data-end=\"3163\">\n<li data-start=\"3063\" data-end=\"3089\">\n<p data-start=\"3065\" data-end=\"3089\">T\u1ed1c \u0111\u1ed9 truy\u1ec1n t\u1ea3i t\u1ed1i \u0111a<\/p>\n<\/li>\n<li data-start=\"3090\" data-end=\"3122\">\n<p data-start=\"3092\" data-end=\"3122\">Ki\u1ec3m so\u00e1t \u0111\u1ed9 ph\u1eb3ng t\u1ed1i \u0111a<\/p>\n<\/li>\n<li data-start=\"3123\" data-end=\"3163\">\n<p data-start=\"3125\" data-end=\"3163\">S\u1ea3n xu\u1ea5t k\u1ebft h\u1ee3p c\u00e1c k\u00edch th\u01b0\u1edbc 6 inch v\u00e0 8 inch<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"3165\" data-end=\"3203\">\u0110i\u1ec1u n\u00e0y khi\u1ebfn d\u00f2ng s\u1ea3n ph\u1ea9m n\u00e0y ph\u00f9 h\u1ee3p v\u1edbi c\u1ea3 hai:<\/p>\n<ul data-start=\"3204\" data-end=\"3283\">\n<li data-start=\"3204\" data-end=\"3243\">\n<p data-start=\"3206\" data-end=\"3243\">S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb \u0111i\u1ec7n v\u1edbi s\u1ed1 l\u01b0\u1ee3ng l\u1edbn<\/p>\n<\/li>\n<li data-start=\"3244\" data-end=\"3283\">\n<p data-start=\"3246\" data-end=\"3283\">Ch\u1ebf t\u1ea1o ch\u1ea5t n\u1ec1n SiC cao c\u1ea5p<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"3290\" data-end=\"3317\">\u1ee8ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/h2>\n<ul data-start=\"3319\" data-end=\"3498\">\n<li data-start=\"3319\" data-end=\"3385\">\n<p data-start=\"3321\" data-end=\"3385\">T\u1ea5m b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t silicon (Si) v\u00e0 silicon cacbua (SiC) (MOSFET, IGBT, \u0111i\u1ed1t)<\/p>\n<\/li>\n<li data-start=\"3386\" data-end=\"3425\">\n<p data-start=\"3388\" data-end=\"3425\">Ch\u1ea5t n\u1ec1n SiC v\u00e0 t\u1ea5m wafer epitactic<\/p>\n<\/li>\n<li data-start=\"3426\" data-end=\"3455\">\n<p data-start=\"3428\" data-end=\"3455\">T\u1ea5m wafer \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn<\/p>\n<\/li>\n<li data-start=\"3456\" data-end=\"3498\">\n<p data-start=\"3458\" data-end=\"3498\">T\u1ea5m silicon \u0111\u01b0\u1ee3c \u0111\u00e1nh b\u00f3ng v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/p>\n<\/li>\n<\/ul>\n<h3 data-start=\"58\" data-end=\"102\"><strong data-start=\"62\" data-end=\"102\">C\u00e2u h\u1ecfi th\u01b0\u1eddng g\u1eb7p \u2013 C\u00e1c c\u00e2u h\u1ecfi k\u1ef9 thu\u1eadt kh\u00e1c<\/strong><\/h3>\n<p data-start=\"104\" data-end=\"461\"><strong>C\u00e2u h\u1ecfi 1: H\u1ec7 th\u1ed1ng n\u00e0y gi\u1ea3m thi\u1ec3u t\u00ecnh tr\u1ea1ng v\u1ee1 t\u1ea5m wafer SiC d\u1ec5 v\u1ee1 nh\u01b0 th\u1ebf n\u00e0o?<\/strong><br data-start=\"179\" data-end=\"182\" \/>D\u00e2y chuy\u1ec1n n\u00e0y s\u1eed d\u1ee5ng c\u00e1c thu\u1eadt to\u00e1n th\u00e1o g\u1ee1 \u00edt g\u00e2y \u1ee9ng su\u1ea5t v\u00e0 c\u00e1c \u0111\u01b0\u1eddng cong chuy\u1ec3n \u0111\u1ed9ng \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t, \u0111\u1ed3ng th\u1eddi qu\u1ea3n l\u00fd c\u1ea9n th\u1eadn gia t\u1ed1c, g\u00f3c t\u00e1ch v\u00e0 l\u1ef1c ti\u1ebfp x\u00fac. \u0110i\u1ec1u n\u00e0y gi\u00fap ng\u0103n ng\u1eeba hi\u1ec7n t\u01b0\u1ee3ng s\u1ee9t m\u1ebb c\u1ea1nh, n\u1ee9t vi m\u00f4 v\u00e0 bi\u1ebfn d\u1ea1ng t\u1ea5m wafer do \u1ee9ng su\u1ea5t g\u00e2y ra \u2013 nh\u1eefng v\u1ea5n \u0111\u1ec1 th\u01b0\u1eddng g\u1eb7p \u1edf c\u00e1c ch\u1ea5t n\u1ec1n SiC.<\/p>\n<p data-start=\"468\" data-end=\"792\"><strong>C\u00e2u h\u1ecfi 2: Quy tr\u00ecnh l\u00e0m s\u1ea1ch v\u00e0 l\u1eafp l\u1ea1i c\u00f3 th\u1ec3 \u00e1p d\u1ee5ng cho nhi\u1ec1u th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt c\u1ee7a khay \u0111\u1ef1ng kh\u00e1c nhau kh\u00f4ng?<\/strong><br data-start=\"553\" data-end=\"556\" \/>\u0110\u00fang v\u1eady. C\u00e1c m\u00f4-\u0111un \u0111\u1ec7m v\u00e0 l\u00e0m s\u1ea1ch khay ch\u1ee9a h\u1ed7 tr\u1ee3 nhi\u1ec1u k\u00edch th\u01b0\u1edbc \u0111\u01b0\u1eddng k\u00ednh khay ch\u1ee9a g\u1ed1m (v\u00ed d\u1ee5: 485 mm v\u00e0 576 mm) c\u0169ng nh\u01b0 s\u1ed1 l\u01b0\u1ee3ng t\u1ea5m wafer tr\u00ean m\u1ed7i khay. \u0110i\u1ec1u n\u00e0y cho ph\u00e9p s\u1ea3n xu\u1ea5t t\u1ea5m wafer 6 inch v\u00e0 8 inch v\u1edbi c\u00e1c k\u00edch th\u01b0\u1edbc kh\u00e1c nhau m\u00e0 kh\u00f4ng l\u00e0m gi\u00e1n \u0111o\u1ea1n d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t.<\/p>\n<p data-start=\"799\" data-end=\"1201\"><strong>C\u00e2u h\u1ecfi 3: H\u1ec7 th\u1ed1ng \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng \u0111\u00e1nh b\u00f3ng \u1ed5n \u0111\u1ecbnh gi\u1eefa c\u00e1c l\u00f4 s\u1ea3n ph\u1ea9m nh\u01b0 th\u1ebf n\u00e0o?<\/strong><br data-start=\"878\" data-end=\"881\" \/>B\u1eb1ng c\u00e1ch k\u1ebft h\u1ee3p b\u1ec1 m\u1eb7t \u0111\u1ebf si\u00eau s\u1ea1ch, vi\u1ec7c c\u0103n ch\u1ec9nh t\u1ea5m wafer ch\u00ednh x\u00e1c v\u00e0 ki\u1ec3m so\u00e1t \u0111\u1ed9 ph\u1eb3ng, m\u1ed7i t\u1ea5m wafer \u0111\u1ec1u \u0111\u01b0\u1ee3c l\u1eafp \u0111\u1eb7t trong \u0111i\u1ec1u ki\u1ec7n gi\u1ed1ng h\u1ec7t nhau. \u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o \u00e1p l\u1ef1c \u0111\u00e1nh b\u00f3ng \u1ed5n \u0111\u1ecbnh, qu\u00e1 tr\u00ecnh lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 \u0111\u1ed9 l\u1ec7ch TTV \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u, t\u1eeb \u0111\u00f3 mang l\u1ea1i n\u0103ng su\u1ea5t \u1ed5n \u0111\u1ecbnh v\u00e0 ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean c\u00e1c l\u00f4 s\u1ea3n xu\u1ea5t.<\/p>","protected":false},"excerpt":{"rendered":"<p>D\u00e2y chuy\u1ec1n t\u1ef1 \u0111\u1ed9ng \u0111\u00e1nh b\u00f3ng b\u1ed1n m\u1eb7t cho t\u1ea5m wafer silicon v\u00e0 SiC k\u00edch th\u01b0\u1edbc 6\u20138 inch, t\u00edch h\u1ee3p v\u00f2ng l\u1eb7p l\u00e0m s\u1ea1ch v\u00e0 l\u1eafp l\u1ea1i, l\u00e0 m\u1ed9t n\u1ec1n t\u1ea3ng quy tr\u00ecnh sau \u0111\u00e1nh b\u00f3ng ho\u00e0n to\u00e0n t\u00edch h\u1ee3p, \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 h\u1ed7 tr\u1ee3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t t\u1ea5m wafer silicon v\u00e0 silicon carbide.<\/p>","protected":false},"featured_media":1642,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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