{"id":2558,"date":"2026-06-16T01:53:41","date_gmt":"2026-06-16T01:53:41","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2558"},"modified":"2026-06-16T01:53:46","modified_gmt":"2026-06-16T01:53:46","slug":"what-is-wafer-tir-and-how-is-it-different-from-ttv","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/what-is-wafer-tir-and-how-is-it-different-from-ttv\/","title":{"rendered":"Wafer TIR l\u00e0 g\u00ec v\u00e0 n\u00f3 kh\u00e1c v\u1edbi TTV nh\u01b0 th\u1ebf n\u00e0o?"},"content":{"rendered":"<p>Trong <a href=\"https:\/\/www.zmsh-semitech.com\/vi\/products\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#cf2e2e\" class=\"has-inline-color\">s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/mark><\/a>, h\u00ecnh d\u1ea1ng c\u1ee7a t\u1ea5m wafer \u0111\u00f3ng vai tr\u00f2 then ch\u1ed1t trong vi\u1ec7c quy\u1ebft \u0111\u1ecbnh \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh, \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a k\u1ef9 thu\u1eadt quang kh\u1eafc, ch\u1ea5t l\u01b0\u1ee3ng li\u00ean k\u1ebft v\u00e0 cu\u1ed1i c\u00f9ng l\u00e0 hi\u1ec7u su\u1ea5t s\u1ea3n ph\u1ea9m. Khi \u0111\u01b0\u1eddng k\u00ednh t\u1ea5m wafer ti\u1ebfp t\u1ee5c t\u0103ng l\u00ean v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn ng\u00e0y c\u00e0ng \u0111\u1eb7t ra nh\u1eefng y\u00eau c\u1ea7u kh\u1eaft khe h\u01a1n, nhu c\u1ea7u v\u1ec1 \u0111o l\u01b0\u1eddng ch\u00ednh x\u00e1c t\u1ea5m wafer ch\u01b0a bao gi\u1edd c\u1ea5p thi\u1ebft \u0111\u1ebfn th\u1ebf.<\/p>\n\n\n\n<p>Trong s\u1ed1 r\u1ea5t nhi\u1ec1u th\u00f4ng s\u1ed1 \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 \u0111\u00e1nh gi\u00e1 ch\u1ea5t l\u01b0\u1ee3ng t\u1ea5m wafer, <strong>\u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y (TTV)<\/strong> v\u00e0 <strong>Gi\u00e1 tr\u1ecb \u0111\u1ecdc t\u1ed5ng h\u1ee3p (TIR)<\/strong> th\u01b0\u1eddng g\u1eb7p. M\u1eb7c d\u00f9 c\u1ea3 hai th\u00f4ng s\u1ed1 n\u00e0y \u0111\u1ec1u li\u00ean quan \u0111\u1ebfn \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 ph\u1eb3ng c\u1ee7a t\u1ea5m wafer, nh\u01b0ng ch\u00fang m\u00f4 t\u1ea3 c\u00e1c \u0111\u1eb7c t\u00ednh v\u1eadt l\u00fd kh\u00e1c nhau v\u00e0 th\u01b0\u1eddng b\u1ecb hi\u1ec3u nh\u1ea7m.<\/p>\n\n\n\n<p>B\u00e0i vi\u1ebft n\u00e0y gi\u1ea3i th\u00edch c\u00e1c \u0111\u1ecbnh ngh\u0129a, ph\u01b0\u01a1ng ph\u00e1p \u0111o l\u01b0\u1eddng, \u1ee9ng d\u1ee5ng v\u00e0 nh\u1eefng \u0111i\u1ec3m kh\u00e1c bi\u1ec7t ch\u00ednh gi\u1eefa TIR v\u00e0 TTV, gi\u00fap c\u00e1c k\u1ef9 s\u01b0 hi\u1ec3u r\u00f5 h\u01a1n v\u1ec1 c\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt h\u00ecnh h\u1ecdc c\u1ee7a t\u1ea5m wafer.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"512\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-1024x512.png\" alt=\"\" class=\"wp-image-2559\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-1024x512.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-300x150.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-768x384.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-1536x768.png 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-2048x1024.png 2048w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-18x9.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/06\/What-Is-Wafer-TIR-and-How-Is-It-Different-from-TTV-600x300.png 600w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">Hi\u1ec3u v\u1ec1 vi\u1ec7c \u0111o \u0111\u1ed9 d\u00e0y t\u1ea5m wafer<\/h2>\n\n\n\n<p><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/danh-muc-san-pham\/wafer\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#cf2e2e\" class=\"has-inline-color\">T\u1ea5m b\u00e1n d\u1eabn<\/mark>s<\/a> \u0111\u01b0\u1ee3c k\u1ef3 v\u1ecdng s\u1ebd c\u00f3 \u0111\u1ed9 d\u00e0y \u0111\u1ed3ng \u0111\u1ec1u cao tr\u00ean to\u00e0n b\u1ed9 b\u1ec1 m\u1eb7t. Ngay c\u1ea3 nh\u1eefng s\u1ef1 ch\u00eanh l\u1ec7ch nh\u1ecf nh\u1ea5t c\u0169ng c\u00f3 th\u1ec3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a ti\u00eau \u0111i\u1ec3m trong k\u1ef9 thu\u1eadt in th\u1ea1ch b\u1ea3n<\/li>\n\n\n\n<li>X\u1eed l\u00fd v\u00e0 v\u1eadn chuy\u1ec3n t\u1ea5m wafer<\/li>\n\n\n\n<li>C\u00e1c quy tr\u00ecnh h\u00e0n wafer<\/li>\n\n\n\n<li>Hi\u1ec7u su\u1ea5t c\u1ee7a CMP<\/li>\n\n\n\n<li>\u0110\u1ed9 tin c\u1eady v\u00e0 hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb<\/li>\n<\/ul>\n\n\n\n<p>\u0110\u1ec3 \u0111\u00e1nh gi\u00e1 \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y, c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t s\u1eed d\u1ee5ng m\u1ed9t s\u1ed1 th\u00f4ng s\u1ed1 h\u00ecnh h\u1ecdc, bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 d\u00e0y<\/li>\n\n\n\n<li>TTV (\u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y)<\/li>\n\n\n\n<li>Cung<\/li>\n\n\n\n<li>Warp<\/li>\n\n\n\n<li>TIR (Gi\u00e1 tr\u1ecb hi\u1ec3n th\u1ecb t\u1ed5ng)<\/li>\n<\/ul>\n\n\n\n<p>M\u1ed7i th\u00f4ng s\u1ed1 cung c\u1ea5p th\u00f4ng tin ri\u00eang bi\u1ec7t v\u1ec1 t\u00ecnh tr\u1ea1ng v\u1eadt l\u00fd c\u1ee7a t\u1ea5m wafer.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u0110i\u1ec1u g\u00ec l\u00e0 <a href=\"https:\/\/www.zmsh-semitech.com\/vi\/what-are-wafer-ttv-bow-and-warp\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#cf2e2e\" class=\"has-inline-color\">TTV (\u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y)<\/mark><\/a>?<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u1ecbnh ngh\u0129a<\/h3>\n\n\n\n<p>TTV l\u00e0 gi\u00e1 tr\u1ecb ch\u00eanh l\u1ec7ch gi\u1eefa \u0111\u1ed9 d\u00e0y t\u1ed1i \u0111a v\u00e0 \u0111\u1ed9 d\u00e0y t\u1ed1i thi\u1ec3u \u0111\u01b0\u1ee3c \u0111o tr\u00ean b\u1ec1 m\u1eb7t m\u1ed9t t\u1ea5m wafer.<\/p>\n\n\n\n<p>V\u1ec1 m\u1eb7t to\u00e1n h\u1ecdc:<\/p>\n\n\n\n<p><strong>TTV = \u0110\u1ed9 d\u00e0y t\u1ed1i \u0111a \u2212 \u0110\u1ed9 d\u00e0y t\u1ed1i thi\u1ec3u<\/strong><\/p>\n\n\n\n<p>Ph\u01b0\u01a1ng ph\u00e1p TTV ch\u1ec9 t\u1eadp trung v\u00e0o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 kh\u00f4ng t\u00ednh \u0111\u1ebfn h\u01b0\u1edbng c\u1ee7a t\u1ea5m wafer hay h\u00e0nh vi quay c\u1ee7a n\u00f3.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Nguy\u00ean l\u00fd \u0111o l\u01b0\u1eddng<\/h3>\n\n\n\n<p>Vi\u1ec7c \u0111o \u0111\u1ed9 d\u00e0y \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n t\u1ea1i nhi\u1ec1u \u0111i\u1ec3m tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1ea3m bi\u1ebfn \u0111i\u1ec7n dung<\/li>\n\n\n\n<li>M\u00e1y giao thoa quang h\u1ecdc<\/li>\n\n\n\n<li>Thi\u1ebft b\u1ecb \u0111o \u0111\u1ed9 d\u00e0y ti\u1ebfp x\u00fac<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng \u0111o l\u01b0\u1eddng b\u1eb1ng laser<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c gi\u00e1 tr\u1ecb \u0111\u1ed9 d\u00e0y l\u1edbn nh\u1ea5t v\u00e0 nh\u1ecf nh\u1ea5t \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh, v\u00e0 ch\u00eanh l\u1ec7ch gi\u1eefa ch\u00fang ch\u00ednh l\u00e0 gi\u00e1 tr\u1ecb TTV.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">V\u00ed d\u1ee5<\/h3>\n\n\n\n<p>N\u1ebfu \u0111\u1ed9 d\u00e0y c\u1ee7a t\u1ea5m wafer n\u1eb1m trong kho\u1ea3ng t\u1eeb:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 d\u00e0y t\u1ed1i \u0111a: 726 \u03bcm<\/li>\n\n\n\n<li>\u0110\u1ed9 d\u00e0y t\u1ed1i thi\u1ec3u: 721 \u03bcm<\/li>\n<\/ul>\n\n\n\n<p>Sau \u0111\u00f3:<\/p>\n\n\n\n<p><strong>TTV = 726 \u2212 721 = 5 \u03bcm<\/strong><\/p>\n\n\n\n<p>Gi\u00e1 tr\u1ecb TTV c\u00e0ng nh\u1ecf th\u00ec \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y c\u00e0ng cao.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">TIR (Gi\u00e1 tr\u1ecb ch\u1ec9 th\u1ecb t\u1ed5ng) l\u00e0 g\u00ec?<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u1ecbnh ngh\u0129a<\/h3>\n\n\n\n<p>TIR \u0111o l\u01b0\u1eddng \u0111\u1ed9 bi\u1ebfn thi\u00ean t\u1ed5ng th\u1ec3 quan s\u00e1t \u0111\u01b0\u1ee3c khi m\u1ed9t t\u1ea5m wafer quay quanh tr\u1ee5c t\u00e2m c\u1ee7a n\u00f3.<\/p>\n\n\n\n<p>Kh\u00e1c v\u1edbi TTV, TIR ph\u1ea3n \u00e1nh t\u00e1c \u0111\u1ed9ng t\u1ed5ng h\u1ee3p c\u1ee7a:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 bi\u1ebfn thi\u00ean v\u1ec1 \u0111\u1ed9 d\u00e0y<\/li>\n\n\n\n<li>S\u1ef1 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>\u0110\u1ed9 l\u1ec7ch t\u00e2m c\u1ee7a t\u1ea5m wafer<\/li>\n\n\n\n<li>L\u1ed7i c\u0103n ch\u1ec9nh gi\u00e1 \u0111\u1ee1<\/li>\n\n\n\n<li>\u0110\u1ed9 l\u1ec7ch t\u00e2m b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n\n\n\n<p>TIR th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c \u1ee9ng d\u1ee5ng c\u01a1 kh\u00ed ch\u00ednh x\u00e1c v\u00e0 \u0111o l\u01b0\u1eddng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Nguy\u00ean l\u00fd \u0111o l\u01b0\u1eddng<\/h3>\n\n\n\n<p>T\u1ea5m wafer \u0111\u01b0\u1ee3c g\u1eafn l\u00ean tr\u1ee5c quay v\u00e0 xoay 360 \u0111\u1ed9 trong khi c\u1ea3m bi\u1ebfn d\u1ecbch chuy\u1ec3n li\u00ean t\u1ee5c ghi l\u1ea1i chuy\u1ec3n \u0111\u1ed9ng c\u1ee7a b\u1ec1 m\u1eb7t.<\/p>\n\n\n\n<p>S\u1ef1 ch\u00eanh l\u1ec7ch gi\u1eefa gi\u00e1 tr\u1ecb \u0111o cao nh\u1ea5t v\u00e0 th\u1ea5p nh\u1ea5t trong qu\u00e1 tr\u00ecnh quay \u0111\u01b0\u1ee3c \u0111\u1ecbnh ngh\u0129a l\u00e0:<\/p>\n\n\n\n<p><strong>TIR = Gi\u00e1 tr\u1ecb \u0111\u1ecdc t\u1ed1i \u0111a c\u1ee7a \u0111\u1ed3ng h\u1ed3 \u2212 Gi\u00e1 tr\u1ecb \u0111\u1ecdc t\u1ed1i thi\u1ec3u c\u1ee7a \u0111\u1ed3ng h\u1ed3<\/strong><\/p>\n\n\n\n<h3 class=\"wp-block-heading\">V\u00ed d\u1ee5<\/h3>\n\n\n\n<p>Trong qu\u00e1 tr\u00ecnh lu\u00e2n phi\u00ean:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Gi\u00e1 tr\u1ecb \u0111o cao nh\u1ea5t: +3 \u03bcm<\/li>\n\n\n\n<li>Gi\u00e1 tr\u1ecb \u0111o th\u1ea5p nh\u1ea5t: \u22124 \u03bcm<\/li>\n<\/ul>\n\n\n\n<p>Sau \u0111\u00f3:<\/p>\n\n\n\n<p><strong>TIR = 3 \u2212 (\u22124) = 7 \u03bcm<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">TTV so v\u1edbi TIR: Nh\u1eefng \u0111i\u1ec3m kh\u00e1c bi\u1ec7t ch\u00ednh<\/h2>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><th>Tham s\u1ed1<\/th><th>TTV<\/th><th>TIR<\/th><\/tr><tr><td>H\u1ecd v\u00e0 t\u00ean<\/td><td>\u0110\u1ed9 dao \u0111\u1ed9ng t\u1ed5ng th\u1ec3 v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td><td>T\u1ed5ng gi\u00e1 tr\u1ecb ch\u1ec9 th\u1ecb<\/td><\/tr><tr><td>M\u1ee5c \u0111\u00edch ch\u00ednh<\/td><td>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td><td>S\u1ef1 bi\u1ebfn \u0111\u1ed5i b\u1ec1 m\u1eb7t do chuy\u1ec3n \u0111\u1ed9ng quay<\/td><\/tr><tr><td>C\u00f3 \u0111o \u0111\u1ed9 d\u00e0y kh\u00f4ng?<\/td><td>\u0110\u00fang<\/td><td>M\u1ed9t ph\u1ea7n<\/td><\/tr><tr><td>C\u00f3 b\u1ecb \u1ea3nh h\u01b0\u1edfng b\u1edfi h\u00ecnh d\u1ea1ng b\u1ec1 m\u1eb7t kh\u00f4ng?<\/td><td>Kh\u00f4ng<\/td><td>\u0110\u00fang<\/td><\/tr><tr><td>C\u00f3 ph\u1ea3i do \u0111\u1ed9 l\u1ec7ch t\u00e2m c\u1ee7a t\u1ea5m wafer kh\u00f4ng?<\/td><td>Kh\u00f4ng<\/td><td>\u0110\u00fang<\/td><\/tr><tr><td>C\u00f3 c\u1ea7n xoay kh\u00f4ng?<\/td><td>Kh\u00f4ng<\/td><td>\u0110\u00fang<\/td><\/tr><tr><td>\u1ee8ng d\u1ee5ng \u0111i\u1ec3n h\u00ecnh<\/td><td>Ki\u1ec3m \u0111\u1ecbnh t\u1ea5m b\u00e1n d\u1eabn<\/td><td>\u0110o l\u01b0\u1eddng ch\u00ednh x\u00e1c v\u00e0 c\u0103n ch\u1ec9nh thi\u1ebft b\u1ecb<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>S\u1ef1 kh\u00e1c bi\u1ec7t quan tr\u1ecdng nh\u1ea5t l\u00e0:<\/p>\n\n\n\n<p><strong>TTV \u0111o tr\u1ef1c ti\u1ebfp s\u1ef1 bi\u1ebfn thi\u00ean v\u1ec1 \u0111\u1ed9 d\u00e0y, trong khi TIR \u0111o s\u1ef1 bi\u1ebfn thi\u00ean v\u1ecb tr\u00ed t\u1ed5ng th\u1ec3 trong qu\u00e1 tr\u00ecnh quay.<\/strong><\/p>\n\n\n\n<p>Do \u0111\u00f3, c\u00e1c gi\u00e1 tr\u1ecb TIR th\u01b0\u1eddng l\u1edbn h\u01a1n c\u00e1c gi\u00e1 tr\u1ecb TTV v\u00ec ch\u00fang bao g\u1ed3m th\u00eam c\u00e1c sai s\u1ed1 h\u00ecnh h\u1ecdc.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">M\u1ed1i quan h\u1ec7 gi\u1eefa TIR v\u00e0 TTV<\/h2>\n\n\n\n<p>M\u1eb7c d\u00f9 c\u00f3 li\u00ean quan \u0111\u1ebfn nhau, nh\u01b0ng TIR v\u00e0 TTV kh\u00f4ng th\u1ec3 d\u00f9ng thay th\u1ebf cho nhau.<\/p>\n\n\n\n<p>Trong m\u1ed9t t\u1ea5m wafer l\u00fd t\u01b0\u1edfng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u0103n gi\u1eefa ho\u00e0n h\u1ea3o<\/li>\n\n\n\n<li>S\u1ef1 c\u0103n ch\u1ec9nh tr\u1ee5c ho\u00e0n h\u1ea3o<\/li>\n\n\n\n<li>Kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n\n\n\n<p>TIR c\u00f3 th\u1ec3 ti\u1ec7m c\u1eadn gi\u00e1 tr\u1ecb TTV.<\/p>\n\n\n\n<p>Tuy nhi\u00ean, trong c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t th\u1ef1c t\u1ebf, TIR th\u01b0\u1eddng b\u1ecb \u1ea3nh h\u01b0\u1edfng b\u1edfi c\u00e1c y\u1ebfu t\u1ed1 kh\u00e1c:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u1ed9 l\u1ec7ch b\u1ec1 m\u1eb7t<\/h3>\n\n\n\n<p>S\u1ef1 g\u1ee3n s\u00f3ng \u1edf c\u1ea5p \u0111\u1ed9 vi m\u00f4 ho\u1eb7c c\u00e1c khuy\u1ebft t\u1eadt c\u1ee5c b\u1ed9 c\u00f3 th\u1ec3 l\u00e0m t\u0103ng gi\u00e1 tr\u1ecb ch\u1ec9 s\u1ed1.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u1ed9 l\u1ec7ch t\u00e2m c\u1ee7a t\u1ea5m wafer<\/h3>\n\n\n\n<p>N\u1ebfu t\u00e2m t\u1ea5m wafer kh\u00f4ng ho\u00e0n to\u00e0n tr\u00f9ng kh\u1edbp v\u1edbi tr\u1ee5c tr\u1ee5c ch\u00ednh, gi\u00e1 tr\u1ecb TIR s\u1ebd t\u0103ng l\u00ean.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">L\u1ed7i l\u1ecbch thi \u0111\u1ea5u<\/h3>\n\n\n\n<p>\u0110\u1ed9 ph\u1eb3ng c\u1ee7a m\u00e2m k\u1eb9p v\u00e0 \u0111\u1ed9 ch\u00ednh x\u00e1c khi l\u1eafp \u0111\u1eb7t c\u00f3 th\u1ec3 l\u00e0 nguy\u00ean nh\u00e2n g\u00e2y ra s\u1ef1 dao \u0111\u1ed9ng trong k\u1ebft qu\u1ea3 \u0111o.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Dao \u0111\u1ed9ng c\u01a1 h\u1ecdc<\/h3>\n\n\n\n<p>S\u1ef1 kh\u00f4ng \u1ed5n \u0111\u1ecbnh c\u1ee7a thi\u1ebft b\u1ecb c\u00f3 th\u1ec3 g\u00e2y ra nhi\u1ec5u trong qu\u00e1 tr\u00ecnh \u0111o.<\/p>\n\n\n\n<p>Do \u0111\u00f3:<\/p>\n\n\n\n<p><strong>Trong h\u1ea7u h\u1ebft c\u00e1c t\u00ecnh hu\u1ed1ng th\u1ef1c t\u1ebf, TIR \u2265 TTV.<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">T\u1ea1i sao TIR l\u1ea1i quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p>Khi \u0111\u01b0\u1eddng k\u00ednh t\u1ea5m wafer t\u0103ng t\u1eeb 150 mm v\u00e0 200 mm l\u00ean 300 mm v\u00e0 h\u01a1n th\u1ebf n\u1eefa, \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 h\u00ecnh h\u1ecdc ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng.<\/p>\n\n\n\n<p>C\u00e1c ph\u00e9p \u0111o TIR th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">M\u00e0i t\u1ea5m wafer<\/h3>\n\n\n\n<p>Gi\u00e1m s\u00e1t \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a tr\u1ee5c ch\u00ednh trong qu\u00e1 tr\u00ecnh m\u00e0i m\u1eb7t sau.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">\u0110\u00e1nh b\u00f3ng t\u1ea5m wafer<\/h3>\n\n\n\n<p>\u0110\u00e1nh gi\u00e1 \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh quay trong qu\u00e1 tr\u00ecnh gia c\u00f4ng CMP.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">H\u1ec7 th\u1ed1ng ki\u1ec3m tra t\u1ea5m wafer<\/h3>\n\n\n\n<p>\u0110\u1ea3m b\u1ea3o \u0111\u1ecbnh v\u1ecb v\u00e0 l\u1ea5y n\u00e9t ch\u00ednh x\u00e1c.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">K\u1ebft d\u00ednh wafer<\/h3>\n\n\n\n<p>Gi\u1ea3m thi\u1ec3u sai s\u1ed1 c\u0103n ch\u1ec9nh trong c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">S\u1ea3n xu\u1ea5t MEMS<\/h3>\n\n\n\n<p>\u0110\u1ea3m b\u1ea3o tu\u00e2n th\u1ee7 c\u00e1c y\u00eau c\u1ea7u nghi\u00eam ng\u1eb7t v\u1ec1 \u0111\u1ed9 ph\u1eb3ng \u0111\u1ed1i v\u1edbi c\u00e1c c\u1ea5u tr\u00fac vi c\u01a1 \u0111i\u1ec7n t\u1eed.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e1c y\u00eau c\u1ea7u ti\u00eau bi\u1ec3u trong ng\u00e0nh<\/h2>\n\n\n\n<p>C\u00e1c gi\u00e1 tr\u1ecb TTV v\u00e0 TIR cho ph\u00e9p ph\u1ee5 thu\u1ed9c v\u00e0o lo\u1ea1i t\u1ea5m wafer v\u00e0 \u1ee9ng d\u1ee5ng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">T\u1ea5m silicon<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>\u0110\u01b0\u1eddng k\u00ednh<\/td><td>TTV \u0111i\u1ec3n h\u00ecnh<\/td><\/tr><tr><td>150 mm<\/td><td>&lt; 5 \u03bcm<\/td><\/tr><tr><td>200 mm<\/td><td>&lt; 3 \u03bcm<\/td><\/tr><tr><td>300 mm<\/td><td>&lt; 1 \u03bcm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">T\u1ea5m wafer SiC ti\u00ean ti\u1ebfn<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>\u0110\u01b0\u1eddng k\u00ednh<\/td><td>TTV \u0111i\u1ec3n h\u00ecnh<\/td><\/tr><tr><td>6 inch<\/td><td>&lt; 10 \u03bcm<\/td><\/tr><tr><td>8 inch<\/td><td>&lt; 5 \u03bcm<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>C\u00e1c th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt TIR th\u01b0\u1eddng \u0111\u01b0\u1ee3c x\u00e1c \u0111\u1ecbnh b\u1edfi c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb v\u00e0 c\u00e1c y\u00eau c\u1ea7u v\u1ec1 quy tr\u00ecnh, ch\u1ee9 kh\u00f4ng ch\u1ec9 d\u1ef1a tr\u00ean c\u00e1c ti\u00eau chu\u1ea9n v\u1ec1 v\u1eadt li\u1ec7u n\u1ec1n.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">TIR, TTV, Bow v\u00e0 Warp: M\u1ed9t c\u00e1i nh\u00ecn to\u00e0n di\u1ec7n<\/h2>\n\n\n\n<p>Kh\u00f4ng c\u00f3 th\u00f4ng s\u1ed1 n\u00e0o c\u00f3 th\u1ec3 m\u00f4 t\u1ea3 \u0111\u1ea7y \u0111\u1ee7 h\u00ecnh h\u1ecdc c\u1ee7a t\u1ea5m wafer.<\/p>\n\n\n\n<p>C\u00e1c k\u1ef9 s\u01b0 th\u01b0\u1eddng \u0111\u00e1nh gi\u00e1:<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><td>Tham s\u1ed1<\/td><td>M\u00f4 t\u1ea3<\/td><\/tr><tr><td>\u0110\u1ed9 d\u00e0y<\/td><td>\u0110\u1ed9 d\u00e0y trung b\u00ecnh c\u1ee7a t\u1ea5m wafer<\/td><\/tr><tr><td>TTV<\/td><td>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y<\/td><\/tr><tr><td>TIR<\/td><td>Bi\u1ebfn thi\u00ean theo g\u00f3c quay<\/td><\/tr><tr><td>Cung<\/td><td>\u0110\u1ed9 d\u1ecbch chuy\u1ec3n t\u00e2m so v\u1edbi m\u1eb7t ph\u1eb3ng tham chi\u1ebfu<\/td><\/tr><tr><td>Warp<\/td><td>Bi\u1ebfn d\u1ea1ng t\u1ed5ng th\u1ec3 c\u1ee7a t\u1ea5m wafer<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>K\u1ebft h\u1ee3p l\u1ea1i, c\u00e1c ph\u00e9p \u0111o n\u00e0y gi\u00fap ch\u00fang ta c\u00f3 c\u00e1i nh\u00ecn to\u00e0n di\u1ec7n v\u1ec1 ch\u1ea5t l\u01b0\u1ee3ng t\u1ea5m wafer v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch c\u1ee7a quy tr\u00ecnh.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p>TTV v\u00e0 TIR \u0111\u1ec1u l\u00e0 c\u00e1c th\u00f4ng s\u1ed1 \u0111o l\u01b0\u1eddng t\u1ea5m wafer thi\u1ebft y\u1ebfu, nh\u01b0ng ch\u00fang ph\u1ee5c v\u1ee5 c\u00e1c m\u1ee5c \u0111\u00edch kh\u00e1c nhau.<\/p>\n\n\n\n<p>TTV \u0111\u1ecbnh l\u01b0\u1ee3ng \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer, do \u0111\u00f3 tr\u1edf th\u00e0nh m\u1ed9t th\u00f4ng s\u1ed1 k\u1ef9 thu\u1eadt quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t ch\u1ea5t n\u1ec1n v\u00e0 c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn. Ng\u01b0\u1ee3c l\u1ea1i, TIR \u0111o l\u01b0\u1eddng \u0111\u1ed9 bi\u1ebfn thi\u00ean v\u1ecb tr\u00ed t\u1ed5ng th\u1ec3 trong qu\u00e1 tr\u00ecnh quay v\u00e0 ph\u1ea3n \u00e1nh t\u00e1c \u0111\u1ed9ng t\u1ed5ng h\u1ee3p c\u1ee7a s\u1ef1 bi\u1ebfn thi\u00ean \u0111\u1ed9 d\u00e0y, \u0111\u1ed9 kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u b\u1ec1 m\u1eb7t v\u00e0 s\u1ef1 c\u0103n ch\u1ec9nh c\u01a1 h\u1ecdc.<\/p>\n\n\n\n<p>Khi ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u1ebfp t\u1ee5c chuy\u1ec3n h\u01b0\u1edbng sang s\u1eed d\u1ee5ng c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n, c\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c dung sai quy tr\u00ecnh ch\u1eb7t ch\u1ebd h\u01a1n, vi\u1ec7c hi\u1ec3u r\u00f5 s\u1ef1 kh\u00e1c bi\u1ec7t gi\u1eefa TTV v\u00e0 TIR ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c k\u1ef9 s\u01b0 tham gia v\u00e0o qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m wafer, ki\u1ec3m tra v\u00e0 ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb.<\/p>\n\n\n\n<p>B\u1eb1ng c\u00e1ch \u0111\u00e1nh gi\u00e1 ch\u00ednh x\u00e1c c\u1ea3 hai th\u00f4ng s\u1ed1 n\u00e0y, c\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t c\u00f3 th\u1ec3 n\u00e2ng cao \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh, hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb v\u00e0 n\u0103ng su\u1ea5t t\u1ed5ng th\u1ec3 c\u1ee7a s\u1ea3n ph\u1ea9m.<\/p>","protected":false},"excerpt":{"rendered":"<p>In semiconductor manufacturing, wafer geometry plays a critical role in determining process stability, lithography accuracy, bonding quality, and ultimately device yield. As wafer diameters continue to increase and advanced packaging technologies become more demanding, the need for precise wafer metrology has never been greater. Among the many parameters used to evaluate wafer quality, Total Thickness [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2559,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[25],"tags":[1522,383,1524,36,195,637,1090,1520,130,1518,372,1515,1521,714,1517,1523,1519,873,131],"class_list":["post-2558","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-technology-applications","tag-cmp-process","tag-precision-metrology","tag-semiconductor-engineering","tag-semiconductor-manufacturing","tag-semiconductor-materials","tag-sic-wafer","tag-silicon-wafer","tag-total-indicated-reading","tag-total-thickness-variation","tag-wafer-bow","tag-wafer-flatness","tag-wafer-geometry","tag-wafer-grinding","tag-wafer-inspection","tag-wafer-metrology","tag-wafer-thickness-measurement","tag-wafer-tir","tag-wafer-ttv","tag-wafer-warp"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2558","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2558"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2558\/revisions"}],"predecessor-version":[{"id":2560,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2558\/revisions\/2560"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2559"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2558"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2558"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2558"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}