{"id":2466,"date":"2026-05-14T06:21:48","date_gmt":"2026-05-14T06:21:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2466"},"modified":"2026-05-14T06:22:03","modified_gmt":"2026-05-14T06:22:03","slug":"wafer-notching-and-coring-processes","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/wafer-notching-and-coring-processes\/","title":{"rendered":"C\u00e1c quy tr\u00ecnh c\u1eaft r\u00e3nh v\u00e0 kho\u00e9t l\u1ed7 tr\u00ean t\u1ea5m wafer trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn 300mm"},"content":{"rendered":"<p>Trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn 300mm, c\u00e1c quy tr\u00ecnh c\u01a1 kh\u00ed c\u1eaft r\u00e3nh v\u00e0 kho\u00e9t l\u00f5i l\u00e0 nh\u1eefng c\u00f4ng \u0111o\u1ea1n quan tr\u1ecdng nh\u1eb1m chu\u1ea9n b\u1ecb c\u00e1c t\u1ea5m wafer silicon cho c\u00e1c b\u01b0\u1edbc ch\u1ebf t\u1ea1o ti\u1ebfp theo. C\u00e1c quy tr\u00ecnh n\u00e0y \u0111\u1ea3m b\u1ea3o h\u01b0\u1edbng \u0111\u1eb7t ch\u00ednh x\u00e1c c\u1ee7a t\u1ea5m wafer, t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac, c\u0169ng nh\u01b0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd t\u1ef1 \u0111\u1ed9ng trong c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n<p>Khi k\u00edch th\u01b0\u1edbc t\u1ea5m wafer ng\u00e0y c\u00e0ng t\u0103ng v\u00e0 c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 ng\u00e0y c\u00e0ng ti\u00ean ti\u1ebfn, \u0111\u1ed9 ch\u00ednh x\u00e1c trong qu\u00e1 tr\u00ecnh gia c\u00f4ng c\u01a1 kh\u00ed t\u1ea5m wafer ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng \u0111\u1ed1i v\u1edbi vi\u1ec7c ki\u1ec3m so\u00e1t n\u0103ng su\u1ea5t v\u00e0 kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch c\u1ee7a thi\u1ebft b\u1ecb.<\/p>\n\n\n\n<p>B\u00e0i vi\u1ebft n\u00e0y gi\u1ea3i th\u00edch kh\u00e1i ni\u1ec7m v\u1ec1 vi\u1ec7c c\u1eaft r\u00e3nh v\u00e0 khoan l\u1ed7 tr\u00ean t\u1ea5m wafer, quy tr\u00ecnh th\u1ef1c hi\u1ec7n c\u00e1c c\u00f4ng \u0111o\u1ea1n n\u00e0y, c\u0169ng nh\u01b0 l\u00fd do t\u1ea1i sao ch\u00fang l\u1ea1i \u0111\u00f3ng vai tr\u00f2 thi\u1ebft y\u1ebfu trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"800\" height=\"533\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH.jpg\" alt=\"\" class=\"wp-image-2467\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH.jpg 800w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH-300x200.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH-768x512.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/NOTCH-600x400.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">C\u1eaft r\u00e3nh tr\u00ean t\u1ea5m wafer l\u00e0 g\u00ec?<\/h2>\n\n\n\n<p>Vi\u1ec7c t\u1ea1o r\u00e3nh tr\u00ean t\u1ea5m wafer l\u00e0 qu\u00e1 tr\u00ecnh t\u1ea1o ra m\u1ed9t v\u1ebft c\u1eaft nh\u1ecf, \u0111\u01b0\u1ee3c \u0111\u1ecbnh v\u1ecb ch\u00ednh x\u00e1c (r\u00e3nh) tr\u00ean m\u00e9p c\u1ee7a t\u1ea5m wafer silicon. R\u00e3nh n\u00e0y \u0111\u00f3ng vai tr\u00f2 l\u00e0 \u0111i\u1ec3m tham chi\u1ebfu \u0111\u1ecbnh h\u01b0\u1edbng cho c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">M\u1ee5c \u0111\u00edch c\u1ee7a vi\u1ec7c c\u1eaft r\u00e3nh tr\u00ean t\u1ea5m wafer<\/h3>\n\n\n\n<p>C\u00e1c ch\u1ee9c n\u0103ng ch\u00ednh c\u1ee7a vi\u1ec7c c\u1eaft r\u00e3nh tr\u00ean t\u1ea5m wafer bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>S\u1eafp x\u1ebfp h\u01b0\u1edbng tinh th\u1ec3<\/strong> (v\u00ed d\u1ee5: h\u01b0\u1edbng tinh th\u1ec3 silic  ho\u1eb7c )<\/li>\n\n\n\n<li><strong>Tham chi\u1ebfu v\u1ecb tr\u00ed thi\u1ebft b\u1ecb<\/strong> d\u00e0nh cho c\u00e1c h\u1ec7 th\u1ed1ng x\u1eed l\u00fd b\u1eb1ng robot<\/li>\n\n\n\n<li><strong>S\u1ef1 nh\u1ea5t qu\u00e1n trong quy tr\u00ecnh gi\u1eefa c\u00e1c c\u00f4ng \u0111o\u1ea1n quang kh\u1eafc, \u0103n m\u00f2n v\u00e0 l\u1eafng \u0111\u1ecdng<\/strong><\/li>\n\n\n\n<li><strong>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi t\u1ef1 \u0111\u1ed9ng h\u00f3a trong c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip 300mm<\/strong><\/li>\n<\/ul>\n\n\n\n<p>Tr\u00ean c\u00e1c t\u1ea5m wafer 300mm, v\u1ebft kh\u00eda l\u00e0 m\u1ed9t \u0111\u1eb7c \u0111i\u1ec3m ti\u00eau chu\u1ea9n gi\u00fap thi\u1ebft b\u1ecb x\u00e1c \u0111\u1ecbnh h\u01b0\u1edbng c\u1ee7a t\u1ea5m wafer m\u00e0 kh\u00f4ng c\u1ea7n can thi\u1ec7p th\u1ee7 c\u00f4ng.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Wafer Coring l\u00e0 g\u00ec?<\/h2>\n\n\n\n<p>C\u1eaft l\u00f5i wafer l\u00e0 qu\u00e1 tr\u00ecnh lo\u1ea1i b\u1ecf ho\u1eb7c t\u1ea1o h\u00ecnh v\u00f9ng trung t\u00e2m ho\u1eb7c c\u00e1c ph\u1ea7n m\u00e9p c\u1ee7a wafer nh\u1eb1m ph\u1ee5c v\u1ee5 c\u00e1c \u1ee9ng d\u1ee5ng chuy\u00ean bi\u1ec7t ho\u1eb7c \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t. M\u1eb7c d\u00f9 \u00edt \u0111\u01b0\u1ee3c \u0111\u1ec1 c\u1eadp \u0111\u1ebfn h\u01a1n so v\u1edbi vi\u1ec7c t\u1ea1o r\u00e3nh, vi\u1ec7c c\u1eaft l\u00f5i v\u1eabn \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng trong m\u1ed9t s\u1ed1 \u1ee9ng d\u1ee5ng s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn v\u00e0 nghi\u00ean c\u1ee9u c\u1ee5 th\u1ec3.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1c ch\u1ee9c n\u0103ng ch\u00ednh c\u1ee7a qu\u00e1 tr\u00ecnh khoan l\u00f5i wafer<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ea1o c\u1ea5u tr\u00fac c\u0103n gi\u1eefa ho\u1eb7c c\u1ea5u tr\u00fac gi\u1ea3m \u00e1p c\u01a1 h\u1ecdc<\/li>\n\n\n\n<li>Chu\u1ea9n b\u1ecb c\u00e1c t\u1ea5m wafer cho c\u00e1c quy tr\u00ecnh h\u00e0n ho\u1eb7c x\u1ebfp ch\u1ed3ng chuy\u00ean d\u1ee5ng<\/li>\n\n\n\n<li>Lo\u1ea1i b\u1ecf c\u00e1c v\u00f9ng trung t\u00e2m b\u1ecb c\u0103ng th\u1eb3ng ho\u1eb7c b\u1ecb l\u1ed7i trong c\u00e1c quy tr\u00ecnh th\u00ed nghi\u1ec7m<\/li>\n\n\n\n<li>H\u1ed7 tr\u1ee3 c\u00e1c h\u00ecnh d\u1ea1ng t\u1ea5m wafer t\u00f9y ch\u1ec9nh cho nghi\u00ean c\u1ee9u v\u00e0 ch\u1ebf t\u1ea1o m\u1eabu<\/li>\n<\/ul>\n\n\n\n<p>Trong c\u00e1c m\u00f4i tr\u01b0\u1eddng s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn, qu\u00e1 tr\u00ecnh khoan l\u00f5i th\u01b0\u1eddng \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n b\u1eb1ng c\u00e1c d\u1ee5ng c\u1ee5 kim c\u01b0\u01a1ng c\u00f3 \u0111\u1ed9 ch\u00ednh x\u00e1c cao ho\u1eb7c c\u00e1c h\u1ec7 th\u1ed1ng h\u1ed7 tr\u1ee3 b\u1eb1ng laser.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Thi\u1ebft b\u1ecb d\u00f9ng trong gia c\u00f4ng r\u00e3nh v\u00e0 khoan l\u00f5i<\/h2>\n\n\n\n<p>Vi\u1ec7c gia c\u00f4ng t\u1ea5m wafer v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c cao \u0111\u00f2i h\u1ecfi ph\u1ea3i c\u00f3 thi\u1ebft b\u1ecb chuy\u00ean d\u1ee5ng \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf \u0111\u1ec3 \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf m\u1ee9c micromet v\u00e0 h\u1ea1n ch\u1ebf t\u1ed1i \u0111a t\u1ed5n th\u01b0\u01a1ng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1. H\u1ec7 th\u1ed1ng c\u1eaft r\u00e3nh ch\u00ednh x\u00e1c tr\u00ean t\u1ea5m wafer<\/h3>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng n\u00e0y s\u1eed d\u1ee5ng \u0111\u0129a m\u00e0i kim c\u01b0\u01a1ng ho\u1eb7c \u0111\u1ea7u c\u1eaft b\u1eb1ng laser \u0111\u1ec3 t\u1ea1o ra c\u00e1c v\u1ebft kh\u00eda ch\u00ednh x\u00e1c tr\u00ean m\u00e9p t\u1ea5m wafer.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2. M\u00e1y c\u01b0a d\u00e2y kim c\u01b0\u01a1ng<\/h3>\n\n\n\n<p>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong m\u1ed9t s\u1ed1 \u1ee9ng d\u1ee5ng khoan l\u00f5i v\u00e0 t\u1ea1o h\u00ecnh, \u0111\u1eb7c bi\u1ec7t l\u00e0 khi gia c\u00f4ng c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng ho\u1eb7c c\u00e1c t\u1ea5m wafer d\u00e0y.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3. H\u1ec7 th\u1ed1ng gia c\u00f4ng vi m\u00f4 b\u1eb1ng laser<\/h3>\n\n\n\n<p>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip ti\u00ean ti\u1ebfn c\u00f3 th\u1ec3 s\u1eed d\u1ee5ng c\u00e1c c\u00f4ng c\u1ee5 d\u1ef1a tr\u00ean c\u00f4ng ngh\u1ec7 laser \u0111\u1ec3 th\u1ef1c hi\u1ec7n c\u00e1c thao t\u00e1c c\u1eaft r\u00e3nh v\u00e0 kho\u00e9t l\u1ed7 kh\u00f4ng ti\u1ebfp x\u00fac nh\u1eb1m gi\u1ea3m \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4. M\u00e1y m\u00e0i ch\u00ednh x\u00e1c CNC<\/h3>\n\n\n\n<p>\u0110\u1ea3m b\u1ea3o \u0111\u1ed9 l\u1eb7p l\u1ea1i cao v\u00e0 ki\u1ec3m so\u00e1t k\u00edch th\u01b0\u1edbc ch\u1eb7t ch\u1ebd trong qu\u00e1 tr\u00ecnh gia c\u00f4ng m\u00e9p t\u1ea5m wafer.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Quy tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m wafer 300mm<\/h2>\n\n\n\n<p>Quy tr\u00ecnh \u0111\u01a1n gi\u1ea3n h\u00f3a cho vi\u1ec7c c\u1eaft r\u00e3nh v\u00e0 khoan l\u1ed7 tr\u00ean t\u1ea5m wafer bao g\u1ed3m:<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>Ki\u1ec3m tra t\u1ea5m wafer<\/strong>\n<ul class=\"wp-block-list\">\n<li>Ph\u00e1t hi\u1ec7n khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>\u0110o \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 ph\u1eb3ng<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\u0110\u1ecbnh h\u01b0\u1edbng v\u00e0 c\u0103n ch\u1ec9nh<\/strong>\n<ul class=\"wp-block-list\">\n<li>X\u00e1c \u0111\u1ecbnh h\u01b0\u1edbng tr\u1ee5c tinh th\u1ec3<\/li>\n\n\n\n<li>C\u00e0i \u0111\u1eb7t v\u1ecb tr\u00ed tham chi\u1ebfu r\u00e3nh<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Gia c\u00f4ng c\u01a1 kh\u00ed ho\u1eb7c gia c\u00f4ng b\u1eb1ng laser<\/strong>\n<ul class=\"wp-block-list\">\n<li>C\u1eaft r\u00e3nh \u1edf m\u00e9p t\u1ea5m wafer<\/li>\n\n\n\n<li>Khoan l\u00f5i ho\u1eb7c t\u1ea1o h\u00ecnh trung t\u00e2m (n\u1ebfu c\u1ea7n thi\u1ebft)<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Lo\u1ea1i b\u1ecf g\u1edd v\u00e0 ho\u00e0n thi\u1ec7n b\u1ec1 m\u1eb7t<\/strong>\n<ul class=\"wp-block-list\">\n<li>Lo\u1ea1i b\u1ecf c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf v\u00e0 m\u1ea3nh v\u1ee5n<\/li>\n\n\n\n<li>\u0110\u00e1nh b\u00f3ng c\u1ea1nh \u0111\u1ec3 gi\u1ea3m \u1ee9ng su\u1ea5t<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Ki\u1ec3m tra sau gia c\u00f4ng<\/strong>\n<ul class=\"wp-block-list\">\n<li>\u0110o l\u01b0\u1eddng quang h\u1ecdc<\/li>\n\n\n\n<li>Ki\u1ec3m tra k\u00edch th\u01b0\u1edbc<\/li>\n\n\n\n<li>Ki\u1ec3m tra t\u00ednh to\u00e0n v\u1eb9n b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h2 class=\"wp-block-heading\">T\u1ea7m quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn 300mm<\/h2>\n\n\n\n<p>Khi \u0111\u01b0\u1eddng k\u00ednh t\u1ea5m wafer t\u0103ng l\u00ean 300 mm v\u00e0 h\u01a1n th\u1ebf n\u1eefa, \u0111\u1ed9 ch\u00ednh x\u00e1c c\u01a1 h\u1ecdc tr\u1edf n\u00ean quan tr\u1ecdng h\u01a1n do:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1. Y\u00eau c\u1ea7u v\u1ec1 t\u1ef1 \u0111\u1ed9ng h\u00f3a<\/h3>\n\n\n\n<p>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i ph\u1ee5 thu\u1ed9c r\u1ea5t nhi\u1ec1u v\u00e0o vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer b\u1eb1ng robot. Ngay c\u1ea3 m\u1ed9t sai l\u1ec7ch nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 g\u00e2y ra:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>V\u1ee1 t\u1ea5m wafer<\/li>\n\n\n\n<li>S\u1ef1 sai l\u1ec7ch v\u1ecb tr\u00ed trong c\u00e1c thi\u1ebft b\u1ecb quang kh\u1eafc<\/li>\n\n\n\n<li>M\u1ea5t m\u00e1t n\u0103ng su\u1ea5t trong c\u00e1c c\u00f4ng \u0111o\u1ea1n sau<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2. \u0110\u1ed9 nh\u1ea1y c\u1ea3m v\u1edbi c\u0103ng th\u1eb3ng<\/h3>\n\n\n\n<p>C\u00e1c t\u1ea5m wafer c\u1ee1 l\u1edbn nh\u1ea1y c\u1ea3m h\u01a1n v\u1edbi \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc ph\u00e1t sinh trong qu\u00e1 tr\u00ecnh gia c\u00f4ng m\u00e9p. Vi\u1ec7c t\u1ea1o r\u00e3nh ho\u1eb7c kho\u00e9t l\u1ed7 kh\u00f4ng \u0111\u00fang c\u00e1ch c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c v\u1ebft n\u1ee9t nh\u1ecf<\/li>\n\n\n\n<li>S\u1ee9t m\u1ebb m\u00e9p<\/li>\n\n\n\n<li>Hi\u1ec7n t\u01b0\u1ee3ng bong tr\u00f3c l\u1edbp trong qu\u00e1 tr\u00ecnh thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3. T\u00edch h\u1ee3p quy tr\u00ecnh<\/h3>\n\n\n\n<p>C\u00e1c r\u00e3nh ph\u1ea3i \u0111\u01b0\u1ee3c c\u0103n ch\u1ec9nh ch\u00ednh x\u00e1c v\u1edbi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng c\u0103n ch\u1ec9nh trong c\u00f4ng ngh\u1ec7 in th\u1ea1ch b\u1ea3n<\/li>\n\n\n\n<li>H\u01b0\u1edbng c\u1ee7a d\u1ee5ng c\u1ee5 kh\u1eafc<\/li>\n\n\n\n<li>Khung tham chi\u1ebfu \u0111o l\u01b0\u1eddng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Nh\u1eefng th\u00e1ch th\u1ee9c th\u01b0\u1eddng g\u1eb7p trong qu\u00e1 tr\u00ecnh c\u1eaft r\u00e3nh v\u00e0 khoan l\u1ed7 tr\u00ean t\u1ea5m wafer<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">1. M\u1ebb c\u1ea1nh<\/h3>\n\n\n\n<p>C\u00e1c th\u00f4ng s\u1ed1 gia c\u00f4ng kh\u00f4ng ph\u00f9 h\u1ee3p c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4 \u1edf m\u00e9p t\u1ea5m wafer, l\u00e0m \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 b\u1ec1n c\u01a1 h\u1ecdc.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2. H\u01b0 h\u1ecfng b\u00ean d\u01b0\u1edbi b\u1ec1 m\u1eb7t<\/h3>\n\n\n\n<p>L\u1ef1c c\u01a1 h\u1ecdc qu\u00e1 l\u1edbn c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt ti\u1ec1m \u1ea9n, sau \u0111\u00f3 lan r\u1ed9ng trong qu\u00e1 tr\u00ecnh x\u1eed l\u00fd nhi\u1ec7t.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3. L\u1ed7i c\u0103n ch\u1ec9nh<\/h3>\n\n\n\n<p>Ngay c\u1ea3 nh\u1eefng sai l\u1ec7ch nh\u1ecf v\u1ec1 v\u1ecb tr\u00ed r\u00e3nh c\u0169ng c\u00f3 th\u1ec3 \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn c\u00e1c h\u1ec7 th\u1ed1ng t\u1ef1 \u0111\u1ed9ng h\u00f3a to\u00e0n di\u1ec7n trong nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4. M\u00f2n d\u1ee5ng c\u1ee5<\/h3>\n\n\n\n<p>C\u00e1c d\u1ee5ng c\u1ee5 kim c\u01b0\u01a1ng s\u1ebd b\u1ecb m\u00f2n theo th\u1eddi gian, \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u00f2i h\u1ecfi ph\u1ea3i c\u00f3 quy tr\u00ecnh b\u1ea3o d\u01b0\u1ee1ng ch\u1eb7t ch\u1ebd.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Ki\u1ec3m so\u00e1t ch\u1ea5t l\u01b0\u1ee3ng v\u00e0 c\u00e1c ph\u01b0\u01a1ng ph\u00e1p ki\u1ec3m tra<\/h2>\n\n\n\n<p>\u0110\u1ec3 \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 tin c\u1eady trong s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, c\u00e1c quy tr\u00ecnh c\u1eaft r\u00e3nh v\u00e0 khoan l\u00f5i tr\u00ean t\u1ea5m wafer \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m tra b\u1eb1ng k\u00ednh hi\u1ec3n vi quang h\u1ecdc<\/li>\n\n\n\n<li>K\u1ef9 thu\u1eadt \u0111o l\u01b0\u1eddng b\u1eb1ng qu\u00e9t laser<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng \u0111o c\u1ea1nh<\/li>\n\n\n\n<li>Ph\u00e2n t\u00edch \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t (s\u1eed d\u1ee5ng AFM\/SEM trong c\u00e1c tr\u01b0\u1eddng h\u1ee3p ph\u1ee9c t\u1ea1p)<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c ph\u01b0\u01a1ng ph\u00e1p n\u00e0y \u0111\u1ea3m b\u1ea3o tu\u00e2n th\u1ee7 c\u00e1c ti\u00eau chu\u1ea9n d\u00e0nh cho ng\u00e0nh b\u00e1n d\u1eabn.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">\u1ee8ng d\u1ee5ng trong c\u00f4ng nghi\u1ec7p<\/h2>\n\n\n\n<p>Vi\u1ec7c c\u1eaft r\u00e3nh v\u00e0 kho\u00e9t l\u1ed7 tr\u00ean t\u1ea5m wafer \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ea3n xu\u1ea5t t\u1ea5m wafer silicon 300mm<\/li>\n\n\n\n<li>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip logic v\u00e0 b\u1ed9 nh\u1edb ti\u00ean ti\u1ebfn<\/li>\n\n\n\n<li>Nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n m\u1eabu th\u1eed tr\u00ean t\u1ea5m wafer<\/li>\n\n\n\n<li>V\u1eadt li\u1ec7u b\u00e1n d\u1eabn chuy\u00ean d\u1ee5ng (SiC, ng\u1ecdc b\u00edch, t\u1ea5m k\u00ednh)<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p>C\u1eaft r\u00e3nh v\u00e0 kho\u00e9t l\u1ed7 tr\u00ean t\u1ea5m wafer l\u00e0 nh\u1eefng quy tr\u00ecnh ch\u00ednh x\u00e1c kh\u00f4ng th\u1ec3 thi\u1ebfu trong<mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\"> S\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn 300mm<\/mark>. M\u1eb7c d\u00f9 c\u00f3 v\u1ebb kh\u00f4ng quan tr\u1ecdng b\u1eb1ng c\u00e1c c\u00f4ng \u0111o\u1ea1n quang kh\u1eafc hay l\u1eafng \u0111\u1ecdng, nh\u01b0ng c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u01a1 kh\u00ed n\u00e0y l\u1ea1i \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn \u0111\u1ed9 ch\u00ednh x\u00e1c trong vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer, s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a quy tr\u00ecnh v\u00e0 n\u0103ng su\u1ea5t t\u1ed5ng th\u1ec3.<\/p>\n\n\n\n<p>C\u00f9ng v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n kh\u00f4ng ng\u1eebng c\u1ee7a c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn, nhu c\u1ea7u v\u1ec1 c\u00e1c quy tr\u00ecnh x\u1eed l\u00fd vi m\u1ea1ch si\u00eau ch\u00ednh x\u00e1c s\u1ebd ti\u1ebfp t\u1ee5c gia t\u0103ng, khi\u1ebfn c\u00e1c quy tr\u00ecnh n\u00e0y ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng trong c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip th\u1ebf h\u1ec7 m\u1edbi.<\/p>","protected":false},"excerpt":{"rendered":"<p>In 300mm semiconductor manufacturing, wafer notching and coring are critical mechanical processes used to prepare silicon wafers for downstream fabrication steps. These processes ensure proper wafer orientation, structural integrity, and compatibility with automated handling systems in advanced fabs. As wafer sizes continue to increase and process nodes become more advanced, precision in mechanical wafer shaping [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2467,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[1367,1370,185,1327,1369,1365,1366,1337,1368],"class_list":["post-2466","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-300mm-wafer-manufacturing","tag-precision-wafer-processing","tag-semiconductor-manufacturing-equipment","tag-semiconductor-wafer-processing","tag-silicon-wafer-alignment","tag-wafer-coring","tag-wafer-edge-notching","tag-wafer-handling-systems","tag-wafer-notching"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2466","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2466"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2466\/revisions"}],"predecessor-version":[{"id":2468,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2466\/revisions\/2468"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2467"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2466"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2466"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2466"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}