{"id":2457,"date":"2026-05-11T05:12:17","date_gmt":"2026-05-11T05:12:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2457"},"modified":"2026-05-11T05:12:34","modified_gmt":"2026-05-11T05:12:34","slug":"semiconductor-manufacturing-equipment-ecosystem-and-advanced-fab-layout-architecture","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/semiconductor-manufacturing-equipment-ecosystem-and-advanced-fab-layout-architecture\/","title":{"rendered":"H\u1ec7 sinh th\u00e1i thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn v\u00e0 ki\u1ebfn tr\u00fac b\u1ed1 tr\u00ed nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ti\u00ean ti\u1ebfn"},"content":{"rendered":"<p><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/products\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">Thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/mark><\/a> \u0111\u01b0\u1ee3c coi l\u00e0 \u201cc\u1ed7 m\u00e1y m\u1eb9\u201d c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p m\u1ea1ch t\u00edch h\u1ee3p (IC), gi\u00fap th\u1ef1c hi\u1ec7n to\u00e0n b\u1ed9 qu\u00e1 tr\u00ecnh chuy\u1ec3n \u0111\u1ed5i t\u1eeb nguy\u00ean li\u1ec7u silicon th\u00f4 th\u00e0nh chip th\u00e0nh ph\u1ea9m.<\/p>\n\n\n\n<p>Trong t\u1ea5t c\u1ea3 c\u00e1c ph\u00e2n kh\u00fac c\u1ee7a chu\u1ed7i gi\u00e1 tr\u1ecb ng\u00e0nh b\u00e1n d\u1eabn, thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t t\u1ea5m wafer chi\u1ebfm kho\u1ea3ng 85% t\u1ed5ng v\u1ed1n \u0111\u1ea7u t\u01b0 v\u00e0o thi\u1ebft b\u1ecb, \u0111\u1ed3ng th\u1eddi l\u00e0 l\u0129nh v\u1ef1c c\u00f3 r\u00e0o c\u1ea3n c\u00f4ng ngh\u1ec7 cao nh\u1ea5t v\u00e0 \u0111\u00f2i h\u1ecfi v\u1ed1n \u0111\u1ea7u t\u01b0 l\u1edbn nh\u1ea5t.<\/p>\n\n\n\n<p>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i kh\u00f4ng c\u00f2n \u0111\u01b0\u1ee3c t\u1ed5 ch\u1ee9c theo m\u00f4 h\u00ecnh d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t tuy\u1ebfn t\u00ednh \u0111\u01a1n thu\u1ea7n n\u1eefa. Thay v\u00e0o \u0111\u00f3, ch\u00fang \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf theo m\u00f4 h\u00ecnh <strong>h\u1ec7 th\u1ed1ng nhi\u1ec1u l\u1edbp, m\u00f4-\u0111un v\u00e0 \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a v\u00f2ng l\u1eb7p<\/strong>, \u0111\u01b0\u1ee3c x\u00e2y d\u1ef1ng d\u1ef1a tr\u00ean:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ebfn tr\u00fac h\u01b0\u1edbng theo lu\u1ed3ng quy tr\u00ecnh<\/li>\n\n\n\n<li>Ph\u00e2n v\u00f9ng theo ti\u00eau chu\u1ea9n v\u1ec7 sinh<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng x\u1eed l\u00fd v\u1eadt li\u1ec7u t\u1ef1 \u0111\u1ed9ng<\/li>\n\n\n\n<li>B\u1ed1 tr\u00ed t\u1eadp trung v\u00e0o thi\u1ebft b\u1ecb g\u00e2y t\u1eafc ngh\u1ebdn<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c m\u1ee5c ti\u00eau cu\u1ed1i c\u00f9ng c\u1ee7a thi\u1ebft k\u1ebf nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ed1i \u01b0u h\u00f3a vi\u1ec7c s\u1eed d\u1ee5ng c\u00e1c c\u00f4ng c\u1ee5 gi\u1ea3i quy\u1ebft \u0111i\u1ec3m ngh\u1ebdn<\/li>\n\n\n\n<li>Gi\u1ea3m thi\u1ec3u kho\u1ea3ng c\u00e1ch v\u1eadn chuy\u1ec3n t\u1ea5m wafer v\u00e0 th\u1eddi gian chu k\u1ef3<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m nghi\u00eam ng\u1eb7t<\/li>\n\n\n\n<li>\u0110\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng v\u00e0 kh\u1ea3 n\u0103ng di chuy\u1ec3n n\u00fat trong t\u01b0\u01a1ng lai<\/li>\n<\/ul>\n\n\n\n<p>H\u1ec7 th\u1ed1ng t\u00edch h\u1ee3p n\u00e0y t\u1ea1o n\u00ean m\u1ed9t h\u1ec7 sinh th\u00e1i s\u1ea3n xu\u1ea5t v\u00f4 c\u00f9ng ph\u1ee9c t\u1ea1p nh\u01b0ng hi\u1ec7u qu\u1ea3.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"940\" height=\"622\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1.png\" alt=\"\" class=\"wp-image-2458\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1.png 940w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-300x199.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-768x508.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/640-1-600x397.png 600w\" sizes=\"(max-width: 940px) 100vw, 940px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">1. T\u1ed5ng quan v\u1ec1 h\u1ec7 sinh th\u00e1i thi\u1ebft b\u1ecb b\u00e1n d\u1eabn<\/h2>\n\n\n\n<p>Ng\u00e0nh c\u00f4ng nghi\u1ec7p thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh s\u00e1u ph\u00e2n kh\u00fac ch\u00ednh:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.1 Thi\u1ebft b\u1ecb chu\u1ea9n b\u1ecb v\u1eadt li\u1ec7u b\u00e1n d\u1eabn (Giai \u0111o\u1ea1n \u0111\u1ea7u)<\/h3>\n\n\n\n<p>L\u0129nh v\u1ef1c n\u00e0y h\u1ed7 tr\u1ee3 vi\u1ec7c s\u1ea3n xu\u1ea5t nguy\u00ean li\u1ec7u th\u00f4 cho ng\u00e0nh b\u00e1n d\u1eabn, t\u1ea1o n\u00ean n\u1ec1n t\u1ea3ng cho to\u00e0n b\u1ed9 chu\u1ed7i cung \u1ee9ng.<\/p>\n\n\n\n<p>C\u00e1c quy tr\u00ecnh ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 silic v\u00e0 c\u1eaft l\u00e1t wafer<\/li>\n\n\n\n<li>\u0110\u00e1nh b\u00f3ng v\u00e0 x\u1eed l\u00fd b\u1ec1 m\u1eb7t wafer<\/li>\n\n\n\n<li>T\u1ed5ng h\u1ee3p v\u1eadt li\u1ec7u b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt ch\u00ednh t\u1eadp trung v\u00e0o:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t \u0111\u1ed9 tinh khi\u1ebft c\u1ef1c cao<\/li>\n\n\n\n<li>Gi\u1ea3m thi\u1ec3u khuy\u1ebft t\u1eadt tinh th\u1ec3<\/li>\n\n\n\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u01b0\u1eddng k\u00ednh v\u00e0 \u0111\u1ed9 d\u00e0y<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">1.2 Thi\u1ebft b\u1ecb ki\u1ec3m tra thi\u1ebft k\u1ebf<\/h3>\n\n\n\n<p>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c giai \u0111o\u1ea1n thi\u1ebft k\u1ebf v\u00e0 ki\u1ec3m \u0111\u1ecbnh chip \u0111\u1ec3 \u0111\u1ea3m b\u1ea3o t\u00ednh ch\u00ednh x\u00e1c v\u1ec1 m\u1eb7t \u0111i\u1ec7n v\u00e0 ch\u1ee9c n\u0103ng tr\u01b0\u1edbc khi s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t.<\/p>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng \u0111i\u1ec3n h\u00ecnh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>N\u1ec1n t\u1ea3ng ki\u1ec3m tra t\u00ednh to\u00e0n v\u1eb9n t\u00edn hi\u1ec7u t\u1ed1c \u0111\u1ed9 cao<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng \u0111\u00e1nh gi\u00e1 \u0111\u1eb7c t\u00ednh \u0111i\u1ec7n c\u1ee7a thi\u1ebft b\u1ecb<\/li>\n\n\n\n<li>C\u00e1c thi\u1ebft b\u1ecb ph\u00e2n t\u00edch th\u1eddi gian v\u00e0 c\u00f4ng su\u1ea5t<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c c\u00f4ng c\u1ee5 n\u00e0y \u0111\u1ea3m b\u1ea3o t\u00ednh kh\u1ea3 thi v\u1ec1 m\u1eb7t thi\u1ebft k\u1ebf v\u00e0 kh\u1ea3 n\u0103ng s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.3 Thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t wafer (L\u0129nh v\u1ef1c c\u1ed1t l\u00f5i)<\/h3>\n\n\n\n<p>\u0110\u00e2y l\u00e0 ph\u00e2n kh\u00fac quan tr\u1ecdng nh\u1ea5t v\u00e0 \u0111\u00f2i h\u1ecfi v\u1ed1n \u0111\u1ea7u t\u01b0 l\u1edbn nh\u1ea5t, tr\u1ef1c ti\u1ebfp quy\u1ebft \u0111\u1ecbnh c\u00e1c th\u1ebf h\u1ec7 c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p>C\u00e1c danh m\u1ee5c ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng in th\u1ea1ch b\u1ea3n<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng kh\u1eafc<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng c\u1ea5y ion v\u00e0 \u1ee7 nhi\u1ec7t<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch v\u00e0 \u0111o l\u01b0\u1eddng<\/li>\n<\/ul>\n\n\n\n<p>Ph\u1ea7n n\u00e0y tr\u00ecnh b\u00e0y v\u1ec1 n\u0103ng l\u1ef1c s\u1ea3n xu\u1ea5t cho c\u00e1c quy tr\u00ecnh c\u00f4ng ngh\u1ec7 nh\u01b0 28nm, 7nm v\u00e0 3nm.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.4 Thi\u1ebft b\u1ecb \u0111\u00f3ng g\u00f3i b\u00e1n d\u1eabn<\/h3>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh \u0111\u00f3ng g\u00f3i bi\u1ebfn c\u00e1c t\u1ea5m wafer \u0111\u00e3 gia c\u00f4ng th\u00e0nh c\u00e1c chip ho\u1ea1t \u0111\u1ed9ng v\u00e0 thi\u1ebft l\u1eadp k\u1ebft n\u1ed1i \u0111i\u1ec7n.<\/p>\n\n\n\n<p>C\u00e1c danh m\u1ee5c ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Thi\u1ebft b\u1ecb \u0111\u00f3ng g\u00f3i truy\u1ec1n th\u1ed1ng (n\u1ed1i d\u00e2y, v.v.)<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn (flip-chip, t\u00edch h\u1ee3p 2.5D\/3D)<\/li>\n<\/ul>\n\n\n\n<p>C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn \u0111ang tr\u1edf th\u00e0nh m\u1ed9t ph\u1ea7n m\u1edf r\u1ed9ng quan tr\u1ecdng c\u1ee7a \u0110\u1ecbnh lu\u1eadt Moore.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.5 Thi\u1ebft b\u1ecb ki\u1ec3m tra b\u00e1n d\u1eabn<\/h3>\n\n\n\n<p>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ki\u1ec3m tra cu\u1ed1i c\u00f9ng chip v\u00e0 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng, bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Thi\u1ebft b\u1ecb ki\u1ec3m tra t\u1ef1 \u0111\u1ed9ng (ATE)<\/li>\n\n\n\n<li>Tr\u1ea1m \u0111o<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng ph\u00e2n lo\u1ea1i v\u00e0 \u0111\u00f3ng g\u00f3i<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng n\u00e0y \u0111\u1ea3m b\u1ea3o n\u0103ng su\u1ea5t v\u00e0 \u0111\u1ed9 tin c\u1eady tr\u01b0\u1edbc khi xu\u1ea5t x\u01b0\u1edfng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1.6 Thi\u1ebft b\u1ecb ki\u1ec3m tra v\u00e0 ph\u00e2n t\u00edch ch\u1ea5t b\u00e1n d\u1eabn<\/h3>\n\n\n\n<p>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 gi\u00e1m s\u00e1t quy tr\u00ecnh v\u00e0 ph\u00e2n t\u00edch s\u1ef1 c\u1ed1:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng ki\u1ec3m tra khuy\u1ebft t\u1eadt<\/li>\n\n\n\n<li>C\u00e1c c\u00f4ng c\u1ee5 ph\u00e2n t\u00edch th\u00e0nh ph\u1ea7n v\u1eadt li\u1ec7u v\u00e0 c\u1ea5u tr\u00fac<\/li>\n\n\n\n<li>N\u1ec1n t\u1ea3ng ki\u1ec3m th\u1eed \u0111\u1ed9 tin c\u1eady<\/li>\n<\/ul>\n\n\n\n<p>Ch\u00fang cung c\u1ea5p th\u00f4ng tin ph\u1ea3n h\u1ed3i nh\u1eb1m t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh v\u00e0 n\u00e2ng cao n\u0103ng su\u1ea5t.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. Ki\u1ebfn tr\u00fac b\u1ed1 tr\u00ed nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i<\/h2>\n\n\n\n<p>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i l\u00e0 nh\u1eefng m\u00f4i tr\u01b0\u1eddng \u0111\u01b0\u1ee3c thi\u1ebft k\u1ebf k\u1ef9 thu\u1eadt tinh vi v\u1edbi logic ki\u1ebfn tr\u00fac ch\u1eb7t ch\u1ebd.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.1 B\u1ed1 tr\u00ed d\u1ef1a tr\u00ean quy tr\u00ecnh<\/h3>\n\n\n\n<p>Quy tr\u00ecnh x\u1eed l\u00fd wafer tu\u00e2n theo m\u1ed9t tr\u00ecnh t\u1ef1 nghi\u00eam ng\u1eb7t:<\/p>\n\n\n\n<p>Chu\u1ea9n b\u1ecb v\u1eadt li\u1ec7u \u2192 In quang \u2192 \u0102n m\u00f2n \u2192 Ph\u1ee7 l\u1edbp \u2192 Pha t\u1ea1p \u2192 X\u1eed l\u00fd nhi\u1ec7t \u2192 L\u00e0m s\u1ea1ch \u2192 \u0110o l\u01b0\u1eddng<\/p>\n\n\n\n<p>Vi\u1ec7c b\u1ed1 tr\u00ed thi\u1ebft b\u1ecb ph\u1ea3i tu\u00e2n th\u1ee7 nghi\u00eam ng\u1eb7t quy tr\u00ecnh n\u00e0y \u0111\u1ec3 tr\u00e1nh ph\u1ea3i quay l\u1ea1i c\u00e1c b\u01b0\u1edbc \u0111\u00e3 th\u1ef1c hi\u1ec7n v\u00e0 ng\u0103n ng\u1eeba \u00f4 nhi\u1ec5m.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.2 Chi\u1ebfn l\u01b0\u1ee3c ph\u00e2n v\u00f9ng ph\u00f2ng s\u1ea1ch<\/h3>\n\n\n\n<p>C\u00e1c ph\u00f2ng s\u1ea1ch \u0111\u01b0\u1ee3c chia th\u00e0nh nhi\u1ec1u c\u1ea5p \u0111\u1ed9 s\u1ea1ch kh\u00e1c nhau:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Khu v\u1ef1c si\u00eau s\u1ea1ch (quy tr\u00ecnh in th\u1ea1ch b\u1ea3n v\u00e0 \u0103n m\u00f2n ti\u00ean ti\u1ebfn)<\/li>\n\n\n\n<li>Khu v\u1ef1c c\u00f3 \u0111\u1ed9 s\u1ea1ch cao (ph\u1ee7 l\u1edbp v\u00e0 c\u1ea5y gh\u00e9p)<\/li>\n\n\n\n<li>Khu v\u1ef1c s\u1ea1ch ti\u00eau chu\u1ea9n (c\u00e1c quy tr\u00ecnh h\u1ed7 tr\u1ee3)<\/li>\n<\/ul>\n\n\n\n<p>Lu\u1ed3ng kh\u00f4ng kh\u00ed v\u00e0 s\u1ef1 di chuy\u1ec3n c\u1ee7a nh\u00e2n vi\u00ean \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd theo h\u01b0\u1edbng m\u1ed9t chi\u1ec1u.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.3 H\u1ec7 th\u1ed1ng x\u1eed l\u00fd v\u1eadt li\u1ec7u t\u1ef1 \u0111\u1ed9ng (AMHS)<\/h3>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh v\u1eadn chuy\u1ec3n t\u1ea5m wafer \u0111\u01b0\u1ee3c t\u1ef1 \u0111\u1ed9ng h\u00f3a ho\u00e0n to\u00e0n nh\u1eb1m gi\u1ea3m thi\u1ec3u s\u1ef1 ti\u1ebfp x\u00fac c\u1ee7a con ng\u01b0\u1eddi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng v\u1eadn chuy\u1ec3n b\u1eb1ng t\u1eddi treo (OHT)<\/li>\n\n\n\n<li>Xe t\u1ef1 h\u00e0nh (AGV)<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng l\u01b0u tr\u1eef v\u00e0 l\u1ea5y h\u00e0ng t\u1ef1 \u0111\u1ed9ng (AS\/RS)<\/li>\n<\/ul>\n\n\n\n<p>M\u1ee5c ti\u00eau l\u00e0 \u0111\u1ea3m b\u1ea3o kh\u00f4ng c\u00f3 r\u1ee7i ro \u00f4 nhi\u1ec5m v\u00e0 \u0111\u1ea1t hi\u1ec7u su\u1ea5t x\u1eed l\u00fd cao.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2.4 Thi\u1ebft k\u1ebf b\u1ed1 tr\u00ed t\u1eadp trung v\u00e0o \u0111i\u1ec3m ngh\u1ebdn<\/h3>\n\n\n\n<p>Thi\u1ebft b\u1ecb quan tr\u1ecdng (ch\u1eb3ng h\u1ea1n nh\u01b0 c\u00e1c thi\u1ebft b\u1ecb quang kh\u1eafc ti\u00ean ti\u1ebfn) th\u01b0\u1eddng quy\u1ebft \u0111\u1ecbnh n\u0103ng su\u1ea5t c\u1ee7a nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip.<\/p>\n\n\n\n<p>C\u00e1c nguy\u00ean t\u1eafc ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>B\u1ed1 c\u1ee5c t\u1eadp trung v\u00e0o c\u00e1c c\u00f4ng c\u1ee5 gi\u1ea3i quy\u1ebft \u0111i\u1ec3m ngh\u1ebdn<\/li>\n\n\n\n<li>T\u1ed1i \u01b0u h\u00f3a \u0111\u1ed1i x\u1ee9ng gi\u1eefa h\u01b0\u1edbng l\u00ean v\u00e0 h\u01b0\u1edbng xu\u1ed1ng<\/li>\n\n\n\n<li>T\u1ed1i \u0111a h\u00f3a t\u1ef7 l\u1ec7 s\u1eed d\u1ee5ng d\u1ee5ng c\u1ee5<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2.5 Thi\u1ebft k\u1ebf nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t linh ho\u1ea1t v\u00e0 c\u00f3 kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng<\/h3>\n\n\n\n<p>C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t \u0111\u01b0\u1ee3c x\u00e2y d\u1ef1ng theo m\u00f4-\u0111un ph\u00f2ng s\u1ea1ch nh\u1eb1m m\u1ee5c \u0111\u00edch:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u1edf r\u1ed9ng c\u00f4ng su\u1ea5t<\/li>\n\n\n\n<li>N\u00e2ng c\u1ea5p c\u00f4ng ngh\u1ec7<\/li>\n\n\n\n<li>S\u1ef1 c\u00f9ng t\u1ed3n t\u1ea1i c\u1ee7a nhi\u1ec1u n\u00fat<\/li>\n<\/ul>\n\n\n\n<p>\u0110i\u1ec1u n\u00e0y \u0111\u1ea3m b\u1ea3o t\u00ednh linh ho\u1ea1t v\u00e0 hi\u1ec7u qu\u1ea3 v\u1ec1 chi ph\u00ed trong d\u00e0i h\u1ea1n.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. C\u00e1c c\u00f4ng ngh\u1ec7 thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u1ed1t l\u00f5i<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">3.1 H\u1ec7 th\u1ed1ng quang kh\u1eafc<\/h2>\n\n\n\n<p>Quang kh\u1eafc l\u00e0 c\u00f4ng \u0111o\u1ea1n quan tr\u1ecdng nh\u1ea5t trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, c\u00f3 nhi\u1ec7m v\u1ee5 chuy\u1ec3n c\u00e1c m\u1eabu m\u1ea1ch l\u00ean t\u1ea5m wafer.<\/p>\n\n\n\n<p>C\u00e1c ph\u00e2n lo\u1ea1i c\u00f4ng ngh\u1ec7 bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00f4ng ngh\u1ec7 in kh\u1eafc tia c\u1ef1c t\u00edm c\u1ef1c m\u1ea1nh (EUV) cho quy tr\u00ecnh 7nm v\u00e0 nh\u1ecf h\u01a1n<\/li>\n\n\n\n<li>C\u00f4ng ngh\u1ec7 in kh\u1eafc ng\u00e2m ArF cho c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 28nm\u20137nm<\/li>\n\n\n\n<li>C\u00f4ng ngh\u1ec7 in th\u1ea1ch b\u1ea3n ArF kh\u00f4 cho c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 \u0111\u00e3 ph\u00e1t tri\u1ec3n<\/li>\n\n\n\n<li>K\u1ef9 thu\u1eadt in quang h\u1ecdc i-line cho c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t th\u1ebf h\u1ec7 c\u0169<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng EUV thu\u1ed9c h\u00e0ng nh\u1eefng m\u00e1y m\u00f3c c\u00f4ng nghi\u1ec7p ph\u1ee9c t\u1ea1p nh\u1ea5t t\u1eebng \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o, t\u00edch h\u1ee3p:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ngu\u1ed3n s\u00e1ng EUV n\u0103ng l\u01b0\u1ee3ng cao (b\u01b0\u1edbc s\u00f3ng 13,5 nm)<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng quang h\u1ecdc ph\u1ea3n x\u1ea1 nhi\u1ec1u l\u1edbp<\/li>\n\n\n\n<li>\u0110\u1ecbnh v\u1ecb t\u1ea5m wafer hai giai \u0111o\u1ea1n v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf c\u1ea5p nanomet<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng cao<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.2 H\u1ec7 th\u1ed1ng kh\u1eafc<\/h2>\n\n\n\n<p>Thi\u1ebft b\u1ecb kh\u1eafc h\u00f3a h\u1ecdc lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u m\u1ed9t c\u00e1ch c\u00f3 ch\u1ecdn l\u1ecdc \u0111\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c c\u1ea5u tr\u00fac b\u00f3ng b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p>C\u00e1c lo\u1ea1i ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ph\u01b0\u01a1ng ph\u00e1p \u0103n m\u00f2n b\u1eb1ng plasma k\u1ebft h\u1ee3p \u0111i\u1ec7n dung (CCP)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p \u0103n m\u00f2n b\u1eb1ng plasma k\u1ebft h\u1ee3p c\u1ea3m \u1ee9ng (ICP)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p kh\u1eafc ion ph\u1ea3n \u1ee9ng s\u00e2u (DRIE)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p kh\u1eafc l\u1edbp nguy\u00ean t\u1eed (ALE)<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c xu h\u01b0\u1edbng ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed<\/li>\n\n\n\n<li>Kh\u1ea3 n\u0103ng ch\u1ebf t\u1ea1o c\u1ea5u tr\u00fac c\u00f3 t\u1ef7 l\u1ec7 chi\u1ec1u cao cao<\/li>\n\n\n\n<li>T\u00ednh ch\u1ecdn l\u1ecdc v\u00e0 t\u00ednh \u0111\u1ed3ng \u0111\u1ec1u \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.3 H\u1ec7 th\u1ed1ng l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/h2>\n\n\n\n<p>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 ph\u1ee7 c\u00e1c l\u1edbp ch\u1ee9c n\u0103ng l\u00ean c\u00e1c t\u1ea5m wafer:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed \u0111\u01b0\u1ee3c t\u0103ng c\u01b0\u1eddng b\u1eb1ng plasma (PECVD)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb pha kh\u00ed \u00e1p su\u1ea5t th\u1ea5p (LPCVD)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb plasma m\u1eadt \u0111\u1ed9 cao (HDPCVD)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd (PVD)<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng l\u1edbp nguy\u00ean t\u1eed (ALD)<\/li>\n<\/ul>\n\n\n\n<p>C\u00f4ng ngh\u1ec7 ALD cho ph\u00e9p ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed v\u1edbi \u0111\u1ed9 b\u00e1m d\u00ednh g\u1ea7n nh\u01b0 ho\u00e0n h\u1ea3o.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3.4 C\u1ea5y ion v\u00e0 x\u1eed l\u00fd nhi\u1ec7t<\/h2>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng n\u00e0y l\u00e0m thay \u0111\u1ed5i c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u1ee7a ch\u1ea5t b\u00e1n d\u1eabn:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ph\u01b0\u01a1ng ph\u00e1p c\u1ea5y ion cho ph\u00e9p \u0111\u01b0a c\u00e1c ch\u1ea5t pha t\u1ea1p v\u00e0o v\u1edbi s\u1ef1 ki\u1ec3m so\u00e1t n\u0103ng l\u01b0\u1ee3ng ch\u00ednh x\u00e1c<\/li>\n\n\n\n<li>Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t nhanh (RTA) k\u00edch ho\u1ea1t c\u00e1c ch\u1ea5t pha t\u1ea1p v\u00e0 ph\u1ee5c h\u1ed3i c\u00e1c t\u1ed5n th\u01b0\u01a1ng tinh th\u1ec3<\/li>\n\n\n\n<li>Qu\u00e1 tr\u00ecnh \u1ee7 b\u1eb1ng laser cho ph\u00e9p gia nhi\u1ec7t c\u1ee5c b\u1ed9 v\u1edbi t\u1ed1c \u0111\u1ed9 c\u1ef1c cao cho c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c y\u00eau c\u1ea7u ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t li\u1ec1u l\u01b0\u1ee3ng v\u00e0 n\u0103ng l\u01b0\u1ee3ng ch\u00ednh x\u00e1c<\/li>\n\n\n\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u cao<\/li>\n\n\n\n<li>T\u00e1c \u0111\u1ed9ng t\u1ed1i thi\u1ec3u \u0111\u1ebfn ng\u00e2n s\u00e1ch nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3.5 H\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch v\u00e0 \u0111o l\u01b0\u1eddng<\/h2>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong t\u1ea5t c\u1ea3 c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u1ee7a quy tr\u00ecnh \u0111\u1ec3 lo\u1ea1i b\u1ecf:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u00d4 nhi\u1ec5m h\u1ea1t<\/li>\n\n\n\n<li>Ch\u1ea5t th\u1ea3i h\u1eefu c\u01a1<\/li>\n\n\n\n<li>T\u1ea1p ch\u1ea5t kim lo\u1ea1i<\/li>\n<\/ul>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng \u0111o l\u01b0\u1eddng cung c\u1ea5p kh\u1ea3 n\u0103ng \u0111i\u1ec1u khi\u1ec3n quy tr\u00ecnh theo th\u1eddi gian th\u1ef1c th\u00f4ng qua vi\u1ec7c \u0111o l\u01b0\u1eddng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>K\u00edch th\u01b0\u1edbc quan tr\u1ecdng (CD)<\/li>\n\n\n\n<li>\u0110\u1ed9 d\u00e0y m\u00e0ng<\/li>\n\n\n\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a l\u1edbp ph\u1ee7<\/li>\n\n\n\n<li>M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. Xu h\u01b0\u1edbng ph\u00e1t tri\u1ec3n c\u00f4ng ngh\u1ec7<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">4.1 Chuy\u1ec3n \u0111\u1ed5i sang s\u1ea3n xu\u1ea5t \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed<\/h3>\n\n\n\n<p>Ng\u00e0nh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn \u0111ang ti\u1ebfn g\u1ea7n \u0111\u1ebfn gi\u1edbi h\u1ea1n v\u1eadt l\u00fd, \u0111\u00f2i h\u1ecfi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t quy tr\u00ecnh \u1edf c\u1ea5p \u0111\u1ed9 l\u1edbp nguy\u00ean t\u1eed<\/li>\n\n\n\n<li>M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt c\u1ef1c th\u1ea5p<\/li>\n\n\n\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c d\u01b0\u1edbi nanomet<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.2 T\u00edch h\u1ee3p quy tr\u00ecnh \u0111a v\u1eadt l\u00fd<\/h3>\n\n\n\n<p>Thi\u1ebft b\u1ecb trong t\u01b0\u01a1ng lai s\u1ebd t\u00edch h\u1ee3p:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng quang h\u1ecdc<\/li>\n\n\n\n<li>V\u1eadt l\u00fd plasma<\/li>\n\n\n\n<li>\u0110\u1ed9ng h\u1ecdc nhi\u1ec7t<\/li>\n\n\n\n<li>\u0110i\u1ec1u khi\u1ec3n \u0111i\u1ec7n t\u1eeb<\/li>\n<\/ul>\n\n\n\n<p>\u0111\u1ec3 th\u1ef1c thi quy tr\u00ecnh v\u1edbi \u0111\u1ed9 \u0111\u1ed3ng b\u1ed9 cao.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">4.3 Tr\u00ed tu\u1ec7 s\u1ea3n xu\u1ea5t d\u1ef1a tr\u00ean tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o<\/h3>\n\n\n\n<p>Tr\u00ed tu\u1ec7 nh\u00e2n t\u1ea1o ng\u00e0y c\u00e0ng \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c l\u0129nh v\u1ef1c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh<\/li>\n\n\n\n<li>B\u1ea3o tr\u00ec d\u1ef1 \u0111o\u00e1n<\/li>\n\n\n\n<li>N\u00e2ng cao n\u0103ng su\u1ea5t theo th\u1eddi gian th\u1ef1c<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4.4 C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn v\u00e0 t\u00edch h\u1ee3p h\u1ec7 th\u1ed1ng<\/h3>\n\n\n\n<p>Khi t\u1ed1c \u0111\u1ed9 ph\u00e1t tri\u1ec3n c\u1ee7a \u0110\u1ecbnh lu\u1eadt Moore ch\u1eadm l\u1ea1i, s\u1ef1 \u0111\u1ed5i m\u1edbi \u0111ang chuy\u1ec3n h\u01b0\u1edbng sang:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u00edch h\u1ee3p d\u1ecb th\u1ec3 3D<\/li>\n\n\n\n<li>Ki\u1ebfn tr\u00fac chiplet<\/li>\n\n\n\n<li>\u0110\u00f3ng g\u00f3i c\u1ea5p h\u1ec7 th\u1ed1ng (SiP, x\u1ebfp ch\u1ed3ng 2.5D\/3D)<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p>Thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn l\u00e0 m\u1ed9t trong nh\u1eefng h\u1ec7 th\u1ed1ng c\u00f4ng nghi\u1ec7p ti\u00ean ti\u1ebfn v\u00e0 ph\u1ee9c t\u1ea1p nh\u1ea5t t\u1eebng \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n. H\u1ec7 th\u1ed1ng n\u00e0y t\u00edch h\u1ee3p k\u1ef9 thu\u1eadt ch\u00ednh x\u00e1c, khoa h\u1ecdc v\u1eadt li\u1ec7u, v\u1eadt l\u00fd plasma, quang h\u1ecdc, t\u1ef1 \u0111\u1ed9ng h\u00f3a v\u00e0 tr\u00ed tu\u1ec7 d\u1eef li\u1ec7u v\u00e0o m\u1ed9t h\u1ec7 sinh th\u00e1i s\u1ea3n xu\u1ea5t th\u1ed1ng nh\u1ea5t.<\/p>\n\n\n\n<p>M\u1ed7i thi\u1ebft b\u1ecb trong nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn kh\u00f4ng ph\u1ea3i l\u00e0 m\u1ed9t c\u1ed7 m\u00e1y ho\u1ea1t \u0111\u1ed9ng \u0111\u1ed9c l\u1eadp, m\u00e0 l\u00e0 m\u1ed9t ph\u1ea7n c\u1ee7a m\u1ea1ng l\u01b0\u1edbi quy tr\u00ecnh \u0111\u01b0\u1ee3c \u0111\u1ed3ng b\u1ed9 h\u00f3a ch\u1eb7t ch\u1ebd v\u00e0 ph\u1ee5 thu\u1ed9c l\u1eabn nhau.<\/p>\n\n\n\n<p>Khi c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn ti\u1ebfp t\u1ee5c thu nh\u1ecf \u0111\u1ebfn gi\u1edbi h\u1ea1n v\u1eadt l\u00fd, \u0111\u1ed9 ph\u1ee9c t\u1ea1p, \u0111\u1ed9 ch\u00ednh x\u00e1c v\u00e0 m\u1ee9c \u0111\u1ed9 t\u00edch h\u1ee3p c\u1ee7a thi\u1ebft b\u1ecb s\u1ebd ng\u00e0y c\u00e0ng gia t\u0103ng \u2014 bi\u1ebfn ng\u00e0nh c\u00f4ng nghi\u1ec7p n\u00e0y th\u00e0nh m\u1ed9t tr\u1ee5 c\u1ed9t trong cu\u1ed9c c\u1ea1nh tranh c\u00f4ng ngh\u1ec7 to\u00e0n c\u1ea7u.<\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor manufacturing equipment is widely regarded as the \u201cindustrial mother machine\u201d of the integrated circuit (IC) industry, enabling the entire transformation from raw silicon materials to finished chips. Among all segments of the semiconductor value chain, wafer fabrication equipment accounts for approximately 85% of total equipment investment, representing the highest technological barrier and the most [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2458,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[1354,213,44,187,1343,1334,1340,1355,1361,1331,1344,1363,1335,1349,1353,1345,1341,663,360,658,1338,1359,1347,325,1342,709,411,1333,706,1348,1339,1346,1358,1351,1362,716,715,1357,181,1336,712,1350,347,1352,40,1332,1356,36,214,1360,708,350,707,41,1337],"class_list":["post-2457","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-2-5d-packaging","tag-3d-ic-integration","tag-advanced-packaging","tag-ald","tag-ale-atomic-layer-etching","tag-amhs-automation","tag-arf-immersion-lithography","tag-ate-systems","tag-atomic-scale-manufacturing","tag-bottleneck-equipment","tag-ccp-etching","tag-chiplet-architecture","tag-cleanroom-design","tag-critical-dimension-measurement","tag-defect-inspection","tag-drie","tag-dry-lithography","tag-duv-lithography","tag-etching-systems","tag-euv-lithography","tag-fab-layout","tag-failure-analysis","tag-hdpcvd","tag-heterogeneous-integration","tag-i-line-lithography","tag-ic-manufacturing","tag-icp-etching","tag-integrated-circuit-industry","tag-ion-implantation","tag-laser-annealing","tag-lithography-systems","tag-lpcvd","tag-materials-analysis","tag-metrology-systems","tag-moores-law","tag-pecvd","tag-plasma-etching","tag-probe-station","tag-process-control","tag-process-flow-optimization","tag-pvd","tag-rapid-thermal-annealing","tag-semiconductor-automation","tag-semiconductor-cleaning-systems","tag-semiconductor-equipment","tag-semiconductor-industry-ecosystem","tag-semiconductor-inspection","tag-semiconductor-manufacturing","tag-semiconductor-packaging","tag-semiconductor-scaling","tag-semiconductor-testing","tag-thin-film-deposition","tag-wafer-cleaning","tag-wafer-fabrication","tag-wafer-handling-systems"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2457","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2457"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2457\/revisions"}],"predecessor-version":[{"id":2459,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2457\/revisions\/2459"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2458"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2457"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2457"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2457"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}