{"id":2451,"date":"2026-05-06T05:42:15","date_gmt":"2026-05-06T05:42:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2451"},"modified":"2026-05-06T05:45:22","modified_gmt":"2026-05-06T05:45:22","slug":"sic-industry-chain-key-segments-and-process-characteristics","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/sic-industry-chain-key-segments-and-process-characteristics\/","title":{"rendered":"C\u00e1c ph\u00e2n kh\u00fac ch\u00ednh v\u00e0 \u0111\u1eb7c \u0111i\u1ec3m quy tr\u00ecnh trong chu\u1ed7i ng\u00e0nh SiC (B\u00e0i ph\u00e2n t\u00edch chuy\u00ean s\u00e2u g\u1ed1c)"},"content":{"rendered":"<p>Cacbua silic (SiC) \u0111\u00e3 tr\u1edf th\u00e0nh v\u1eadt li\u1ec7u n\u1ec1n t\u1ea3ng trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t th\u1ebf h\u1ec7 m\u1edbi, \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong xe \u0111i\u1ec7n, b\u1ed9 bi\u1ebfn t\u1ea7n quang \u0111i\u1ec7n v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng \u0111i\u1ec7n \u00e1p cao. Tuy nhi\u00ean, kh\u00e1c v\u1edbi c\u00f4ng ngh\u1ec7 silicon \u0111\u00e3 ph\u00e1t tri\u1ec3n ho\u00e0n thi\u1ec7n, chu\u1ed7i cung \u1ee9ng SiC v\u1eabn c\u00f2n r\u1ea5t ph\u1ee9c t\u1ea1p, \u0111\u00f2i h\u1ecfi v\u1ed1n \u0111\u1ea7u t\u01b0 l\u1edbn v\u00e0 nh\u1ea1y c\u1ea3m v\u1edbi quy tr\u00ecnh s\u1ea3n xu\u1ea5t.<\/p>\n\n\n\n<p>B\u00e0i vi\u1ebft n\u00e0y cung c\u1ea5p m\u1ed9t c\u00e1i nh\u00ecn t\u1ed5ng quan c\u00f3 h\u1ec7 th\u1ed1ng v\u1ec1 chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p SiC, c\u00e1c giai \u0111o\u1ea1n s\u1ea3n xu\u1ea5t ch\u00ednh, nh\u1eefng th\u00e1ch th\u1ee9c trong quy tr\u00ecnh v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng thi\u1ebft b\u1ecb quan tr\u1ecdng, d\u1ef1a tr\u00ean c\u00e1c th\u1ef1c ti\u1ec5n trong l\u0129nh v\u1ef1c k\u1ef9 thu\u1eadt c\u00f4ng nghi\u1ec7p.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">1. T\u1ed5ng quan v\u1ec1 chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p SiC<\/h1>\n\n\n\n<p>Chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p thi\u1ebft b\u1ecb SiC t\u01b0\u01a1ng t\u1ef1 nh\u01b0 ng\u00e0nh b\u00e1n d\u1eabn silicon truy\u1ec1n th\u1ed1ng v\u00e0 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c chia th\u00e0nh n\u0103m ph\u00e2n kh\u00fac ch\u00ednh:<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1. Ch\u1ea5t n\u1ec1n tinh th\u1ec3 \u0111\u01a1n (Ch\u1ea5t n\u1ec1n)<\/h2>\n\n\n\n<p>Bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ph\u01b0\u01a1ng ph\u00e1p t\u1ed5ng h\u1ee3p b\u1ed9t SiC c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao<\/li>\n\n\n\n<li>Ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u01a1n<\/li>\n\n\n\n<li>C\u1eaft, m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 Ch\u1ee9c n\u0103ng: Cung c\u1ea5p v\u1eadt li\u1ec7u t\u1ea5m wafer SiC c\u01a1 b\u1ea3n<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. L\u1edbp epitaksi (Epitaksi)<\/h2>\n\n\n\n<p>M\u1ed9t l\u1edbp SiC ch\u1ea5t l\u01b0\u1ee3ng cao \u0111\u01b0\u1ee3c t\u1ea1o ra tr\u00ean ch\u1ea5t n\u1ec1n.<\/p>\n\n\n\n<p>C\u00e1c t\u00ednh n\u0103ng ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 d\u00e0y quy\u1ebft \u0111\u1ecbnh m\u1ee9c \u0111i\u1ec7n \u00e1p \u0111\u1ecbnh m\u1ee9c<\/li>\n\n\n\n<li>~1 \u03bcm \u2248 kh\u1ea3 n\u0103ng ch\u1ecbu \u0111i\u1ec7n \u00e1p \u0111\u1ee9t m\u1ea1ch 100 V<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 Ch\u1ee9c n\u0103ng: X\u00e1c \u0111\u1ecbnh gi\u1edbi h\u1ea1n t\u1ed1i \u0111a v\u1ec1 hi\u1ec7u su\u1ea5t \u0111i\u1ec7n c\u1ee7a thi\u1ebft b\u1ecb<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb<\/h2>\n\n\n\n<p>Th\u01b0\u1eddng \u00e1p d\u1ee5ng m\u00f4 h\u00ecnh IDM (Nh\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb t\u00edch h\u1ee3p).<\/p>\n\n\n\n<p>C\u00e1c quy tr\u00ecnh ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Quang kh\u1eafc<\/li>\n\n\n\n<li>C\u1ea5y ion<\/li>\n\n\n\n<li>K\u1ef9 thu\u1eadt kh\u1eafc axit<\/li>\n\n\n\n<li>Qu\u00e1 tr\u00ecnh oxy h\u00f3a<\/li>\n\n\n\n<li>M\u1ea1 kim lo\u1ea1i<\/li>\n\n\n\n<li>\u1ee6<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 Ch\u1ee9c n\u0103ng: \u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t nh\u01b0 MOSFET SiC<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u0110\u00f3ng g\u00f3i (Bao b\u1ecdc)<\/h2>\n\n\n\n<p>C\u00e1c l\u0129nh v\u1ef1c tr\u1ecdng t\u00e2m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ea3n nhi\u1ec7t<\/li>\n\n\n\n<li>K\u1ebft n\u1ed1i \u0111i\u1ec7n<\/li>\n\n\n\n<li>N\u00e2ng cao \u0111\u1ed9 tin c\u1eady<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i trong n\u01b0\u1edbc \u0111\u00e3 t\u01b0\u01a1ng \u0111\u1ed1i ph\u00e1t tri\u1ec3n<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">5. M\u00f4-\u0111un &amp; \u1ee8ng d\u1ee5ng<\/h2>\n\n\n\n<p>C\u00e1c \u1ee9ng d\u1ee5ng ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Xe \u0111i\u1ec7n<\/li>\n\n\n\n<li>Bi\u1ebfn t\u1ea7n quang \u0111i\u1ec7n<\/li>\n\n\n\n<li>B\u1ed9 ngu\u1ed3n c\u00f4ng nghi\u1ec7p<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng l\u01b0\u1edbi \u0111i\u1ec7n cao \u00e1p<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">2. T\u1ea1i sao c\u00f4ng ngh\u1ec7 ch\u1ebf t\u1ea1o SiC l\u1ea1i kh\u00f3 kh\u0103n \u0111\u1ebfn v\u1eady<\/h1>\n\n\n\n<p>V\u1eadt li\u1ec7u SiC c\u00f3 ba t\u00ednh ch\u1ea5t v\u1eadt l\u00fd \u0111\u1eb7c bi\u1ec7t:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 c\u1ee9ng c\u1ef1c cao<\/li>\n\n\n\n<li>Nhi\u1ec7t \u0111\u1ed9 n\u00f3ng ch\u1ea3y\/th\u0103ng hoa c\u1ef1c cao (&gt;2000\u00b0C)<\/li>\n\n\n\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc cao<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng \u0111\u1eb7c t\u00ednh n\u00e0y khi\u1ebfn vi\u1ec7c gia c\u00f4ng tr\u1edf n\u00ean kh\u00f3 kh\u0103n h\u01a1n \u0111\u00e1ng k\u1ec3 so v\u1edbi silicon.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1. Ph\u00e2n l\u1eadp tinh th\u1ec3 \u0111\u01a1n (ch\u1ee7 y\u1ebfu l\u00e0 ph\u01b0\u01a1ng ph\u00e1p PVT)<\/h2>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"768\" height=\"768\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1.webp\" alt=\"\" class=\"wp-image-2452\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1.webp 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/05\/SiC-Single-Crystal-Growth-Furnace-for-6-Inch-and-8-Inch-Crystals-Using-PVT-Lely-and-TSSG-Methods-3-768x768-1-100x100.webp 100w\" sizes=\"(max-width: 768px) 100vw, 768px\" \/><\/figure>\n\n\n\n<p>C\u00e1c ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>V\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT)<\/li>\n\n\n\n<li>CVD nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>S\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a gi\u1ea3i ph\u00e1p (m\u1ee9c \u0111\u1ed9 \u00e1p d\u1ee5ng c\u00f2n h\u1ea1n ch\u1ebf)<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m ch\u00ednh:<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Nhi\u1ec7t \u0111\u1ed9 l\u00ean \u0111\u1ebfn kho\u1ea3ng 2500\u00b0C<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng \u00e1p su\u1ea5t c\u1ef1c th\u1ea5p<\/li>\n\n\n\n<li>T\u1ed1c \u0111\u1ed9 t\u0103ng tr\u01b0\u1edfng c\u1ef1c k\u1ef3 ch\u1eadm<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Nh\u1eefng th\u00e1ch th\u1ee9c ch\u00ednh:<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh tr\u01b0\u1eddng nhi\u1ec7t<\/li>\n\n\n\n<li>\u0110\u1ed9 b\u1ec1n c\u1ee7a v\u1eadt li\u1ec7u l\u00f2 nung<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt (s\u1ef1 d\u1ecbch chuy\u1ec3n, c\u00e1c \u1ed1ng vi m\u00f4)<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 K\u1ebft qu\u1ea3: T\u1ed1c \u0111\u1ed9 s\u1ea3n xu\u1ea5t ch\u1eadm v\u00e0 chi ph\u00ed s\u1ea3n xu\u1ea5t cao<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. Ch\u1ebf bi\u1ebfn t\u1ea5m wafer: X\u1eed l\u00fd v\u1eadt li\u1ec7u c\u1ef1c k\u1ef3 c\u1ee9ng<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">C\u1eaft b\u1eb1ng d\u00e2y kim lo\u1ea1i<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u00e1y c\u01b0a d\u00e2y kim c\u01b0\u01a1ng \u0111a d\u00e2y l\u00e0 thi\u1ebft b\u1ecb ti\u00eau chu\u1ea9n<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Hi\u1ec7u su\u1ea5t c\u1eaft th\u1ea5p<\/li>\n\n\n\n<li>S\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4<\/li>\n\n\n\n<li>M\u1ee9c \u0111\u1ed9 m\u00f2n d\u1ee5ng c\u1ee5 cao<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">M\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng<\/h3>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Vi\u1ec7c ki\u1ec3m so\u00e1t qu\u00e1 tr\u00ecnh gia c\u00f4ng v\u1eadt li\u1ec7u kh\u00f3<\/li>\n\n\n\n<li>T\u00ecnh tr\u1ea1ng cong v\u00eanh nghi\u00eam tr\u1ecdng c\u1ee7a t\u1ea5m wafer<\/li>\n\n\n\n<li>Nguy c\u01a1 cao g\u00e2y v\u1ee1 t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 V\u1ea5n \u0111\u1ec1 ch\u00ednh: Hi\u1ec7u su\u1ea5t gia c\u00f4ng c\u01a1 kh\u00ed c\u1ef1c k\u1ef3 th\u1ea5p<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. Ph\u1ea3n \u1ee9ng epitxy: Kho\u1ea3ng \u0111i\u1ec1u ki\u1ec7n qu\u00e1 tr\u00ecnh h\u1eb9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n<p>Nhi\u1ec7t \u0111\u1ed9 trung b\u00ecnh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u00ean \u0111\u1ebfn 1.700\u00b0C<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kho\u1ea3ng dung sai quy tr\u00ecnh c\u1ef1c k\u1ef3 h\u1eb9p<\/li>\n\n\n\n<li>\u0110\u1ed9 nh\u1ea1y d\u00f2ng kh\u00ed<\/li>\n\n\n\n<li>Kh\u00f3 kh\u0103n trong vi\u1ec7c ki\u1ec3m so\u00e1t \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. S\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb: H\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng cao v\u00e0 nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">C\u00e1c thi\u1ebft b\u1ecb ch\u00ednh bao g\u1ed3m:<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>H\u1ec7 th\u1ed1ng c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>L\u00f2 \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>L\u00f2 oxy h\u00f3a nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng kh\u1eafc kh\u00f4<\/li>\n\n\n\n<li>C\u00e1c c\u00f4ng c\u1ee5 l\u00e0m s\u1ea1ch v\u00e0 m\u1ea1 kim lo\u1ea1i<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">3. Thi\u1ebft b\u1ecb ch\u00ednh trong s\u1ea3n xu\u1ea5t SiC (h\u01a1n 20 h\u1ec7 th\u1ed1ng)<\/h1>\n\n\n\n<p>5<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">1.<mark style=\"background-color:rgba(0, 0, 0, 0);color:#fcb900\" class=\"has-inline-color\"> <\/mark><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/san-pham\/sic-single-crystal-growth-furnace-for-6-inch-and-8-inch-crystals-using-pvt-lely-and-tssg-methods\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#9b51e0\" class=\"has-inline-color\">L\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC<\/mark><\/a><\/h2>\n\n\n\n<p>Y\u00eau c\u1ea7u:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kh\u1ea3 n\u0103ng ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 \u22652500\u00b0C<\/li>\n\n\n\n<li>H\u00e0n ch\u00e2n kh\u00f4ng si\u00eau cao<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t tr\u01b0\u1eddng nhi\u1ec7t ch\u00ednh x\u00e1c<\/li>\n<\/ul>\n\n\n\n<p>\ud83d\udc49 V\u1ec1 c\u01a1 b\u1ea3n, \u0111\u00e2y l\u00e0 m\u1ed9t h\u1ec7 th\u1ed1ng k\u1ef9 thu\u1eadt v\u1eadt li\u1ec7u ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2. M\u00e1y c\u1eaft kim c\u01b0\u01a1ng nhi\u1ec1u d\u00e2y<\/h2>\n\n\n\n<p>Ch\u1ee9c n\u0103ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1eaft l\u00e1t wafer t\u1eeb th\u1ecfi SiC<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t \u0111\u1ed9 c\u0103ng d\u00e2y<\/li>\n\n\n\n<li>Gi\u1ea3m rung<\/li>\n\n\n\n<li>Qu\u1ea3n l\u00fd m\u00e0i m\u00f2n do v\u1eadt li\u1ec7u m\u00e0i m\u00f2n<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. M\u00e0i c\u1ea1nh t\u1ea5m wafer (v\u00e1t c\u1ea1nh)<\/h2>\n\n\n\n<p>Ch\u1ee9c n\u0103ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Gi\u1ea3m \u1ee9ng su\u1ea5t \u1edf c\u00e1c m\u00e9p t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110i\u1ec1u khi\u1ec3n v\u1edbi \u0111\u1ed9 ch\u00ednh x\u00e1c \u1edf m\u1ee9c micromet<\/li>\n\n\n\n<li>Ph\u00f2ng ng\u1eeba n\u1ee9t n\u1ebb<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. H\u1ec7 th\u1ed1ng m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng<\/h2>\n\n\n\n<p>C\u00e1c lo\u1ea1i:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Nghi\u1ec1n th\u00f4 (\u0111\u00e3 t\u01b0\u01a1ng \u0111\u1ed1i ph\u00e1t tri\u1ec3n trong n\u01b0\u1edbc)<\/li>\n\n\n\n<li>\u0110\u00e1nh b\u00f3ng tinh (v\u1eabn ph\u1ea3i ph\u1ee5 thu\u1ed9c v\u00e0o nh\u1eadp kh\u1ea9u)<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t h\u01b0 h\u1ecfng b\u00ean d\u01b0\u1edbi b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u0111\u1ed9 ph\u1eb3ng c\u1ee7a t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5. L\u00f2 ph\u1ea3n \u1ee9ng epitactic<\/h2>\n\n\n\n<p>C\u00e1c nh\u00e0 cung c\u1ea5p l\u1edbn tr\u00ean th\u1ebf gi\u1edbi:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Aixtron (\u0110\u1ee9c)<\/li>\n\n\n\n<li>LPE (\u00dd)<\/li>\n\n\n\n<li>Nuflare (Nh\u1eadt B\u1ea3n)<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a kh\u00ed \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t \u0111\u1ed9 ch\u00ednh x\u00e1c v\u1ec1 \u0111\u1ed9 d\u00e0y<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">6. M\u00e1y c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n<p>\u00dd ngh\u0129a:<br>\ud83d\udc49 Thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i \u201cc\u01a1 b\u1ea3n\u201d cho c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t SiC<\/p>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>B\u00e0n \u0111\u1ebf wafer ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u1ea7m trong \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">7. L\u00f2 \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao (l\u00ean \u0111\u1ebfn 2000\u00b0C)<\/h2>\n\n\n\n<p>Ch\u1ee9c n\u0103ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>K\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p<\/li>\n\n\n\n<li>Ph\u1ee5c h\u1ed3i h\u01b0 h\u1ecfng m\u1ea1ng tinh th\u1ec3<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t \u0111\u1ed9 (\u00b15\u00b0C)<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t \u1ee9ng su\u1ea5t nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">8. L\u00f2 oxy h\u00f3a nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n<p>\u0110i\u1ec1u ki\u1ec7n:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>1.300\u20131.400\u00b0C<\/li>\n\n\n\n<li>H\u00f3a h\u1ecdc kh\u00ed ph\u1ee9c t\u1ea1p (O\u2082 \/ DCE \/ NO)<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n<\/li>\n\n\n\n<li>Thi\u1ebft k\u1ebf bu\u1ed3ng si\u00eau s\u1ea1ch<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">9. Thi\u1ebft b\u1ecb v\u1ec7 sinh<\/h2>\n\n\n\n<p>Y\u00eau c\u1ea7u ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t h\u1ea1t \u1edf c\u1ea5p \u0111\u1ed9 nanomet (v\u1edbi kh\u1ea3 n\u0103ng x\u1eed l\u00fd h\u1ea1t c\u00f3 k\u00edch th\u01b0\u1edbc xu\u1ed1ng \u0111\u1ebfn kho\u1ea3ng 45 nm)<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t \u00f4 nhi\u1ec5m b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>Kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch \u0111a ti\u1ebfn tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">4. Nh\u1eefng th\u00e1ch th\u1ee9c c\u01a1 b\u1ea3n c\u1ee7a chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p SiC<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">1. \u0110i\u1ec1u ki\u1ec7n v\u1eadt l\u00fd kh\u1eafc nghi\u1ec7t<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Quy tr\u00ecnh x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao (2000\u20132500\u00b0C)<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng v\u00e0 \u0103n m\u00f2n<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">2. \u0110\u1ed9 c\u1ee9ng v\u1eadt li\u1ec7u cao<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u1ed1c \u0111\u1ed9 gia c\u00f4ng c\u1ef1c k\u1ef3 ch\u1eadm<\/li>\n\n\n\n<li>M\u1ee9c \u0111\u1ed9 m\u00f2n d\u1ee5ng c\u1ee5 cao v\u00e0 chi ph\u00ed cao<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">3. Kh\u00f3 kh\u0103n trong vi\u1ec7c ki\u1ec3m so\u00e1t n\u0103ng su\u1ea5t<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 lan truy\u1ec1n l\u1ed7i qua c\u00e1c quy tr\u00ecnh<\/li>\n\n\n\n<li>T\u00e1c \u0111\u1ed9ng t\u00edch l\u0169y c\u1ee7a s\u00e1t th\u01b0\u01a1ng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4. Kho\u1ea3ng c\u00e1ch trong vi\u1ec7c \u0111\u1ecba ph\u01b0\u01a1ng h\u00f3a thi\u1ebft b\u1ecb<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u1ed9t s\u1ed1 thi\u1ebft b\u1ecb \u0111\u00e3 \u0111\u01b0\u1ee3c b\u1ea3n \u0111\u1ecba h\u00f3a<\/li>\n\n\n\n<li>C\u00e1c thi\u1ebft b\u1ecb \u00e9p l\u1edbp v\u00e0 thi\u1ebft b\u1ecb ch\u00ednh x\u00e1c cao c\u1ea5p v\u1eabn ph\u1ea3i ph\u1ee5 thu\u1ed9c v\u00e0o h\u00e0ng nh\u1eadp kh\u1ea9u<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h1>\n\n\n\n<p>Kh\u00f3 kh\u0103n trong s\u1ea3n xu\u1ea5t SiC kh\u00f4ng xu\u1ea5t ph\u00e1t t\u1eeb m\u1ed9t \u0111i\u1ec3m ngh\u1ebdn duy nh\u1ea5t, m\u00e0 l\u00e0 do th\u1ef1c t\u1ebf r\u1eb1ng:<\/p>\n\n\n\n<p>\ud83d\udc49 M\u1ed7i b\u01b0\u1edbc\u2014t\u1eeb qu\u00e1 tr\u00ecnh nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u1ebfn ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb\u2014\u0111\u1ec1u \u0111\u1ea9y c\u1ea3 v\u1eadt l\u00fd v\u1eadt li\u1ec7u l\u1eabn k\u1ef9 thu\u1eadt thi\u1ebft b\u1ecb \u0111\u1ebfn gi\u1edbi h\u1ea1n c\u1ee7a ch\u00fang.<\/p>\n\n\n\n<p>Kh\u1ea3 n\u0103ng c\u1ea1nh tranh trong t\u01b0\u01a1ng lai c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p SiC s\u1ebd ph\u1ee5 thu\u1ed9c v\u00e0o ba b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 quan tr\u1ecdng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00f4ng ngh\u1ec7 ph\u00e1t tri\u1ec3n tinh th\u1ec3 \u1ed5n \u0111\u1ecbnh h\u01a1n<\/li>\n\n\n\n<li>C\u00e1c quy tr\u00ecnh epitaxy c\u00f3 \u0111\u1ed9 \u0111\u1ed3ng nh\u1ea5t cao h\u01a1n<\/li>\n\n\n\n<li>H\u1ec7 sinh th\u00e1i thi\u1ebft b\u1ecb c\u00f3 chi ph\u00ed th\u1ea5p h\u01a1n v\u00e0 \u0111\u01b0\u1ee3c b\u1ea3n \u0111\u1ecba h\u00f3a ho\u00e0n to\u00e0n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Silicon Carbide (SiC) has become a cornerstone material in next-generation power electronics, widely used in electric vehicles, photovoltaic inverters, and high-voltage power systems. However, unlike mature silicon technology, the SiC industry chain is still highly complex, capital-intensive, and process-sensitive. This article provides a structured overview of the SiC industry chain, key manufacturing stages, process challenges, [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2452,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[1319,221,1321,1323,185,1329,1327,368,1325,1326,1324,1330,255,1328,188],"class_list":["post-2451","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-diamond-wire-saw-cutting","tag-high-temperature-annealing","tag-ion-implantation-sic","tag-power-electronics-semiconductors","tag-semiconductor-manufacturing-equipment","tag-semiconductor-oxidation-process","tag-semiconductor-wafer-processing","tag-sic-crystal-growth","tag-sic-device-fabrication","tag-sic-epitaxy-process","tag-sic-industry-chain","tag-sic-wafer-substrate","tag-silicon-carbide-manufacturing","tag-wafer-grinding-and-polishing","tag-wide-bandgap-semiconductors"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2451","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2451"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2451\/revisions"}],"predecessor-version":[{"id":2453,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2451\/revisions\/2453"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2452"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2451"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2451"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2451"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}