{"id":2449,"date":"2026-05-06T05:10:20","date_gmt":"2026-05-06T05:10:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2449"},"modified":"2026-05-06T05:12:07","modified_gmt":"2026-05-06T05:12:07","slug":"why-silicon-carbide-sic-chips-are-so-difficult-to-manufacture","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/why-silicon-carbide-sic-chips-are-so-difficult-to-manufacture\/","title":{"rendered":"T\u1ea1i sao chip cacbua silic (SiC) l\u1ea1i kh\u00f3 s\u1ea3n xu\u1ea5t \u0111\u1ebfn v\u1eady: Ph\u00e2n t\u00edch s\u00e2u qua h\u01a1n 20 c\u00e2u h\u1ecfi v\u00e0 tr\u1ea3 l\u1eddi v\u1ec1 thi\u1ebft b\u1ecb"},"content":{"rendered":"<p>Cacbua silic (SiC) \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u quan tr\u1ecdng nh\u1ea5t trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t th\u1ebf h\u1ec7 m\u1edbi. So v\u1edbi silicon truy\u1ec1n th\u1ed1ng, v\u1eadt li\u1ec7u n\u00e0y cho ph\u00e9p ch\u1ebf t\u1ea1o c\u00e1c thi\u1ebft b\u1ecb c\u00f3 \u0111i\u1ec7n \u00e1p cao h\u01a1n, ch\u1ecbu nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n v\u00e0 hi\u1ec7u su\u1ea5t cao h\u01a1n. Tuy nhi\u00ean, \u0111\u1eb1ng sau nh\u1eefng \u01b0u \u0111i\u1ec3m n\u00e0y l\u00e0 m\u1ed9t th\u1ef1c t\u1ebf kh\u1eafc nghi\u1ec7t: vi\u1ec7c s\u1ea3n xu\u1ea5t chip SiC tr\u00ean quy m\u00f4 l\u1edbn l\u00e0 v\u00f4 c\u00f9ng kh\u00f3 kh\u0103n v\u00e0 t\u1ed1n k\u00e9m.<\/p>\n\n\n\n<p>Kh\u00e1c v\u1edbi quy tr\u00ecnh ch\u1ebf t\u1ea1o silicon truy\u1ec1n th\u1ed1ng, quy tr\u00ecnh s\u1ea3n xu\u1ea5t SiC \u0111\u00f2i h\u1ecfi nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao, v\u1eadt li\u1ec7u si\u00eau c\u1ee9ng v\u00e0 c\u00e1c th\u00f4ng s\u1ed1 quy tr\u00ecnh r\u1ea5t ch\u1eb7t ch\u1ebd. Ngay c\u1ea3 nh\u1eefng bi\u1ebfn \u0111\u1ed9ng nh\u1ecf nh\u1ea5t trong thi\u1ebft b\u1ecb c\u0169ng c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn khuy\u1ebft t\u1eadt tinh th\u1ec3, v\u1ee1 t\u1ea5m wafer ho\u1eb7c gi\u1ea3m n\u0103ng su\u1ea5t.<\/p>\n\n\n\n<p>B\u00e0i vi\u1ebft n\u00e0y ph\u00e2n t\u00edch chi ti\u1ebft to\u00e0n b\u1ed9 chu\u1ed7i s\u1ea3n xu\u1ea5t SiC th\u00f4ng qua m\u1ed9t khung h\u1ecfi \u0111\u00e1p c\u00f3 c\u1ea5u tr\u00fac bao g\u1ed3m h\u01a1n 20 lo\u1ea1i thi\u1ebft b\u1ecb, \u0111\u1ed3ng th\u1eddi gi\u1ea3i th\u00edch l\u00fd do t\u1ea1i sao vi\u1ec7c ch\u1ebf t\u1ea1o c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn \u0111\u00e1ng tin c\u1eady t\u1eeb v\u1eadt li\u1ec7u n\u00e0y l\u1ea1i g\u1eb7p nhi\u1ec1u th\u00e1ch th\u1ee9c \u0111\u1ebfn v\u1eady.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/san-pham\/sic-crystal-growth-furnace-pvt-lpe-ht-cvd-for-high-quality-silicon-carbide-single-crystal-production\/\"><img fetchpriority=\"high\" decoding=\"async\" width=\"750\" height=\"648\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2.webp\" alt=\"\" class=\"wp-image-2288\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2.webp 750w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-300x259.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-14x12.webp 14w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method2-600x518.webp 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/><\/a><\/figure>\n\n\n\n<h1 class=\"wp-block-heading\">1. T\u1ed5ng quan v\u1ec1 quy tr\u00ecnh s\u1ea3n xu\u1ea5t SiC: Hai giai \u0111o\u1ea1n ch\u00ednh<\/h1>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb SiC th\u01b0\u1eddng \u0111\u01b0\u1ee3c chia th\u00e0nh hai giai \u0111o\u1ea1n ch\u00ednh:<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>S\u1ef1 ph\u00e1t tri\u1ec3n tinh th\u1ec3 v\u00e0 gia c\u00f4ng t\u1ea5m wafer<\/strong><\/li>\n\n\n\n<li><strong>S\u1ea3n xu\u1ea5t v\u00e0 \u0111\u00f3ng g\u00f3i thi\u1ebft b\u1ecb<\/strong><\/li>\n<\/ol>\n\n\n\n<p>M\u1ed7i giai \u0111o\u1ea1n \u0111\u1ec1u \u0111\u00f2i h\u1ecfi ph\u1ea3i s\u1eed d\u1ee5ng c\u00e1c thi\u1ebft b\u1ecb chuy\u00ean d\u1ee5ng cao, ho\u1ea1t \u0111\u1ed9ng trong \u0111i\u1ec1u ki\u1ec7n v\u1eadt l\u00fd kh\u1eafc nghi\u1ec7t.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">2. T\u1ea1i sao vi\u1ec7c nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u1ea1i kh\u00f3 \u0111\u1ebfn v\u1eady<\/h1>\n\n\n\n<p>Kh\u00f4ng gi\u1ed1ng nh\u01b0 silicon, SiC kh\u00f4ng th\u1ec3 \u0111\u01b0\u1ee3c t\u1ea1o ra t\u1eeb qu\u00e1 tr\u00ecnh n\u1ea5u ch\u1ea3y \u0111\u01a1n thu\u1ea7n. Qu\u00e1 tr\u00ecnh n\u00e0y \u0111\u00f2i h\u1ecfi ph\u1ea3i s\u1eed d\u1ee5ng ph\u01b0\u01a1ng ph\u00e1p t\u1ea1o tinh th\u1ec3 d\u1ef1a tr\u00ean qu\u00e1 tr\u00ecnh th\u0103ng hoa \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao (&gt;2000\u00b0C). \u0110i\u1ec1u n\u00e0y \u0111\u1eb7t ra nhi\u1ec1u th\u00e1ch th\u1ee9c v\u1ec1 m\u1eb7t k\u1ef9 thu\u1eadt.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 1: C\u00e1c h\u1ec7 th\u1ed1ng thi\u1ebft b\u1ecb ch\u00ednh d\u00f9ng \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u00e0 g\u00ec?<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u00f2 t\u1ed5ng h\u1ee3p b\u1ed9t SiC<\/li>\n\n\n\n<li><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/danh-muc-san-pham\/crystal-growth-furnace\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">L\u00f2 nung tinh th\u1ec3 \u0111\u01a1n SiC<\/mark><\/a><\/li>\n\n\n\n<li>M\u00e1y c\u1eaft kim c\u01b0\u01a1ng nhi\u1ec1u d\u00e2y<\/li>\n\n\n\n<li>M\u00e1y m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 2: T\u1ea1i sao vi\u1ec7c t\u1ed5ng h\u1ee3p b\u1ed9t SiC l\u1ea1i kh\u00f3 \u0111\u1ebfn v\u1eady?<\/h2>\n\n\n\n<p>C\u00e1c th\u00e1ch th\u1ee9c ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao<\/li>\n\n\n\n<li>\u0110\u1ed9 tin c\u1eady c\u1ee7a ph\u01b0\u01a1ng ph\u00e1p \u0111\u00f3ng g\u00f3i ch\u00e2n kh\u00f4ng<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ch\u00ednh x\u00e1c<\/li>\n\n\n\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc<\/li>\n<\/ul>\n\n\n\n<p>Ngay c\u1ea3 nh\u1eefng dao \u0111\u1ed9ng nh\u1ecf v\u1ec1 nhi\u1ec7t \u0111\u1ed9 ho\u1eb7c \u00e1p su\u1ea5t c\u0169ng c\u00f3 th\u1ec3 l\u00e0m thay \u0111\u1ed5i \u0111\u1ed9 tinh khi\u1ebft c\u1ee7a b\u1ed9t, t\u1eeb \u0111\u00f3 \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 3: T\u1ea1i sao c\u00f4ng ngh\u1ec7 l\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC l\u1ea1i ph\u1ee9c t\u1ea1p \u0111\u1ebfn v\u1eady?<\/h2>\n\n\n\n<p>Nh\u1eefng kh\u00f3 kh\u0103n ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Thi\u1ebft k\u1ebf l\u00f2 nhi\u1ec7t \u0111\u1ed9 cao c\u1ee1 l\u1edbn<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 tr\u00ean 2000\u00b0C<\/li>\n\n\n\n<li>L\u1ef1a ch\u1ecdn v\u1eadt li\u1ec7u l\u00f2 nung (h\u1ec7 th\u1ed1ng d\u1ef1a tr\u00ean than ch\u00ec)<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t l\u01b0u l\u01b0\u1ee3ng kh\u00ed ch\u00ednh x\u00e1c<\/li>\n\n\n\n<li>Qu\u1ea3n l\u00fd t\u00ednh \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a tr\u01b0\u1eddng nhi\u1ec7t<\/li>\n<\/ul>\n\n\n\n<p>B\u1ea5t k\u1ef3 s\u1ef1 b\u1ea5t \u1ed5n n\u00e0o c\u0169ng d\u1eabn \u0111\u1ebfn:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c khuy\u1ebft t\u1eadt \u0111a tinh th\u1ec3<\/li>\n\n\n\n<li>S\u1ef1 tr\u1eadt kh\u1edbp<\/li>\n\n\n\n<li>M\u1ea5t n\u0103ng su\u1ea5t trong c\u00e1c t\u1ea5m wafer<\/li>\n<\/ul>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h1 class=\"wp-block-heading\">3. C\u1eaft v\u00e0 gia c\u00f4ng t\u1ea5m wafer: Gi\u1edbi h\u1ea1n c\u01a1 h\u1ecdc c\u1ee7a SiC<\/h1>\n\n\n\n<p>8<\/p>\n\n\n\n<p>SiC l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u b\u00e1n d\u1eabn c\u1ee9ng nh\u1ea5t, ch\u1ec9 \u0111\u1ee9ng sau kim c\u01b0\u01a1ng v\u1ec1 \u0111\u1ed9 c\u1ee9ng. \u0110i\u1ec1u n\u00e0y khi\u1ebfn vi\u1ec7c gia c\u00f4ng c\u01a1 h\u1ecdc tr\u1edf n\u00ean v\u00f4 c\u00f9ng kh\u00f3 kh\u0103n.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 4: T\u1ea1i sao vi\u1ec7c c\u1eaft b\u1eb1ng d\u00e2y kim c\u01b0\u01a1ng l\u1ea1i kh\u00f3 \u0111\u1ed1i v\u1edbi SiC?<\/h2>\n\n\n\n<p>C\u00e1c v\u1ea5n \u0111\u1ec1 k\u1ef9 thu\u1eadt ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 m\u1ea5t \u1ed5n \u0111\u1ecbnh c\u1ee7a l\u1ef1c c\u0103ng d\u00e2y<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t rung \u0111\u1ed9ng khi c\u1eaft<\/li>\n\n\n\n<li>M\u00e0i m\u00f2n do h\u1ea1t b\u00f9n<\/li>\n\n\n\n<li>S\u1ef1 t\u00edch t\u1ee5 nhi\u1ec7t trong qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t<\/li>\n<\/ul>\n\n\n\n<p>N\u1ebfu kh\u00f4ng \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t \u0111\u00fang c\u00e1ch:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u00ecnh tr\u1ea1ng s\u1ee9t m\u00e9p gia t\u0103ng<\/li>\n\n\n\n<li>H\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4 b\u00ean trong<\/li>\n\n\n\n<li>\u0110\u1ed9 b\u1ec1n c\u1ee7a t\u1ea5m wafer gi\u1ea3m<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 5: \u0110i\u1ec1u g\u00ec khi\u1ebfn vi\u1ec7c m\u00e0i SiC tr\u1edf n\u00ean kh\u00f3 kh\u0103n?<\/h2>\n\n\n\n<p>C\u00e1c th\u00e1ch th\u1ee9c bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 c\u1ee9ng d\u1eabn \u0111\u1ebfn t\u1ed1c \u0111\u1ed9 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u ch\u1eadm<\/li>\n\n\n\n<li>S\u1ef1 h\u00ecnh th\u00e0nh l\u1edbp h\u01b0 h\u1ecfng b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>S\u1ef1 t\u00edch t\u1ee5 \u1ee9ng su\u1ea5t d\u01b0<\/li>\n\n\n\n<li>T\u00ecnh tr\u1ea1ng cong v\u00eanh nghi\u00eam tr\u1ecdng c\u1ee7a t\u1ea5m wafer sau khi m\u00e0i m\u1ecfng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 6: T\u1ea1i sao qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng SiC l\u1ea1i ph\u1ee9c t\u1ea1p h\u01a1n so v\u1edbi silicon?<\/h2>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 c\u1ee9ng cao d\u1eabn \u0111\u1ebfn s\u1ef1 ph\u00e2n b\u1ed1 \u00e1p su\u1ea5t kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u<\/li>\n\n\n\n<li>Bi\u1ebfn d\u1ea1ng nhi\u1ec7t c\u1ee7a \u0111\u1ec7m \u0111\u00e1nh b\u00f3ng<\/li>\n\n\n\n<li>Kh\u00f3 kh\u0103n trong vi\u1ec7c \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 ph\u1eb3ng \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed<\/li>\n\n\n\n<li>Vi\u1ec7c lo\u1ea1i b\u1ecf c\u00e1c h\u01b0 h\u1ecfng b\u00ean d\u01b0\u1edbi b\u1ec1 m\u1eb7t kh\u00f3 h\u01a1n<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">4. Ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb: \u0110i\u1ec1u ki\u1ec7n nhi\u1ec7t \u0111\u1ed9 v\u00e0 plasma c\u1ef1c \u0111oan<\/h1>\n\n\n\n<p>8<\/p>\n\n\n\n<p>Sau khi chu\u1ea9n b\u1ecb t\u1ea5m wafer, qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb SiC l\u1ea1i mang \u0111\u1ebfn m\u1ed9t m\u1ee9c \u0111\u1ed9 ph\u1ee9c t\u1ea1p m\u1edbi: <strong>m\u00f4i tr\u01b0\u1eddng x\u1eed l\u00fd nhi\u1ec7t v\u00e0 plasma kh\u1eafc nghi\u1ec7t<\/strong>.<\/p>\n\n\n\n<hr class=\"wp-block-separator has-alpha-channel-opacity\"\/>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 7: Nh\u1eefng thi\u1ebft b\u1ecb n\u00e0o \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb SiC?<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u00f2 ph\u1ea3n \u1ee9ng epitaxy SiC<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng kh\u1eafc kh\u00f4<\/li>\n\n\n\n<li>M\u00e1y c\u1ea5y ion nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>L\u00f2 \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>L\u00f2 oxy h\u00f3a<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng m\u00e0i m\u1eb7t sau<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 8: T\u1ea1i sao qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 SiC l\u1ea1i kh\u00f3 kh\u0103n?<\/h2>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c ch\u00ednh:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u00f4i tr\u01b0\u1eddng nu\u00f4i c\u1ea5y \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>S\u1ef1 b\u1ea5t \u1ed5n \u0111\u1ecbnh c\u1ee7a d\u00f2ng kh\u00ed<\/li>\n\n\n\n<li>Ki\u1ec3m so\u00e1t khuy\u1ebft t\u1eadt b\u1ec1 m\u1eb7t<\/li>\n\n\n\n<li>\u0110\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y tr\u00ean c\u00e1c t\u1ea5m wafer c\u00f3 \u0111\u01b0\u1eddng k\u00ednh 200mm<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 9: \u0110i\u1ec1u g\u00ec khi\u1ebfn qu\u00e1 tr\u00ecnh kh\u1eafc plasma tr\u00ean SiC tr\u1edf n\u00ean kh\u00f3 kh\u0103n?<\/h2>\n\n\n\n<p>C\u00e1c v\u1ea5n \u0111\u1ec1 bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kh\u1ea3 n\u0103ng ch\u1ed1ng h\u00f3a ch\u1ea5t cao c\u1ee7a SiC<\/li>\n\n\n\n<li>S\u1ef1 \u0103n m\u00f2n bu\u1ed3ng do plasma c\u00f3 t\u00ednh \u0103n m\u00f2n<\/li>\n\n\n\n<li>T\u1ed1c \u0111\u1ed9 \u0103n m\u00f2n th\u1ea5p so v\u1edbi silicon<\/li>\n\n\n\n<li>S\u1ef1 m\u1ea5t \u1ed5n \u0111\u1ecbnh c\u1ee7a qu\u00e1 tr\u00ecnh trong m\u00f4i tr\u01b0\u1eddng plasma n\u0103ng l\u01b0\u1ee3ng cao<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 10: T\u1ea1i sao vi\u1ec7c c\u1ea5y ion v\u00e0o SiC l\u1ea1i kh\u00f3 h\u01a1n?<\/h2>\n\n\n\n<p>SiC y\u00eau c\u1ea7u:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1ea5y gh\u00e9p \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n<li>Qu\u00e1 tr\u00ecnh \u1ee7 k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p s\u00e2u<\/li>\n<\/ul>\n\n\n\n<p>Nh\u1eefng th\u00e1ch th\u1ee9c:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Hi\u1ec7u su\u1ea5t k\u00edch ho\u1ea1t ch\u1ea5t pha t\u1ea1p th\u1ea5p<\/li>\n\n\n\n<li>Vi\u1ec7c kh\u1eafc ph\u1ee5c h\u01b0 h\u1ecfng tinh th\u1ec3 l\u00e0 r\u1ea5t kh\u00f3 kh\u0103n<\/li>\n\n\n\n<li>Thi\u1ebft b\u1ecb ph\u1ea3i ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c chu k\u1ef3 nhi\u1ec7t \u0111\u1ed9 kh\u1eafc nghi\u1ec7t<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 11: T\u1ea1i sao qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t \u0111\u1ed9 cao l\u1ea1i r\u1ea5t quan tr\u1ecdng?<\/h2>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t ph\u1ea3i kh\u1eafc ph\u1ee5c \u0111\u01b0\u1ee3c t\u1ed5n th\u01b0\u01a1ng do c\u1ea5y gh\u00e9p, nh\u01b0ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Y\u00eau c\u1ea7u \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao<\/li>\n\n\n\n<li>Qu\u00e1 tr\u00ecnh thay \u0111\u1ed5i nhi\u1ec7t \u0111\u1ed9 nhanh c\u00f3 th\u1ec3 g\u00e2y n\u1ee9t t\u1ea5m wafer<\/li>\n\n\n\n<li>Vi\u1ec7c gia nhi\u1ec7t \u0111\u1ed3ng \u0111\u1ec1u tr\u00ean c\u00e1c t\u1ea5m wafer l\u1edbn l\u00e0 m\u1ed9t th\u00e1ch th\u1ee9c<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">5. X\u1eed l\u00fd ph\u00eda m\u00e1y ch\u1ee7: N\u0103ng su\u1ea5t quy\u1ebft \u0111\u1ecbnh l\u1ee3i nhu\u1eadn<\/h1>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 12: T\u1ea1i sao vi\u1ec7c l\u00e0m m\u1ecfng m\u1eb7t sau l\u1ea1i kh\u00f3 kh\u0103n?<\/h2>\n\n\n\n<p>C\u00e1c v\u1ea5n \u0111\u1ec1 bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ki\u1ec3m so\u00e1t \u0111\u1ed9 d\u00e0y \u1edf m\u1ee9c micromet<\/li>\n\n\n\n<li>S\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4<\/li>\n\n\n\n<li>S\u1ef1 cong v\u00eanh c\u1ee7a t\u1ea5m wafer do c\u0103ng th\u1eb3ng g\u00e2y ra<\/li>\n\n\n\n<li>Vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer d\u1ec5 v\u1ee1 sau khi m\u00e0i m\u1ecfng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 13: T\u1ea1i sao hi\u1ec7n t\u01b0\u1ee3ng cong v\u00eanh c\u1ee7a t\u1ea5m wafer SiC l\u1ea1i x\u1ea3y ra th\u01b0\u1eddng xuy\u00ean h\u01a1n so v\u1edbi t\u1ea5m wafer silicon?<\/h2>\n\n\n\n<p>B\u1edfi v\u00ec:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u00c1p l\u1ef1c n\u1ed9i t\u1ea1i cao h\u01a1n<\/li>\n\n\n\n<li>\u0110\u1ed9 c\u1ee9ng m\u1ea1ng tinh th\u1ec3 cao h\u01a1n<\/li>\n\n\n\n<li>Vi\u1ec7c lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u trong qu\u00e1 tr\u00ecnh m\u00e0i<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">C\u00e2u h\u1ecfi 14: T\u1ea1i sao vi\u1ec7c x\u1eed l\u00fd t\u1ea5m wafer l\u1ea1i c\u1ef1c k\u1ef3 nguy hi\u1ec3m?<\/h2>\n\n\n\n<p>C\u00e1c t\u1ea5m wafer SiC m\u1ecfng l\u00e0:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>D\u1ec5 v\u1ee1<\/li>\n\n\n\n<li>D\u1ec5 b\u1ecb \u1ea3nh h\u01b0\u1edfng b\u1edfi c\u0103ng th\u1eb3ng<\/li>\n\n\n\n<li>D\u1ec5 b\u1ecb g\u00e3y trong qu\u00e1 tr\u00ecnh chuy\u1ec3n giao t\u1ef1 \u0111\u1ed9ng<\/li>\n<\/ul>\n\n\n\n<p>Ngay c\u1ea3 nh\u1eefng rung \u0111\u1ed9ng nh\u1ecf nh\u1ea5t c\u0169ng c\u00f3 th\u1ec3 d\u1eabn \u0111\u1ebfn t\u1ed5n th\u1ea5t n\u0103ng su\u1ea5t nghi\u00eam tr\u1ecdng.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">6. Th\u00e1ch th\u1ee9c \u1edf c\u1ea5p \u0111\u1ed9 h\u1ec7 th\u1ed1ng: H\u01a1n 20 thi\u1ebft b\u1ecb ph\u1ea3i ho\u1ea1t \u0111\u1ed9ng \u0111\u1ed3ng b\u1ed9<\/h1>\n\n\n\n<p>M\u1ed9t d\u00e2y chuy\u1ec1n s\u1ea3n xu\u1ea5t SiC ho\u00e0n ch\u1ec9nh \u0111\u00f2i h\u1ecfi h\u01a1n 20 lo\u1ea1i thi\u1ebft b\u1ecb ch\u00ednh x\u00e1c ph\u1ea3i ho\u1ea1t \u0111\u1ed9ng \u0111\u1ed3ng b\u1ed9:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u00f2 nu\u00f4i c\u1ea5y tinh th\u1ec3<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng c\u01b0a d\u00e2y<\/li>\n\n\n\n<li>M\u00e1y m\u00e0i<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng \u0111\u00e1nh b\u00f3ng<\/li>\n\n\n\n<li>L\u00f2 ph\u1ea3n \u1ee9ng epitaxy<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng kh\u1eafc<\/li>\n\n\n\n<li>C\u00e1c thi\u1ebft b\u1ecb c\u1ea5y ion<\/li>\n\n\n\n<li>L\u00f2 \u1ee7<\/li>\n\n\n\n<li>L\u00f2 oxy h\u00f3a<\/li>\n\n\n\n<li>H\u1ec7 th\u1ed1ng m\u00e0i m\u1eb7t sau<\/li>\n<\/ul>\n\n\n\n<p>Th\u00e1ch th\u1ee9c th\u1ef1c s\u1ef1 kh\u00f4ng ch\u1ec9 n\u1eb1m \u1edf t\u1eebng m\u00e1y m\u00f3c ri\u00eang l\u1ebb, m\u00e0 c\u00f2n \u1edf s\u1ef1 \u1ed5n \u0111\u1ecbnh c\u1ee7a vi\u1ec7c t\u00edch h\u1ee3p quy tr\u00ecnh tr\u00ean to\u00e0n b\u1ed9 chu\u1ed7i.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">7. T\u1ea1i sao vi\u1ec7c s\u1ea3n xu\u1ea5t SiC l\u1ea1i t\u1ed1n k\u00e9m \u0111\u1ebfn v\u1eady<\/h1>\n\n\n\n<p>C\u00e1c y\u1ebfu t\u1ed1 ch\u00ednh \u1ea3nh h\u01b0\u1edfng \u0111\u1ebfn chi ph\u00ed:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">1. Y\u00eau c\u1ea7u v\u1ec1 thi\u1ebft b\u1ecb c\u1ef1c k\u1ef3 kh\u1eaft khe<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Nhi\u1ec7t \u0111\u1ed9 cao (h\u1ec7 th\u1ed1ng tr\u00ean 2000\u00b0C)<\/li>\n\n\n\n<li>M\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng cao<\/li>\n\n\n\n<li>V\u1eadt li\u1ec7u ch\u1ed1ng \u0103n m\u00f2n<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">2. T\u1ef7 l\u1ec7 thu ho\u1ea1ch th\u1ea5p<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 nh\u1ea1y v\u1edbi khuy\u1ebft t\u1eadt<\/li>\n\n\n\n<li>Nguy c\u01a1 v\u1ee1 t\u1ea5m wafer<\/li>\n\n\n\n<li>S\u1ef1 bi\u1ebfn \u0111\u1ed9ng trong quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">3. T\u1ed1c \u0111\u1ed9 x\u1eed l\u00fd ch\u1eadm<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>V\u1eadt li\u1ec7u c\u1ee9ng l\u00e0m ch\u1eadm t\u1ea5t c\u1ea3 c\u00e1c c\u00f4ng \u0111o\u1ea1n c\u01a1 kh\u00ed<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">4. M\u1ee9c \u0111\u1ed9 \u0111\u1ea7u t\u01b0 v\u00e0o nghi\u00ean c\u1ee9u v\u00e0 ph\u00e1t tri\u1ec3n cao<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1ea7n ph\u1ea3i li\u00ean t\u1ee5c t\u1ed1i \u01b0u h\u00f3a quy tr\u00ecnh<\/li>\n<\/ul>\n\n\n\n<h1 class=\"wp-block-heading\">K\u1ebft lu\u1eadn<\/h1>\n\n\n\n<p>Vi\u1ec7c s\u1ea3n xu\u1ea5t chip SiC g\u1eb7p nhi\u1ec1u kh\u00f3 kh\u0103n kh\u00f4ng ph\u1ea3i do m\u1ed9t \u0111i\u1ec3m ngh\u1ebdn duy nh\u1ea5t, m\u00e0 b\u1edfi v\u00ec m\u1ed7i c\u00f4ng \u0111o\u1ea1n \u2014 t\u1eeb qu\u00e1 tr\u00ecnh nu\u00f4i tinh th\u1ec3 \u0111\u1ebfn c\u00f4ng \u0111o\u1ea1n m\u00e0i m\u1ecfng t\u1ea5m wafer cu\u1ed1i c\u00f9ng \u2014 \u0111\u1ec1u \u0111\u1ea9y c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn hi\u1ec7n t\u1ea1i \u0111\u1ebfn gi\u1edbi h\u1ea1n v\u1ec1 m\u1eb7t v\u1eadt l\u00fd v\u00e0 k\u1ef9 thu\u1eadt.<\/p>\n\n\n\n<p>S\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 c\u1ef1c cao<\/li>\n\n\n\n<li>H\u00e0nh vi c\u1ee7a v\u1eadt li\u1ec7u si\u00eau c\u1ee9ng<\/li>\n\n\n\n<li>d\u1ea3i dung sai ch\u1eb7t ch\u1ebd<\/li>\n\n\n\n<li>\u0111\u1ed9 ph\u1ee9c t\u1ea1p c\u1ee7a quy tr\u00ecnh nhi\u1ec1u b\u01b0\u1edbc<\/li>\n<\/ul>\n\n\n\n<p>khi\u1ebfn SiC tr\u1edf th\u00e0nh m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u b\u00e1n d\u1eabn kh\u00f3 s\u1ea3n xu\u1ea5t h\u00e0ng lo\u1ea1t nh\u1ea5t hi\u1ec7n nay.<\/p>\n\n\n\n<p>Tuy nhi\u00ean, c\u00f9ng v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00f4ng ngh\u1ec7 thi\u1ebft b\u1ecb \u2014 \u0111\u1eb7c bi\u1ec7t l\u00e0 trong l\u0129nh v\u1ef1c ki\u1ec3m so\u00e1t qu\u00e1 tr\u00ecnh k\u1ebft tinh, gia c\u00f4ng h\u1ed7 tr\u1ee3 b\u1eb1ng laser v\u00e0 c\u00e1c h\u1ec7 th\u1ed1ng \u0103n m\u00f2n ti\u00ean ti\u1ebfn \u2014 SiC \u0111ang d\u1ea7n tr\u1edf n\u00ean d\u1ec5 m\u1edf r\u1ed9ng quy m\u00f4 h\u01a1n, t\u1ea1o \u0111i\u1ec1u ki\u1ec7n cho vi\u1ec7c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i v\u1eadt li\u1ec7u n\u00e0y trong xe \u0111i\u1ec7n, c\u00e1c h\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o v\u00e0 thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t cao \u00e1p.<\/p>","protected":false},"excerpt":{"rendered":"<p>Silicon carbide (SiC) has become one of the most important materials in next-generation power electronics. It enables higher voltage, higher temperature, and higher efficiency devices compared with traditional silicon. However, behind these advantages lies a harsh reality: SiC chips are extremely difficult and expensive to manufacture at scale. Unlike conventional silicon processing, SiC manufacturing involves [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[1319,1317,1321,1323,1318,368,867,1313,1320,1322],"class_list":["post-2449","post","type-post","status-publish","format-standard","hentry","category-industry-news","tag-diamond-wire-saw-cutting","tag-ilicon-carbide-manufacturing","tag-ion-implantation-sic","tag-power-electronics-semiconductors","tag-semiconductor-fabrication-equipment","tag-sic-crystal-growth","tag-sic-wafer-processing","tag-wafer-dicing-process","tag-wafer-polishing-process","tag-wafer-warpage"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2449","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2449"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2449\/revisions"}],"predecessor-version":[{"id":2450,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2449\/revisions\/2450"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2449"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2449"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2449"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}