{"id":2440,"date":"2026-04-30T02:35:44","date_gmt":"2026-04-30T02:35:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2440"},"modified":"2026-04-30T02:48:31","modified_gmt":"2026-04-30T02:48:31","slug":"why-cvd-silicon-carbide-is-a-key-material-in-advanced-engineering","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/why-cvd-silicon-carbide-is-a-key-material-in-advanced-engineering\/","title":{"rendered":"T\u1ea1i sao cacbua silic (CVD) l\u1ea1i l\u00e0 v\u1eadt li\u1ec7u then ch\u1ed1t trong k\u1ef9 thu\u1eadt ti\u00ean ti\u1ebfn: C\u1ea5u tr\u00fac, t\u00ednh ch\u1ea5t v\u00e0 hi\u1ec7u su\u1ea5t"},"content":{"rendered":"

Cacbua silic (SiC) l\u00e0 m\u1ed9t lo\u1ea1i g\u1ed1m hi\u1ec7u su\u1ea5t cao \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong ch\u1ebf bi\u1ebfn b\u00e1n d\u1eabn, quang h\u1ecdc v\u00e0 c\u00e1c m\u00f4i tr\u01b0\u1eddng c\u00f4ng nghi\u1ec7p kh\u1eafc nghi\u1ec7t. Trong s\u1ed1 c\u00e1c d\u1ea1ng kh\u00e1c nhau c\u1ee7a n\u00f3, cacbua silic CVD (CVD SiC) \u2014 \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t th\u00f4ng qua ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc \u2014 th\u01b0\u1eddng \u0111\u01b0\u1ee3c coi l\u00e0 m\u1ed9t trong nh\u1eefng v\u1eadt li\u1ec7u g\u1ed1m ti\u00ean ti\u1ebfn nh\u1ea5t nh\u1edd \u0111\u1ed9 tinh khi\u1ebft, m\u1eadt \u0111\u1ed9 v\u00e0 t\u00ednh \u0111\u1ed3ng nh\u1ea5t c\u1ea5u tr\u00fac v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n\n\n\n

B\u00e0i vi\u1ebft n\u00e0y ph\u00e2n t\u00edch c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt l\u00fd, c\u1ea5u tr\u00fac vi m\u00f4 v\u00e0 nh\u1eefng \u01b0u \u0111i\u1ec3m \u1ee9ng d\u1ee5ng c\u1ee7a SiC CVD, d\u1ef1a tr\u00ean d\u1eef li\u1ec7u so s\u00e1nh v\u1edbi c\u00e1c v\u1eadt li\u1ec7u th\u00f4ng d\u1ee5ng kh\u00e1c.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1. T\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u: M\u1ed9t g\u00f3c nh\u00ecn so s\u00e1nh<\/h2>\n\n\n\n

D\u1ef1a tr\u00ean c\u00e1c d\u1eef li\u1ec7u k\u1ef9 thu\u1eadt ti\u00eau chu\u1ea9n, SiC CVD th\u1ec3 hi\u1ec7n hi\u1ec7u su\u1ea5t v\u01b0\u1ee3t tr\u1ed9i tr\u00ean nhi\u1ec1u th\u00f4ng s\u1ed1 quan tr\u1ecdng:<\/p>\n\n\n\n

B\u1ea3ng 1. So s\u00e1nh c\u00e1c t\u00ednh ch\u1ea5t v\u1eadt li\u1ec7u \u0111i\u1ec3n h\u00ecnh<\/h3>\n\n\n\n
Ch\u1ea5t li\u1ec7u<\/th>M\u1eadt \u0111\u1ed9 (g\/cm\u00b3)<\/th>\u0110\u1ed9 d\u1eabn nhi\u1ec7t (W\/m\u00b7K)<\/th>Nhi\u1ec7t dung ri\u00eang (J\/kg\u00b7K)<\/th>M\u00f4 \u0111un \u0111\u00e0n h\u1ed3i (GPa)<\/th>CTE (\u00d710\u207b\u2076 \/K)<\/th>B\u1ec1 m\u1eb7t ho\u00e0n thi\u1ec7n<\/th><\/tr><\/thead>
Beryli (Be)<\/td>~1.85<\/td>~216<\/td>~1880<\/td>~303<\/td>~11.4<\/td>\u226410 \u00c5 RMS<\/td><\/tr>
K\u00ednh ULE<\/td>~2.20<\/td>~1.30<\/td>~708<\/td>~67<\/td>~0.03<\/td>\u22643 \u00c5 RMS<\/td><\/tr>
SiC \u0111a tinh th\u1ec3<\/td>~2.30<\/td>~150<\/td>~920<\/td>~110<\/td>~3.8<\/td>\u22645 \u00c5 RMS<\/td><\/tr>
Th\u1ea1ch anh<\/td>~2.20<\/td>~1.40<\/td>~1210<\/td>~70<\/td>~0.5<\/td>\u22643 \u00c5 RMS<\/td><\/tr>
CVD SiC<\/strong><\/td>~3.21<\/strong><\/td>~300<\/strong><\/td>~640<\/strong><\/td>~466<\/strong><\/td>~4.0<\/strong><\/td>\u22643 \u00c5 RMS<\/strong><\/td><\/tr>
SiC li\u00ean k\u1ebft ph\u1ea3n \u1ee9ng<\/td>~3.10<\/td>120\u2013170<\/td>\u2014<\/td>~391<\/td>~4.3<\/td>\u226520 \u00c5 RMS<\/td><\/tr>
SiC \u00e9p n\u00f3ng<\/td>~3.20<\/td>50\u2013120<\/td>\u2014<\/td>~451<\/td>~4.6<\/td>\u226550 \u00c5 RMS<\/td><\/tr>
SiC nung k\u1ebft<\/td>~3.10<\/td>50\u2013120<\/td>\u2014<\/td>~408<\/td>~4.5<\/td>\u2265100 \u00c5 RMS<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

Nh\u1eefng nh\u1eadn \u0111\u1ecbnh ch\u00ednh<\/h2>\n\n\n\n

1. \u0110\u1ed9 d\u1eabn nhi\u1ec7t cao<\/h3>\n\n\n\n

CVD SiC (~300 W\/m\u00b7K) c\u00f3 hi\u1ec7u su\u1ea5t v\u01b0\u1ee3t tr\u1ed9i \u0111\u00e1ng k\u1ec3 so v\u1edbi c\u00e1c v\u1eadt li\u1ec7u th\u1ea1ch anh v\u00e0 th\u1ee7y tinh.<\/p>\n\n\n\n

H\u1eadu qu\u1ea3:<\/strong>
T\u1ea3n nhi\u1ec7t hi\u1ec7u qu\u1ea3 v\u00e0 gi\u1ea3m \u0111\u1ed9 ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9 trong c\u00e1c h\u1ec7 th\u1ed1ng nhi\u1ec7t \u0111\u1ed9 cao.<\/p>\n\n\n\n

2. M\u00f4 \u0111un \u0111\u00e0n h\u1ed3i cao<\/h3>\n\n\n\n

V\u1edbi \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t qu\u00e1 450 GPa, SiC s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD mang l\u1ea1i \u0111\u1ed9 c\u1ee9ng v\u01b0\u1ee3t tr\u1ed9i.<\/p>\n\n\n\n

H\u1eadu qu\u1ea3:<\/strong>
Gi\u1eef \u0111\u01b0\u1ee3c \u0111\u1ed9 \u1ed5n \u0111\u1ecbnh k\u00edch th\u01b0\u1edbc khi ch\u1ecbu t\u00e1c \u0111\u1ed9ng c\u1ee7a nhi\u1ec7t v\u00e0 l\u1ef1c c\u01a1 h\u1ecdc.<\/p>\n\n\n\n

3. \u0110\u1ed9 gi\u00e3n n\u1edf nhi\u1ec7t th\u1ea5p<\/h3>\n\n\n\n

H\u1ec7 s\u1ed1 gi\u00e3n n\u1edf nhi\u1ec7t (CTE) t\u01b0\u01a1ng \u0111\u1ed1i th\u1ea5p gi\u00fap \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 bi\u1ebfn d\u1ea1ng \u1edf m\u1ee9c t\u1ed1i thi\u1ec3u.<\/p>\n\n\n\n

H\u1eadu qu\u1ea3:<\/strong>
R\u1ea5t quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c cao nh\u01b0 ch\u1ebf t\u1ea1o ch\u1ea5t b\u00e1n d\u1eabn v\u00e0 quang h\u1ecdc.<\/p>\n\n\n\n

4. B\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 m\u1ecbn m\u00e0ng<\/h3>\n\n\n\n

\u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t c\u00f3 th\u1ec3 \u0111\u1ea1t \u0111\u1ebfn m\u1ee9c angstrom (\u22643 \u00c5 RMS).<\/p>\n\n\n\n

H\u1eadu qu\u1ea3:<\/strong>
Gi\u1ea3m thi\u1ec3u \u00f4 nhi\u1ec5m do h\u1ea1t b\u1ee5i trong c\u00e1c m\u00f4i tr\u01b0\u1eddng si\u00eau s\u1ea1ch.<\/p>\n\n\n\n

2. C\u1ea5u tr\u00fac vi m\u00f4: \u01afu \u0111i\u1ec3m c\u1ee7a quy tr\u00ecnh CVD<\/h2>\n\n\n\n

SiC CVD \u0111\u01b0\u1ee3c h\u00ecnh th\u00e0nh th\u00f4ng qua c\u00e1c ph\u1ea3n \u1ee9ng \u1edf pha kh\u00ed, t\u1ea1o ra m\u1ed9t ch\u1ea5t r\u1eafn c\u00f3 \u0111\u1ed9 \u0111\u1eb7c ho\u00e0n to\u00e0n v\u00e0 kh\u00f4ng c\u00f3 l\u1ed7 r\u1ed7ng.<\/p>\n\n\n\n

C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m c\u1ea5u tr\u00fac ch\u00ednh:<\/h3>\n\n\n\n
    \n
  • \u0110\u1ed9 tinh khi\u1ebft l\u00ean \u0111\u1ebfn ~99,9991%<\/li>\n\n\n\n
  • M\u1eadt \u0111\u1ed9 g\u1ea7n b\u1eb1ng gi\u00e1 tr\u1ecb l\u00fd thuy\u1ebft<\/li>\n\n\n\n
  • Kh\u00f4ng c\u00f3 pha th\u1ee9 c\u1ea5p t\u1ea1i ranh gi\u1edbi h\u1ea1t<\/li>\n\n\n\n
  • C\u1ea5u tr\u00fac tinh th\u1ec3 \u03b2-SiC h\u00ecnh l\u1eadp ph\u01b0\u01a1ng (t\u00ednh ch\u1ea5t \u0111\u1ed3ng nh\u1ea5t)<\/li>\n<\/ul>\n\n\n\n

    \u00dd ngh\u0129a khoa h\u1ecdc:<\/strong><\/p>\n\n\n\n

    Kh\u00f4ng gi\u1ed1ng nh\u01b0 g\u1ed1m s\u1ee9 d\u1ea1ng b\u1ed9t, SiC CVD kh\u00f4ng c\u00f3 c\u00e1c khuy\u1ebft t\u1eadt b\u00ean trong nh\u01b0 l\u1ed7 r\u1ed7ng hay ch\u1ea5t k\u1ebft d\u00ednh c\u00f2n s\u00f3t l\u1ea1i, v\u1ed1n th\u01b0\u1eddng th\u1ea5y trong c\u00e1c v\u1eadt li\u1ec7u nung k\u1ebft. \u0110i\u1ec1u n\u00e0y d\u1eabn \u0111\u1ebfn:<\/p>\n\n\n\n

      \n
    • T\u00ednh \u1ed5n \u0111\u1ecbnh h\u00f3a h\u1ecdc \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n\n\n\n
    • Gi\u1ea3m l\u01b0\u1ee3ng h\u1ea1t sinh ra<\/li>\n\n\n\n
    • Kh\u1ea3 n\u0103ng t\u00e1i hi\u1ec7n \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n<\/ul>\n\n\n\n

      3. Hi\u1ec7u su\u1ea5t trong \u0111i\u1ec1u ki\u1ec7n kh\u1eafc nghi\u1ec7t<\/h2>\n\n\n\n

      3.1 \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/h2>\n\n\n\n

      C\u00e1c linh ki\u1ec7n SiC CVD c\u00f3 th\u1ec3 ho\u1ea1t \u0111\u1ed9ng trong m\u00f4i tr\u01b0\u1eddng c\u00f3 nhi\u1ec7t \u0111\u1ed9 v\u01b0\u1ee3t qu\u00e1 1.500\u00b0C<\/strong>, \u0111\u1ed3ng th\u1eddi duy tr\u00ec t\u00ednh to\u00e0n v\u1eb9n c\u1ea5u tr\u00fac v\u00e0 hi\u1ec7u su\u1ea5t.<\/p>\n\n\n\n

      3.2 Kh\u1ea3 n\u0103ng ch\u1ecbu h\u00f3a ch\u1ea5t<\/h2>\n\n\n\n
        \n
      • Ch\u1ecbu \u0111\u01b0\u1ee3c c\u00e1c h\u00f3a ch\u1ea5t m\u1ea1nh<\/li>\n\n\n\n
      • C\u00f3 th\u1ec3 l\u00e0m s\u1ea1ch b\u1eb1ng c\u00e1c axit m\u1ea1nh nh\u01b0 HF v\u00e0 HCl m\u00e0 h\u1ea7u nh\u01b0 kh\u00f4ng b\u1ecb ph\u00e2n h\u1ee7y<\/li>\n<\/ul>\n\n\n\n

        H\u1eadu qu\u1ea3:<\/strong>
        Th\u00edch h\u1ee3p \u0111\u1ec3 s\u1eed d\u1ee5ng nhi\u1ec1u l\u1ea7n trong c\u00e1c m\u00f4i tr\u01b0\u1eddng ch\u1ebf bi\u1ebfn c\u00f3 t\u00ednh \u0103n m\u00f2n cao.<\/p>\n\n\n\n

        3.3 T\u1ea1o ra \u00edt h\u1ea1t<\/h2>\n\n\n\n

        Do kh\u00f4ng c\u00f3 c\u00e1c pha \u1edf ranh gi\u1edbi h\u1ea1t:<\/p>\n\n\n\n

          \n
        • Trong qu\u00e1 tr\u00ecnh v\u1eadn h\u00e0nh, l\u01b0\u1ee3ng h\u1ea1t b\u1ee5i sinh ra \u00edt h\u01a1n<\/li>\n\n\n\n
        • Gi\u1ea3m nguy c\u01a1 \u00f4 nhi\u1ec5m trong c\u00e1c quy tr\u00ecnh nh\u1ea1y c\u1ea3m<\/li>\n<\/ul>\n\n\n\n

          4. \u1ee8ng d\u1ee5ng trong ch\u1ebf bi\u1ebfn ch\u1ea5t b\u00e1n d\u1eabn<\/h2>\n\n\n\n

          CVD SiC \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn, bao g\u1ed3m:<\/p>\n\n\n\n

            \n
          • V\u00f2ng v\u00e0 \u0111\u1ebf gia nhi\u1ec7t nhanh (RTP)<\/li>\n\n\n\n
          • C\u00e1c linh ki\u1ec7n epitaxy (Epi)<\/li>\n\n\n\n
          • C\u00e1c b\u1ed9 ph\u1eadn c\u1ee7a bu\u1ed3ng kh\u1eafc plasma<\/li>\n<\/ul>\n\n\n\n

            T\u1ea1i sao l\u1ea1i \u0111\u01b0\u1ee3c \u01b0a chu\u1ed9ng:<\/h3>\n\n\n\n
              \n
            • Y\u00eau c\u1ea7u v\u1ec1 \u0111\u1ed9 tinh khi\u1ebft cao (>99,9991%)<\/li>\n\n\n\n
            • Ho\u1ea1t \u0111\u1ed9ng \u1edf nhi\u1ec7t \u0111\u1ed9 cao (>1500\u00b0C)<\/li>\n\n\n\n
            • Kh\u1ea3 n\u0103ng ch\u1ed1ng \u0103n m\u00f2n cao \u0111\u1ed1i v\u1edbi plasma v\u00e0 h\u00f3a ch\u1ea5t<\/li>\n<\/ul>\n\n\n\n

              Ngo\u00e0i ra, c\u00e1c v\u1eadt li\u1ec7u c\u00f3 \u0111i\u1ec7n tr\u1edf su\u1ea5t \u0111i\u1ec1u ch\u1ec9nh<\/strong> \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c h\u1ec7 th\u1ed1ng gh\u00e9p n\u1ed1i RF, gi\u00fap \u0111\u1ea3m b\u1ea3o kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi c\u00e1c m\u00f4i tr\u01b0\u1eddng \u0111i\u1ec7n kh\u00e1c nhau.<\/p>\n\n\n\n

              5. So s\u00e1nh v\u1edbi cacbua silic nung k\u1ebft<\/h2>\n\n\n\n

              M\u1eb7c d\u00f9 nhi\u1ec1u linh ki\u1ec7n SiC \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p nung k\u1ebft ho\u1eb7c \u00e9p n\u00f3ng, nh\u01b0ng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p n\u00e0y g\u00e2y ra:<\/p>\n\n\n\n

                \n
              • Ranh gi\u1edbi h\u1ea1t<\/li>\n\n\n\n
              • C\u00e1c pha c\u00f2n l\u1ea1i<\/li>\n\n\n\n
              • \u0110\u1ed9 x\u1ed1p<\/li>\n<\/ul>\n\n\n\n

                C\u00e1c \u0111\u1eb7c \u0111i\u1ec3m c\u1ea5u tr\u00fac n\u00e0y c\u00f3 th\u1ec3:<\/p>\n\n\n\n

                  \n
                • Gi\u1ea3m kh\u1ea3 n\u0103ng ch\u1ed1ng oxy h\u00f3a \u1edf nhi\u1ec7t \u0111\u1ed9 cao<\/li>\n\n\n\n
                • T\u0103ng c\u01b0\u1eddng qu\u00e1 tr\u00ecnh t\u1ea1o h\u1ea1t<\/li>\n\n\n\n
                • H\u1ea1n ch\u1ebf hi\u1ec7u su\u1ea5t trong m\u00f4i tr\u01b0\u1eddng si\u00eau s\u1ea1ch<\/li>\n<\/ul>\n\n\n\n

                  K\u1ebft lu\u1eadn:<\/strong>
                  SiC \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD th\u01b0\u1eddng ph\u00f9 h\u1ee3p h\u01a1n cho c\u00e1c \u1ee9ng d\u1ee5ng \u0111\u00f2i h\u1ecfi \u0111\u1ed9 tinh khi\u1ebft cao, nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 nh\u1ea1y c\u1ea3m v\u1edbi \u00f4 nhi\u1ec5m, trong khi SiC nung k\u1ebft v\u1eabn hi\u1ec7u qu\u1ea3 cho c\u00e1c \u1ee9ng d\u1ee5ng k\u1ebft c\u1ea5u v\u00e0 y\u00eau c\u1ea7u ti\u1ebft ki\u1ec7m chi ph\u00ed.<\/p>\n\n\n\n

                  6. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

                  CVD Silicon Carbide l\u00e0 m\u1ed9t lo\u1ea1i v\u1eadt li\u1ec7u g\u1ed1m g\u1ea7n nh\u01b0 l\u00fd t\u01b0\u1edfng v\u1ec1 \u0111\u1ed9 tinh khi\u1ebft, m\u1eadt \u0111\u1ed9 v\u00e0 t\u00ednh \u1ed5n \u0111\u1ecbnh v\u1ec1 hi\u1ec7u su\u1ea5t. Nh\u1eefng \u01b0u \u0111i\u1ec3m c\u1ee7a n\u00f3 xu\u1ea5t ph\u00e1t tr\u1ef1c ti\u1ebfp t\u1eeb quy tr\u00ecnh ch\u1ebf t\u1ea1o d\u1ef1a tr\u00ean ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng \u0111\u1ed9c \u0111\u00e1o, gi\u00fap lo\u1ea1i b\u1ecf nhi\u1ec1u h\u1ea1n ch\u1ebf v\u1ec1 c\u1ea5u tr\u00fac th\u01b0\u1eddng th\u1ea5y \u1edf c\u00e1c lo\u1ea1i g\u1ed1m truy\u1ec1n th\u1ed1ng.<\/p>\n\n\n\n

                  Khi c\u00e1c c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn ng\u00e0y c\u00e0ng \u0111\u00f2i h\u1ecfi:<\/p>\n\n\n\n

                    \n
                  • \u0110\u1ed9 s\u1ea1ch cao h\u01a1n<\/li>\n\n\n\n
                  • \u0110\u1ed9 \u1ed5n \u0111\u1ecbnh nhi\u1ec7t cao h\u01a1n<\/li>\n\n\n\n
                  • N\u00e2ng cao \u0111\u1ed9 tin c\u1eady c\u1ee7a v\u1eadt li\u1ec7u<\/li>\n<\/ul>\n\n\n\n

                    SiC \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p CVD d\u1ef1 ki\u1ebfn s\u1ebd ti\u1ebfp t\u1ee5c l\u00e0 v\u1eadt li\u1ec7u quan tr\u1ecdng trong c\u00e1c \u1ee9ng d\u1ee5ng k\u1ef9 thu\u1eadt cao c\u1ea5p.<\/p>","protected":false},"excerpt":{"rendered":"

                    Silicon carbide (SiC) is a high-performance ceramic widely used in semiconductor processing, optics, and harsh industrial environments. Among its various forms, CVD Silicon Carbide (CVD SiC)\u2014produced via Chemical Vapor Deposition\u2014is often regarded as one of the most advanced ceramic materials due to its exceptional purity, density, and structural uniformity. This article examines the material properties, […]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[25],"tags":[1312],"class_list":["post-2440","post","type-post","status-publish","format-standard","hentry","category-technology-applications","tag-cvd-sic"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2440","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2440"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2440\/revisions"}],"predecessor-version":[{"id":2442,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2440\/revisions\/2442"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2440"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2440"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2440"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}