{"id":2162,"date":"2026-04-13T05:49:11","date_gmt":"2026-04-13T05:49:11","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2162"},"modified":"2026-04-13T05:49:16","modified_gmt":"2026-04-13T05:49:16","slug":"laser-dicing-vs-mechanical-saw-in-semiconductor-manufacturing","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/laser-dicing-vs-mechanical-saw-in-semiconductor-manufacturing\/","title":{"rendered":"C\u1eaft b\u1eb1ng laser so v\u1edbi c\u01b0a c\u01a1 kh\u00ed trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn"},"content":{"rendered":"<h2 class=\"wp-block-heading\">1. Gi\u1edbi thi\u1ec7u<\/h2>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t wafer (c\u00f2n g\u1ecdi l\u00e0 t\u00e1ch wafer) l\u00e0 m\u1ed9t c\u00f4ng \u0111o\u1ea1n quan tr\u1ecdng trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, trong \u0111\u00f3 c\u00e1c t\u1ea5m wafer silicon ho\u1eb7c ch\u1ea5t b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t \u0111\u00e3 qua x\u1eed l\u00fd \u0111\u01b0\u1ee3c t\u00e1ch th\u00e0nh c\u00e1c chip ri\u00eang l\u1ebb. Khi k\u00edch th\u01b0\u1edbc thi\u1ebft b\u1ecb ng\u00e0y c\u00e0ng thu nh\u1ecf v\u00e0 v\u1eadt li\u1ec7u ng\u00e0y c\u00e0ng \u0111a d\u1ea1ng \u2014 ch\u1eb3ng h\u1ea1n nh\u01b0 cacbua silic (SiC), nitrua gali (GaN) v\u00e0 ng\u1ecdc b\u00edch \u2014 vi\u1ec7c l\u1ef1a ch\u1ecdn c\u00f4ng ngh\u1ec7 c\u1eaft l\u00e1t tr\u1edf n\u00ean ng\u00e0y c\u00e0ng quan tr\u1ecdng.<\/p>\n\n\n\n<p>Hi\u1ec7n nay, c\u00f3 hai ph\u01b0\u01a1ng ph\u00e1p ch\u1ee7 \u0111\u1ea1o \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1eaft c\u01a1 h\u1ecdc (c\u1eaft b\u1eb1ng l\u01b0\u1ee1i c\u01b0a kim c\u01b0\u01a1ng)<\/li>\n\n\n\n<li>C\u1eaft b\u1eb1ng laser (ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng laser ho\u1eb7c t\u00e1ch k\u00edn)<\/li>\n<\/ul>\n\n\n\n<p>M\u1ed7i ph\u01b0\u01a1ng ph\u00e1p \u0111\u1ec1u c\u00f3 c\u01a1 ch\u1ebf v\u1eadt l\u00fd, c\u00e1c h\u1ea1n ch\u1ebf v\u1ec1 quy tr\u00ecnh v\u00e0 l\u0129nh v\u1ef1c \u1ee9ng d\u1ee5ng ri\u00eang bi\u1ec7t. B\u00e0i vi\u1ebft n\u00e0y \u0111\u01b0a ra m\u1ed9t so s\u00e1nh khoa h\u1ecdc gi\u1eefa hai c\u00f4ng ngh\u1ec7 n\u00e0y v\u1ec1 m\u1eb7t nguy\u00ean l\u00fd, hi\u1ec7u su\u1ea5t v\u00e0 t\u00ednh ph\u00f9 h\u1ee3p trong c\u00f4ng nghi\u1ec7p.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"683\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-1024x683.png\" alt=\"\" class=\"wp-image-2164\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-1024x683.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-300x200.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-768x512.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-18x12.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing-600x400.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Laser-Dicing-vs-Mechanical-Saw-in-Semiconductor-Manufacturing.png 1536w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">2. C\u00e1c nguy\u00ean l\u00fd ho\u1ea1t \u0111\u1ed9ng c\u01a1 b\u1ea3n<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">2.1 C\u1eaft mi\u1ebfng wafer b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p c\u01a1 h\u1ecdc (c\u1eaft b\u1eb1ng l\u01b0\u1ee1i c\u01b0a kim c\u01b0\u01a1ng)<\/h2>\n\n\n\n<p>Ph\u01b0\u01a1ng ph\u00e1p c\u1eaft c\u01a1 h\u1ecdc s\u1eed d\u1ee5ng tr\u1ee5c quay t\u1ed1c \u0111\u1ed9 cao \u0111\u01b0\u1ee3c trang b\u1ecb l\u01b0\u1ee1i dao c\u00f3 g\u1eafn kim c\u01b0\u01a1ng. T\u1ea5m wafer \u0111\u01b0\u1ee3c g\u1eafn l\u00ean b\u0103ng c\u1eaft v\u00e0 \u0111\u01b0\u1ee3c c\u1eaft d\u1ecdc theo c\u00e1c \u0111\u01b0\u1eddng c\u1eaft \u0111\u00e3 \u0111\u1ecbnh s\u1eb5n.<\/p>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh n\u00e0y \u0111\u01b0\u1ee3c chi ph\u1ed1i b\u1edfi s\u1ef1 lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u th\u00f4ng qua qu\u00e1 tr\u00ecnh m\u00e0i m\u00f2n v\u00e0 c\u01a1 h\u1ecdc \u0111\u1ee9t g\u00e3y:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c h\u1ea1t kim c\u01b0\u01a1ng g\u00e2y tr\u1ea7y x\u01b0\u1edbc v\u00e0 l\u00e0m v\u1ee1 t\u1ea5m wafer m\u1ed9t c\u00e1ch c\u01a1 h\u1ecdc<\/li>\n\n\n\n<li>V\u1eadt li\u1ec7u \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf d\u01b0\u1edbi d\u1ea1ng c\u1eb7n m\u1ecbn (d\u1ea1ng b\u00f9n ho\u1eb7c h\u1ea1t kh\u00f4 t\u00f9y thu\u1ed9c v\u00e0o h\u1ec7 th\u1ed1ng)<\/li>\n\n\n\n<li>N\u01b0\u1edbc l\u00e0m m\u00e1t th\u01b0\u1eddng \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng \u0111\u1ec3 gi\u1ea3m \u1ee9ng su\u1ea5t nhi\u1ec7t v\u00e0 c\u01a1 h\u1ecdc<\/li>\n<\/ul>\n\n\n\n<p>Ph\u01b0\u01a1ng ph\u00e1p n\u00e0y \u0111\u00e3 \u0111\u01b0\u1ee3c ho\u00e0n thi\u1ec7n v\u00e0 \u0111\u01b0\u1ee3c \u00e1p d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">2.2 C\u1eaft mi\u1ebfng wafer b\u1eb1ng laser<\/h2>\n\n\n\n<p>Ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng laser s\u1eed d\u1ee5ng ch\u00f9m tia laser c\u00f3 \u0111\u1ed9 t\u1eadp trung cao (v\u1edbi c\u00e1c xung c\u00f3 \u0111\u1ed9 d\u00e0i nano gi\u00e2y, pico gi\u00e2y ho\u1eb7c femto gi\u00e2y) \u0111\u1ec3 gia c\u00f4ng ho\u1eb7c lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u.<\/p>\n\n\n\n<p>C\u00e1c c\u01a1 ch\u1ebf ph\u1ed5 bi\u1ebfn bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>C\u1eaft b\u1ecf b\u1eb1ng laser<\/strong>: qu\u00e1 tr\u00ecnh bay h\u01a1i tr\u1ef1c ti\u1ebfp c\u1ee7a v\u1eadt li\u1ec7u<\/li>\n\n\n\n<li><strong>C\u1eaft x\u00fac x\u1eafc l\u00e9n l\u00fat<\/strong>: s\u1eeda \u0111\u1ed5i l\u1edbp d\u01b0\u1edbi b\u1ec1 m\u1eb7t, sau \u0111\u00f3 l\u00e0 t\u1ea1o v\u1ebft n\u1ee9t c\u00f3 ki\u1ec3m so\u00e1t<\/li>\n\n\n\n<li><strong>T\u00e1ch l\u1edbp do \u1ee9ng su\u1ea5t nhi\u1ec7t<\/strong>: s\u1ef1 gia nhi\u1ec7t c\u1ee5c b\u1ed9 g\u00e2y ra s\u1ef1 lan truy\u1ec1n v\u1ebft n\u1ee9t<\/li>\n<\/ul>\n\n\n\n<p>Kh\u00e1c v\u1edbi ph\u01b0\u01a1ng ph\u00e1p c\u1eaft ti\u1ebfp x\u00fac c\u01a1 h\u1ecdc, ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng laser l\u00e0 m\u1ed9t quy tr\u00ecnh kh\u00f4ng ti\u1ebfp x\u00fac, gi\u00fap gi\u1ea3m \u00e1p l\u1ef1c c\u01a1 h\u1ecdc l\u00ean t\u1ea5m wafer.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">3. So s\u00e1nh quy tr\u00ecnh<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">3.1 \u00c1p l\u1ef1c c\u01a1 h\u1ecdc v\u00e0 h\u01b0 h\u1ecfng<\/h3>\n\n\n\n<p>Gi\u1edbi thi\u1ec7u v\u1ec1 c\u00f4ng ngh\u1ec7 c\u1eaft c\u01a1 h\u1ecdc:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ee9t m\u1ebb m\u00e9p<\/li>\n\n\n\n<li>C\u00e1c v\u1ebft n\u1ee9t nh\u1ecf<\/li>\n\n\n\n<li>S\u1ef1 lan truy\u1ec1n \u1ee9ng su\u1ea5t trong v\u1eadt li\u1ec7u gi\u00f2n<\/li>\n<\/ul>\n\n\n\n<p>C\u1eaft b\u1eb1ng laser gi\u00fap gi\u1ea3m l\u1ef1c c\u01a1 h\u1ecdc, nh\u01b0ng c\u00f3 th\u1ec3 g\u00e2y ra:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>V\u00f9ng ch\u1ecbu \u1ea3nh h\u01b0\u1edfng nhi\u1ec7t (HAZ)<\/li>\n\n\n\n<li>S\u1ef1 thay \u0111\u1ed5i c\u1ea5u tr\u00fac vi m\u00f4 t\u00f9y thu\u1ed9c v\u00e0o b\u01b0\u1edbc s\u00f3ng v\u00e0 th\u1eddi gian xung<\/li>\n<\/ul>\n\n\n\n<p>\u0110\u1ed1i v\u1edbi c\u00e1c v\u1eadt li\u1ec7u d\u1ec5 v\u1ee1 v\u00e0 c\u00f3 gi\u00e1 tr\u1ecb cao (v\u00ed d\u1ee5: t\u1ea5m wafer SiC), vi\u1ec7c ki\u1ec3m so\u00e1t h\u01b0 h\u1ecfng l\u00e0 v\u00f4 c\u00f9ng quan tr\u1ecdng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.2 \u0110\u1ed9 ch\u00ednh x\u00e1c v\u00e0 chi\u1ec1u r\u1ed9ng r\u00e3nh c\u1eaft<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\u0110\u1ed9 r\u1ed9ng r\u00e3nh c\u01b0a c\u01a1 kh\u00ed: th\u01b0\u1eddng t\u1eeb 25\u201360 \u00b5m (t\u00f9y thu\u1ed9c v\u00e0o \u0111\u1ed9 d\u00e0y l\u01b0\u1ee1i c\u01b0a)<\/li>\n\n\n\n<li>\u0110\u01b0\u1eddng c\u1eaft laser: c\u00f3 th\u1ec3 gi\u1ea3m xu\u1ed1ng d\u01b0\u1edbi 20 \u00b5m trong c\u00e1c h\u1ec7 th\u1ed1ng \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a<\/li>\n<\/ul>\n\n\n\n<p>C\u00f4ng ngh\u1ec7 laser mang l\u1ea1i \u0111\u1ed9 linh ho\u1ea1t cao h\u01a1n cho c\u00e1c c\u1ea5u tr\u00fac si\u00eau m\u1ecbn, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong l\u0129nh v\u1ef1c \u0111\u00f3ng g\u00f3i ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c thi\u1ebft b\u1ecb MEMS.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.3 T\u00ednh t\u01b0\u01a1ng th\u00edch c\u1ee7a v\u1eadt li\u1ec7u<\/h3>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><thead><tr><th>Lo\u1ea1i v\u1eadt li\u1ec7u<\/th><th>C\u01b0a c\u01a1 kh\u00ed<\/th><th>C\u1eaft b\u1eb1ng laser<\/th><\/tr><\/thead><tbody><tr><td>Silic (Si)<\/td><td>\u0110\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i<\/td><td>S\u1ef1 gia t\u0103ng vi\u1ec7c s\u1eed d\u1ee5ng<\/td><\/tr><tr><td>SiC<\/td><td>Kh\u00f3 (m\u00f2n d\u1ee5ng c\u1ee5)<\/td><td>\u01afu ti\u00ean (h\u1ec7 th\u1ed1ng ti\u00ean ti\u1ebfn)<\/td><\/tr><tr><td>Ng\u1ecdc b\u00edch<\/td><td>Nguy c\u01a1 b\u1ecb s\u1ee9t m\u1ebb cao<\/td><td>Ch\u1ea5t l\u01b0\u1ee3ng c\u1ea1nh t\u1ed1t h\u01a1n<\/td><\/tr><tr><td>GaN<\/td><td>Thi\u1ec7t h\u1ea1i \u1edf m\u1ee9c v\u1eeba ph\u1ea3i<\/td><td>\u01afu ti\u00ean<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>Ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng laser ng\u00e0y c\u00e0ng tr\u1edf n\u00ean hi\u1ec7u qu\u1ea3 h\u01a1n \u0111\u1ed1i v\u1edbi c\u00e1c v\u1eadt li\u1ec7u c\u1ee9ng, gi\u00f2n v\u00e0 c\u00f3 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.4 N\u0103ng su\u1ea5t v\u00e0 hi\u1ec7u qu\u1ea3 chi ph\u00ed<\/h3>\n\n\n\n<p>C\u1eaft mi\u1ebfng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p c\u01a1 h\u1ecdc:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00f4ng su\u1ea5t cao<\/li>\n\n\n\n<li>Gi\u1ea3m chi ph\u00ed thi\u1ebft b\u1ecb<\/li>\n\n\n\n<li>H\u1ec7 sinh th\u00e1i v\u1eadt t\u01b0 ti\u00eau hao \u0111\u00e3 ph\u00e1t tri\u1ec3n ho\u00e0n thi\u1ec7n (l\u01b0\u1ee1i dao, ch\u1ea5t l\u00e0m m\u00e1t)<\/li>\n<\/ul>\n\n\n\n<p>C\u1eaft b\u1eb1ng laser:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u1ee9c \u0111\u1ea7u t\u01b0 v\u1ed1n cao h\u01a1n<\/li>\n\n\n\n<li>Gi\u1ea3m chi ph\u00ed v\u1eadt t\u01b0 ti\u00eau hao<\/li>\n\n\n\n<li>C\u00f3 th\u1ec3 ch\u1eadm h\u01a1n trong m\u1ed9t s\u1ed1 c\u1ea5u h\u00ecnh (t\u00f9y thu\u1ed9c v\u00e0o chi\u1ebfn l\u01b0\u1ee3c qu\u00e9t)<\/li>\n<\/ul>\n\n\n\n<p>Trong s\u1ea3n xu\u1ea5t silicon quy m\u00f4 l\u1edbn, ph\u01b0\u01a1ng ph\u00e1p c\u01b0a c\u01a1 h\u1ecdc v\u1eabn chi\u1ebfm \u01b0u th\u1ebf nh\u1edd t\u00ednh hi\u1ec7u qu\u1ea3 v\u1ec1 chi ph\u00ed.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">3.5 M\u00f2n d\u1ee5ng c\u1ee5 v\u00e0 b\u1ea3o d\u01b0\u1ee1ng<\/h3>\n\n\n\n<p>C\u00e1c h\u1ec7 th\u1ed1ng c\u01a1 kh\u00ed th\u01b0\u1eddng g\u1eb7p ph\u1ea3i c\u00e1c v\u1ea5n \u0111\u1ec1 sau:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 m\u00f2n c\u1ee7a l\u01b0\u1ee1i dao<\/li>\n\n\n\n<li>Thay th\u1ebf th\u01b0\u1eddng xuy\u00ean<\/li>\n\n\n\n<li>S\u1ef1 thay \u0111\u1ed5i c\u1ee7a quy tr\u00ecnh theo th\u1eddi gian<\/li>\n<\/ul>\n\n\n\n<p>H\u1ec7 th\u1ed1ng laser:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Kh\u00f4ng c\u00f3 s\u1ef1 m\u00e0i m\u00f2n c\u1ee7a d\u1ee5ng c\u1ee5<\/li>\n\n\n\n<li>Ch\u1ec9 c\u1ea7n c\u0103n ch\u1ec9nh quang h\u1ecdc v\u00e0 b\u1ea3o d\u01b0\u1ee1ng \u1ed1ng k\u00ednh<\/li>\n<\/ul>\n\n\n\n<p>\u0110i\u1ec1u n\u00e0y khi\u1ebfn c\u00e1c h\u1ec7 th\u1ed1ng laser tr\u1edf n\u00ean h\u1ea5p d\u1eabn nh\u1edd t\u00ednh \u1ed5n \u0111\u1ecbnh l\u00e2u d\u00e0i trong l\u0129nh v\u1ef1c s\u1ea3n xu\u1ea5t ch\u00ednh x\u00e1c.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">4. \u1ee8ng d\u1ee5ng trong c\u00f4ng nghi\u1ec7p<\/h2>\n\n\n\n<h2 class=\"wp-block-heading\">4.1 \u1ee8ng d\u1ee5ng c\u1eaft l\u00e1t c\u01a1 h\u1ecdc<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u1ea3m bi\u1ebfn h\u00ecnh \u1ea3nh CMOS<\/li>\n\n\n\n<li>Chip b\u1ed9 nh\u1edb (DRAM, NAND)<\/li>\n\n\n\n<li>Bao b\u00ec IC silicon ti\u00eau chu\u1ea9n<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">4.2 <a href=\"https:\/\/www.zmsh-semitech.com\/vi\/danh-muc-san-pham\/laser-cutting\/\"><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">C\u1eaft b\u1eb1ng laser<\/mark><\/a> \u1ee8ng d\u1ee5ng<\/h2>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Thi\u1ebft b\u1ecb \u0111i\u1ec7n SiC (xe \u0111i\u1ec7n, h\u1ea1 t\u1ea7ng s\u1ea1c)<\/li>\n\n\n\n<li>T\u1ea5m wafer LED v\u00e0 quang \u0111i\u1ec7n t\u1eed<\/li>\n\n\n\n<li>Thi\u1ebft b\u1ecb MEMS<\/li>\n\n\n\n<li>C\u00f4ng ngh\u1ec7 \u0111\u00f3ng g\u00f3i t\u00edch h\u1ee3p d\u1ecb ch\u1ea5t ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">5. T\u00f3m t\u1eaft c\u00e1c s\u1ef1 \u0111\u00e1nh \u0111\u1ed5i ch\u00ednh<\/h2>\n\n\n\n<p>T\u1eeb g\u00f3c \u0111\u1ed9 k\u1ef9 thu\u1eadt, vi\u1ec7c l\u1ef1a ch\u1ecdn gi\u1eefa ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng laser v\u00e0 ph\u01b0\u01a1ng ph\u00e1p c\u1eaft c\u01a1 h\u1ecdc ph\u1ee5 thu\u1ed9c v\u00e0o vi\u1ec7c c\u00e2n b\u1eb1ng:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>L\u1ee3i nhu\u1eadn so v\u1edbi chi ph\u00ed<\/li>\n\n\n\n<li>\u0110\u1ed9 c\u1ee9ng v\u1eadt li\u1ec7u so v\u1edbi n\u0103ng su\u1ea5t<\/li>\n\n\n\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c so v\u1edbi kh\u1ea3 n\u0103ng m\u1edf r\u1ed9ng<\/li>\n<\/ul>\n\n\n\n<p>C\u1eaft c\u01a1 h\u1ecdc v\u1eabn l\u00e0 tr\u1ee5 c\u1ed9t c\u1ee7a ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn ch\u00ednh th\u1ed1ng, trong khi c\u1eaft b\u1eb1ng laser \u0111ang ph\u00e1t tri\u1ec3n nhanh ch\u00f3ng trong l\u0129nh v\u1ef1c v\u1eadt li\u1ec7u ti\u00ean ti\u1ebfn v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng c\u00f3 gi\u00e1 tr\u1ecb cao.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">6. Xu h\u01b0\u1edbng ph\u00e1t tri\u1ec3n trong t\u01b0\u01a1ng lai<\/h2>\n\n\n\n<p>M\u1ed9t s\u1ed1 xu h\u01b0\u1edbng \u0111ang \u0111\u1ecbnh h\u00ecnh s\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a c\u00f4ng ngh\u1ec7 t\u00e1ch wafer:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.1 H\u1ec7 th\u1ed1ng c\u1eaft l\u00e1t lai<\/h3>\n\n\n\n<p>M\u1ed9t s\u1ed1 nh\u00e0 s\u1ea3n xu\u1ea5t \u0111ang k\u1ebft h\u1ee3p:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Ghi tr\u01b0\u1edbc b\u1eb1ng laser + b\u1ebb g\u00e3y c\u01a1 h\u1ecdc<\/li>\n\n\n\n<li>Gia c\u00f4ng r\u00e3nh b\u1eb1ng laser + ho\u00e0n thi\u1ec7n b\u1eb1ng dao c\u1eaft<\/li>\n<\/ul>\n\n\n\n<p>\u0110i\u1ec1u n\u00e0y gi\u00fap n\u00e2ng cao c\u1ea3 n\u0103ng su\u1ea5t v\u00e0 c\u00f4ng su\u1ea5t.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">6.2 Laser xung si\u00eau ng\u1eafn<\/h3>\n\n\n\n<p>H\u1ec7 th\u1ed1ng laser femtosecond gi\u00fap gi\u1ea3m \u0111\u00e1ng k\u1ec3 v\u00f9ng ch\u1ecbu \u1ea3nh h\u01b0\u1edfng nhi\u1ec7t, t\u1eeb \u0111\u00f3 cho ph\u00e9p:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>C\u00e1c c\u1ea1nh s\u1eafc n\u00e9t h\u01a1n<\/li>\n\n\n\n<li>Gi\u1ea3m thi\u1ec3u c\u00e1c v\u1ebft n\u1ee9t vi m\u00f4<\/li>\n\n\n\n<li>N\u00e2ng cao \u0111\u1ed9 tin c\u1eady c\u1ee7a c\u00e1c t\u1ea5m wafer SiC v\u00e0 sapphire<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">6.3 Nh\u1eefng th\u00e1ch th\u1ee9c li\u00ean quan \u0111\u1ebfn t\u1ea5m wafer 300mm<\/h3>\n\n\n\n<p>Khi k\u00edch th\u01b0\u1edbc t\u1ea5m wafer t\u0103ng l\u00ean:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>S\u1ef1 ph\u00e2n b\u1ed1 \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc tr\u1edf n\u00ean ph\u1ee9c t\u1ea1p h\u01a1n<\/li>\n\n\n\n<li>Vi\u1ec7c ki\u1ec3m so\u00e1t \u0111\u1ed9 cong v\u00eanh l\u00e0 r\u1ea5t quan tr\u1ecdng<\/li>\n\n\n\n<li>\u0110\u1ed9 ch\u00ednh x\u00e1c c\u1ee7a tia laser ng\u00e0y c\u00e0ng tr\u1edf n\u00ean quan tr\u1ecdng<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">7. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n<p>C\u1eaft b\u1eb1ng laser v\u00e0 c\u01b0a c\u01a1 h\u1ecdc l\u00e0 hai ph\u01b0\u01a1ng ph\u00e1p k\u1ef9 thu\u1eadt ho\u00e0n to\u00e0n kh\u00e1c nhau trong vi\u1ec7c t\u00e1ch c\u00e1c t\u1ea5m wafer.<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>M\u00e1y c\u01b0a c\u01a1 kh\u00ed n\u1ed5i tr\u1ed9i v\u1ec1 hi\u1ec7u qu\u1ea3 chi ph\u00ed v\u00e0 s\u1ea3n xu\u1ea5t silicon quy m\u00f4 l\u1edbn<\/li>\n\n\n\n<li>C\u00f4ng ngh\u1ec7 c\u1eaft b\u1eb1ng laser n\u1ed5i tr\u1ed9i v\u1ec1 \u0111\u1ed9 ch\u00ednh x\u00e1c, kh\u1ea3 n\u0103ng t\u01b0\u01a1ng th\u00edch v\u1edbi nhi\u1ec1u lo\u1ea1i v\u1eadt li\u1ec7u v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn<\/li>\n<\/ul>\n\n\n\n<p>Thay v\u00ec thay th\u1ebf ho\u00e0n to\u00e0n l\u1eabn nhau, c\u00e1c c\u00f4ng ngh\u1ec7 n\u00e0y ng\u00e0y c\u00e0ng c\u00f9ng t\u1ed3n t\u1ea1i trong m\u1ed9t h\u1ec7 sinh th\u00e1i s\u1ea3n xu\u1ea5t b\u1ed5 sung cho nhau, \u0111\u01b0\u1ee3c th\u00fac \u0111\u1ea9y b\u1edfi s\u1ef1 \u0111\u1ed5i m\u1edbi v\u1ec1 v\u1eadt li\u1ec7u v\u00e0 qu\u00e1 tr\u00ecnh thu nh\u1ecf thi\u1ebft b\u1ecb.<\/p>","protected":false},"excerpt":{"rendered":"<p>1. Introduction Wafer dicing (also called wafer singulation) is a critical step in semiconductor manufacturing, where processed silicon or compound semiconductor wafers are separated into individual dies. As device geometries shrink and materials diversify\u2014such as silicon carbide (SiC), gallium nitride (GaN), and sapphire\u2014the choice of dicing technology becomes increasingly important. Two dominant approaches are widely [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2164,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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