{"id":2114,"date":"2026-04-03T06:00:09","date_gmt":"2026-04-03T06:00:09","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2114"},"modified":"2026-04-03T06:03:19","modified_gmt":"2026-04-03T06:03:19","slug":"the-ten-core-semiconductor-equipment-in-2026","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/the-ten-core-semiconductor-equipment-in-2026\/","title":{"rendered":"10 thi\u1ebft b\u1ecb b\u00e1n d\u1eabn ch\u1ee7 ch\u1ed1t v\u00e0o n\u0103m 2026: T\u1eeb nh\u1eefng r\u00e0o c\u1ea3n c\u00f4ng ngh\u1ec7 \u0111\u1ebfn nh\u1eefng b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 trong n\u01b0\u1edbc"},"content":{"rendered":"

Nh\u1ecbp \u0111\u1eadp c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn \u0111\u01b0\u1ee3c duy tr\u00ec nh\u1edd c\u00e1c thi\u1ebft b\u1ecb c\u1ed1t l\u00f5i c\u1ef1c k\u1ef3 tinh vi, m\u1ed7i chi\u1ebfc tr\u1ecb gi\u00e1 h\u00e0ng tri\u1ec7u \u0111\u00f4 la. C\u00e1c k\u1ef9 s\u01b0 theo d\u00f5i c\u00e1c m\u1ea1ch \u0111i\u1ec7n c\u00f3 k\u00edch th\u01b0\u1edbc nh\u1ecf h\u01a1n s\u1ee3i t\u00f3c ng\u01b0\u1eddi h\u00e0ng ngh\u00ecn l\u1ea7n qua c\u00e1c c\u1eeda s\u1ed5 quan s\u00e1t ch\u00ednh x\u00e1c, \u0111\u1ea3m b\u1ea3o m\u1ecdi c\u00f4ng \u0111o\u1ea1n trong quy tr\u00ecnh s\u1ea3n xu\u1ea5t chip hi\u1ec7n \u0111\u1ea1i \u0111\u1ec1u \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n cao nh\u1ea5t. M\u1ed7i b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 trong c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn \u0111\u1ec1u ph\u1ee5 thu\u1ed9c tr\u1ef1c ti\u1ebfp v\u00e0o nh\u1eefng ti\u1ebfn b\u1ed9 c\u1ee7a c\u00e1c thi\u1ebft b\u1ecb n\u00e0y, v\u1ed1n n\u1eb1m \u1edf kh\u00e2u \u0111\u1ea7u ngu\u1ed3n c\u1ee7a chu\u1ed7i gi\u00e1 tr\u1ecb ng\u00e0nh. To\u00e0n c\u1ea7u thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn<\/mark> <\/a>th\u1ecb tr\u01b0\u1eddng ti\u1ebfp t\u1ee5c m\u1edf r\u1ed9ng v\u00e0o n\u0103m 2026, cho th\u1ea5y t\u1ea7m quan tr\u1ecdng v\u1ec1 m\u1eb7t chi\u1ebfn l\u01b0\u1ee3c v\u00e0 kinh t\u1ebf c\u1ee7a nh\u1eefng m\u00e1y m\u00f3c n\u00e0y.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1. B\u1ee9c tranh t\u1ed5ng quan ng\u00e0nh: Gi\u00e1 tr\u1ecb v\u00e0 ph\u00e2n ph\u1ed1i thi\u1ebft b\u1ecb<\/h3>\n\n\n\n

M\u1ed9t m\u00e1y in kh\u1eafc tia c\u1ef1c t\u00edm c\u1ef1c m\u1ea1nh (EUV) hi\u1ec7n \u0111\u1ea1i c\u00f3 th\u1ec3 c\u00f3 gi\u00e1 h\u00e0ng tr\u0103m tri\u1ec7u \u0111\u00f4 la v\u00e0 ch\u1ee9a h\u00e0ng tr\u0103m ngh\u00ecn b\u1ed9 ph\u1eadn \u2014 ph\u1ee9c t\u1ea1p h\u01a1n nhi\u1ec1u so v\u1edbi c\u00e1c b\u1ed9 ph\u1eadn c\u1ed1t l\u00f5i c\u1ee7a m\u1ed9t chi\u1ebfc \u00f4 t\u00f4. Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn gi\u1ed1ng nh\u01b0 m\u1ed9t cu\u1ed9c \u0111ua ti\u1ebfp s\u1ee9c si\u00eau ch\u00ednh x\u00e1c, trong \u0111\u00f3 m\u1ed7i c\u00f4ng \u0111o\u1ea1n \u0111\u1ec1u ph\u1ee5 thu\u1ed9c v\u00e0o m\u1ed9t thi\u1ebft b\u1ecb c\u1ee5 th\u1ec3. Qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o t\u1ea5m wafer \u1edf giai \u0111o\u1ea1n \u0111\u1ea7u chi\u1ebfm ph\u1ea7n l\u1edbn chi ph\u00ed \u0111\u1ea7u t\u01b0 v\u00e0o thi\u1ebft b\u1ecb, ph\u1ea3n \u00e1nh c\u1ea3 nh\u1eefng r\u00e0o c\u1ea3n k\u1ef9 thu\u1eadt cao l\u1eabn s\u1ef1 ph\u00e2n b\u1ed5 gi\u00e1 tr\u1ecb kh\u00f4ng \u0111\u1ed3ng \u0111\u1ec1u gi\u1eefa c\u00e1c lo\u1ea1i thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

C\u00e1c lo\u1ea1i thi\u1ebft b\u1ecb ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n

Lo\u1ea1i thi\u1ebft b\u1ecb<\/th>T\u1ef7 tr\u1ecdng gi\u00e1 tr\u1ecb ph\u00eda tr\u01b0\u1edbc<\/th>M\u1ee9c \u0111\u1ed9 t\u1eadp trung th\u1ecb tr\u01b0\u1eddng<\/th>T\u00ecnh tr\u1ea1ng c\u01b0 tr\u00fa<\/th><\/tr><\/thead>
K\u1ef9 thu\u1eadt in th\u1ea1ch b\u1ea3n<\/td>~24%<\/td>C\u00f3 n\u1ed3ng \u0111\u1ed9 cao<\/td>Giai \u0111o\u1ea1n \u0111\u1ed9t ph\u00e1 trong c\u00e1c quy tr\u00ecnh \u0111\u00e3 ho\u00e0n thi\u1ec7n<\/td><\/tr>
K\u1ef9 thu\u1eadt kh\u1eafc axit<\/td>~20%<\/td>C\u00f3 n\u1ed3ng \u0111\u1ed9 cao<\/td>Nh\u1eefng b\u01b0\u1edbc ti\u1ebfn nhanh ch\u00f3ng trong n\u01b0\u1edbc<\/td><\/tr>
Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng<\/td>~20%<\/td>\u0110\u1eadm \u0111\u1eb7c<\/td>Giai \u0111o\u1ea1n b\u00f9 \u0111\u1eafp<\/td><\/tr>
Ki\u1ec3m so\u00e1t quy tr\u00ecnh v\u00e0 ki\u1ec3m tra<\/td>~11%<\/td>C\u00e1c doanh nghi\u1ec7p h\u00e0ng \u0111\u1ea7u th\u1ebf gi\u1edbi<\/td>Nh\u1eefng b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 ban \u0111\u1ea7u trong n\u01b0\u1edbc<\/td><\/tr>
L\u00e0m s\u1ea1ch t\u1ea5m wafer<\/td>~5%<\/td>Trung b\u00ecnh<\/td>\u0110\u00e3 \u0111\u01b0\u1ee3c b\u1ea3n \u0111\u1ecba h\u00f3a m\u1ed9t ph\u1ea7n<\/td><\/tr>
\u0110\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/td>~4%<\/td>Trung b\u00ecnh<\/td>T\u1ef7 l\u1ec7 th\u00e2m nh\u1eadp th\u1ecb tr\u01b0\u1eddng n\u1ed9i \u0111\u1ecba cao (>50%)<\/td><\/tr>
C\u1ea5y ion<\/td>~3%<\/td>H\u00e0ng r\u00e0o cao<\/td>Th\u00e0nh t\u1ef1u trong n\u01b0\u1edbc t\u1eeb con s\u1ed1 0 \u0111\u1ebfn 1<\/td><\/tr>
Ph\u1ee7 v\u00e0 tr\u00e1ng phim quang nh\u1ea1y<\/td><3%<\/td>C\u00f3 n\u1ed3ng \u0111\u1ed9 cao<\/td>Nh\u1eefng b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 ban \u0111\u1ea7u<\/td><\/tr>
Qu\u00e1 tr\u00ecnh oxy h\u00f3a\/ph\u00e2n t\u00e1n<\/td>~2%<\/td>\u0110\u1eadm \u0111\u1eb7c<\/td>M\u1ee9c \u0111\u1ed9 bao ph\u1ee7 n\u1ed9i b\u1ed9 cao trong c\u00e1c quy tr\u00ecnh \u0111\u00e3 ho\u00e0n thi\u1ec7n<\/td><\/tr>
Ch\u1ed1ng bong tr\u00f3c<\/td>T\u1ef7 l\u1ec7 nh\u1ecf<\/td>Ph\u00e2n b\u1ed1 t\u01b0\u01a1ng \u0111\u1ed1i r\u1ea3i r\u00e1c<\/td>G\u1ea7n nh\u01b0 thay th\u1ebf ho\u00e0n to\u00e0n b\u1eb1ng s\u1ea3n ph\u1ea9m n\u1ed9i \u0111\u1ecba<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n

2. K\u1ef9 thu\u1eadt in th\u1ea1ch b\u1ea3n: \u0110\u1ec9nh cao c\u1ee7a c\u00f4ng ngh\u1ec7<\/h3>\n\n\n\n

C\u00f4ng ngh\u1ec7 in th\u1ea1ch b\u1ea3n chuy\u1ec3n c\u00e1c m\u1eabu m\u1ea1ch l\u00ean c\u00e1c t\u1ea5m silicon, t\u1eeb \u0111\u00f3 tr\u1ef1c ti\u1ebfp quy\u1ebft \u0111\u1ecbnh m\u1ee9c \u0111\u1ed9 t\u00edch h\u1ee3p v\u00e0 gi\u1edbi h\u1ea1n hi\u1ec7u su\u1ea5t c\u1ee7a chip. Quy tr\u00ecnh n\u00e0y d\u1ef1a v\u00e0o c\u00e1c h\u1ec7 th\u1ed1ng chi\u1ebfu s\u00e1ng quang h\u1ecdc ch\u00ednh x\u00e1c v\u00e0 tu\u00e2n theo ti\u00eau chu\u1ea9n Rayleigh (CD = k\u2081\u00b7\u03bb\/NA) \u0111\u1ec3 m\u1edf r\u1ed9ng gi\u1edbi h\u1ea1n \u0111\u1ed9 ph\u00e2n gi\u1ea3i. Tr\u00ean ph\u1ea1m vi to\u00e0n c\u1ea7u, th\u1ecb tr\u01b0\u1eddng n\u00e0y mang t\u00ednh ch\u1ea5t \u0111\u1ed9c quy\u1ec1n nh\u00f3m. Vi\u1ec7c x\u00e2y d\u1ef1ng n\u0103ng l\u1ef1c s\u1ea3n xu\u1ea5t trong n\u01b0\u1edbc cho c\u00e1c quy tr\u00ecnh \u0111\u00e3 ho\u00e0n thi\u1ec7n (\u226590nm) v\u1eabn l\u00e0 \u01b0u ti\u00ean chi\u1ebfn l\u01b0\u1ee3c, v\u00e0 c\u00e1c n\u1ed7 l\u1ef1c hi\u1ec7n nay t\u1eadp trung v\u00e0o vi\u1ec7c ti\u1ebfp t\u1ee5c m\u1edf r\u1ed9ng n\u0103ng l\u1ef1c h\u01b0\u1edbng t\u1edbi c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n

3. Kh\u1eafc h\u00f3a h\u1ecdc: \u0110\u1ed9 ch\u00ednh x\u00e1c trong kh\u00f4ng gian ba chi\u1ec1u<\/h3>\n\n\n\n

Qu\u00e1 tr\u00ecnh \u0103n m\u00f2n lo\u1ea1i b\u1ecf c\u00e1c v\u1eadt li\u1ec7u c\u1ee5 th\u1ec3 kh\u1ecfi c\u00e1c t\u1ea5m wafer d\u01b0\u1edbi l\u1edbp m\u1eb7t n\u1ea1 c\u00f3 hoa v\u0103n \u0111\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c c\u1ea5u tr\u00fac 3D ph\u1ee9c t\u1ea1p. Khi thi\u1ebft k\u1ebf chip chuy\u1ec3n t\u1eeb ki\u1ebfn tr\u00fac 2D sang 3D, s\u1ed1 l\u01b0\u1ee3ng v\u00e0 t\u1ea7m quan tr\u1ecdng c\u1ee7a c\u00e1c b\u01b0\u1edbc \u0103n m\u00f2n ng\u00e0y c\u00e0ng t\u0103ng. \u0102n m\u00f2n kh\u00f4, \u0111\u1eb7c bi\u1ec7t l\u00e0 \u0103n m\u00f2n b\u1eb1ng plasma, l\u00e0 c\u00f4ng ngh\u1ec7 ch\u1ee7 \u0111\u1ea1o. Thi\u1ebft b\u1ecb s\u1ea3n xu\u1ea5t trong n\u01b0\u1edbc trong l\u0129nh v\u1ef1c n\u00e0y \u0111\u00e3 \u0111\u1ea1t \u0111\u01b0\u1ee3c nh\u1eefng ti\u1ebfn b\u1ed9 nhanh ch\u00f3ng, v\u1edbi c\u00e1c m\u00e1y \u0103n m\u00f2n ti\u00ean ti\u1ebfn c\u00f3 kh\u1ea3 n\u0103ng x\u1eed l\u00fd t\u1ef7 l\u1ec7 khung h\u00ecnh cao, ph\u00f9 h\u1ee3p cho s\u1ea3n xu\u1ea5t 3D NAND.<\/p>\n\n\n\n

4. L\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng: T\u1ea1o ra c\u00e1c \u201ckh\u1ed1i\u201d c\u1ee7a chip\u201d<\/h3>\n\n\n\n

Qu\u00e1 tr\u00ecnh l\u1eafng \u0111\u1ecdng m\u00e0ng m\u1ecfng t\u1ea1o ra ho\u1eb7c ph\u1ee7 c\u00e1c l\u1edbp v\u1eadt li\u1ec7u ch\u1ee9c n\u0103ng \u2014 ch\u1ea5t d\u1eabn \u0111i\u1ec7n, ch\u1ea5t c\u00e1ch \u0111i\u1ec7n ho\u1eb7c ch\u1ea5t b\u00e1n d\u1eabn \u2014 l\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer, t\u1ea1o th\u00e0nh nh\u1eefng \u201ckh\u1ed1i x\u00e2y d\u1ef1ng\u201d thi\u1ebft y\u1ebfu c\u1ee7a chip. C\u00e1c k\u1ef9 thu\u1eadt l\u1eafng \u0111\u1ecdng ch\u00ednh bao g\u1ed3m L\u1eafng \u0111\u1ecdng h\u01a1i v\u1eadt l\u00fd (PVD), L\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc (CVD) v\u00e0 L\u1eafng \u0111\u1ecdng l\u1edbp nguy\u00ean t\u1eed (ALD), trong \u0111\u00f3 CVD l\u00e0 ph\u01b0\u01a1ng ph\u00e1p \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i nh\u1ea5t. C\u00f4ng ngh\u1ec7 trong n\u01b0\u1edbc \u0111\u00e3 \u0111\u1ea1t \u0111\u01b0\u1ee3c nh\u1eefng b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 \u0111\u00e1ng k\u1ec3 trong c\u00e1c h\u1ec7 th\u1ed1ng PECVD, PVD v\u00e0 MOCVD, bao ph\u1ee7 nhi\u1ec1u \u1ee9ng d\u1ee5ng trong l\u0129nh v\u1ef1c m\u1ea1 kim lo\u1ea1i v\u00e0 b\u00e1n d\u1eabn h\u1ee3p ch\u1ea5t.<\/p>\n\n\n\n

5. C\u00e1c thi\u1ebft b\u1ecb quan tr\u1ecdng kh\u00e1c<\/h3>\n\n\n\n

C\u00e1c thi\u1ebft b\u1ecb quan tr\u1ecdng kh\u00e1c h\u1ed7 tr\u1ee3 qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t chip v\u00e0 \u0111\u1ea3m b\u1ea3o n\u0103ng su\u1ea5t c\u0169ng nh\u01b0 ch\u1ea5t l\u01b0\u1ee3ng:<\/p>\n\n\n\n

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  • Ki\u1ec3m so\u00e1t quy tr\u00ecnh v\u00e0 ki\u1ec3m tra:<\/strong> Gi\u00e1m s\u00e1t c\u00e1c c\u00f4ng \u0111o\u1ea1n s\u1ea3n xu\u1ea5t \u1edf quy m\u00f4 nanomet \u0111\u1ec3 duy tr\u00ec n\u0103ng su\u1ea5t. M\u1eb7c d\u00f9 r\u00e0o c\u1ea3n c\u00f4ng ngh\u1ec7 c\u00f2n r\u1ea5t l\u1edbn, nh\u01b0ng c\u00e1c h\u1ec7 th\u1ed1ng trong n\u01b0\u1edbc \u0111ang b\u1eaft \u0111\u1ea7u thu h\u1eb9p kho\u1ea3ng c\u00e1ch n\u00e0y.<\/li>\n\n\n\n
  • C\u1ea5y ion:<\/strong> Thay \u0111\u1ed5i c\u00e1c t\u00ednh ch\u1ea5t \u0111i\u1ec7n c\u1ee7a ch\u1ea5t b\u00e1n d\u1eabn. C\u00e1c thi\u1ebft b\u1ecb c\u1ea5y ion n\u0103ng l\u01b0\u1ee3ng cao trong n\u01b0\u1edbc \u0111\u00e3 \u0111\u1ea1t \u0111\u01b0\u1ee3c nh\u1eefng b\u01b0\u1edbc \u0111\u1ed9t ph\u00e1 mang t\u00ednh \u201c0 \u0111\u1ebfn 1\u201d.<\/li>\n\n\n\n
  • \u0110\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP):<\/strong> \u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh l\u00e0m ph\u1eb3ng t\u1ea5m wafer tr\u00ean quy m\u00f4 to\u00e0n c\u1ea7u. C\u00e1c h\u1ec7 th\u1ed1ng CMP trong n\u01b0\u1edbc hi\u1ec7n \u0111\u00e3 chi\u1ebfm h\u01a1n 50% th\u1ecb ph\u1ea7n \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00f3 k\u00edch th\u01b0\u1edbc \u226528nm.<\/li>\n\n\n\n
  • L\u00e0m s\u1ea1ch t\u1ea5m wafer:<\/strong> Y\u1ebfu t\u1ed1 then ch\u1ed1t \u0111\u1ec3 s\u1ea3n xu\u1ea5t kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt. C\u00e1c h\u1ec7 th\u1ed1ng l\u00e0m s\u1ea1ch trong n\u01b0\u1edbc \u0111\u00e3 \u0111\u1ea1t \u0111\u01b0\u1ee3c t\u1ef7 l\u1ec7 n\u1ed9i \u0111\u1ecba h\u00f3a t\u01b0\u01a1ng \u0111\u1ed1i cao.<\/li>\n<\/ul>\n\n\n\n

    6. C\u01a1 h\u1ed9i v\u00e0 th\u00e1ch th\u1ee9c c\u1ee7a ng\u00e0nh v\u00e0o n\u0103m 2026<\/h3>\n\n\n\n

    S\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a ng\u00e0nh thi\u1ebft b\u1ecb b\u00e1n d\u1eabn trong n\u01b0\u1edbc \u0111\u01b0\u1ee3c th\u00fac \u0111\u1ea9y b\u1edfi s\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa c\u00f4ng ngh\u1ec7, nhu c\u1ea7u th\u1ecb tr\u01b0\u1eddng v\u00e0 s\u1ef1 h\u1ed7 tr\u1ee3 t\u1eeb ch\u00ednh s\u00e1ch. Vi\u1ec7c m\u1edf r\u1ed9ng quy m\u00f4 l\u1edbn c\u00e1c c\u01a1 s\u1edf s\u1ea3n xu\u1ea5t wafer cung c\u1ea5p nh\u1eefng m\u00f4i tr\u01b0\u1eddng th\u1eed nghi\u1ec7m qu\u00fd gi\u00e1, trong khi c\u00e1c qu\u1ef9 qu\u1ed1c gia th\u00fac \u0111\u1ea9y qu\u00e1 tr\u00ecnh \u0111\u1ed5i m\u1edbi. C\u00e1c \u0111\u1ed9t ph\u00e1 hi\u1ec7n nay t\u1eadp trung v\u00e0o c\u00e1c quy tr\u00ecnh \u0111\u00e3 tr\u01b0\u1edfng th\u00e0nh (\u226528nm), v\u1edbi m\u1ee5c ti\u00eau d\u1ea7n d\u1ea7n m\u1edf r\u1ed9ng sang c\u00e1c n\u00fat c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn. M\u1ed9t s\u1ed1 l\u0129nh v\u1ef1c nh\u01b0 quang kh\u1eafc, \u0111o l\u01b0\u1eddng cao c\u1ea5p v\u00e0 c\u1ea5y ion v\u1eabn l\u00e0 nh\u1eefng th\u00e1ch th\u1ee9c kh\u00f3 kh\u0103n. Thi\u1ebft b\u1ecb b\u00e1n d\u1eabn v\u1ed1n d\u0129 \u0111\u00f2i h\u1ecfi v\u1ed1n \u0111\u1ea7u t\u01b0 l\u1edbn, ngu\u1ed3n nh\u00e2n l\u1ef1c ch\u1ea5t l\u01b0\u1ee3ng cao v\u00e0 c\u00f4ng ngh\u1ec7 ti\u00ean ti\u1ebfn, \u0111\u00f2i h\u1ecfi s\u1ef1 ph\u00e1t tri\u1ec3n l\u00e2u d\u00e0i v\u00e0 s\u1ef1 h\u1ee3p t\u00e1c trong h\u1ec7 sinh th\u00e1i.<\/p>\n\n\n\n

    B\u00ean trong ph\u00f2ng s\u1ea1ch, c\u00e1c c\u00e1nh tay robot li\u00ean t\u1ee5c \u0111\u01b0a c\u00e1c t\u1ea5m wafer v\u00e0o c\u00e1c m\u00e1y kh\u1eafc trong n\u01b0\u1edbc. Vi\u1ec7c gi\u00e1m s\u00e1t theo th\u1eddi gian th\u1ef1c \u1edf c\u1ea5p \u0111\u1ed9 nanomet \u0111\u1ea3m b\u1ea3o c\u00e1c th\u00f4ng s\u1ed1 \u1ed5n \u0111\u1ecbnh v\u00e0 \u0111\u1ea1t \u0111\u01b0\u1ee3c n\u0103ng su\u1ea5t m\u1ee5c ti\u00eau. C\u00e1c k\u1ef9 s\u01b0 ghi ch\u00e9p d\u1eef li\u1ec7u \u2014 minh ch\u1ee9ng cho vi\u1ec7c x\u00e1c nh\u1eadn th\u00e0nh c\u00f4ng c\u1ee7a thi\u1ebft b\u1ecb trong n\u01b0\u1edbc. Trong khi \u0111\u00f3, c\u00e1c m\u1eabu th\u1eed nghi\u1ec7m c\u1ee7a m\u00e1y quang kh\u1eafc th\u1ebf h\u1ec7 m\u1edbi \u0111ang \u0111\u01b0\u1ee3c hi\u1ec7u chu\u1ea9n c\u1ea9n th\u1eadn, v\u1edbi ngu\u1ed3n s\u00e1ng ph\u00e1t ra \u00e1nh s\u00e1ng d\u1ecbu nh\u1eb9. Tr\u00ean t\u01b0\u1eddng c\u00f3 d\u00f2ng ch\u1eef: \u201cM\u1ed7i nanomet ti\u1ebfn b\u1ed9 \u0111\u1ec1u do ch\u00ednh tay ch\u00fang ta \u0111o l\u01b0\u1eddng.\u201d<\/p>","protected":false},"excerpt":{"rendered":"

    The heartbeat of the semiconductor industry is maintained by highly sophisticated core equipment, each worth millions of dollars. Engineers monitor circuits thousands of times finer than human hair through precision windows, ensuring every step in modern chip manufacturing meets the highest standards. Every breakthrough in semiconductor technology relies directly on advances in these devices, which […]<\/p>\n","protected":false},"author":1,"featured_media":2115,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[795,792,793,343,797,276,800,706,799,798,40,721,794,350,796],"class_list":["post-2114","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-2026-trends","tag-chip-manufacturing","tag-cleaning-equipment","tag-cmp-equipment","tag-domestic-manufacturers","tag-etching-equipment","tag-high-end-equipment","tag-ion-implantation","tag-lithography-machine","tag-localization","tag-semiconductor-equipment","tag-semiconductor-industry","tag-technological-barrier","tag-thin-film-deposition","tag-wafer-fab"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2114","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=2114"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2114\/revisions"}],"predecessor-version":[{"id":2116,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/2114\/revisions\/2116"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/2115"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=2114"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=2114"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=2114"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}