{"id":2112,"date":"2026-04-03T05:44:04","date_gmt":"2026-04-03T05:44:04","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2112"},"modified":"2026-04-03T05:44:13","modified_gmt":"2026-04-03T05:44:13","slug":"silicon-carbide-sic-epitaxy-equipment-and-industry-overview","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/silicon-carbide-sic-epitaxy-equipment-and-industry-overview\/","title":{"rendered":"Thi\u1ebft b\u1ecb ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tr\u00ean ch\u1ea5t n\u1ec1n (epitaxy) b\u1eb1ng cacbua silic (SiC) v\u00e0 t\u1ed5ng quan v\u1ec1 ng\u00e0nh"},"content":{"rendered":"<p>Epitaxy b\u00e1n d\u1eabn l\u00e0 qu\u00e1 tr\u00ecnh t\u1ea1o m\u00e0ng m\u1ecfng \u0111\u01a1n tinh th\u1ec3 tr\u00ean c\u00e1c ch\u1ea5t n\u1ec1n silicon ho\u1eb7c cacbua silic (SiC). L\u1edbp epitaxy c\u00f3 c\u00f9ng h\u01b0\u1edbng tinh th\u1ec3 v\u1edbi ch\u1ea5t n\u1ec1n v\u00e0 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c ph\u00e1t tri\u1ec3n b\u1eb1ng c\u00e1ch s\u1eed d\u1ee5ng c\u00f9ng m\u1ed9t v\u1eadt li\u1ec7u (homoepitaxy) ho\u1eb7c c\u00e1c v\u1eadt li\u1ec7u kh\u00e1c nhau (heteroepitaxy). \u0110\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 cao v\u00e0 c\u00f4ng su\u1ea5t cao, s\u1ef1 ph\u00e1t tri\u1ec3n epitaxy gi\u00fap t\u1ed1i \u01b0u h\u00f3a hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb: c\u00e1c l\u1edbp epitaxy c\u00f3 \u0111i\u1ec7n tr\u1edf su\u1ea5t cao cung c\u1ea5p \u0111i\u1ec7n \u00e1p \u0111\u1ee9t cao, trong khi c\u00e1c ch\u1ea5t n\u1ec1n c\u00f3 \u0111i\u1ec7n tr\u1edf su\u1ea5t th\u1ea5p l\u00e0m gi\u1ea3m \u0111i\u1ec7n tr\u1edf n\u1ed1i ti\u1ebfp, t\u1eeb \u0111\u00f3 l\u00e0m gi\u1ea3m \u0111i\u1ec7n \u00e1p b\u00e3o h\u00f2a. C\u00e1c l\u1edbp epitaxial c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c pha t\u1ea1p th\u00e0nh lo\u1ea1i P ho\u1eb7c lo\u1ea1i N, t\u1ea1o th\u00e0nh c\u00e1c ti\u1ebfp gi\u00e1p PN cho ph\u00e9p d\u00f2ng \u0111i\u1ec7n ch\u1ea1y m\u1ed9t chi\u1ec1u, t\u1eeb \u0111\u00f3 th\u1ef1c hi\u1ec7n ch\u1ee9c n\u0103ng ch\u1ec9nh l\u01b0u. Epitaxy SiC \u0111\u01b0\u1ee3c \u1ee9ng d\u1ee5ng r\u1ed9ng r\u00e3i trong \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t, c\u00e1c thi\u1ebft b\u1ecb t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 c\u00e1c \u1ee9ng d\u1ee5ng quang \u0111i\u1ec7n t\u1eed.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png\" alt=\"\" class=\"wp-image-2091\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">1. Chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p SiC v\u00e0 ph\u00e2n ph\u1ed1i gi\u00e1 tr\u1ecb<\/h3>\n\n\n\n<p>Chu\u1ed7i ng\u00e0nh c\u00f4ng nghi\u1ec7p thi\u1ebft b\u1ecb SiC bao g\u1ed3m ba ph\u00e2n kh\u00fac ch\u00ednh: ch\u1ea5t n\u1ec1n, qu\u00e1 tr\u00ecnh m\u1ecdc tinh th\u1ec3 v\u00e0 s\u1ea3n xu\u1ea5t thi\u1ebft b\u1ecb (thi\u1ebft k\u1ebf, ch\u1ebf t\u1ea1o v\u00e0 \u0111\u00f3ng g\u00f3i). C\u00e1c giai \u0111o\u1ea1n ch\u1ea5t n\u1ec1n v\u00e0 epitaxy chi\u1ebfm kho\u1ea3ng 70% chu\u1ed7i gi\u00e1 tr\u1ecb, trong khi qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb \u1edf giai \u0111o\u1ea1n h\u1ea1 ngu\u1ed3n ch\u1ec9 chi\u1ebfm 30%. \u0110i\u1ec1u n\u00e0y tr\u00e1i ng\u01b0\u1ee3c v\u1edbi c\u00e1c thi\u1ebft b\u1ecb silicon truy\u1ec1n th\u1ed1ng, n\u01a1i qu\u00e1 tr\u00ecnh x\u1eed l\u00fd sau khi c\u1eaft wafer chi\u1ebfm ph\u1ea7n l\u1edbn chi ph\u00ed s\u1ea3n xu\u1ea5t. S\u1ef1 t\u1eadp trung gi\u00e1 tr\u1ecb cao \u1edf giai \u0111o\u1ea1n th\u01b0\u1ee3ng ngu\u1ed3n nh\u1ea5n m\u1ea1nh t\u1ea7m quan tr\u1ecdng chi\u1ebfn l\u01b0\u1ee3c c\u1ee7a c\u00f4ng ngh\u1ec7 ch\u1ea5t n\u1ec1n v\u00e0 epitaxy.<\/p>\n\n\n\n<p><strong>Ph\u00e2n \u0111o\u1ea1n ch\u1ea5t n\u1ec1n<\/strong> bao g\u1ed3m qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3, c\u1eaft l\u00e1t wafer, m\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng. Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c th\u1ef1c hi\u1ec7n th\u00f4ng qua ph\u01b0\u01a1ng ph\u00e1p V\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT), Ph\u1ee7 h\u01a1i h\u00f3a h\u1ecdc nhi\u1ec7t \u0111\u1ed9 cao (HTCVD) ho\u1eb7c Ph\u1ee7 l\u1edbp tr\u00ean pha l\u1ecfng (LPE). Vi\u1ec7c c\u1eaft wafer s\u1eed d\u1ee5ng c\u01b0a d\u00e2y, d\u00e2y kim c\u01b0\u01a1ng, laser ho\u1eb7c c\u00e1c ph\u01b0\u01a1ng ph\u00e1p t\u00e1ch l\u1ea1nh, trong khi qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng c\u01a1 h\u1ecdc h\u00f3a h\u1ecdc (CMP) \u0111\u1ea3m b\u1ea3o b\u1ec1 m\u1eb7t ph\u1eb3ng, kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt, ph\u00f9 h\u1ee3p cho qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 tr\u00ean tinh th\u1ec3.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2. Quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t n\u1ec1n SiC<\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>S\u1ef1 ph\u00e1t tri\u1ec3n c\u1ee7a tinh th\u1ec3:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>PVT:<\/strong> Ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 SiC. Thi\u1ebft b\u1ecb t\u01b0\u01a1ng \u0111\u1ed1i \u0111\u01a1n gi\u1ea3n, chi ph\u00ed v\u1eadn h\u00e0nh th\u1ea5p v\u00e0 vi\u1ec7c ki\u1ec3m so\u00e1t quy tr\u00ecnh c\u0169ng d\u1ec5 d\u00e0ng.<\/li>\n\n\n\n<li><strong>HTCVD:<\/strong> Cho ra c\u00e1c tinh th\u1ec3 c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao nh\u01b0ng t\u1ed1c \u0111\u1ed9 ph\u00e1t tri\u1ec3n ch\u1eadm h\u01a1n, n\u0103ng su\u1ea5t th\u1ea5p h\u01a1n v\u00e0 chi ph\u00ed cao h\u01a1n.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> Cho ra c\u00e1c tinh th\u1ec3 ch\u1ea5t l\u01b0\u1ee3ng cao, \u00edt khuy\u1ebft t\u1eadt, nh\u01b0ng t\u1ed1c \u0111\u1ed9 ph\u00e1t tri\u1ec3n v\u00e0 k\u00edch th\u01b0\u1edbc b\u1ecb h\u1ea1n ch\u1ebf.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>C\u1eaft l\u00e1t wafer:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>M\u00e1y c\u01b0a d\u00e2y:<\/strong> Ph\u01b0\u01a1ng ph\u00e1p ti\u00eau chu\u1ea9n v\u1edbi n\u0103ng su\u1ea5t cao v\u00e0 chi ph\u00ed th\u1ea5p.<\/li>\n\n\n\n<li><strong>C\u1eaft b\u1eb1ng d\u00e2y kim c\u01b0\u01a1ng v\u00e0 laser:<\/strong> Mang l\u1ea1i hi\u1ec7u qu\u1ea3 cao h\u01a1n, gi\u1ea3m thi\u1ec3u t\u1ed5n th\u1ea5t nguy\u00ean li\u1ec7u v\u00e0 mang l\u1ea1i l\u1ee3i \u00edch cho m\u00f4i tr\u01b0\u1eddng.<\/li>\n\n\n\n<li><strong>Ph\u01b0\u01a1ng ph\u00e1p t\u00e1ch l\u1ea1nh:<\/strong> S\u1eed d\u1ee5ng \u1ee9ng su\u1ea5t v\u1eadt li\u1ec7u b\u00ean trong \u0111\u1ec3 t\u00e1ch c\u00e1c t\u1ea5m wafer v\u1edbi m\u1ee9c t\u1ed5n th\u1ea5t t\u1ed1i thi\u1ec3u.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>M\u00e0i v\u00e0 \u0111\u00e1nh b\u00f3ng:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CMP:<\/strong> Ph\u01b0\u01a1ng ph\u00e1p ch\u00ednh \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c b\u1ec1 m\u1eb7t t\u1ea5m wafer c\u1ef1c k\u1ef3 ph\u1eb3ng v\u00e0 kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt, y\u1ebfu t\u1ed1 then ch\u1ed1t cho qu\u00e1 tr\u00ecnh m\u1ecdc l\u1edbp ph\u1ee7 ch\u1ea5t l\u01b0\u1ee3ng cao.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">3. C\u00e1c quy tr\u00ecnh v\u00e0 thi\u1ebft b\u1ecb epitaxy<\/h3>\n\n\n\n<p>Qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 epitaxial l\u00e0 m\u1ed9t b\u01b0\u1edbc quan tr\u1ecdng trong quy tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb SiC. Kh\u00e1c v\u1edbi c\u00e1c thi\u1ebft b\u1ecb silicon truy\u1ec1n th\u1ed1ng, c\u00e1c thi\u1ebft b\u1ecb SiC kh\u00f4ng th\u1ec3 \u0111\u01b0\u1ee3c ch\u1ebf t\u1ea1o tr\u1ef1c ti\u1ebfp tr\u00ean ch\u1ea5t n\u1ec1n. Tr\u01b0\u1edbc khi ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb, c\u1ea7n ph\u1ea3i ph\u00e1t tri\u1ec3n m\u1ed9t l\u1edbp ph\u1ee7 epitaxial \u0111\u01a1n tinh th\u1ec3 ch\u1ea5t l\u01b0\u1ee3ng cao tr\u00ean ch\u1ea5t n\u1ec1n.<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>C\u00e1c lo\u1ea1i epitaxy:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\u0110\u1ed3ng tinh th\u1ec3:<\/strong> Tr\u1ed3ng SiC tr\u00ean c\u00e1c ch\u1ea5t n\u1ec1n SiC d\u1eabn \u0111i\u1ec7n, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng cho c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t th\u1ea5p, c\u00e1c \u1ee9ng d\u1ee5ng t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 quang \u0111i\u1ec7n t\u1eed.<\/li>\n\n\n\n<li><strong>Heteroepitaxy:<\/strong> Tr\u1ed3ng GaN tr\u00ean c\u00e1c ch\u1ea5t n\u1ec1n SiC b\u00e1n d\u1eabn, \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng cho c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>Thi\u1ebft b\u1ecb epitaxy:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CVD (Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u01a1i h\u00f3a h\u1ecdc):<\/strong> C\u00e1c ti\u1ec1n ch\u1ea5t \u1edf d\u1ea1ng kh\u00ed ph\u1ea3n \u1ee9ng tr\u00ean c\u00e1c \u0111\u1ebf SiC \u0111\u01b0\u1ee3c gia nhi\u1ec7t \u0111\u1ec3 t\u1ea1o th\u00e0nh c\u00e1c l\u1edbp epitactic.<\/li>\n\n\n\n<li><strong>MOCVD (Ph\u01b0\u01a1ng ph\u00e1p l\u1eafng \u0111\u1ecdng h\u00f3a h\u1ecdc t\u1eeb kh\u00ed kim lo\u1ea1i-h\u1eefu c\u01a1):<\/strong> S\u1eed d\u1ee5ng c\u00e1c ti\u1ec1n ch\u1ea5t h\u1eefu c\u01a1 kim lo\u1ea1i, cho ph\u00e9p l\u1eafng \u0111\u1ecdng \u1edf nhi\u1ec7t \u0111\u1ed9 th\u1ea5p h\u01a1n v\u00e0 t\u1ea1o ra c\u00e1c l\u1edbp si\u00eau m\u1ecfng cho c\u00e1c c\u1ea5u tr\u00fac ph\u1ee9c t\u1ea1p.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> L\u00e0m tan ch\u1ea3y nguy\u00ean li\u1ec7u trong dung m\u00f4i kim lo\u1ea1i n\u00f3ng ch\u1ea3y v\u00e0 l\u1eafng \u0111\u1ecdng ch\u00fang l\u00ean b\u1ec1 m\u1eb7t n\u1ec1n khi ngu\u1ed9i \u0111i.<\/li>\n\n\n\n<li><strong>MBE (Ph\u01b0\u01a1ng ph\u00e1p k\u1ebft tinh l\u1edbp b\u1eb1ng ch\u00f9m ph\u00e2n t\u1eed):<\/strong> L\u1edbp ph\u1ee7 c\u00e1c l\u1edbp nguy\u00ean t\u1eed trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng c\u1ef1c cao \u0111\u1ec3 ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c \u0111\u1ed9 d\u00e0y v\u00e0 th\u00e0nh ph\u1ea7n c\u1ee7a m\u00e0ng.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>C\u1eaft mi\u1ebfng wafer sau qu\u00e1 tr\u00ecnh epitaxy:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>C\u1eaft mi\u1ebfng b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p c\u01a1 h\u1ecdc<\/strong> v\u00e0 <strong>c\u1eaft b\u1eb1ng tia laser<\/strong> l\u00e0 \u0111i\u1ec1u th\u01b0\u1eddng g\u1eb7p.<\/li>\n\n\n\n<li><strong>C\u1eaft b\u1eb1ng laser<\/strong> t\u1eadp trung c\u00e1c xung n\u0103ng l\u01b0\u1ee3ng cao v\u00e0o c\u00e1c v\u00f9ng di\u1ec7n t\u00edch nh\u1ecf \u0111\u1ec3 l\u00e0m bay h\u01a1i ho\u1eb7c bi\u1ebfn \u0111\u1ed5i v\u1eadt li\u1ec7u, t\u1eeb \u0111\u00f3 gi\u1ea3m thi\u1ec3u t\u1ed5n th\u1ea5t do v\u1ebft c\u1eaft v\u00e0 s\u1ef1 h\u00ecnh th\u00e0nh v\u1ebft n\u1ee9t.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">4. Xu h\u01b0\u1edbng th\u1ecb tr\u01b0\u1eddng v\u00e0 c\u00f4ng ngh\u1ec7<\/h3>\n\n\n\n<p>S\u1ea3n xu\u1ea5t ch\u1ea5t n\u1ec1n v\u00e0 qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 SiC v\u1eabn l\u00e0 nh\u1eefng l\u0129nh v\u1ef1c \u0111\u00f2i h\u1ecfi c\u00f4ng ngh\u1ec7 cao trong ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn to\u00e0n c\u1ea7u. C\u00e1c xu h\u01b0\u1edbng trong t\u01b0\u01a1ng lai bao g\u1ed3m:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>T\u0103ng k\u00edch th\u01b0\u1edbc \u0111\u1ebf t\u1eeb 6 inch l\u00ean 8 inch ho\u1eb7c l\u1edbn h\u01a1n \u0111\u1ec3 gi\u1ea3m chi ph\u00ed \u0111\u01a1n v\u1ecb.<\/li>\n\n\n\n<li>N\u00e2ng c\u1ea5p thi\u1ebft b\u1ecb epitaxy nh\u1eb1m \u0111\u1ea1t \u0111\u1ed9 ch\u00ednh x\u00e1c cao, m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt th\u1ea5p v\u00e0 kh\u1ea3 n\u0103ng ki\u1ec3m so\u00e1t l\u1edbp nguy\u00ean t\u1eed, t\u1eeb \u0111\u00f3 \u0111\u00e1p \u1ee9ng c\u00e1c y\u00eau c\u1ea7u v\u1ec1 c\u00f4ng su\u1ea5t cao v\u00e0 t\u1ea7n s\u1ed1 cao.<\/li>\n\n\n\n<li>Ph\u00e1t tri\u1ec3n c\u00e1c c\u00f4ng ngh\u1ec7 c\u1eaft l\u00e1t theo h\u01b0\u1edbng c\u00e1c ph\u01b0\u01a1ng ph\u00e1p t\u00e1ch b\u1eb1ng laser kh\u00f4ng ti\u1ebfp x\u00fac, t\u1ed5n th\u1ea5t th\u1ea5p v\u00e0 t\u00e1ch l\u1ea1nh.<\/li>\n\n\n\n<li>Th\u00fac \u0111\u1ea9y s\u1ef1 t\u1ef1 ch\u1ee7 v\u1ec1 thi\u1ebft b\u1ecb trong n\u01b0\u1edbc v\u00e0 tr\u00ean to\u00e0n c\u1ea7u, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong l\u0129nh v\u1ef1c l\u00f2 \u00e9p tinh th\u1ec3 v\u00e0 h\u1ec7 th\u1ed1ng c\u1eaft l\u00e1t ch\u00ednh x\u00e1c cao.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">5. K\u1ebft lu\u1eadn<\/h3>\n\n\n\n<p><a href=\"https:\/\/www.zmsh-semitech.com\/vi\/san-pham\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-1-color\">Thi\u1ebft b\u1ecb ph\u00e1t tri\u1ec3n l\u1edbp ph\u1ee7 SiC <\/mark><\/a>l\u00e0 y\u1ebfu t\u1ed1 thi\u1ebft y\u1ebfu trong s\u1ea3n xu\u1ea5t c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao, t\u1ea7n s\u1ed1 v\u00f4 tuy\u1ebfn (RF) v\u00e0 quang \u0111i\u1ec7n t\u1eed. Ch\u1ea5t l\u01b0\u1ee3ng c\u1ee7a ch\u1ea5t n\u1ec1n, c\u00e1c l\u1edbp epitaksi v\u00e0 thi\u1ebft b\u1ecb c\u1eaft l\u00e1t \u1ea3nh h\u01b0\u1edfng tr\u1ef1c ti\u1ebfp \u0111\u1ebfn hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb v\u00e0 kh\u1ea3 n\u0103ng c\u1ea1nh tranh c\u1ee7a ng\u00e0nh. V\u1edbi nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng \u0111\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao, s\u1ef1 ph\u00e1t tri\u1ec3n li\u00ean t\u1ee5c v\u00e0 n\u1ed9i \u0111\u1ecba h\u00f3a c\u00f4ng ngh\u1ec7 epitaksi s\u1ebd \u0111\u00f3ng vai tr\u00f2 ng\u00e0y c\u00e0ng quan tr\u1ecdng trong chu\u1ed7i gi\u00e1 tr\u1ecb b\u00e1n d\u1eabn.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor epitaxy refers to the process of growing single-crystal thin films on silicon or silicon carbide (SiC) substrates. The epitaxial layer shares the same crystal orientation as the substrate and can be grown using either the same material (homoepitaxy) or different materials (heteroepitaxy). For high-frequency and high-power devices, epitaxial growth helps optimize device performance: high-resistivity [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":2091,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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