{"id":1923,"date":"2026-03-16T05:17:47","date_gmt":"2026-03-16T05:17:47","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=1923"},"modified":"2026-03-16T05:25:25","modified_gmt":"2026-03-16T05:25:25","slug":"scaling-up-overcoming-the-challenges-of-12-inch-sic-wafer-production","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/scaling-up-overcoming-the-challenges-of-12-inch-sic-wafer-production\/","title":{"rendered":"M\u1edf r\u1ed9ng quy m\u00f4: V\u01b0\u1ee3t qua nh\u1eefng th\u00e1ch th\u1ee9c trong s\u1ea3n xu\u1ea5t t\u1ea5m wafer SiC 12 inch"},"content":{"rendered":"

Cacbua silic (SiC) \u0111\u00e3 tr\u1edf th\u00e0nh m\u1ed9t v\u1eadt li\u1ec7u quan tr\u1ecdng trong l\u0129nh v\u1ef1c \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t cao, \u0111\u1eb7c bi\u1ec7t l\u00e0 trong xe \u0111i\u1ec7n (EV), h\u1ec7 th\u1ed1ng n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o v\u00e0 thi\u1ebft b\u1ecb c\u00f4ng nghi\u1ec7p ti\u00ean ti\u1ebfn. Nh\u1edd kh\u1ea3 n\u0103ng d\u1eabn nhi\u1ec7t v\u01b0\u1ee3t tr\u1ed9i, \u0111i\u1ec7n \u00e1p \u0111\u1ee9t cao v\u00e0 kho\u1ea3ng c\u00e1ch d\u1ea3i n\u0103ng l\u01b0\u1ee3ng r\u1ed9ng, SiC l\u00e0 l\u1ef1a ch\u1ecdn l\u00fd t\u01b0\u1edfng cho c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n c\u00f4ng su\u1ea5t. V\u1edbi vi\u1ec7c ng\u00e0nh c\u00f4ng nghi\u1ec7p b\u00e1n d\u1eabn \u0111ang h\u01b0\u1edbng t\u1edbi hi\u1ec7u su\u1ea5t cao h\u01a1n v\u00e0 s\u1ea3n xu\u1ea5t quy m\u00f4 l\u1edbn h\u01a1n, vi\u1ec7c chuy\u1ec3n \u0111\u1ed5i t\u1eeb c\u00e1c t\u1ea5m wafer SiC 6 inch v\u00e0 8 inch sang t\u1ea5m wafer 12 inch mang l\u1ea1i c\u1ea3 nh\u1eefng c\u01a1 h\u1ed9i l\u1edbn l\u1eabn nh\u1eefng th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt \u0111\u00e1ng k\u1ec3.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1. T\u1ea1i sao T\u1ea5m wafer SiC 12 inch<\/mark><\/a>?<\/h2>\n\n\n\n

Nhu c\u1ea7u v\u1ec1 c\u00e1c t\u1ea5m wafer SiC k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n xu\u1ea5t ph\u00e1t t\u1eeb y\u00eau c\u1ea7u gi\u1ea3m chi ph\u00ed tr\u00ean m\u1ed7i thi\u1ebft b\u1ecb v\u00e0 t\u0103ng n\u0103ng su\u1ea5t s\u1ea3n xu\u1ea5t. C\u00e1c t\u1ea5m wafer l\u1edbn h\u01a1n cho ph\u00e9p s\u1ea3n xu\u1ea5t \u0111\u01b0\u1ee3c nhi\u1ec1u thi\u1ebft b\u1ecb h\u01a1n t\u1eeb m\u1ed9t t\u1ea5m n\u1ec1n duy nh\u1ea5t, t\u1eeb \u0111\u00f3 gi\u00fap gi\u1ea3m chi ph\u00ed s\u1ea3n xu\u1ea5t v\u00e0 n\u00e2ng cao hi\u1ec7u su\u1ea5t thu h\u1ed3i tr\u00ean m\u1ed7i t\u1ea5m wafer. Ngo\u00e0i ra, c\u00e1c t\u1ea5m wafer 12 inch c\u00f2n h\u1ed7 tr\u1ee3 vi\u1ec7c ph\u00e1t tri\u1ec3n c\u00e1c m\u00f4-\u0111un c\u00f4ng su\u1ea5t m\u1eadt \u0111\u1ed9 cao, v\u1ed1n \u0111\u00f3ng vai tr\u00f2 quan tr\u1ecdng \u0111\u1ed1i v\u1edbi c\u00e1c \u1ee9ng d\u1ee5ng xe \u0111i\u1ec7n th\u1ebf h\u1ec7 m\u1edbi v\u00e0 h\u1ec7 th\u1ed1ng l\u01b0\u1edbi \u0111i\u1ec7n.<\/p>\n\n\n\n

Tuy nhi\u00ean, vi\u1ec7c chuy\u1ec3n t\u1eeb t\u1ea5m wafer 8 inch sang 12 inch kh\u00f4ng ch\u1ec9 \u0111\u01a1n thu\u1ea7n l\u00e0 vi\u1ec7c t\u0103ng k\u00edch th\u01b0\u1edbc tinh th\u1ec3. C\u00e1c t\u00ednh ch\u1ea5t c\u01a1 h\u1ecdc v\u00e0 nhi\u1ec7t c\u1ee7a SiC khi\u1ebfn qu\u00e1 tr\u00ecnh chuy\u1ec3n \u0111\u1ed5i n\u00e0y tr\u1edf n\u00ean v\u00f4 c\u00f9ng kh\u00f3 kh\u0103n.<\/p>\n\n\n\n

2. Nh\u1eefng th\u00e1ch th\u1ee9c ch\u00ednh trong s\u1ea3n xu\u1ea5t t\u1ea5m wafer SiC 12 inch<\/h2>\n\n\n\n

2.1 T\u0103ng tr\u01b0\u1edfng tinh th\u1ec3 v\u00e0 qu\u1ea3n l\u00fd khuy\u1ebft t\u1eadt<\/h3>\n\n\n\n

C\u00e1c tinh th\u1ec3 \u0111\u01a1n tinh th\u1ec3 SiC \u0111\u01b0\u1ee3c nu\u00f4i c\u1ea5y b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p v\u1eadn chuy\u1ec3n h\u01a1i v\u1eadt l\u00fd (PVT), trong \u0111\u00f3 c\u00e1c h\u1ee3p ch\u1ea5t silicon v\u00e0 carbon bay h\u01a1i tr\u1ef1c ti\u1ebfp v\u00e0 k\u1ebft t\u1ee7a l\u00ean m\u1ed9t tinh th\u1ec3 h\u1ea1t gi\u1ed1ng. \u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer 12 inch, vi\u1ec7c duy tr\u00ec t\u00ednh \u0111\u1ed3ng nh\u1ea5t c\u1ee7a tinh th\u1ec3 ng\u00e0y c\u00e0ng tr\u1edf n\u00ean kh\u00f3 kh\u0103n:<\/p>\n\n\n\n

    \n
  • \u00c1p l\u1ef1c nhi\u1ec7t<\/strong>: C\u00e1c tinh th\u1ec3 l\u1edbn h\u01a1n ch\u1ecbu s\u1ef1 ch\u00eanh l\u1ec7ch nhi\u1ec7t \u0111\u1ed9 cao h\u01a1n, d\u1eabn \u0111\u1ebfn s\u1ef1 h\u00ecnh th\u00e0nh c\u00e1c khuy\u1ebft t\u1eadt d\u1ecbch chuy\u1ec3n v\u00e0 c\u00e1c \u1ed1ng vi m\u00f4.<\/li>\n\n\n\n
  • M\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt<\/strong>: C\u00e1c \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n d\u1ec5 b\u1ecb l\u1ed7i x\u1ebfp ch\u1ed3ng v\u00e0 sai l\u1ec7ch m\u1eb7t \u0111\u00e1y h\u01a1n, \u0111i\u1ec1u n\u00e0y c\u00f3 th\u1ec3 l\u00e0m gi\u1ea3m hi\u1ec7u su\u1ea5t c\u1ee7a thi\u1ebft b\u1ecb.<\/li>\n<\/ul>\n\n\n\n

    Vi\u1ec7c ki\u1ec3m so\u00e1t nhi\u1ec7t \u0111\u1ed9 ti\u00ean ti\u1ebfn v\u00e0 \u0111\u1ecbnh h\u01b0\u1edbng h\u1ea1t gi\u1ed1ng t\u1ed1i \u01b0u l\u00e0 y\u1ebfu t\u1ed1 thi\u1ebft y\u1ebfu \u0111\u1ec3 gi\u1ea3m thi\u1ec3u s\u1ef1 lan r\u1ed9ng c\u1ee7a c\u00e1c khuy\u1ebft t\u1eadt.<\/p>\n\n\n\n

    2.2 \u0110\u1ed9 ch\u00ednh x\u00e1c khi c\u1eaft l\u00e1t wafer<\/h3>\n\n\n\n

    Vi\u1ec7c c\u1eaft c\u00e1c th\u1ecfi SiC 12 inch th\u00e0nh c\u00e1c t\u1ea5m wafer \u0111\u00f2i h\u1ecfi \u0111\u1ed9 ch\u00ednh x\u00e1c c\u1ef1c cao. \u0110\u1ed9 c\u1ee9ng c\u1ee7a SiC (9,5 theo thang Mohs) \u0111\u00f2i h\u1ecfi ph\u1ea3i s\u1eed d\u1ee5ng m\u00e1y c\u01b0a d\u00e2y kim c\u01b0\u01a1ng chuy\u00ean d\u1ee5ng ho\u1eb7c c\u00e1c h\u1ec7 th\u1ed1ng c\u1eaft laser ti\u00ean ti\u1ebfn. C\u00e1c th\u00e1ch th\u1ee9c bao g\u1ed3m:<\/p>\n\n\n\n

      \n
    • S\u1ef1 m\u00f2n v\u00e0 g\u00e3y l\u01b0\u1ee1i dao<\/strong>: C\u00e1c th\u1ecfi kim lo\u1ea1i c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n s\u1ebd l\u00e0m t\u0103ng th\u1eddi gian c\u1eaft, khi\u1ebfn d\u00e2y c\u1eaft b\u1ecb m\u00f2n nhanh h\u01a1n v\u00e0 l\u00e0m gi\u1ea3m ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t.<\/li>\n\n\n\n
    • S\u1ef1 s\u1ee9t m\u1ebb m\u00e9p v\u00e0 c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf<\/strong>: B\u1ea5t k\u1ef3 t\u00e1c \u0111\u1ed9ng c\u01a1 h\u1ecdc n\u00e0o c\u0169ng c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt lan truy\u1ec1n trong qu\u00e1 tr\u00ecnh ch\u1ebf t\u1ea1o thi\u1ebft b\u1ecb.<\/li>\n\n\n\n
    • L\u00e0m m\u00e1t v\u00e0 lo\u1ea1i b\u1ecf m\u1ea3nh v\u1ee5n<\/strong>: Vi\u1ec7c duy tr\u00ec nhi\u1ec7t \u0111\u1ed9 l\u00e0m m\u00e1t \u0111\u1ed3ng \u0111\u1ec1u v\u00e0 lo\u1ea1i b\u1ecf b\u00f9n hi\u1ec7u qu\u1ea3 l\u00e0 y\u1ebfu t\u1ed1 quan tr\u1ecdng \u0111\u1ec3 ng\u0103n ng\u1eeba h\u01b0 h\u1ecfng do nhi\u1ec7t.<\/li>\n<\/ul>\n\n\n\n

      2.3 \u0110\u00e1nh b\u00f3ng b\u1ec1 m\u1eb7t v\u00e0 \u0111\u1ed9 ph\u1eb3ng<\/h3>\n\n\n\n

      \u0110\u1ed1i v\u1edbi c\u00e1c thi\u1ebft b\u1ecb c\u00f4ng su\u1ea5t cao, \u0111\u1ed9 ph\u1eb3ng c\u1ee7a t\u1ea5m wafer, \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t l\u00e0 nh\u1eefng y\u1ebfu t\u1ed1 quan tr\u1ecdng. Vi\u1ec7c \u0111\u00e1nh b\u00f3ng c\u00e1c t\u1ea5m wafer 12 inch kh\u00f3 kh\u0103n h\u01a1n v\u00ec:<\/p>\n\n\n\n

        \n
      • Nguy c\u01a1 bi\u1ebfn d\u1ea1ng<\/strong>: C\u00e1c t\u1ea5m wafer l\u1edbn v\u00e0 m\u1ecfng d\u1ec5 b\u1ecb u\u1ed1n cong trong qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc-c\u01a1 h\u1ecdc (CMP).<\/li>\n\n\n\n
      • Ki\u1ec3m so\u00e1t \u0111\u1ed9 ph\u1eb3ng<\/strong>: \u0110\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 l\u1ec7ch \u0111\u1ed9 d\u00e0y t\u1ed5ng th\u1ec3 (TTV) trong ph\u1ea1m vi v\u00e0i micromet, c\u1ea7n ph\u1ea3i c\u00f3 thi\u1ebft b\u1ecb \u0111\u00e1nh b\u00f3ng ti\u00ean ti\u1ebfn.<\/li>\n<\/ul>\n\n\n\n

        3. C\u00e1c gi\u1ea3i ph\u00e1p c\u00f4ng ngh\u1ec7<\/h2>\n\n\n\n

        3.1 T\u1ed1i \u01b0u h\u00f3a qu\u00e1 tr\u00ecnh k\u1ebft tinh<\/h3>\n\n\n\n
          \n
        • L\u00f2 PVT c\u1ea3i ti\u1ebfn<\/strong>: C\u00e1c l\u00f2 nung hi\u1ec7n \u0111\u1ea1i c\u00f3 ch\u1ee9c n\u0103ng \u0111i\u1ec1u khi\u1ec3n nhi\u1ec7t \u0111\u1ed9 theo nhi\u1ec1u v\u00f9ng gi\u00fap \u0111\u1ea3m b\u1ea3o \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u nhi\u1ec7t t\u1ed1t h\u01a1n.<\/li>\n\n\n\n
        • K\u1ef9 thu\u1eadt bi\u1ebfn \u0111\u1ed5i gen<\/strong>: Vi\u1ec7c s\u1eed d\u1ee5ng c\u00e1c tinh th\u1ec3 h\u1ea1t gi\u1ed1ng c\u00f3 k\u00edch th\u01b0\u1edbc l\u1edbn h\u01a1n v\u00e0 kh\u00f4ng c\u00f3 khuy\u1ebft t\u1eadt s\u1ebd gi\u00fap gi\u1ea3m thi\u1ec3u s\u1ef1 lan truy\u1ec1n c\u1ee7a khuy\u1ebft t\u1eadt.<\/li>\n\n\n\n
        • Gi\u00e1m s\u00e1t t\u1ea1i ch\u1ed7<\/strong>: C\u00e1c c\u1ea3m bi\u1ebfn th\u1eddi gian th\u1ef1c ph\u00e1t hi\u1ec7n \u1ee9ng su\u1ea5t c\u1ee7a tinh th\u1ec3 v\u00e0 cho ph\u00e9p \u0111i\u1ec1u ch\u1ec9nh \u0111\u1ed9ng trong qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n.<\/li>\n<\/ul>\n\n\n\n

          3.2 C\u00e1c k\u1ef9 thu\u1eadt c\u1eaft l\u00e1t n\u00e2ng cao<\/h3>\n\n\n\n
            \n
          • M\u00e1y c\u1eaft d\u00e2y kim c\u01b0\u01a1ng \u0111\u1ed9 ch\u00ednh x\u00e1c cao<\/strong>: H\u1ec7 th\u1ed1ng nhi\u1ec1u d\u00e2y gi\u00fap gi\u1ea3m hi\u1ec7n t\u01b0\u1ee3ng m\u1ebb c\u1ea1nh v\u00e0 duy tr\u00ec \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u khi c\u1eaft.<\/li>\n\n\n\n
          • C\u1eaft l\u00e1t b\u1eb1ng laser<\/strong>: Tia laser nano gi\u00e2y ho\u1eb7c pico gi\u00e2y c\u00f3 th\u1ec3 t\u1ea1o r\u00e3nh tr\u01b0\u1edbc tr\u00ean c\u00e1c t\u1ea5m wafer, gi\u00fap gi\u1ea3m \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc.<\/li>\n\n\n\n
          • H\u1ec7 th\u1ed1ng l\u00e0m m\u00e1t v\u00e0 b\u00f4i tr\u01a1n \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a<\/strong>: Gi\u00fap k\u00e9o d\u00e0i tu\u1ed5i th\u1ecd c\u1ee7a d\u00e2y v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 nh\u1eb5n b\u1ec1 m\u1eb7t.<\/li>\n<\/ul>\n\n\n\n

            3.3 \u0110\u00e1nh b\u00f3ng v\u00e0 \u0111o l\u01b0\u1eddng<\/h3>\n\n\n\n
              \n
            • Thi\u1ebft b\u1ecb CMP di\u1ec7n t\u00edch l\u1edbn<\/strong>: \u0110\u1ea3m b\u1ea3o qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng \u0111\u1ed3ng \u0111\u1ec1u m\u00e0 kh\u00f4ng g\u00e2y bi\u1ebfn d\u1ea1ng t\u1ea5m wafer.<\/li>\n\n\n\n
            • \u0110o l\u01b0\u1eddng t\u1ef1 \u0111\u1ed9ng<\/strong>: K\u1ef9 thu\u1eadt giao thoa v\u00e0 qu\u00e9t quang h\u1ecdc \u0111o \u0111\u1ed9 l\u1ec7ch t\u00e2m tr\u1ee5c (TTV) v\u00e0 \u0111\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t theo th\u1eddi gian th\u1ef1c.<\/li>\n\n\n\n
            • C\u00e1c k\u1ef9 thu\u1eadt gi\u1ea3m c\u0103ng th\u1eb3ng<\/strong>: Qu\u00e1 tr\u00ecnh \u1ee7 nhi\u1ec7t gi\u00fap gi\u1ea3m \u1ee9ng su\u1ea5t d\u01b0, t\u1eeb \u0111\u00f3 n\u00e2ng cao hi\u1ec7u su\u1ea5t.<\/li>\n<\/ul>\n\n\n\n

              4. Xu h\u01b0\u1edbng v\u00e0 tri\u1ec3n v\u1ecdng ng\u00e0nh<\/h2>\n\n\n\n

              Vi\u1ec7c chuy\u1ec3n sang s\u1eed d\u1ee5ng t\u1ea5m wafer SiC 12 inch l\u00e0 m\u1ed9t ph\u1ea7n c\u1ee7a xu h\u01b0\u1edbng chung h\u01b0\u1edbng t\u1edbi c\u00e1c thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t c\u00f3 hi\u1ec7u su\u1ea5t cao v\u00e0 chi ph\u00ed th\u1ea5p. C\u00e1c nh\u00e0 s\u1ea3n xu\u1ea5t h\u00e0ng \u0111\u1ea7u \u0111ang \u0111\u1ea7u t\u01b0 m\u1ea1nh m\u1ebd v\u00e0o t\u1ef1 \u0111\u1ed9ng h\u00f3a, ki\u1ec3m tra li\u00ean t\u1ee5c v\u00e0 c\u00e1c c\u00f4ng ngh\u1ec7 c\u1eaft l\u00e1t ti\u00ean ti\u1ebfn \u0111\u1ec3 \u0111\u00e1p \u1ee9ng nhu c\u1ea7u ng\u00e0y c\u00e0ng t\u0103ng t\u1eeb th\u1ecb tr\u01b0\u1eddng xe \u0111i\u1ec7n v\u00e0 n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o.<\/p>\n\n\n\n

              M\u1eb7c d\u00f9 c\u00f2n nhi\u1ec1u th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt \u0111\u00e1ng k\u1ec3, nh\u01b0ng s\u1ef1 k\u1ebft h\u1ee3p gi\u1eefa qu\u00e1 tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3 \u0111\u01b0\u1ee3c t\u1ed1i \u01b0u h\u00f3a, c\u1eaft l\u00e1t ch\u00ednh x\u00e1c v\u00e0 c\u00f4ng ngh\u1ec7 \u0111\u00e1nh b\u00f3ng ti\u00ean ti\u1ebfn \u0111\u00e3 gi\u00fap vi\u1ec7c s\u1ea3n xu\u1ea5t t\u1ea5m wafer SiC 12 inch quy m\u00f4 th\u01b0\u01a1ng m\u1ea1i tr\u1edf n\u00ean kh\u1ea3 thi. C\u00e1c doanh nghi\u1ec7p th\u00e0nh c\u00f4ng trong vi\u1ec7c m\u1edf r\u1ed9ng quy m\u00f4 s\u1ea3n xu\u1ea5t l\u00ean k\u00edch th\u01b0\u1edbc n\u00e0y s\u1ebd c\u00f3 \u0111\u01b0\u1ee3c l\u1ee3i th\u1ebf c\u1ea1nh tranh v\u1ec1 n\u0103ng su\u1ea5t, chi ph\u00ed v\u00e0 hi\u1ec7u su\u1ea5t thi\u1ebft b\u1ecb.<\/p>\n\n\n\n

              5. K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

              Vi\u1ec7c m\u1edf r\u1ed9ng quy m\u00f4 s\u1ea3n xu\u1ea5t sang c\u00e1c t\u1ea5m wafer SiC 12 inch v\u1eeba l\u00e0 m\u1ed9t th\u00e1ch th\u1ee9c k\u1ef9 thu\u1eadt, v\u1eeba l\u00e0 m\u1ed9t c\u01a1 h\u1ed9i chi\u1ebfn l\u01b0\u1ee3c. \u0110\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c th\u00e0nh c\u00f4ng, c\u1ea7n c\u00f3 m\u1ed9t c\u00e1ch ti\u1ebfp c\u1eadn to\u00e0n di\u1ec7n: ki\u1ec3m so\u00e1t c\u00e1c khuy\u1ebft t\u1eadt tinh th\u1ec3, l\u00e0m ch\u1ee7 k\u1ef9 thu\u1eadt c\u1eaft l\u00e1t ch\u00ednh x\u00e1c v\u00e0 \u0111\u1ea3m b\u1ea3o ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t. Khi ng\u00e0nh c\u00f4ng nghi\u1ec7p ti\u1ebfp t\u1ee5c \u0111\u1ed5i m\u1edbi, c\u00e1c t\u1ea5m wafer 12 inch h\u1ee9a h\u1eb9n s\u1ebd tr\u1edf th\u00e0nh ti\u00eau chu\u1ea9n m\u1edbi cho c\u00e1c thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u00f4ng su\u1ea5t cao, hi\u1ec7u su\u1ea5t cao, cung c\u1ea5p n\u0103ng l\u01b0\u1ee3ng cho th\u1ebf h\u1ec7 ti\u1ebfp theo c\u1ee7a xe \u0111i\u1ec7n, thi\u1ebft b\u1ecb \u0111i\u1ec7n t\u1eed c\u00f4ng nghi\u1ec7p v\u00e0 c\u00e1c gi\u1ea3i ph\u00e1p n\u0103ng l\u01b0\u1ee3ng t\u00e1i t\u1ea1o.<\/p>","protected":false},"excerpt":{"rendered":"

              Silicon carbide (SiC) has emerged as a critical material in high-power electronics, particularly in electric vehicles (EVs), renewable energy systems, and advanced industrial equipment. Its exceptional thermal conductivity, high breakdown voltage, and wide bandgap make SiC an ideal choice for power devices. With the semiconductor industry pushing for higher efficiency and larger-scale production, the move […]<\/p>\n","protected":false},"author":1,"featured_media":1924,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[24],"tags":[366,387,378,197,334,386,115,375,371,380,381,379,384,370,376,383,385,369,382,36,184,368,367,72,377,374,373,372,196,113],"class_list":["post-1923","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-industry-news","tag-12-inch-sic-wafer","tag-advanced-semiconductor-materials","tag-basal-plane-dislocations","tag-chemical-mechanical-polishing","tag-cmp","tag-device-yield","tag-diamond-wire-saw","tag-dislocations","tag-edge-chipping","tag-electric-vehicles","tag-ev-power-devices","tag-high-power-electronics","tag-inline-inspection","tag-laser-dicing","tag-micropipes","tag-precision-metrology","tag-process-optimization","tag-pvt-method","tag-renewable-energy","tag-semiconductor-manufacturing","tag-sic","tag-sic-crystal-growth","tag-sic-wafer-production","tag-silicon-carbide","tag-stacking-faults","tag-thermal-stress","tag-thickness-uniformity","tag-wafer-flatness","tag-wafer-polishing","tag-wafer-slicing"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1923","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=1923"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1923\/revisions"}],"predecessor-version":[{"id":1925,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1923\/revisions\/1925"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/1924"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=1923"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=1923"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=1923"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}