{"id":1906,"date":"2026-03-06T02:37:48","date_gmt":"2026-03-06T02:37:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=1906"},"modified":"2026-03-06T02:45:28","modified_gmt":"2026-03-06T02:45:28","slug":"quy-trinh-san-xuat-tam-wafer-silicon-300mm-tao-tinh-the-cat-lat-va-danh-bong","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/vi\/the-300mm-silicon-wafer-manufacturing-process-crystal-growth-slicing-and-polishing\/","title":{"rendered":"Quy tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m silicon 300mm: T\u1ea1o tinh th\u1ec3, c\u1eaft l\u00e1t v\u00e0 \u0111\u00e1nh b\u00f3ng"},"content":{"rendered":"

T\u1ea5m silicon 300mm<\/mark><\/a> <\/mark>(T\u1ea5m wafer 12 inch) l\u00e0 n\u1ec1n t\u1ea3ng c\u1ee7a ng\u00e0nh s\u1ea3n xu\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i. Ch\u00fang \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng r\u1ed9ng r\u00e3i trong c\u00e1c chip logic ti\u00ean ti\u1ebfn, thi\u1ebft b\u1ecb b\u1ed9 nh\u1edb v\u00e0 \u0111i\u1ec7n t\u1eed c\u00f4ng su\u1ea5t. So v\u1edbi t\u1ea5m wafer 200mm, t\u1ea5m wafer 300mm gi\u00fap n\u00e2ng cao \u0111\u00e1ng k\u1ec3 hi\u1ec7u qu\u1ea3 s\u1ea3n xu\u1ea5t v\u00ec t\u1ea5m wafer l\u1edbn h\u01a1n c\u00f3 th\u1ec3 ch\u1ee9a \u0111\u01b0\u1ee3c nhi\u1ec1u chip h\u01a1n trong m\u1ed7i chu k\u1ef3 s\u1ea3n xu\u1ea5t. Tuy nhi\u00ean, vi\u1ec7c s\u1ea3n xu\u1ea5t t\u1ea5m wafer 300mm \u0111\u00f2i h\u1ecfi s\u1ef1 ki\u1ec3m so\u00e1t c\u1ef1c k\u1ef3 ch\u00ednh x\u00e1c \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh ph\u00e1t tri\u1ec3n tinh th\u1ec3, c\u1eaft l\u00e1t v\u00e0 \u0111\u00e1nh b\u00f3ng.<\/p>\n\n\n\n

B\u00e0i vi\u1ebft n\u00e0y tr\u00ecnh b\u00e0y quy tr\u00ecnh s\u1ea3n xu\u1ea5t \u0111\u1ea7y \u0111\u1ee7 c\u1ee7a c\u00e1c t\u1ea5m wafer silicon 300mm c\u00f9ng c\u00e1c c\u00f4ng ngh\u1ec7 ch\u1ee7 ch\u1ed1t li\u00ean quan.<\/p>\n\n\n\n

\"\"<\/figure>\n\n\n\n

1. Chu\u1ea9n b\u1ecb nguy\u00ean li\u1ec7u: T\u1eeb th\u1ea1ch anh \u0111\u1ebfn silic c\u1ea5p \u0111i\u1ec7n t\u1eed<\/h2>\n\n\n\n

Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t t\u1ea5m silicon b\u1eaft \u0111\u1ea7u t\u1eeb silicon c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao. Nguy\u00ean li\u1ec7u ban \u0111\u1ea7u l\u00e0 th\u1ea1ch anh (SiO\u2082), \u0111\u01b0\u1ee3c kh\u1eed b\u1eb1ng carbon trong l\u00f2 \u0111i\u1ec7n h\u1ed3 quang \u0111\u1ec3 t\u1ea1o ra silicon c\u1ea5p luy\u1ec7n kim v\u1edbi \u0111\u1ed9 tinh khi\u1ebft kho\u1ea3ng 98\u201399%.<\/p>\n\n\n\n

Trong s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, silic ph\u1ea3i \u0111\u01b0\u1ee3c tinh ch\u1ebf \u0111\u1ebfn m\u1ee9c \u0111\u1ed9 c\u1ef1c k\u1ef3 cao. Th\u00f4ng qua c\u00e1c quy tr\u00ecnh h\u00f3a h\u1ecdc nh\u01b0 quy tr\u00ecnh Siemens, silic \u0111\u01b0\u1ee3c chuy\u1ec3n h\u00f3a th\u00e0nh trichlorosilane, sau \u0111\u00f3 \u0111\u01b0\u1ee3c l\u1eafng \u0111\u1ecdng \u0111\u1ec3 t\u1ea1o th\u00e0nh polysilicon v\u1edbi \u0111\u1ed9 tinh khi\u1ebft tr\u00ean 99,99999991% (9N).<\/p>\n\n\n\n

Lo\u1ea1i polysilicon si\u00eau tinh khi\u1ebft n\u00e0y sau \u0111\u00f3 \u0111\u01b0\u1ee3c nung ch\u1ea3y v\u00e0 chu\u1ea9n b\u1ecb \u0111\u1ec3 nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u01a1n.<\/p>\n\n\n\n

2. Ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 \u0111\u01a1n: Ph\u01b0\u01a1ng ph\u00e1p Czochralski<\/h2>\n\n\n\n

H\u1ea7u h\u1ebft c\u00e1c t\u1ea5m wafer silicon 300mm \u0111\u1ec1u \u0111\u01b0\u1ee3c s\u1ea3n xu\u1ea5t b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p nu\u00f4i c\u1ea5y tinh th\u1ec3 Czochralski (CZ).<\/p>\n\n\n\n

T\u1ed5ng quan v\u1ec1 quy tr\u00ecnh<\/h3>\n\n\n\n
    \n
  1. Polysilicon c\u00f3 \u0111\u1ed9 tinh khi\u1ebft cao \u0111\u01b0\u1ee3c cho v\u00e0o n\u1ed3i th\u1ea1ch anh.<\/li>\n\n\n\n
  2. Silic \u0111\u01b0\u1ee3c nung ch\u1ea3y \u1edf nhi\u1ec7t \u0111\u1ed9 kho\u1ea3ng 1420\u00b0C.<\/li>\n\n\n\n
  3. M\u1ed9t tinh th\u1ec3 h\u1ea1t nh\u1ecf c\u00f3 h\u01b0\u1edbng tinh th\u1ec3 c\u1ee5 th\u1ec3 \u0111\u01b0\u1ee3c nh\u00fang v\u00e0o silicon n\u00f3ng ch\u1ea3y.<\/li>\n\n\n\n
  4. Tinh th\u1ec3 h\u1ea1t \u0111\u01b0\u1ee3c k\u00e9o t\u1eeb t\u1eeb l\u00ean tr\u00ean trong khi quay.<\/li>\n\n\n\n
  5. C\u00e1c nguy\u00ean t\u1eed silic k\u1ebft tinh tr\u00ean tinh th\u1ec3 h\u1ea1t gi\u1ed1ng, t\u1ea1o th\u00e0nh m\u1ed9t th\u1ecfi \u0111\u01a1n tinh th\u1ec3 h\u00ecnh tr\u1ee5 l\u1edbn.<\/li>\n<\/ol>\n\n\n\n

    \u0110\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer 300 mm, \u0111\u01b0\u1eddng k\u00ednh th\u1ecfi silicon th\u01b0\u1eddng \u0111\u1ea1t 300\u2013310 mm, v\u00e0 chi\u1ec1u d\u00e0i c\u00f3 th\u1ec3 v\u01b0\u1ee3t qu\u00e1 1,5 m\u00e9t.<\/p>\n\n\n\n

    Nh\u1eefng th\u00e1ch th\u1ee9c ch\u00ednh<\/h3>\n\n\n\n

    \u0110\u1ec3 s\u1ea3n xu\u1ea5t \u0111\u01b0\u1ee3c nh\u1eefng tinh th\u1ec3 l\u1edbn nh\u01b0 v\u1eady, c\u1ea7n ph\u1ea3i ki\u1ec3m so\u00e1t ch\u00ednh x\u00e1c c\u00e1c y\u1ebfu t\u1ed1 sau:<\/p>\n\n\n\n

      \n
    • \u0110\u1ed9 d\u1ed1c nhi\u1ec7t \u0111\u1ed9<\/li>\n\n\n\n
    • T\u1ed1c \u0111\u1ed9 k\u00e9o<\/li>\n\n\n\n
    • T\u1ed1c \u0111\u1ed9 quay<\/li>\n\n\n\n
    • N\u1ed3ng \u0111\u1ed9 oxy trong n\u1ed3i th\u1ea1ch anh<\/li>\n<\/ul>\n\n\n\n

      Ngay c\u1ea3 nh\u1eefng dao \u0111\u1ed9ng nh\u1ecf c\u0169ng c\u00f3 th\u1ec3 g\u00e2y ra c\u00e1c khuy\u1ebft t\u1eadt nh\u01b0 tr\u1eadt v\u1ecb ho\u1eb7c tr\u01b0\u1ee3t tinh th\u1ec3.<\/p>\n\n\n\n

      3. T\u1ea1o h\u00ecnh ph\u00f4i v\u00e0 m\u00e0i c\u1ea1nh<\/h2>\n\n\n\n

      Sau khi tinh th\u1ec3 k\u1ebft tinh, th\u1ecfi silic \u0111\u01b0\u1ee3c gia c\u00f4ng c\u01a1 kh\u00ed \u0111\u1ec3 chu\u1ea9n b\u1ecb cho qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t.<\/p>\n\n\n\n

      C\u00e1c b\u01b0\u1edbc ch\u00ednh bao g\u1ed3m:<\/p>\n\n\n\n

      1. C\u1eaft x\u00e9n<\/strong>
      Hai \u0111\u1ea7u tr\u00ean v\u00e0 d\u01b0\u1edbi c\u1ee7a th\u1ecfi kim lo\u1ea1i \u0111\u01b0\u1ee3c c\u1eaft b\u1ecf v\u00ec ch\u00fang c\u00f3 m\u1eadt \u0111\u1ed9 khuy\u1ebft t\u1eadt cao h\u01a1n.<\/p>\n\n\n\n

      2. M\u00e0i \u0111\u01b0\u1eddng k\u00ednh<\/strong>
      B\u1ec1 m\u1eb7t th\u1ecfi \u0111\u01b0\u1ee3c m\u00e0i nh\u1eb5n \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u01b0\u1eddng k\u00ednh ch\u00ednh x\u00e1c theo y\u00eau c\u1ea7u cho c\u00e1c t\u1ea5m wafer 300mm.<\/p>\n\n\n\n

      3. H\u01b0\u1edbng ph\u1eb3ng hay c\u00f3 r\u00e3nh<\/strong>
      M\u1ed9t c\u00e1i nh\u1ecf r\u00e3nh<\/strong> \u0111\u01b0\u1ee3c c\u1eaft v\u00e0o th\u1ecfi \u0111\u1ec3 ch\u1ec9 h\u01b0\u1edbng tinh th\u1ec3. Trong c\u00e1c t\u1ea5m wafer 300mm, ng\u01b0\u1eddi ta th\u01b0\u1eddng s\u1eed d\u1ee5ng c\u00e1c v\u1ebft kh\u00eda thay v\u00ec c\u00e1c m\u1eb7t ph\u1eb3ng.<\/p>\n\n\n\n

      D\u1ea5u \u0111\u1ecbnh v\u1ecb n\u00e0y gi\u00fap thi\u1ebft b\u1ecb b\u00e1n d\u1eabn c\u0103n ch\u1ec9nh ch\u00ednh x\u00e1c t\u1ea5m wafer trong qu\u00e1 tr\u00ecnh gia c\u00f4ng.<\/p>\n\n\n\n

      4. C\u1eaft l\u00e1t wafer: C\u1eaft b\u1eb1ng d\u00e2y kim c\u01b0\u01a1ng<\/h2>\n\n\n\n

      Sau \u0111\u00f3, th\u1ecfi silicon \u0111\u00e3 \u0111\u01b0\u1ee3c \u0111\u1ecbnh h\u00ecnh s\u1ebd \u0111\u01b0\u1ee3c c\u1eaft th\u00e0nh c\u00e1c t\u1ea5m wafer m\u1ecfng.<\/p>\n\n\n\n

      C\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t chip hi\u1ec7n \u0111\u1ea1i ch\u1ee7 y\u1ebfu s\u1eed d\u1ee5ng c\u00f4ng ngh\u1ec7 m\u00e1y c\u01b0a kim c\u01b0\u01a1ng nhi\u1ec1u d\u00e2y<\/strong>.<\/p>\n\n\n\n

      C\u00e1ch th\u1ee9c ho\u1ea1t \u0111\u1ed9ng<\/h3>\n\n\n\n

      M\u1ed9t s\u1ee3i d\u00e2y d\u00e0i \u0111\u01b0\u1ee3c nh\u00fang c\u00e1c h\u1ea1t m\u00e0i kim c\u01b0\u01a1ng di chuy\u1ec3n v\u1edbi t\u1ed1c \u0111\u1ed9 cao trong khi c\u1eaft qua kh\u1ed1i th\u1ecfi. H\u00e0ng tr\u0103m t\u1ea5m wafer c\u00f3 th\u1ec3 \u0111\u01b0\u1ee3c c\u1eaft c\u00f9ng l\u00fac.<\/p>\n\n\n\n

      \u0110\u1ed9 d\u00e0y \u0111i\u1ec3n h\u00ecnh c\u1ee7a t\u1ea5m wafer tr\u01b0\u1edbc khi \u0111\u00e1nh b\u00f3ng:<\/p>\n\n\n\n

        \n
      • ~775 \u00b5m \u0111\u1ed1i v\u1edbi c\u00e1c t\u1ea5m wafer 300 mm<\/strong><\/li>\n<\/ul>\n\n\n\n

        \u01afu \u0111i\u1ec3m c\u1ee7a ph\u01b0\u01a1ng ph\u00e1p c\u1eaft b\u1eb1ng d\u00e2y kim c\u01b0\u01a1ng<\/h3>\n\n\n\n
          \n
        • \u0110\u1ed9 ch\u00ednh x\u00e1c c\u1eaft cao h\u01a1n<\/li>\n\n\n\n
        • Gi\u1ea3m t\u1ed5n th\u1ea5t v\u1eadt li\u1ec7u (t\u1ed5n th\u1ea5t do v\u1ebft c\u1eaft)<\/li>\n\n\n\n
        • Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n<\/li>\n\n\n\n
        • N\u0103ng su\u1ea5t cao h\u01a1n<\/li>\n<\/ul>\n\n\n\n

          Tuy nhi\u00ean, qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t v\u1eabn t\u1ea1o ra c\u00e1c l\u1edbp h\u01b0 h\u1ecfng b\u1ec1 m\u1eb7t c\u1ea7n ph\u1ea3i \u0111\u01b0\u1ee3c lo\u1ea1i b\u1ecf trong c\u00e1c b\u01b0\u1edbc ti\u1ebfp theo.<\/p>\n\n\n\n

          5. Bo tr\u00f2n c\u1ea1nh v\u00e0 m\u00e0i b\u1ec1 m\u1eb7t<\/h2>\n\n\n\n

          Sau khi c\u1eaft l\u00e1t, c\u00e1c t\u1ea5m wafer \u0111\u01b0\u1ee3c x\u1eed l\u00fd m\u00e9p v\u00e0 l\u00e0m ph\u1eb3ng b\u1ec1 m\u1eb7t.<\/p>\n\n\n\n

          L\u00e0m tr\u00f2n c\u00e1c g\u00f3c<\/h3>\n\n\n\n

          C\u00e1c m\u00e9p c\u1ee7a t\u1ea5m wafer \u0111\u01b0\u1ee3c bo tr\u00f2n \u0111\u1ec3 tr\u00e1nh n\u1ee9t v\u1ee1 v\u00e0 s\u1ee9t m\u1ebb trong c\u00e1c c\u00f4ng \u0111o\u1ea1n gia c\u00f4ng ti\u1ebfp theo.<\/p>\n\n\n\n

          \u0110i\u1ec1u n\u00e0y \u0111\u1eb7c bi\u1ec7t quan tr\u1ecdng b\u1edfi v\u00ec c\u00e1c t\u1ea5m b\u00e1n d\u1eabn ph\u1ea3i ch\u1ecbu \u0111\u01b0\u1ee3c h\u00e0ng tr\u0103m chu k\u1ef3 x\u1eed l\u00fd \u1edf nhi\u1ec7t \u0111\u1ed9 cao v\u00e0 trong m\u00f4i tr\u01b0\u1eddng ch\u00e2n kh\u00f4ng.<\/p>\n\n\n\n

          M\u00e0i ph\u1eb3ng<\/h3>\n\n\n\n

          M\u00e1y m\u00e0i hai m\u1eb7t gi\u00fap gi\u1ea3m s\u1ef1 ch\u00eanh l\u1ec7ch v\u1ec1 \u0111\u1ed9 d\u00e0y v\u00e0 c\u1ea3i thi\u1ec7n \u0111\u1ed9 ph\u1eb3ng.<\/p>\n\n\n\n

          B\u01b0\u1edbc n\u00e0y nh\u1eb1m chu\u1ea9n b\u1ecb t\u1ea5m wafer cho qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c cao.<\/p>\n\n\n\n

          6. Kh\u1eafc h\u00f3a h\u1ecdc<\/h2>\n\n\n\n

          Qu\u00e1 tr\u00ecnh c\u1eaft l\u00e1t v\u00e0 m\u00e0i c\u01a1 h\u1ecdc g\u00e2y ra nh\u1eefng t\u1ed5n th\u01b0\u01a1ng vi m\u00f4 tr\u00ean b\u1ec1 m\u1eb7t t\u1ea5m wafer.<\/p>\n\n\n\n

          \u0110\u1ec3 lo\u1ea1i b\u1ecf c\u00e1c l\u1edbp b\u1ecb h\u01b0 h\u1ecfng n\u00e0y, c\u00e1c t\u1ea5m wafer \u0111\u01b0\u1ee3c x\u1eed l\u00fd b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p \u0103n m\u00f2n h\u00f3a h\u1ecdc, th\u01b0\u1eddng s\u1eed d\u1ee5ng h\u1ed7n h\u1ee3p axit.<\/p>\n\n\n\n

          Quy tr\u00ecnh kh\u1eafc axit:<\/p>\n\n\n\n

            \n
          • Lo\u1ea1i b\u1ecf \u1ee9ng su\u1ea5t c\u01a1 h\u1ecdc c\u00f2n s\u00f3t l\u1ea1i<\/li>\n\n\n\n
          • Lo\u1ea1i b\u1ecf c\u00e1c v\u1ebft n\u1ee9t nh\u1ecf<\/li>\n\n\n\n
          • C\u1ea3i thi\u1ec7n \u0111\u1ed9 \u0111\u1ed3ng \u0111\u1ec1u c\u1ee7a b\u1ec1 m\u1eb7t<\/li>\n<\/ul>\n\n\n\n

            Sau khi \u0103n m\u00f2n, c\u00e1c t\u1ea5m wafer c\u00f3 b\u1ec1 m\u1eb7t m\u1edd v\u00e0 \u0111\u00e3 s\u1eb5n s\u00e0ng \u0111\u1ec3 ti\u1ebfn h\u00e0nh \u0111\u00e1nh b\u00f3ng ch\u00ednh x\u00e1c.<\/p>\n\n\n\n

            7. \u0110\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc c\u01a1 h\u1ecdc (CMP)<\/h2>\n\n\n\n

            B\u01b0\u1edbc cu\u1ed1i c\u00f9ng trong qu\u00e1 tr\u00ecnh chu\u1ea9n b\u1ecb b\u1ec1 m\u1eb7t t\u1ea5m wafer l\u00e0 qu\u00e1 tr\u00ecnh \u0111\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc-c\u01a1 h\u1ecdc (CMP).<\/p>\n\n\n\n

            CMP k\u1ebft h\u1ee3p:<\/p>\n\n\n\n

              \n
            • Ph\u1ea3n \u1ee9ng h\u00f3a h\u1ecdc<\/li>\n\n\n\n
            • M\u00e0i m\u00f2n c\u01a1 h\u1ecdc<\/li>\n<\/ul>\n\n\n\n

              \u0111\u1ec3 t\u1ea1o ra m\u1ed9t b\u1ec1 m\u1eb7t c\u1ef1c k\u1ef3 m\u1ecbn m\u00e0ng.<\/p>\n\n\n\n

              Trong th\u1eddi gian di\u1ec5n ra CMP:<\/p>\n\n\n\n

                \n
              • M\u1ed9t mi\u1ebfng \u0111\u1ec7m \u0111\u00e1nh b\u00f3ng \u0111\u01b0\u1ee3c \u00e9p ch\u1eb7t v\u00e0o b\u1ec1 m\u1eb7t t\u1ea5m wafer.<\/li>\n\n\n\n
              • M\u1ed9t h\u1ed7n h\u1ee3p b\u00f9n ch\u1ee9a c\u00e1c h\u1ea1t m\u00e0i m\u00f2n v\u00e0 h\u00f3a ch\u1ea5t lo\u1ea1i b\u1ecf v\u1eadt li\u1ec7u \u1edf c\u1ea5p \u0111\u1ed9 nguy\u00ean t\u1eed.<\/li>\n<\/ul>\n\n\n\n

                Ch\u1ea5t l\u01b0\u1ee3ng b\u1ec1 m\u1eb7t cu\u1ed1i c\u00f9ng<\/h3>\n\n\n\n

                Sau qu\u00e1 tr\u00ecnh CMP, c\u00e1c t\u1ea5m wafer 300mm \u0111\u1ea1t \u0111\u01b0\u1ee3c:<\/p>\n\n\n\n

                  \n
                • \u0110\u1ed9 nh\u00e1m b\u1ec1 m\u1eb7t d\u01b0\u1edbi 1 nm<\/li>\n\n\n\n
                • \u0110\u1ed9 ph\u1eb3ng c\u1ef1c cao (\u1edf c\u1ea5p \u0111\u1ed9 nanomet)<\/li>\n<\/ul>\n\n\n\n

                  M\u1ee9c \u0111\u1ed9 ch\u00ednh x\u00e1c n\u00e0y l\u00e0 y\u00eau c\u1ea7u b\u1eaft bu\u1ed9c \u0111\u1ed1i v\u1edbi c\u00e1c quy tr\u00ecnh quang kh\u1eafc hi\u1ec7n \u0111\u1ea1i \u0111\u01b0\u1ee3c s\u1eed d\u1ee5ng trong c\u00e1c th\u1ebf h\u1ec7 vi m\u1ea1ch b\u00e1n d\u1eabn ti\u00ean ti\u1ebfn.<\/p>\n\n\n\n

                  8. V\u1ec7 sinh v\u00e0 ki\u1ec3m tra<\/h2>\n\n\n\n

                  Tr\u01b0\u1edbc khi \u0111\u01b0\u1ee3c v\u1eadn chuy\u1ec3n \u0111\u1ebfn c\u00e1c nh\u00e0 m\u00e1y s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn, c\u00e1c t\u1ea5m wafer ph\u1ea3i tr\u1ea3i qua c\u00e1c quy tr\u00ecnh l\u00e0m s\u1ea1ch v\u00e0 ki\u1ec3m tra k\u1ef9 l\u01b0\u1ee1ng.<\/p>\n\n\n\n

                  Trong s\u1ed1 \u0111\u00f3 c\u00f3:<\/p>\n\n\n\n

                    \n
                  • V\u1ec7 sinh b\u1eb1ng n\u01b0\u1edbc si\u00eau tinh khi\u1ebft<\/li>\n\n\n\n
                  • C\u00e1c quy tr\u00ecnh lo\u1ea1i b\u1ecf h\u1ea1t<\/li>\n\n\n\n
                  • Ki\u1ec3m tra khuy\u1ebft t\u1eadt b\u1eb1ng qu\u00e9t laser<\/li>\n\n\n\n
                  • \u0110o \u0111\u1ed9 d\u00e0y v\u00e0 \u0111\u1ed9 ph\u1eb3ng<\/li>\n<\/ul>\n\n\n\n

                    Ch\u1ec9 nh\u1eefng t\u1ea5m wafer \u0111\u00e1p \u1ee9ng c\u00e1c ti\u00eau chu\u1ea9n ch\u1ea5t l\u01b0\u1ee3ng nghi\u00eam ng\u1eb7t m\u1edbi \u0111\u01b0\u1ee3c \u0111\u01b0a v\u00e0o s\u1ea3n xu\u1ea5t chip.<\/p>\n\n\n\n

                    K\u1ebft lu\u1eadn<\/h2>\n\n\n\n

                    Qu\u00e1 tr\u00ecnh s\u1ea3n xu\u1ea5t c\u00e1c t\u1ea5m silicon 300mm l\u00e0 m\u1ed9t quy tr\u00ecnh c\u1ef1c k\u1ef3 ph\u1ee9c t\u1ea1p, k\u1ebft h\u1ee3p gi\u1eefa khoa h\u1ecdc v\u1eadt li\u1ec7u, k\u1ef9 thu\u1eadt ch\u00ednh x\u00e1c v\u00e0 c\u00f4ng ngh\u1ec7 x\u1eed l\u00fd h\u00f3a h\u1ecdc.<\/p>\n\n\n\n

                    T\u1eeb qu\u00e1 tr\u00ecnh nu\u00f4i c\u1ea5y tinh th\u1ec3 b\u1eb1ng ph\u01b0\u01a1ng ph\u00e1p Czochralski \u0111\u1ebfn c\u1eaft b\u1eb1ng d\u00e2y kim c\u01b0\u01a1ng v\u00e0 \u0111\u00e1nh b\u00f3ng h\u00f3a h\u1ecdc-c\u01a1 h\u1ecdc, m\u1ed7i b\u01b0\u1edbc \u0111\u1ec1u ph\u1ea3i \u0111\u01b0\u1ee3c ki\u1ec3m so\u00e1t ch\u1eb7t ch\u1ebd \u0111\u1ec3 \u0111\u1ea1t \u0111\u01b0\u1ee3c \u0111\u1ed9 tinh khi\u1ebft, \u0111\u1ed9 ph\u1eb3ng v\u00e0 c\u1ea5u tr\u00fac ho\u00e0n h\u1ea3o theo y\u00eau c\u1ea7u c\u1ee7a quy tr\u00ecnh s\u1ea3n xu\u1ea5t ch\u1ea5t b\u00e1n d\u1eabn hi\u1ec7n \u0111\u1ea1i.<\/p>\n\n\n\n

                    C\u00f9ng v\u1edbi s\u1ef1 ph\u00e1t tri\u1ec3n kh\u00f4ng ng\u1eebng c\u1ee7a c\u00f4ng ngh\u1ec7 b\u00e1n d\u1eabn, ng\u00e0nh s\u1ea3n xu\u1ea5t t\u1ea5m wafer c\u0169ng \u0111ang ti\u1ebfn t\u1edbi vi\u1ec7c s\u1eed d\u1ee5ng c\u00e1c t\u1ea5m c\u00f3 \u0111\u01b0\u1eddng k\u00ednh l\u1edbn h\u01a1n, ch\u1ea5t l\u01b0\u1ee3ng tinh th\u1ec3 \u0111\u01b0\u1ee3c c\u1ea3i thi\u1ec7n v\u00e0 quy tr\u00ecnh s\u1ea3n xu\u1ea5t hi\u1ec7u qu\u1ea3 h\u01a1n \u2014 \u0111\u1ea3m b\u1ea3o r\u1eb1ng c\u00e1c t\u1ea5m wafer silicon v\u1eabn l\u00e0 tr\u1ee5 c\u1ed9t c\u1ee7a ng\u00e0nh c\u00f4ng nghi\u1ec7p \u0111i\u1ec7n t\u1eed to\u00e0n c\u1ea7u.<\/p>","protected":false},"excerpt":{"rendered":"

                    300mm silicon wafers (12-inch wafers) are the foundation of modern semiconductor manufacturing. They are widely used in advanced logic chips, memory devices, and power electronics. Compared with 200mm wafers, 300mm wafers significantly improve production efficiency because a larger wafer can accommodate more chips per fabrication cycle. However, manufacturing a 300mm wafer requires extremely precise control […]<\/p>\n","protected":false},"author":1,"featured_media":1907,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"categories":[1],"tags":[278,277,295,285,281,280,283,291,195,288,284,282,294,279,289,293,286,292,287,290],"class_list":["post-1906","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-company-news","tag-12-inch-silicon-wafer","tag-300mm-silicon-wafer","tag-advanced-semiconductor-wafers","tag-chemical-mechanical-polishing-cmp","tag-cz-silicon-crystal","tag-czochralski-crystal-growth","tag-diamond-wire-wafer-slicing","tag-semiconductor-manufacturing-technology","tag-semiconductor-materials","tag-semiconductor-wafer-fabrication","tag-semiconductor-wafer-polishing","tag-silicon-ingot-manufacturing","tag-silicon-wafer-cleaning-and-inspection","tag-silicon-wafer-manufacturing-process","tag-silicon-wafer-production","tag-ultra-pure-polysilicon","tag-wafer-edge-grinding","tag-wafer-flatness-control","tag-wafer-surface-grinding","tag-wafer-thickness-775um"],"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1906","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/comments?post=1906"}],"version-history":[{"count":1,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1906\/revisions"}],"predecessor-version":[{"id":1908,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/posts\/1906\/revisions\/1908"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media\/1907"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/media?parent=1906"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/categories?post=1906"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/vi\/wp-json\/wp\/v2\/tags?post=1906"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}