{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"Yar\u0131 \u0130letken Plazma A\u015f\u0131nd\u0131rma i\u00e7in Hassas Silikon Halka (Tek Kristal \/ Polikristal)"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"Yar\u0131 \u0130letken Plazma A\u015f\u0131nd\u0131rma i\u00e7in Hassas Silikon Halka (Tek Kristal \/ Polikristal)\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Silikon Halka (Si Halka), yar\u0131 iletken plazma i\u015fleme ekipmanlar\u0131nda yayg\u0131n olarak kullan\u0131lan bir bile\u015fendir ve odak halkas\u0131, kenar halkas\u0131 veya hazne astar\u0131 olarak hizmet eder. Plazma da\u011f\u0131l\u0131m\u0131n\u0131 kontrol etmede, da\u011flama homojenli\u011fini iyile\u015ftirmede ve kritik oda bile\u015fenlerini y\u00fcksek enerjili plazmaya do\u011frudan maruz kalmaktan korumada \u00f6nemli bir rol oynar.<\/p>\n<p data-start=\"560\" data-end=\"882\">Y\u00fcksek safl\u0131kta tek kristal silikondan veya polikristal silikondan \u00fcretilen Si halkalar, silikon yonga plakas\u0131 i\u015flemleriyle m\u00fckemmel uyumluluk sunar. Bu i\u00e7sel malzeme uyumlulu\u011fu, kontaminasyon risklerini \u00f6nemli \u00f6l\u00e7\u00fcde azaltarak silikon halkalar\u0131 bir\u00e7ok yar\u0131 iletken \u00fcretim ortam\u0131nda tercih edilen bir se\u00e7enek haline getirir.<\/p>\n<p data-start=\"884\" data-end=\"1239\">\u00c7al\u0131\u015fma s\u0131ras\u0131nda silikon halkalar CF\u2084, SF\u2086, NF\u2083 ve Cl\u2082 gibi gazlar taraf\u0131ndan \u00fcretilen reaktif plazmaya maruz kal\u0131r. Bu ko\u015fullar kademeli olarak malzeme erozyonuna ve y\u00fczey bozulmas\u0131na neden olur. Sonu\u00e7 olarak, silikon halkalar kritik yar\u0131 iletken sarf malzemeleri olarak s\u0131n\u0131fland\u0131r\u0131l\u0131r ve optimum proses performans\u0131n\u0131 ve verimi korumak i\u00e7in periyodik olarak de\u011fi\u015ftirilmeleri gerekir.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">SiC bileziklerle kar\u015f\u0131la\u015ft\u0131r\u0131ld\u0131\u011f\u0131nda, silikon bilezikler daha uygun maliyetli ve i\u015flenmesi daha kolayd\u0131r, bu da onlar\u0131 de\u011fi\u015ftirme d\u00f6ng\u00fclerinin kabul edilebilir oldu\u011fu ve maliyet kontrol\u00fcn\u00fcn \u00f6nemli oldu\u011fu uygulamalar i\u00e7in ideal hale getirir.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">Temel \u00d6zellikler<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">Y\u00fcksek Safl\u0131kta Silikon Malzeme: Tek kristal ve polikristal formlarda mevcuttur<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">M\u00fckemmel Proses Uyumlulu\u011fu: D\u00fc\u015f\u00fck kontaminasyon riski ile silikon gofret i\u015fleme i\u00e7in ideal<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">Kararl\u0131 Elektriksel \u00d6zellikler: Tutarl\u0131 plazma davran\u0131\u015f\u0131n\u0131 destekler<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">Hassas \u0130\u015fleme: Geli\u015fmi\u015f yar\u0131 iletken tak\u0131mlar i\u00e7in s\u0131k\u0131 tolerans (&lt;10 \u03bcm)<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">\u00c7oklu Diren\u00e7lilik Se\u00e7enekleri: Farkl\u0131 plazma kontrol gereksinimleri i\u00e7in uygundur<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">Uygun Maliyetli \u00c7\u00f6z\u00fcm: SiC alternatiflerine k\u0131yasla daha d\u00fc\u015f\u00fck ba\u015flang\u0131\u00e7 maliyeti<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">\u00d6zel Tasar\u0131m Deste\u011fi: Karma\u015f\u0131k geometriler ve boyutlar mevcuttur<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Teknik \u00d6zellikler<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Parametre<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">\u015eartname<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Malzeme<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Tek Kristal Silikon \/ Polikristal Silikon<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">Safl\u0131k<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99,999% (5N yar\u0131 iletken s\u0131n\u0131f\u0131)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">\u00c7ap (Maks)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">480 mm'ye kadar<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">Kal\u0131nl\u0131k<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">\u00d6zel (tipik olarak 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">Diren\u00e7lilik (D\u00fc\u015f\u00fck)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">Diren\u00e7lilik (Orta)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">Diren\u00e7lilik (Y\u00fcksek)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">\u00d6zdiren\u00e7 Tekd\u00fczeli\u011fi (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">Y\u00fczey Durumu<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">Cilal\u0131 \/ Al\u0131\u015ft\u0131r\u0131lm\u0131\u015f \/ Ta\u015flanm\u0131\u015f<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">Y\u00fczey P\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (cilal\u0131 daha d\u00fc\u015f\u00fck olabilir)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">Hassas \u0130\u015fleme<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">D\u00fczl\u00fck<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (boyuta ba\u011fl\u0131 olarak)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Kenar Tipi<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">Pah \/ Yar\u0131\u00e7ap \u00f6zelle\u015ftirilebilir<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Kalite Kontrol<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">\u00c7atlak, yonga, \u00e7izik, kirlenme yok<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">Uygulamalar<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">Silikon halkalar, \u00e7e\u015fitli yar\u0131 iletken i\u015fleme ortamlar\u0131nda \u00e7ok \u00f6nemlidir:<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">Plazma a\u015f\u0131nd\u0131rma sistemleri (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">Kimyasal buhar biriktirme (CVD \/ PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">Odak halkas\u0131 \/ kenar halkas\u0131 bile\u015fenleri<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">Hazne koruma ve kaplama par\u00e7alar\u0131<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">Wafer kenar\u0131 plazma kontrol uygulamalar\u0131<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">Maliyet verimlili\u011fi ve istikrarl\u0131 performans\u0131n gerekli oldu\u011fu hem olgun hem de ara s\u00fcre\u00e7 d\u00fc\u011f\u00fcmlerinde yayg\u0131n olarak kullan\u0131l\u0131rlar.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"Yar\u0131 \u0130letken Plazma A\u015f\u0131nd\u0131rma i\u00e7in Hassas Silikon Halka (Tek Kristal \/ Polikristal)\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">Avantajlar &amp; Konumland\u0131rma<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">Silikon halkalar performans ve maliyet aras\u0131nda dengeli bir \u00e7\u00f6z\u00fcm sa\u011flar. SiC halkalar ile kar\u015f\u0131la\u015ft\u0131r\u0131ld\u0131\u011f\u0131nda:<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">D\u00fc\u015f\u00fck Maliyet: B\u00fct\u00e7eye duyarl\u0131 veya y\u00fcksek yenileme senaryolar\u0131 i\u00e7in ideal<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">\u0130yi Proses Uyumlulu\u011fu: \u00d6zellikle silikon bazl\u0131 prosesler i\u00e7in uygundur<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">Esnek \u00dcretim: Karma\u015f\u0131k tasar\u0131mlar\u0131 i\u015flemek daha kolay<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">G\u00fcvenilir Performans: B\u00fcy\u00fck \u00f6l\u00e7ekli yar\u0131 iletken \u00fcretiminde kan\u0131tlanm\u0131\u015ft\u0131r<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">Ancak, a\u015f\u0131r\u0131 sert plazma ko\u015fullar\u0131 alt\u0131nda, silikon halkalar SiC halkalardan daha h\u0131zl\u0131 a\u015f\u0131nabilir. Bu nedenle, malzeme se\u00e7imi proses yo\u011funlu\u011funa, kullan\u0131m \u00f6mr\u00fc beklentilerine ve maliyet hususlar\u0131na g\u00f6re yap\u0131lmal\u0131d\u0131r.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">SSS<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">S1: Silikon halka sarf malzemesi midir?<br data-start=\"3963\" data-end=\"3966\" \/>Evet. Plazma ortamlar\u0131nda kademeli erozyon nedeniyle kritik bir yar\u0131 iletken sarf malzemesi olarak kabul edilir.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">S2: Tek kristal ve polikristal silikon halkalar aras\u0131ndaki fark nedir?<br data-start=\"4160\" data-end=\"4163\" \/>Tek kristal silikon daha iyi homojenlik ve elektriksel \u00f6zellikler sunarken, polikristal silikon daha uygun maliyetlidir.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">S3: Silikon halka \u00f6zelle\u015ftirilebilir mi?<br data-start=\"4336\" data-end=\"4339\" \/>Evet. Boyut, kal\u0131nl\u0131k, diren\u00e7, y\u00fczey kalitesi ve geometri \u00e7izimlerinize g\u00f6re \u00f6zelle\u015ftirilebilir.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">S4: Bir silikon halkan\u0131n ne s\u0131kl\u0131kla de\u011fi\u015ftirilmesi gerekir?<br data-start=\"4509\" data-end=\"4512\" \/>Proses ko\u015fullar\u0131na ba\u011fl\u0131d\u0131r, ancak daha d\u00fc\u015f\u00fck plazma direnci nedeniyle tipik olarak SiC halkalardan daha s\u0131kt\u0131r.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">S5: Tipik teslim s\u00fcresi nedir?<br data-start=\"4662\" data-end=\"4665\" \/>\u00dcretim, teknik \u00f6zelliklere ve miktara ba\u011fl\u0131 olarak genellikle 3-5 hafta s\u00fcrer.<\/p>","protected":false},"excerpt":{"rendered":"<p>Silikon Halka (Si Halka), yar\u0131 iletken plazma i\u015fleme ekipmanlar\u0131nda yayg\u0131n olarak kullan\u0131lan bir bile\u015fendir ve odak halkas\u0131, kenar halkas\u0131 veya hazne astar\u0131 olarak hizmet eder. Plazma da\u011f\u0131l\u0131m\u0131n\u0131 kontrol etmede, da\u011flama homojenli\u011fini iyile\u015ftirmede ve kritik oda bile\u015fenlerini y\u00fcksek enerjili plazmaya do\u011frudan maruz kalmaktan korumada \u00f6nemli bir rol oynar.<\/p>","protected":false},"featured_media":2404,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[1251,1250,1246,1237,1254,1218,1232,1249,1252,1248,1255,1253,1256],"class_list":{"0":"post-2400","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"product_tag-edge-ring-semiconductor","8":"product_tag-focus-ring-silicon","9":"product_tag-icp-rie-ring","10":"product_tag-plasma-etching-ring","11":"product_tag-polycrystalline-silicon-ring","12":"product_tag-semiconductor-consumables","13":"product_tag-semiconductor-equipment-parts","14":"product_tag-si-ring-semiconductor","15":"product_tag-silicon-chamber-parts","16":"product_tag-silicon-ring","17":"product_tag-silicon-wear-parts","18":"product_tag-single-crystal-silicon-ring","19":"product_tag-wafer-processing-components","20":"desktop-align-left","21":"tablet-align-left","22":"mobile-align-left","23":"ast-product-gallery-layout-horizontal-slider","24":"ast-product-tabs-layout-horizontal","26":"first","27":"instock","28":"shipping-taxable","29":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2400","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/comments?post=2400"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2400\/revisions"}],"predecessor-version":[{"id":2408,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2400\/revisions\/2408"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media\/2404"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media?parent=2400"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_brand?post=2400"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_cat?post=2400"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_tag?post=2400"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}