{"id":2346,"date":"2026-04-22T05:56:29","date_gmt":"2026-04-22T05:56:29","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2346"},"modified":"2026-04-22T07:25:08","modified_gmt":"2026-04-22T07:25:08","slug":"ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing\/","title":{"rendered":"6-8 \u0130n\u00e7 Silikon Gofret \u0130\u015fleme i\u00e7in Ai250 (Orta I\u015f\u0131n) Oda S\u0131cakl\u0131\u011f\u0131nda \u0130yon \u0130mplantasyon Sistemi"},"content":{"rendered":"

\"\"Ai250 (Medium Beam) iyon implantasyon sistemi, 6 in\u00e7 ve 8 in\u00e7 silikon gofret yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in tasarlanm\u0131\u015ft\u0131r. Kararl\u0131 \u0131\u015f\u0131n performans\u0131, y\u00fcksek implantasyon do\u011frulu\u011fu ve g\u00fcvenilir doz kontrol\u00fc sa\u011flayan, geli\u015fmi\u015f entegre devre \u00fcretim s\u00fcre\u00e7lerinde kullan\u0131lan bir orta ak\u0131m iyon implanteridir.<\/p>\n

Sistem, 5 keV ila 250 keV enerji aral\u0131\u011f\u0131n\u0131 destekleyerek hem s\u0131\u011f hem de derin iyon implantasyon uygulamalar\u0131na olanak sa\u011flar. \u00c7ok \u00e7e\u015fitli yar\u0131 iletken doping i\u015flemleri i\u00e7in uygundur ve LSI \u00fcretim gereksinimleriyle tamamen uyumludur.<\/p>\n

\n

\u00d6zellikler<\/h2>\n

Kararl\u0131 Orta I\u015f\u0131n Performans\u0131<\/h3>\n

Uzun \u00fcretim d\u00f6ng\u00fcleri s\u0131ras\u0131nda istikrarl\u0131 iyon \u0131\u015f\u0131n\u0131 \u00e7\u0131k\u0131\u015f\u0131 sa\u011flayarak proses tutarl\u0131l\u0131\u011f\u0131n\u0131 art\u0131r\u0131r ve de\u011fi\u015fkenli\u011fi azalt\u0131r.<\/p>\n

Geni\u015f Enerji Aral\u0131\u011f\u0131 Yetene\u011fi<\/h3>\n

5-250 keV enerji aral\u0131\u011f\u0131, farkl\u0131 cihaz yap\u0131lar\u0131 ve i\u015flem d\u00fc\u011f\u00fcmleri i\u00e7in esnek implantasyon gereksinimlerini destekler.<\/p>\n

Y\u00fcksek Hassasiyetli S\u00fcre\u00e7 Kontrol\u00fc<\/h3>\n

A\u00e7\u0131 do\u011frulu\u011fu \u2264 0,2\u00b0, \u0131\u015f\u0131n paralelli\u011fi \u2264 0,2\u00b0, homojenlik \u2264 0,5% ve tekrarlanabilirlik \u2264 0,5% ile y\u00fcksek do\u011frulukta implantasyon performans\u0131 sa\u011flar.<\/p>\n

Y\u00fcksek Verim Kapasitesi<\/h3>\n

Orta ila y\u00fcksek hacimli yar\u0131 iletken \u00fcretimi i\u00e7in uygun olan saatte \u2265 200 gofreti destekler.<\/p>\n

Desen \u0130mplant Fonksiyonu<\/h3>\n

Tek bir yonga plakas\u0131 \u00fczerinde \u00e7ok b\u00f6lgeli ve \u00e7eyrek implantasyonu destekleyerek s\u00fcre\u00e7 esnekli\u011fini art\u0131r\u0131r ve geli\u015ftirme maliyetini d\u00fc\u015f\u00fcr\u00fcr.<\/p>\n

LSI S\u00fcre\u00e7 Uyumlulu\u011fu<\/h3>\n

LSI yar\u0131 iletken \u00fcretim s\u00fcre\u00e7leriyle tamamen uyumludur.<\/p>\n

\"\"<\/p>\n

\n

Temel \u00d6zellikler<\/h2>\n

S\u00fcre\u00e7 Parametreleri<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u00d6\u011fe<\/th>\n\u015eartname<\/th>\n<\/tr>\n<\/thead>\n
Gofret Boyutu<\/td>\n6-8 in\u00e7 silikon gofretler<\/td>\n<\/tr>\n
Enerji Aral\u0131\u011f\u0131<\/td>\n5-250 keV<\/td>\n<\/tr>\n
\u0130mplante Edilmi\u015f Elemanlar<\/td>\nB+, P+, As+, Ar+, N+, H+<\/td>\n<\/tr>\n
Doz Aral\u0131\u011f\u0131<\/td>\n5E11-1E16 iyon\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

I\u015f\u0131n Performans\u0131<\/h3>\n
\n
\n\n\n\n\n\n\n\n
\u00d6\u011fe<\/th>\n\u015eartname<\/th>\n<\/tr>\n<\/thead>\n
Maksimum I\u015f\u0131n Ak\u0131m\u0131<\/td>\nAr+ \u2265 1300 \u03bcA @ \u2265220 keV
\nB+ \u2265 1000 \u03bcA @ \u2265220 keV
\nP+ \u2265 1300 \u03bcA @ \u2265220 keV
\nN+ \u2265 1000 \u03bcA @ \u2265220 keV<\/td>\n<\/tr>\n
Kiri\u015f Stabilitesi<\/td>\n\u2264 15% \/ saat (\u0131\u015f\u0131n kesintisi ve ark \u2264 saatte 1 kez)<\/td>\n<\/tr>\n
Kiri\u015f Paralelli\u011fi<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\u0130mplantasyon Do\u011frulu\u011fu<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\u00d6\u011fe<\/th>\n\u015eartname<\/th>\n<\/tr>\n<\/thead>\n
\u0130mplant A\u00e7\u0131 Aral\u0131\u011f\u0131<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
A\u00e7\u0131 Do\u011frulu\u011fu<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n
Tekd\u00fczelik (1\u03c3)<\/td>\n\u2264 0,5% (B+, 2E14, 150 keV)<\/td>\n<\/tr>\n
Tekrarlanabilirlik (1\u03c3)<\/td>\n\u2264 0,5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

Sistem Performans\u0131<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n
\u00d6\u011fe<\/th>\n\u015eartname<\/th>\n<\/tr>\n<\/thead>\n
Verim<\/td>\nSaatte \u2265 200 gofret<\/td>\n<\/tr>\n
Vakum Seviyesi<\/td>\n< 5E-7 Torr<\/td>\n<\/tr>\n
X-ray S\u0131z\u0131nt\u0131s\u0131<\/td>\n\u2264 0,6 \u03bcSv\/h<\/td>\n<\/tr>\n
Tarama Modu<\/td>\nYatay elektrostatik tarama + dikey mekanik tarama<\/td>\n<\/tr>\n
Ekipman Boyutu<\/td>\n5600 \u00d7 3300 \u00d7 2600 mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

Uygulama Alanlar\u0131<\/h2>\n

Yar\u0131 \u0130letken Cihaz \u00dcretimi<\/h3>\n

Transist\u00f6r olu\u015fumu i\u00e7in hassas dopant implantasyonu sa\u011flayan CMOS mant\u0131k cihaz\u0131 \u00fcretiminde kullan\u0131l\u0131r.<\/p>\n

Entegre Devre \u00dcretimi<\/h3>\n

Y\u00fcksek hassasiyetli doping kontrol\u00fc gerektiren LSI ve geli\u015fmi\u015f IC \u00fcretim s\u00fcre\u00e7lerinde uygulan\u0131r.<\/p>\n

S\u0131\u011f ve Derin Kav\u015fak Olu\u015fumu<\/h3>\n

Kaynak\/bo\u015faltma m\u00fchendisli\u011fi ve ba\u011flant\u0131 derinli\u011fi kontrol\u00fc i\u00e7in implantasyon s\u00fcre\u00e7lerini destekler.<\/p>\n

Dopant M\u00fchendisli\u011fi<\/h3>\n

Do\u011fru iyon implantasyonu yoluyla silikon gofretlerin elektriksel \u00f6zelliklerini kontrol etmek i\u00e7in kullan\u0131l\u0131r.<\/p>\n

S\u00fcre\u00e7 Geli\u015ftirme ve AR-GE<\/h3>\n

Yar\u0131 iletken proses geli\u015ftirme, pilot \u00fcretim ve deneysel cihaz imalat\u0131 i\u00e7in uygundur.<\/p>\n

\n

S\u0131k\u00e7a Sorulan Sorular<\/h2>\n

1. Ai250 hangi yonga plakas\u0131 boyutlar\u0131n\u0131 destekler?<\/h3>\n

Sistem 6 in\u00e7 ve 8 in\u00e7 silikon gofretleri destekler ve ana ak\u0131m yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in uygundur.<\/p>\n

2. Sistemin enerji aral\u0131\u011f\u0131 nedir<\/h3>\n

Enerji aral\u0131\u011f\u0131 5 keV ila 250 keV'dir ve yar\u0131 iletken cihaz \u00fcretimi i\u00e7in hem s\u0131\u011f hem de derin implantasyon s\u00fcre\u00e7lerini destekler.<\/p>\n

3. Sistem hangi d\u00fczeyde s\u00fcre\u00e7 do\u011frulu\u011fu sa\u011fl\u0131yor?<\/h3>\n

Sistem 0,2\u00b0 i\u00e7inde a\u00e7\u0131 do\u011frulu\u011fu, 0,2\u00b0 i\u00e7inde \u0131\u015f\u0131n paralelli\u011fi ve 0,5% i\u00e7inde tekd\u00fczelik ve tekrarlanabilirlik sa\u011flayarak istikrarl\u0131 ve y\u00fcksek verimli \u00fcretim performans\u0131 sa\u011flar.<\/p>","protected":false},"excerpt":{"rendered":"

Ai250 (Medium Beam) iyon implantasyon sistemi, 6 in\u00e7 ve 8 in\u00e7 silikon gofret yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in tasarlanm\u0131\u015ft\u0131r. Kararl\u0131 \u0131\u015f\u0131n performans\u0131, y\u00fcksek implantasyon do\u011frulu\u011fu ve g\u00fcvenilir doz kontrol\u00fc sa\u011flayan, geli\u015fmi\u015f entegre devre \u00fcretim s\u00fcre\u00e7lerinde kullan\u0131lan bir orta ak\u0131m iyon implanteridir.<\/p>","protected":false},"featured_media":2347,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1177],"product_tag":[1189,1190,1191,1193,1178,1192,1186,1185,1188,1187],"class_list":{"0":"post-2346","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ion-implantation-equipment","7":"product_tag-6-inch-wafer-equipment","8":"product_tag-8-inch-wafer-processing","9":"product_tag-cmos-manufacturing-equipment","10":"product_tag-high-current-ion-implantation","11":"product_tag-ion-implantation-system","12":"product_tag-lsi-process-equipment","13":"product_tag-medium-beam-ion-implanter","14":"product_tag-semiconductor-fabrication-equipment","15":"product_tag-semiconductor-implantation-machine","16":"product_tag-silicon-wafer-doping-equipment","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-gallery-with-no-image","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2346","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/comments?post=2346"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2346\/revisions"}],"predecessor-version":[{"id":2374,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2346\/revisions\/2374"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media\/2347"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media?parent=2346"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_brand?post=2346"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_cat?post=2346"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_tag?post=2346"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}