{"id":2342,"date":"2026-04-22T05:35:46","date_gmt":"2026-04-22T05:35:46","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2342"},"modified":"2026-04-22T07:27:32","modified_gmt":"2026-04-22T07:27:32","slug":"high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/high-efficiency-ai80hchigh-beam-ion-implantation-equipment-for-advanced-silicon-wafer-doping\/","title":{"rendered":"Geli\u015fmi\u015f Silikon Gofret Dopingi i\u00e7in Y\u00fcksek Verimli Ai80HC (Y\u00fcksek I\u015f\u0131n) \u0130yon \u0130mplantasyon Ekipman\u0131"},"content":{"rendered":"<p data-start=\"153\" data-end=\"528\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2343 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png\" alt=\"Geli\u015fmi\u015f Silikon Gofret Dopingi i\u00e7in Y\u00fcksek Verimli Ai80HC (Y\u00fcksek I\u015f\u0131n) \u0130yon \u0130mplantasyon Ekipman\u0131\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/AI80HC.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Ai80HC (Y\u00fcksek I\u015f\u0131nl\u0131) \u0130yon \u0130mplantasyon Ekipman\u0131, 12 in\u00e7 silikon gofret yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in \u00f6zel olarak tasarlanm\u0131\u015f y\u00fcksek ak\u0131ml\u0131 bir iyon implanteridir. Modern entegre devre \u00fcretimindeki geli\u015fmi\u015f hassas doping prosesleri i\u00e7in tasarlanm\u0131\u015ft\u0131r ve istikrarl\u0131 \u0131\u015f\u0131n performans\u0131, y\u00fcksek proses tekrarlanabilirli\u011fi ve m\u00fckemmel doz kontrol do\u011frulu\u011fu sunar.<\/p>\n<p data-start=\"530\" data-end=\"891\">Sistem, 0,5 keV ila 80 keV aras\u0131nda geni\u015f bir enerji aral\u0131\u011f\u0131nda \u00e7al\u0131\u015farak hem s\u0131\u011f hem de orta derinlikte ba\u011flant\u0131 m\u00fchendisli\u011fi i\u00e7in esnek implantasyon ko\u015fullar\u0131 sa\u011flar. \u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a ve \u00b9H\u207a dahil olmak \u00fczere \u00e7oklu implantasyon t\u00fcrlerini destekler, bu da onu \u00e7ok \u00e7e\u015fitli CMOS ve geli\u015fmi\u015f mant\u0131k ayg\u0131t\u0131 \u00fcretim s\u00fcre\u00e7leri i\u00e7in uygun hale getirir.<\/p>\n<p data-start=\"893\" data-end=\"1243\">Sistem, 0\u00b0 ila 45\u00b0 implantasyon a\u00e7\u0131s\u0131 aral\u0131\u011f\u0131 ve \u2264 0,1\u00b0 y\u00fcksek a\u00e7\u0131 hassasiyeti ile dopant da\u011f\u0131l\u0131m\u0131 ve ba\u011flant\u0131 profili m\u00fchendisli\u011finin hassas kontrol\u00fcn\u00fc sa\u011flar. Ai80HC (Y\u00fcksek I\u015f\u0131n), \u2264 0,3\u00b0 \u0131\u015f\u0131n paralelli\u011fi ve \u2264 1% (1\u03c3) homojenli\u011fi ile birle\u015fti\u011finde, wafer'dan wafer'a ve wafer i\u00e7i s\u00fcre\u00e7 kararl\u0131l\u0131\u011f\u0131n\u0131 tutarl\u0131 bir \u015fekilde sunar.<\/p>\n<p data-start=\"1245\" data-end=\"1496\">Y\u00fcksek verimli \u00fcretim ortamlar\u0131 i\u00e7in tasarlanan sistem, s\u0131k\u0131 s\u00fcre\u00e7 istikrar\u0131n\u0131 korurken saatte \u2265 200 gofret (WPH) verimine ula\u015farak LSI uyumlu geli\u015fmi\u015f yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in uygun hale gelir.<\/p>\n<h2 data-section-id=\"12rj9ab\" data-start=\"1101\" data-end=\"1126\">Sistem Mimarisi<\/h2>\n<p data-start=\"1128\" data-end=\"1199\">Ai80HC, a\u015fa\u011f\u0131dakilerden olu\u015fan olgun ve g\u00fcvenilir bir \u0131\u015f\u0131n hatt\u0131 tasar\u0131m\u0131n\u0131 benimser:<\/p>\n<ul data-start=\"1201\" data-end=\"1436\">\n<li data-section-id=\"1kfcth9\" data-start=\"1201\" data-end=\"1215\">\u0130yon Kayna\u011f\u0131<\/li>\n<li data-section-id=\"1r1hm7c\" data-start=\"1216\" data-end=\"1237\">Ekstraksiyon Sistemi<\/li>\n<li data-section-id=\"1twz66q\" data-start=\"1238\" data-end=\"1255\">K\u00fctle Analiz\u00f6r\u00fc<\/li>\n<li data-section-id=\"ywuuxz\" data-start=\"1256\" data-end=\"1280\">Manyetik Lens Sistemi<\/li>\n<li data-section-id=\"1s57tik\" data-start=\"1281\" data-end=\"1302\">H\u0131zlanma T\u00fcp\u00fc<\/li>\n<li data-section-id=\"pg1cgy\" data-start=\"1303\" data-end=\"1336\">Elektrostatik Tarama Sistemi<\/li>\n<li data-section-id=\"1iwk7km\" data-start=\"1337\" data-end=\"1367\">Paralel I\u015f\u0131n \u015eekillendirici Lens<\/li>\n<li data-section-id=\"1cur4hx\" data-start=\"1368\" data-end=\"1401\">Proses Odas\u0131 (Son \u0130stasyon)<\/li>\n<li data-section-id=\"qtlnqu\" data-start=\"1402\" data-end=\"1436\">Gofret Kaseti \/ Y\u00fckleyici Sistemi<\/li>\n<\/ul>\n<p data-start=\"1438\" data-end=\"1458\">\u0130le donat\u0131lm\u0131\u015ft\u0131r:<\/p>\n<ul data-start=\"1459\" data-end=\"1572\">\n<li data-section-id=\"1jzaueb\" data-start=\"1459\" data-end=\"1494\">Elektrostatik gofret aynas\u0131 a\u015famas\u0131<\/li>\n<li data-section-id=\"1s8wavu\" data-start=\"1495\" data-end=\"1530\">Uzun \u00f6m\u00fcrl\u00fc iyon kayna\u011f\u0131 teknolojisi<\/li>\n<li data-section-id=\"6mih95\" data-start=\"1531\" data-end=\"1572\">Tam otomatik gofret i\u015fleme sistemi<\/li>\n<\/ul>\n<p data-start=\"1574\" data-end=\"1686\">Bu mimari, y\u00fcksek \u0131\u015f\u0131n kararl\u0131l\u0131\u011f\u0131, daha az bak\u0131m duru\u015f s\u00fcresi ve geli\u015fmi\u015f proses tekrarlanabilirli\u011fi sa\u011flar.<\/p>\n<p data-start=\"1574\" data-end=\"1686\"><img decoding=\"async\" class=\"aligncenter wp-image-2371 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png\" alt=\"\" width=\"1024\" height=\"388\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-1024x388.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-300x114.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-768x291.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs-600x227.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/rs.png 1216w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"106914\" data-start=\"1693\" data-end=\"1727\">Temel Teknik \u00d6zellikler<\/h2>\n<table>\n<thead>\n<tr>\n<th>\u00d6\u011fe<\/th>\n<th>\u015eartname<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>Gofret Boyutu<\/td>\n<td>12 in\u00e7<\/td>\n<\/tr>\n<tr>\n<td>Enerji Aral\u0131\u011f\u0131<\/td>\n<td>0,5 - 80 keV<\/td>\n<\/tr>\n<tr>\n<td>\u0130mplante Edilmi\u015f Elemanlar<\/td>\n<td>\u00b9\u00b9B\u207a, \u2074\u2079BF\u2082\u207a, \u00b3\u00b9P\u207a, \u2077\u2075As\u207a, \u00b9\u2074N\u207a, \u00b9H\u207a<\/td>\n<\/tr>\n<tr>\n<td>\u0130mplant A\u00e7\u0131s\u0131<\/td>\n<td>0\u00b0 - 45\u00b0<\/td>\n<\/tr>\n<tr>\n<td>A\u00e7\u0131 Do\u011frulu\u011fu<\/td>\n<td>\u2264 0.1\u00b0<\/td>\n<\/tr>\n<tr>\n<td>Doz Aral\u0131\u011f\u0131<\/td>\n<td>5E11 - 1E17 iyon\/cm\u00b2<\/td>\n<\/tr>\n<tr>\n<td>Kiri\u015f Stabilitesi<\/td>\n<td>\u2264 10% \/ saat (60 dakika i\u00e7inde; \u0131\u015f\u0131n kesintisi ve ark \u2264 1 kez)<\/td>\n<\/tr>\n<tr>\n<td>Kiri\u015f Paralelli\u011fi<\/td>\n<td>\u2264 0.3\u00b0<\/td>\n<\/tr>\n<tr>\n<td>Verim (WPH)<\/td>\n<td>\u2265 200 gofret\/saat<\/td>\n<\/tr>\n<tr>\n<td>Tekd\u00fczelik (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>Tekrarlanabilirlik (1\u03c3)<\/td>\n<td>\u2264 1%<\/td>\n<\/tr>\n<tr>\n<td>S\u00fcre\u00e7 Uyumlulu\u011fu<\/td>\n<td>LSI s\u00fcreci ile uyumlu<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<h2 data-section-id=\"yb78ly\" data-start=\"2475\" data-end=\"2506\">Temel \u00d6zellikler ve Avantajlar<\/h2>\n<h3 data-section-id=\"13hha2k\" data-start=\"2508\" data-end=\"2541\">1. Ak\u0131ll\u0131 Kontrol Sistemi<\/h3>\n<p data-start=\"2542\" data-end=\"2706\">\u00dcretim s\u0131ras\u0131nda basitle\u015ftirilmi\u015f \u00e7al\u0131\u015fma, h\u0131zl\u0131 ar\u0131za te\u015fhisi ve y\u00fcksek sistem kararl\u0131l\u0131\u011f\u0131 sa\u011flayan g\u00f6rselle\u015ftirilmi\u015f ve ak\u0131ll\u0131 bir yaz\u0131l\u0131m platformu ile donat\u0131lm\u0131\u015ft\u0131r.<\/p>\n<h3 data-section-id=\"1cy4f9q\" data-start=\"2713\" data-end=\"2740\">2. Uzun \u00d6m\u00fcrl\u00fc \u0130yon Kayna\u011f\u0131<\/h3>\n<p data-start=\"2741\" data-end=\"2863\">Ar\u0131za s\u00fcresini ve bak\u0131m maliyetini \u00f6nemli \u00f6l\u00e7\u00fcde azaltan \u2265500 saatlik kullan\u0131m \u00f6mr\u00fcne sahip geli\u015fmi\u015f iyon kayna\u011f\u0131 tasar\u0131m\u0131n\u0131 benimser.<\/p>\n<h3 data-section-id=\"4euk5j\" data-start=\"2870\" data-end=\"2903\">3. I\u015f\u0131n Te\u015fhis Yetene\u011fi<\/h3>\n<p data-start=\"2904\" data-end=\"2988\">Do\u011fru izleme yapabilen entegre 2D \u0131\u015f\u0131n profili \u00f6l\u00e7\u00fcm sistemi:<\/p>\n<ul data-start=\"2989\" data-end=\"3019\">\n<li data-section-id=\"1ct5xfp\" data-start=\"2989\" data-end=\"3003\">I\u015f\u0131n geni\u015fli\u011fi<\/li>\n<li data-section-id=\"1vm2uvw\" data-start=\"3004\" data-end=\"3019\">Kiri\u015f y\u00fcksekli\u011fi<\/li>\n<\/ul>\n<p data-start=\"3021\" data-end=\"3092\">Bu, implantasyon do\u011frulu\u011funu art\u0131r\u0131r ve proses tekrarlanabilirli\u011fini geli\u015ftirir.<\/p>\n<h3 data-section-id=\"qq9ajq\" data-start=\"3099\" data-end=\"3132\">4. Y\u00fcksek \u00dcretim Verimlili\u011fi<\/h3>\n<p data-start=\"3133\" data-end=\"3310\">Ai80HC, geleneksel sistemlere g\u00f6re 1,5 kattan daha y\u00fcksek bir verim performans\u0131 sunarak y\u00fcksek hacimli yar\u0131 iletken \u00fcretim ortamlar\u0131 i\u00e7in uygun hale geliyor.<\/p>\n<h3 data-section-id=\"1h2ge5m\" data-start=\"3317\" data-end=\"3357\">5. Geli\u015fmi\u015f Desen \u0130mplant Fonksiyonu<\/h3>\n<p data-start=\"3358\" data-end=\"3429\">Desenli iyon implantasyonunu destekleyerek doz da\u011f\u0131l\u0131m\u0131n\u0131 m\u00fcmk\u00fcn k\u0131lar:<\/p>\n<ul data-start=\"3430\" data-end=\"3488\">\n<li data-section-id=\"fqh2r6\" data-start=\"3430\" data-end=\"3450\">Dairesel b\u00f6lgeler<\/li>\n<li data-section-id=\"1aoby05\" data-start=\"3451\" data-end=\"3488\">\u00c7eyrek tabanl\u0131 gofret segmentasyonu<\/li>\n<\/ul>\n<p data-start=\"3490\" data-end=\"3502\">Bu izin verir:<\/p>\n<ul data-start=\"3503\" data-end=\"3617\">\n<li data-section-id=\"chxy3y\" data-start=\"3503\" data-end=\"3552\">Tek bir gofret \u00fczerinde \u00e7oklu proses ko\u015fullar\u0131<\/li>\n<li data-section-id=\"z1xkzj\" data-start=\"3553\" data-end=\"3589\">Azalt\u0131lm\u0131\u015f s\u00fcre\u00e7 geli\u015ftirme maliyeti<\/li>\n<li data-section-id=\"15uh0gh\" data-start=\"3590\" data-end=\"3617\">Geli\u015ftirilmi\u015f Ar-Ge verimlili\u011fi<\/li>\n<\/ul>\n<p data-start=\"3619\" data-end=\"3780\">\u00d6rnek: Tek bir yonga plakas\u0131 ayn\u0131 anda d\u00f6rt kadranda d\u00f6rt farkl\u0131 implantasyon ko\u015fulu alabilir ve bu da s\u00fcre\u00e7 optimizasyonunu \u00f6nemli \u00f6l\u00e7\u00fcde h\u0131zland\u0131r\u0131r.<\/p>\n<h2 data-section-id=\"18zz1hm\" data-start=\"3787\" data-end=\"3810\">Uygulama<\/h2>\n<ul data-start=\"3812\" data-end=\"4005\">\n<li data-section-id=\"16inq9u\" data-start=\"3812\" data-end=\"3839\">CMOS cihaz \u00fcretimi<\/li>\n<li data-section-id=\"xjegvm\" data-start=\"3840\" data-end=\"3875\">Geli\u015fmi\u015f mant\u0131k IC \u00fcretimi<\/li>\n<li data-section-id=\"1xlm3tz\" data-start=\"3876\" data-end=\"3906\">G\u00fc\u00e7 yar\u0131 iletken katk\u0131lama<\/li>\n<li data-section-id=\"1ursyu4\" data-start=\"3907\" data-end=\"3959\">Ara\u015ft\u0131rma ve geli\u015ftirme yar\u0131 iletken pilot hatlar\u0131<\/li>\n<li data-section-id=\"1k6v1m6\" data-start=\"3960\" data-end=\"4005\">Silikon tabanl\u0131 entegre devre \u00fcretimi<\/li>\n<\/ul>\n<h2 data-section-id=\"1idaiwr\" data-start=\"58\" data-end=\"95\">S\u0131k\u00e7a Sorulan Sorular (SSS)<\/h2>\n<h3 data-section-id=\"squ7m7\" data-start=\"97\" data-end=\"166\">1. Ai80HC (Y\u00fcksek I\u015f\u0131n) sistemi hangi yonga plakas\u0131 boyutu i\u00e7in tasarlanm\u0131\u015ft\u0131r?<\/h3>\n<p data-start=\"167\" data-end=\"381\">Ai80HC (High Beam) iyon implantasyon sistemi, 12 in\u00e7 silikon gofret \u00fcretim hatlar\u0131 i\u00e7in tasarlanm\u0131\u015ft\u0131r ve bu sayede geli\u015fmi\u015f yar\u0131 iletken \u00fcretimi ve y\u00fcksek hacimli entegre devre \u00fcretimi i\u00e7in uygundur.<\/p>\n<h3 data-section-id=\"foelcb\" data-start=\"388\" data-end=\"458\">2. Bu sistemin enerji aral\u0131\u011f\u0131 ve proses kapasitesi nedir?<\/h3>\n<p data-start=\"459\" data-end=\"716\">Sistem, hem s\u0131\u011f hem de orta derinlikte implantasyonu destekleyen 0,5 keV ila 80 keV enerji aral\u0131\u011f\u0131nda \u00e7al\u0131\u015f\u0131r. Geli\u015fmi\u015f cihaz yap\u0131lar\u0131nda s\u0131\u011f ba\u011flant\u0131 olu\u015fumu ve kaynak \/ bo\u015faltma m\u00fchendisli\u011fi dahil olmak \u00fczere LSI s\u00fcre\u00e7leriyle uyumludur.<\/p>\n<h3 data-section-id=\"jluc3f\" data-start=\"723\" data-end=\"792\">3. Sistem ne d\u00fczeyde hassasiyet ve kararl\u0131l\u0131k sa\u011fl\u0131yor?<\/h3>\n<p data-start=\"793\" data-end=\"850\">Ai80HC (High Beam) ile y\u00fcksek proses tutarl\u0131l\u0131\u011f\u0131 sa\u011flar:<\/p>\n<ul data-start=\"851\" data-end=\"965\">\n<li data-section-id=\"8ldlzj\" data-start=\"851\" data-end=\"878\">A\u00e7\u0131 do\u011frulu\u011fu \u2264 0,1\u00b0<\/li>\n<li data-section-id=\"nyztaj\" data-start=\"879\" data-end=\"905\">Tekd\u00fczelik (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"ai4v3y\" data-start=\"906\" data-end=\"935\">Tekrarlanabilirlik (1\u03c3) \u2264 1%<\/li>\n<li data-section-id=\"1hjdqzq\" data-start=\"936\" data-end=\"965\">Kiri\u015f paralelli\u011fi \u2264 0,3\u00b0<\/li>\n<\/ul>\n<p data-start=\"967\" data-end=\"1069\">Bu \u00f6zellikler, istikrarl\u0131 wafer-to-wafer performans\u0131 ve y\u00fcksek verimli yar\u0131 iletken \u00fcretimi sa\u011flar.<\/p>","protected":false},"excerpt":{"rendered":"<p>Ai80HC (High Beam) serisi iyon implantasyon sistemi, 12 in\u00e7 silikon yonga plakas\u0131 yar\u0131 iletken \u00fcretim hatlar\u0131 i\u00e7in \u00f6zel olarak tasarlanm\u0131\u015f y\u00fcksek ak\u0131ml\u0131 bir iyon implanteridir. Modern entegre devre \u00fcretimindeki geli\u015fmi\u015f hassas doping prosesleri i\u00e7in tasarlanm\u0131\u015ft\u0131r ve istikrarl\u0131 \u0131\u015f\u0131n performans\u0131, y\u00fcksek proses tekrarlanabilirli\u011fi ve m\u00fckemmel doz kontrol do\u011frulu\u011fu sunar.<\/p>","protected":false},"featured_media":2343,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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