{"id":2335,"date":"2026-04-21T09:54:15","date_gmt":"2026-04-21T09:54:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2335"},"modified":"2026-06-11T09:58:12","modified_gmt":"2026-06-11T09:58:12","slug":"ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/ceramic-disc-cleaning-and-waxing-integrated-machine-for-semiconductor-wafer-mounting-and-pre-processing\/","title":{"rendered":"Yar\u0131 \u0130letken Gofret Montaj\u0131 ve \u00d6n \u0130\u015fleme i\u00e7in Seramik Disk Temizleme ve Mumlama Entegre Makinesi"},"content":{"rendered":"

\"Yar\u0131Seramik Disk Temizleme ve Mumlama Entegre Makinesi, yar\u0131 iletken gofret \u00f6n i\u015fleme i\u00e7in tasarlanm\u0131\u015f, hassas temizleme, kurutma ve gofret mumlamay\u0131 (montaj) tek bir platforma entegre eden y\u00fcksek verimli otomatik bir sistemdir.<\/p>\n

Bu ekipman SiC, Si, GaN, safir ve geli\u015fmi\u015f seramik i\u015flemede yayg\u0131n olarak kullan\u0131l\u0131r ve ta\u015flama, inceltme veya parlatma i\u015flemlerinden \u00f6nce ta\u015f\u0131y\u0131c\u0131 disklere istikrarl\u0131 yonga plakas\u0131 ba\u011flanmas\u0131n\u0131 sa\u011flar. Ultrasonik temizleme teknolojisini ak\u0131ll\u0131 mumlama kontrol\u00fc ile birle\u015ftiren sistem, 99,9%'ye kadar y\u00fcksek verim oranlar\u0131na ula\u015farak hem seri \u00fcretim hem de \u00fcst d\u00fczey yar\u0131 iletken uygulamalar\u0131 i\u00e7in idealdir.<\/p>\n

Tam otomatik \u00e7al\u0131\u015fma ve MES ba\u011flant\u0131s\u0131 ile bu makine \u00fcretim verimlili\u011fini, s\u00fcre\u00e7 tutarl\u0131l\u0131\u011f\u0131n\u0131 ve izlenebilirli\u011fi \u00f6nemli \u00f6l\u00e7\u00fcde art\u0131r\u0131r.<\/p>\n

\n

Temel Teknik \u00d6zellikler<\/span><\/h2>\n

Entegre Temizlik ve A\u011fda Sistemi<\/span><\/h3>\n
    \n
  • Seramik disk temizleme + \u00e7ift a\u011fda istasyonlar\u0131n\u0131 birle\u015ftirir<\/li>\n
  • Tek ad\u0131mda i\u015fleme: temizleme \u2192 kurutma \u2192 cilalama<\/li>\n
  • Paralel \u00e7al\u0131\u015fma verimi art\u0131r\u0131r<\/li>\n<\/ul>\n

    Ultra Y\u00fcksek Hassasiyetli Hizalama<\/span><\/h3>\n
      \n
    • CCD g\u00f6rsel konumland\u0131rma sistemi<\/li>\n
    • Hizalama hassasiyeti: \u00b10,02 mm<\/li>\n
    • Hassas yonga plakas\u0131 yerle\u015fimi ve yap\u0131\u015ft\u0131rma kalitesi sa\u011flar<\/li>\n<\/ul>\n

      Kontroll\u00fc Balmumu Biriktirme<\/span><\/h3>\n
        \n
      • Balmumu miktar\u0131: Gofret ba\u015f\u0131na 0,8 g \u00b10,05 g<\/li>\n
      • D\u00fczg\u00fcn da\u011f\u0131l\u0131m, ta\u015flama s\u0131ras\u0131nda dengeli montaj sa\u011flar<\/li>\n<\/ul>\n

        Kararl\u0131 Bas\u0131n\u00e7 Kontrol\u00fc<\/span><\/h3>\n
          \n
        • Pn\u00f6matik sistem 5-10 N\/cm\u00b2 e\u015fit bas\u0131n\u00e7 sa\u011flar<\/li>\n
        • Yonga plakas\u0131 \u00e7arp\u0131lmas\u0131n\u0131 ve yap\u0131\u015ft\u0131rma kusurlar\u0131n\u0131 \u00f6nler<\/li>\n<\/ul>\n

          Y\u00fcksek Verim ve S\u00fcre\u00e7 Kararl\u0131l\u0131\u011f\u0131<\/span><\/h3>\n
            \n
          • 99,9%'ye kadar verim oran\u0131<\/li>\n
          • Otomatik parametre ayar\u0131 ile ger\u00e7ek zamanl\u0131 izleme (\u00b13% tolerans)<\/li>\n<\/ul>\n
            \n

            Teknik \u00d6zellikler<\/span><\/h2>\n
            \n
            \n\n\n\n\n\n\n\n\n
            Parametre<\/th>\nDe\u011fer<\/th>\n<\/tr>\n<\/thead>\n
            Boyutlar<\/td>\n7740 \u00d7 3390 \u00d7 2300 mm<\/td>\n<\/tr>\n
            G\u00fc\u00e7 Kayna\u011f\u0131<\/td>\nAC 380V, 50Hz, 90 kW<\/td>\n<\/tr>\n
            Pn\u00f6matik Tedarik<\/td>\n2 m\u00b3\/saat, 0,4-0,5 MPa (ya\u011fs\u0131z kuru hava)<\/td>\n<\/tr>\n
            Su Temini<\/td>\n2 T\/h @ 0,3 MPa, \u226512 M\u03a9-cm DI su<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
            \n

            \u00c7al\u0131\u015fma Prensibi<\/span><\/h2>\n

            1. Seramik Disk Temizleme A\u015famas\u0131<\/span><\/h3>\n
              \n
            • Ultrasonik temizleme sistemi mikron d\u00fczeyindeki partik\u00fclleri ve kirleticileri temizler<\/li>\n
            • Y\u00fcksek safl\u0131kta DI su kullan\u0131r (\u226512 M\u03a9-cm)<\/li>\n
            • Hava b\u0131\u00e7a\u011f\u0131 + vakumlu kurutma ile birlikte s\u0131f\u0131r kal\u0131nt\u0131 sa\u011flar<\/li>\n<\/ul>\n

              2. Otomatik A\u011fda S\u00fcreci<\/span><\/h3>\n
                \n
              • G\u00f6r\u00fc\u015f sistemi disk koordinatlar\u0131n\u0131 alg\u0131lar<\/li>\n
              • Programlanabilir da\u011f\u0131t\u0131m ba\u015fl\u0131\u011f\u0131 tek tip mum tabakas\u0131 uygular<\/li>\n
              • Wafer kontroll\u00fc bas\u0131n\u00e7 ko\u015fullar\u0131 alt\u0131nda monte edilir<\/li>\n<\/ul>\n

                3. Ak\u0131ll\u0131 S\u00fcre\u00e7 Kontrol\u00fc<\/span><\/h3>\n
                  \n
                • PLC sistemi temizleme ve cilalama mod\u00fcllerini senkronize eder<\/li>\n
                • Saatte 30 diske kadar paralel i\u015flemeyi destekler<\/li>\n
                • Kal\u0131nl\u0131k sens\u00f6rleri mum homojenli\u011fini ger\u00e7ek zamanl\u0131 olarak izler<\/li>\n<\/ul>\n
                  \n

                  \u00dcretim Kapasitesi<\/span><\/h2>\n
                  \n
                  \n\n\n\n\n\n\n\n\n\n\n
                  Gofret Boyutu<\/th>\nDisk \u00c7ap\u0131<\/th>\nMiktar<\/th>\n\u00c7evrim S\u00fcresi<\/th>\n<\/tr>\n<\/thead>\n
                  4 in\u00e7<\/td>\n\u03a6485 mm<\/td>\n11 adet<\/td>\n5 dakika\/disk<\/td>\n<\/tr>\n
                  4 in\u00e7<\/td>\n\u03a6576 mm<\/td>\n13 adet<\/td>\n6 dakika\/disk<\/td>\n<\/tr>\n
                  6 in\u00e7<\/td>\n\u03a6485 mm<\/td>\n6 adet<\/td>\n3 dakika\/disk<\/td>\n<\/tr>\n
                  6 in\u00e7<\/td>\n\u03a6576 mm<\/td>\n8 adet<\/td>\n4 dakika\/disk<\/td>\n<\/tr>\n
                  8 in\u00e7<\/td>\n\u03a6485 mm<\/td>\n3 adet<\/td>\n2 dakika\/disk<\/td>\n<\/tr>\n
                  8 in\u00e7<\/td>\n\u03a6576 mm<\/td>\n5 adet<\/td>\n3 dakika\/disk<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
                  \n

                  Uygulamalar<\/span><\/h2>\n

                  \"\"Yar\u0131 \u0130letken Gofret \u00d6n \u0130\u015fleme<\/span><\/h3>\n
                    \n
                  • Ta\u015flama \/ inceltme \/ parlatma \u00f6ncesi Wafer montaj\u0131<\/li>\n
                  • \u015eunlar i\u00e7in uygundur:\n
                      \n
                    • Silisyum (Si)<\/li>\n
                    • Silisyum Karb\u00fcr (SiC)<\/li>\n
                    • Galyum Nitr\u00fcr (GaN)<\/li>\n<\/ul>\n<\/li>\n<\/ul>\n

                      Bile\u015fik Yar\u0131 \u0130letken \u00dcretimi<\/span><\/h3>\n
                        \n
                      • GaN, SiC g\u00fc\u00e7 cihazlar\u0131<\/li>\n
                      • Geli\u015fmi\u015f alt tabaka i\u015fleme<\/li>\n<\/ul>\n

                        Optik ve Kristal Malzemeler<\/span><\/h3>\n
                          \n
                        • Safir y\u00fczeyler<\/li>\n
                        • Hassas seramikler<\/li>\n
                        • Optik bile\u015fenler<\/li>\n<\/ul>\n

                          MEMS ve \u0130leri Malzemeler<\/span><\/h3>\n
                            \n
                          • Mikrofabrikasyon wafer haz\u0131rl\u0131\u011f\u0131<\/li>\n
                          • \u00d6zel malzeme i\u015fleme<\/li>\n<\/ul>\n
                            \n

                            \"\"Temel Avantajlar<\/span><\/h2>\n
                              \n
                            • Y\u00fcksek Entegrasyon: Tek bir sistemde temizleme + kurutma + cilalama<\/li>\n
                            • Enerji Verimlili\u011fi: Su geri d\u00f6n\u00fc\u015f\u00fcm oran\u0131 >80%, azalt\u0131lm\u0131\u015f t\u00fcketim<\/li>\n
                            • Y\u00fcksek Verim: 30 disk\/saate kadar<\/li>\n
                            • Ak\u0131ll\u0131 \u00dcretime Haz\u0131r: MES\/ERP entegrasyonu desteklenir<\/li>\n
                            • Esnek \u00d6zelle\u015ftirme: \u03a6300-650 mm standart d\u0131\u015f\u0131 diskleri destekler<\/li>\n
                            • H\u0131zl\u0131 Ge\u00e7i\u015f: Tak\u0131m de\u011fi\u015ftirme s\u00fcresi <3 dakika<\/li>\n<\/ul>\n
                              \n

                              Performans \u00d6zetleri<\/span><\/h2>\n
                                \n
                              • Balmumu homojenlik sapmas\u0131: \u2264\u00b13%<\/li>\n
                              • Su t\u00fcketimi: \u22640,5 L\/disk<\/li>\n
                              • Tam izlenebilirlik ile otomatik operasyon<\/li>\n
                              • \u0130stikrarl\u0131 ve tekrarlanabilir s\u00fcre\u00e7 kontrol\u00fc<\/li>\n<\/ul>\n
                                \n

                                SSS<\/span><\/h2>\n

                                S1: Y\u00fcksek verim nas\u0131l sa\u011flan\u0131r?<\/span><\/h3>\n

                                \u00d6zel bir CCD g\u00f6rsel hizalama sistemi \u00b10,02 mm konumland\u0131rma hassasiyeti sa\u011flayarak tutarl\u0131 yonga plakas\u0131 montaj kalitesi sa\u011flar.<\/p>\n

                                S2: Su t\u00fcketim seviyesi nedir?<\/span><\/h3>\n

                                Sistem, disk ba\u015f\u0131na \u22640,5 L kadar d\u00fc\u015f\u00fck t\u00fcketimle >80% su geri d\u00f6n\u00fc\u015f\u00fcm\u00fc sa\u011flar.<\/p>\n

                                S3: H\u0131zl\u0131 wafer boyutu de\u011fi\u015ftirmeyi destekliyor mu?<\/span><\/h3>\n

                                Evet, ak\u0131ll\u0131 fikst\u00fcr k\u00fct\u00fcphanesi, HMI arac\u0131l\u0131\u011f\u0131yla 3 dakika i\u00e7inde otomatik tak\u0131m de\u011fi\u015ftirmeye olanak tan\u0131r.<\/p>","protected":false},"excerpt":{"rendered":"

                                Seramik Disk Temizleme ve Mumlama Entegre Makinesi, yar\u0131 iletken gofret \u00f6n i\u015fleme i\u00e7in tasarlanm\u0131\u015f, hassas temizleme, kurutma ve gofret mumlamay\u0131 (montaj) tek bir platforma entegre eden y\u00fcksek verimli otomatik bir sistemdir. Bu ekipman, SiC, Si, GaN, safir ve geli\u015fmi\u015f seramik i\u015flemede yayg\u0131n olarak kullan\u0131l\u0131r ve ta\u015flama, inceltme veya parlatma i\u015flemlerinden \u00f6nce ta\u015f\u0131y\u0131c\u0131 disklere sabit gofret ba\u011flanmas\u0131n\u0131 sa\u011flar.<\/p>","protected":false},"featured_media":2338,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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