{"id":2316,"date":"2026-04-21T06:05:44","date_gmt":"2026-04-21T06:05:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2316"},"modified":"2026-04-21T06:05:45","modified_gmt":"2026-04-21T06:05:45","slug":"ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication\/","title":{"rendered":"Yar\u0131 \u0130letken \u00dcretiminde Si SiO2 ve Metal Malzemeler i\u00e7in \u0130yon I\u015f\u0131nl\u0131 A\u015f\u0131nd\u0131rma Makinesi"},"content":{"rendered":"<p data-start=\"297\" data-end=\"643\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2320 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Si, SiO2 ve Metal Malzemeler i\u00e7in \u0130yon I\u015f\u0131nl\u0131 A\u015f\u0131nd\u0131rma Makinesi, geli\u015fmi\u015f mikrofabrikasyon ve nanoteknoloji uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015f y\u00fcksek hassasiyetli bir kuru a\u015f\u0131nd\u0131rma sistemidir. \u0130yon frezeleme olarak da bilinen iyon \u0131\u015f\u0131n\u0131 a\u015f\u0131nd\u0131rma (IBE) kullanan bu ekipman, tamamen fiziksel bir p\u00fcsk\u00fcrtme i\u015flemi yoluyla y\u00fcksek oranda malzeme \u00e7\u0131kar\u0131lmas\u0131n\u0131 sa\u011flar.<\/p>\n<p data-start=\"645\" data-end=\"961\">Geleneksel plazma tabanl\u0131 a\u015f\u0131nd\u0131rma teknolojilerinin aksine, iyon \u0131\u015f\u0131n\u0131 a\u015f\u0131nd\u0131rmas\u0131 alt tabakay\u0131 do\u011frudan plazmaya maruz b\u0131rakmaz. Bu, plazma kaynakl\u0131 hasar, kirlenme ve y\u00fck birikimi risklerini \u00f6nemli \u00f6l\u00e7\u00fcde azalt\u0131r ve \u00f6zellikle hassas yar\u0131 iletken ve optik cihaz \u00fcretimi i\u00e7in uygun hale getirir.<\/p>\n<p data-start=\"963\" data-end=\"1148\">Nanometre d\u00fczeyinde hassasiyet ve m\u00fckemmel proses kontrol edilebilirli\u011fi ile bu sistem yar\u0131 iletken \u00fcretimi, ince film i\u015fleme ve geli\u015fmi\u015f malzeme ara\u015ft\u0131rmalar\u0131nda yayg\u0131n olarak kullan\u0131lmaktad\u0131r.<\/p>\n<hr data-start=\"1150\" data-end=\"1153\" \/>\n<h2 data-section-id=\"17sw59i\" data-start=\"1155\" data-end=\"1184\"><span role=\"text\"><img decoding=\"async\" class=\"wp-image-2324 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png\" alt=\"\" width=\"458\" height=\"191\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-600x250.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7.png 680w\" sizes=\"(max-width: 458px) 100vw, 458px\" \/>Temel Teknik \u00d6zellikler<\/span><\/h2>\n<ul data-start=\"1186\" data-end=\"1929\">\n<li data-section-id=\"7yo1gz\" data-start=\"1186\" data-end=\"1324\">Ultra Y\u00fcksek Hassasiyet<br data-start=\"1212\" data-end=\"1215\" \/>Geli\u015fmi\u015f yar\u0131 iletken ve nanofabrikasyon gereksinimlerini kar\u015f\u0131layarak \u226410 nm a\u015f\u0131nd\u0131rma \u00e7\u00f6z\u00fcn\u00fcrl\u00fc\u011f\u00fc sa\u011flar.<\/li>\n<li data-section-id=\"csgjgf\" data-start=\"1326\" data-end=\"1497\">Se\u00e7ici Olmayan A\u015f\u0131nd\u0131rma \u00d6zelli\u011fi<br data-start=\"1364\" data-end=\"1367\" \/>Kimyasal ba\u011f\u0131ml\u0131l\u0131k olmadan metaller, yar\u0131 iletkenler ve dielektrikler dahil olmak \u00fczere \u00e7ok say\u0131da malzemede tek tip a\u015f\u0131nd\u0131rma sa\u011flar.<\/li>\n<li data-section-id=\"1xlwjqh\" data-start=\"1499\" data-end=\"1667\">Anizotropik ve Y\u00f6nl\u00fc Kontrol<br data-start=\"1540\" data-end=\"1543\" \/>Ayarlanabilir iyon \u0131\u015f\u0131n\u0131 a\u00e7\u0131lar\u0131, hem anizotropik hem de izotropik a\u015f\u0131nd\u0131rma profillerine izin vererek karma\u015f\u0131k desen transferini destekler.<\/li>\n<li data-section-id=\"1ialgp0\" data-start=\"1669\" data-end=\"1793\">Plazmas\u0131z \u0130\u015fleme Ortam\u0131<br data-start=\"1709\" data-end=\"1712\" \/>Plazma kaynakl\u0131 hasar\u0131 ortadan kald\u0131rarak daha y\u00fcksek cihaz g\u00fcvenilirli\u011fi ve verimi sa\u011flar.<\/li>\n<li data-section-id=\"1squn5z\" data-start=\"1795\" data-end=\"1929\">M\u00fckemmel Y\u00fczey Kalitesi<br data-start=\"1826\" data-end=\"1829\" \/>Optik ve elektronik uygulamalar i\u00e7in kritik olan p\u00fcr\u00fczl\u00fcl\u00fc\u011f\u00fc azalt\u0131lm\u0131\u015f p\u00fcr\u00fczs\u00fcz y\u00fczeyler \u00fcretir.<\/li>\n<\/ul>\n<hr data-start=\"1931\" data-end=\"1934\" \/>\n<h2 data-section-id=\"crb813\" data-start=\"1936\" data-end=\"1965\"><span role=\"text\">\u00c7ekirdek Sistem Bile\u015fenleri<\/span><\/h2>\n<p data-start=\"1967\" data-end=\"2042\">Eksiksiz bir iyon \u0131\u015f\u0131nl\u0131 a\u015f\u0131nd\u0131rma sistemi birka\u00e7 kritik alt sistemden olu\u015fur:<\/p>\n<h3 data-section-id=\"j86wbp\" data-start=\"2044\" data-end=\"2068\"><span role=\"text\">1. Vakum Sistemi<\/span><\/h3>\n<p data-start=\"2069\" data-end=\"2118\">A\u015fa\u011f\u0131dakiler i\u00e7in gerekli olan y\u00fcksek vakumlu bir ortam sa\u011flar:<\/p>\n<ul data-start=\"2119\" data-end=\"2193\">\n<li data-section-id=\"1vzt3vq\" data-start=\"2119\" data-end=\"2137\">Kiri\u015f stabilitesi<\/li>\n<li data-section-id=\"svkbf3\" data-start=\"2138\" data-end=\"2163\">Kontaminasyon kontrol\u00fc<\/li>\n<li data-section-id=\"19d0yza\" data-start=\"2164\" data-end=\"2193\">Y\u00fcksek hassasiyetli i\u015fleme<\/li>\n<\/ul>\n<h3 data-section-id=\"8jigvj\" data-start=\"2195\" data-end=\"2216\"><span role=\"text\">2. \u0130yon Kayna\u011f\u0131<\/span><\/h3>\n<p data-start=\"2217\" data-end=\"2272\">Y\u00fcksek enerjili bir iyon \u0131\u015f\u0131n\u0131 \u00fcretir (genellikle argon iyonlar\u0131):<\/p>\n<ul data-start=\"2273\" data-end=\"2386\">\n<li data-section-id=\"116c4dh\" data-start=\"2273\" data-end=\"2315\">A\u015f\u0131nd\u0131rma oran\u0131n\u0131 ve homojenli\u011fini belirler<\/li>\n<li data-section-id=\"bdpzju\" data-start=\"2316\" data-end=\"2386\">RF ve Kaufman iyon kaynaklar\u0131 gibi farkl\u0131 kaynak t\u00fcrlerini destekler<\/li>\n<\/ul>\n<h3 data-section-id=\"1tpsqxl\" data-start=\"2388\" data-end=\"2411\"><span role=\"text\">3. \u00d6rnek A\u015fama<\/span><\/h3>\n<ul data-start=\"2412\" data-end=\"2530\">\n<li data-section-id=\"d3z3he\" data-start=\"2412\" data-end=\"2468\">D\u00fczg\u00fcn a\u015f\u0131nd\u0131rma i\u00e7in \u00e7ok eksenli d\u00f6n\u00fc\u015f\u00fc destekler<\/li>\n<li data-section-id=\"15yipgz\" data-start=\"2469\" data-end=\"2530\">Entegre s\u0131cakl\u0131k kontrol\u00fc proses stabilitesini art\u0131r\u0131r<\/li>\n<\/ul>\n<h3 data-section-id=\"qoosxq\" data-start=\"2532\" data-end=\"2557\"><span role=\"text\">4. Kontrol Sistemi<\/span><\/h3>\n<ul data-start=\"2558\" data-end=\"2705\">\n<li data-section-id=\"1mqnqw1\" data-start=\"2558\" data-end=\"2587\">Tam otomatik operasyon<\/li>\n<li data-section-id=\"ymbyxd\" data-start=\"2588\" data-end=\"2643\">Hassas parametre kontrol\u00fc ve tekrarlanabilirlik sa\u011flar<\/li>\n<li data-section-id=\"1kjf28e\" data-start=\"2644\" data-end=\"2705\">Geli\u015fmi\u015f proses kontrol\u00fc i\u00e7in iste\u011fe ba\u011fl\u0131 u\u00e7 nokta alg\u0131lama<\/li>\n<\/ul>\n<h3 data-section-id=\"97rafg\" data-start=\"2707\" data-end=\"2729\"><span role=\"text\">5. N\u00f6trle\u015ftirici<\/span><\/h3>\n<ul data-start=\"2730\" data-end=\"2836\">\n<li data-section-id=\"12j0ebp\" data-start=\"2730\" data-end=\"2772\">A\u015f\u0131nd\u0131rma s\u0131ras\u0131nda y\u00fck birikimini \u00f6nler<\/li>\n<li data-section-id=\"1o4nvb1\" data-start=\"2773\" data-end=\"2836\">SiO\u2082 ve Si\u2083N\u2084 gibi yal\u0131tkan malzemeler i\u00e7in gereklidir<\/li>\n<\/ul>\n<hr data-start=\"2838\" data-end=\"2841\" \/>\n<h2 data-section-id=\"sgqumq\" data-start=\"2843\" data-end=\"2867\"><span role=\"text\">\u00c7al\u0131\u015fma Prensibi<\/span><\/h2>\n<p data-start=\"2869\" data-end=\"3006\"><img decoding=\"async\" class=\"size-medium wp-image-2321 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png\" alt=\"\" width=\"300\" height=\"235\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-15x12.png 15w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-600x469.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0130yon \u0131\u015f\u0131n\u0131 ile a\u015f\u0131nd\u0131rma, y\u00fcksek enerjili, kolimasyonlu bir iyon \u0131\u015f\u0131n\u0131n\u0131n vakum ko\u015fullar\u0131 alt\u0131nda hedef malzeme y\u00fczeyine y\u00f6nlendirilmesiyle \u00e7al\u0131\u015f\u0131r.<\/p>\n<p data-start=\"3008\" data-end=\"3253\">\u0130yonlar (tipik olarak Ar\u207a) y\u00fczey atomlar\u0131yla \u00e7arp\u0131\u015farak momentum aktar\u0131r ve atomlar\u0131n fiziksel p\u00fcsk\u00fcrtme yoluyla f\u0131rlat\u0131lmas\u0131na neden olur. Bu i\u015flem, malzemeyi katman katman kald\u0131rarak kimyasal reaksiyonlar olmadan hassas desen tan\u0131m\u0131n\u0131 m\u00fcmk\u00fcn k\u0131lar.<\/p>\n<p data-start=\"3255\" data-end=\"3296\">Bu, IBE'yi \u00f6zellikle a\u015fa\u011f\u0131dakiler i\u00e7in uygun hale getirir:<\/p>\n<ul data-start=\"3297\" data-end=\"3403\">\n<li data-section-id=\"jy9ydi\" data-start=\"3297\" data-end=\"3333\">Y\u00fcksek \u00e7\u00f6z\u00fcn\u00fcrl\u00fckl\u00fc desen aktar\u0131m\u0131<\/li>\n<li data-section-id=\"1ihgsm0\" data-start=\"3334\" data-end=\"3376\">D\u00fc\u015f\u00fck kimyasal reaktiviteye sahip malzemeler<\/li>\n<li data-section-id=\"hl3mzt\" data-start=\"3377\" data-end=\"3403\">\u00c7ok katmanl\u0131 yap\u0131lar<\/li>\n<\/ul>\n<hr data-start=\"3405\" data-end=\"3408\" \/>\n<h2 data-section-id=\"gimyd4\" data-start=\"3410\" data-end=\"3440\"><span role=\"text\">\u0130\u015fleme Yetenekleri<\/span><\/h2>\n<h3 data-section-id=\"ww5vbk\" data-start=\"3442\" data-end=\"3469\"><span role=\"text\">Desteklenen Malzemeler<\/span><\/h3>\n<ul data-start=\"3470\" data-end=\"3622\">\n<li data-section-id=\"4dwycu\" data-start=\"3470\" data-end=\"3504\">Metaller: Au, Pt, Cu, Ta, Al<\/li>\n<li data-section-id=\"12wc4i0\" data-start=\"3505\" data-end=\"3537\">Yar\u0131 iletkenler: Si, GaAs<\/li>\n<li data-section-id=\"75kyg7\" data-start=\"3538\" data-end=\"3570\">Dielektrikler: SiO\u2082, Si\u2083N\u2084<\/li>\n<li data-section-id=\"1xmdv1x\" data-start=\"3571\" data-end=\"3622\">\u0130leri Malzemeler: AlN, seramikler, polimerler<\/li>\n<\/ul>\n<hr data-start=\"3624\" data-end=\"3627\" \/>\n<h2 data-section-id=\"12vl3dy\" data-start=\"3629\" data-end=\"3656\"><span role=\"text\">Tipik S\u00fcre\u00e7 Ak\u0131\u015f\u0131<\/span><\/h2>\n<ol data-start=\"3658\" data-end=\"4078\">\n<li data-section-id=\"1lq2akh\" data-start=\"3658\" data-end=\"3742\">\u00d6rnek Haz\u0131rlama<br data-start=\"3683\" data-end=\"3686\" \/>Alt tabakay\u0131 temizleyin ve vakum odas\u0131na monte edin<\/li>\n<li data-section-id=\"1uf7qj1\" data-start=\"3744\" data-end=\"3821\">Maskeleme<br data-start=\"3758\" data-end=\"3761\" \/>A\u015f\u0131nd\u0131rma alanlar\u0131n\u0131 tan\u0131mlamak i\u00e7in fotorezist veya metal maske uygulay\u0131n<\/li>\n<li data-section-id=\"1sq3ygn\" data-start=\"3823\" data-end=\"3910\">\u0130yon I\u015f\u0131n\u0131 \u00dcretimi<br data-start=\"3849\" data-end=\"3852\" \/>\u0130nert gaz (tipik olarak argon) kullanarak iyon kayna\u011f\u0131n\u0131 etkinle\u015ftirin<\/li>\n<li data-section-id=\"46esbg\" data-start=\"3912\" data-end=\"4006\">A\u015f\u0131nd\u0131rma \u0130\u015flemi<br data-start=\"3934\" data-end=\"3937\" \/>\u0130stenen yap\u0131y\u0131 elde etmek i\u00e7in \u0131\u015f\u0131n enerjisini, a\u00e7\u0131s\u0131n\u0131 ve s\u00fcresini ayarlama<\/li>\n<li data-section-id=\"oeifr6\" data-start=\"4008\" data-end=\"4078\">Maske \u00c7\u0131karma<br data-start=\"4027\" data-end=\"4030\" \/>Son kaz\u0131nm\u0131\u015f desenleri ortaya \u00e7\u0131karmak i\u00e7in maskeyi \u00e7\u0131kar\u0131n<\/li>\n<\/ol>\n<hr data-start=\"4080\" data-end=\"4083\" \/>\n<h2 data-section-id=\"1myoacb\" data-start=\"4085\" data-end=\"4109\"><span role=\"text\">Uygulama Alanlar\u0131<\/span><\/h2>\n<h3 data-section-id=\"bm5nu5\" data-start=\"4111\" data-end=\"4146\"><span role=\"text\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2322 aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png\" alt=\"\" width=\"724\" height=\"157\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-18x4.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-600x130.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6.png 680w\" sizes=\"(max-width: 724px) 100vw, 724px\" \/>Yar\u0131 \u0130letken \u00dcretimi<\/span><\/h3>\n<ul data-start=\"4147\" data-end=\"4236\">\n<li data-section-id=\"13vctk4\" data-start=\"4147\" data-end=\"4180\">Entegre devre desenleme<\/li>\n<li data-section-id=\"ofwy8d\" data-start=\"4181\" data-end=\"4206\">\u0130nce film yap\u0131land\u0131rma<\/li>\n<li data-section-id=\"1x3kzva\" data-start=\"4207\" data-end=\"4236\">Geli\u015fmi\u015f d\u00fc\u011f\u00fcm \u00fcretimi<\/li>\n<\/ul>\n<h3 data-section-id=\"1tse075\" data-start=\"4238\" data-end=\"4261\"><span role=\"text\">Optik Cihazlar<\/span><\/h3>\n<ul data-start=\"4262\" data-end=\"4356\">\n<li data-section-id=\"v6a7ly\" data-start=\"4262\" data-end=\"4309\">Izgaralar\u0131n ve merceklerin hassas i\u015flenmesi<\/li>\n<li data-section-id=\"lq2w9m\" data-start=\"4310\" data-end=\"4356\">Optik bile\u015fenlerin y\u00fczey modifikasyonu<\/li>\n<\/ul>\n<h3 data-section-id=\"1wc0my6\" data-start=\"4358\" data-end=\"4380\"><span role=\"text\">Nanoteknoloji<\/span><\/h3>\n<ul data-start=\"4381\" data-end=\"4441\">\n<li data-section-id=\"178ey7v\" data-start=\"4381\" data-end=\"4441\">Nanotellerin, nano g\u00f6zeneklerin ve MEMS yap\u0131lar\u0131n\u0131n imalat\u0131<\/li>\n<\/ul>\n<h3 data-section-id=\"krs816\" data-start=\"4443\" data-end=\"4468\"><span role=\"text\">Malzeme Bilimi<\/span><\/h3>\n<ul data-start=\"4469\" data-end=\"4541\">\n<li data-section-id=\"18ntl16\" data-start=\"4469\" data-end=\"4506\">Y\u00fczey analizi ve modifikasyonu<\/li>\n<li data-section-id=\"1b8wqpz\" data-start=\"4507\" data-end=\"4541\">Fonksiyonel kaplama haz\u0131rl\u0131\u011f\u0131<\/li>\n<\/ul>\n<hr data-start=\"4543\" data-end=\"4546\" \/>\n<h2 data-section-id=\"13lz0w7\" data-start=\"4548\" data-end=\"4591\"><span role=\"text\">Geleneksel A\u015f\u0131nd\u0131rmaya G\u00f6re Avantajlar\u0131<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4593\" data-end=\"4927\">\n<thead data-start=\"4593\" data-end=\"4646\">\n<tr data-start=\"4593\" data-end=\"4646\">\n<th class=\"\" data-start=\"4593\" data-end=\"4603\" data-col-size=\"sm\">\u00d6zellik<\/th>\n<th class=\"\" data-start=\"4603\" data-end=\"4622\" data-col-size=\"sm\">\u0130yon I\u015f\u0131n\u0131yla A\u015f\u0131nd\u0131rma<\/th>\n<th class=\"\" data-start=\"4622\" data-end=\"4646\" data-col-size=\"sm\">Reaktif \u0130yon A\u015f\u0131nd\u0131rma<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4697\" data-end=\"4927\">\n<tr data-start=\"4697\" data-end=\"4746\">\n<td data-start=\"4697\" data-end=\"4712\" data-col-size=\"sm\">\u0130\u015flem T\u00fcr\u00fc<\/td>\n<td data-start=\"4712\" data-end=\"4723\" data-col-size=\"sm\">Fiziksel<\/td>\n<td data-start=\"4723\" data-end=\"4746\" data-col-size=\"sm\">Fiziksel + Kimyasal<\/td>\n<\/tr>\n<tr data-start=\"4747\" data-end=\"4805\">\n<td data-start=\"4747\" data-end=\"4765\" data-col-size=\"sm\">Plazma Maruziyeti<\/td>\n<td data-start=\"4765\" data-end=\"4786\" data-col-size=\"sm\">Do\u011frudan maruziyet yok<\/td>\n<td data-start=\"4786\" data-end=\"4805\" data-col-size=\"sm\">Do\u011frudan maruz kalma<\/td>\n<\/tr>\n<tr data-start=\"4806\" data-end=\"4853\">\n<td data-start=\"4806\" data-end=\"4829\" data-col-size=\"sm\">Malzeme Se\u00e7icili\u011fi<\/td>\n<td data-start=\"4829\" data-end=\"4845\" data-col-size=\"sm\">D\u00fc\u015f\u00fck (tek tip)<\/td>\n<td data-start=\"4845\" data-end=\"4853\" data-col-size=\"sm\">Y\u00fcksek<\/td>\n<\/tr>\n<tr data-start=\"4854\" data-end=\"4893\">\n<td data-start=\"4854\" data-end=\"4871\" data-col-size=\"sm\">Y\u00fczey Hasar\u0131<\/td>\n<td data-start=\"4871\" data-end=\"4881\" data-col-size=\"sm\">Minimal<\/td>\n<td data-start=\"4881\" data-end=\"4893\" data-col-size=\"sm\">M\u00fcmk\u00fcn<\/td>\n<\/tr>\n<tr data-start=\"4894\" data-end=\"4927\">\n<td data-start=\"4894\" data-end=\"4906\" data-col-size=\"sm\">Hassasiyet<\/td>\n<td data-start=\"4906\" data-end=\"4919\" data-col-size=\"sm\">Ultra y\u00fcksek<\/td>\n<td data-start=\"4919\" data-end=\"4927\" data-col-size=\"sm\">Y\u00fcksek<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4929\" data-end=\"4932\" \/>\n<h2 data-section-id=\"elc90z\" data-start=\"4934\" data-end=\"4944\"><span role=\"text\">SSS<\/span><\/h2>\n<h3 data-section-id=\"1h3z74f\" data-start=\"4946\" data-end=\"4978\"><span role=\"text\">\u0130yon \u0131\u015f\u0131nl\u0131 a\u015f\u0131nd\u0131rma nedir\uff1f<\/span><\/h3>\n<p data-start=\"4979\" data-end=\"5122\">\u0130yon \u0131\u015f\u0131nl\u0131 a\u015f\u0131nd\u0131rma, vakum ortam\u0131nda y\u00fcksek enerjili iyonlar kullanarak fiziksel p\u00fcsk\u00fcrtme yoluyla malzemeyi kald\u0131ran kuru bir a\u015f\u0131nd\u0131rma i\u015flemidir.<\/p>\n<h3 data-section-id=\"1oyreis\" data-start=\"5124\" data-end=\"5153\"><span role=\"text\">IBE ile RIE aras\u0131ndaki fark\uff1f<\/span><\/h3>\n<ul data-start=\"5154\" data-end=\"5316\">\n<li data-section-id=\"6o7nxe\" data-start=\"5154\" data-end=\"5219\">IBE: tamamen fiziksel, plazma temas\u0131 yok, daha y\u00fcksek hassasiyet<\/li>\n<li data-section-id=\"d79ynl\" data-start=\"5220\" data-end=\"5316\">RIE: kimyasal reaksiyonlar\u0131 plazma ile birle\u015ftirir, daha y\u00fcksek se\u00e7icilik ancak daha fazla hasar riski<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Si, SiO2 ve Metal Malzemeler i\u00e7in \u0130yon I\u015f\u0131nl\u0131 A\u015f\u0131nd\u0131rma Makinesi, geli\u015fmi\u015f mikrofabrikasyon ve nanoteknoloji uygulamalar\u0131 i\u00e7in tasarlanm\u0131\u015f y\u00fcksek hassasiyetli bir kuru a\u015f\u0131nd\u0131rma sistemidir. \u0130yon frezeleme olarak da bilinen iyon \u0131\u015f\u0131n\u0131 a\u015f\u0131nd\u0131rma (IBE) kullanan bu ekipman, tamamen fiziksel bir p\u00fcsk\u00fcrtme i\u015flemi yoluyla y\u00fcksek oranda malzeme \u00e7\u0131kar\u0131lmas\u0131n\u0131 sa\u011flar.<\/p>","protected":false},"featured_media":2320,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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