{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/tr\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"6\u201d\/8\u201d Epi-Wafers i\u00e7in Entegre Dikey Hava Ak\u0131\u015fl\u0131 SiC Epitaksi Ekipman\u0131"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Entegre Dikey Hava Ak\u0131\u015fl\u0131 Silisyum Karb\u00fcr (SiC) Epitaksi Ekipman\u0131, 6 in\u00e7 ve 8 in\u00e7 SiC epi-wafer'lar\u0131n y\u00fcksek verimli \u00fcretimi i\u00e7in tasarlanm\u0131\u015f geli\u015fmi\u015f bir epitaksiyel b\u00fcy\u00fctme sistemidir. G\u00fc\u00e7 yar\u0131 iletken \u00fcretiminin artan taleplerini kar\u015f\u0131lamak i\u00e7in tasarlanan bu sistem, homojenlik, verim ve hata kontrol\u00fcnde ola\u011fan\u00fcst\u00fc performans sa\u011flamak i\u00e7in hassas termal kontrol, optimize edilmi\u015f gaz ak\u0131\u015f\u0131 dinamikleri ve ak\u0131ll\u0131 otomasyonu entegre eder.<\/p>\n<p data-start=\"643\" data-end=\"982\">Sistemin \u00f6z\u00fcnde, proses gazlar\u0131n\u0131n yonga plakas\u0131 y\u00fczeyinde e\u015fit da\u011f\u0131l\u0131m\u0131n\u0131 sa\u011flayan yenilik\u00e7i bir dikey hava ak\u0131\u015fl\u0131 du\u015f ba\u015fl\u0131\u011f\u0131 tasar\u0131m\u0131 bulunmaktad\u0131r. \u00c7ok b\u00f6lgeli s\u0131cakl\u0131k alan\u0131 kontrol\u00fc ile birle\u015fti\u011finde, y\u00fcksek performansl\u0131 SiC g\u00fc\u00e7 cihazlar\u0131 i\u00e7in kritik olan m\u00fckemmel kal\u0131nl\u0131k homojenli\u011fi ve istikrarl\u0131 doping konsantrasyonu sa\u011flar.<\/p>\n<p data-start=\"984\" data-end=\"1310\">Sistem, bir EFEM sistemi arac\u0131l\u0131\u011f\u0131yla otomatik gofret i\u015fleme ve y\u00fcksek s\u0131cakl\u0131kta gofret transfer mekanizmas\u0131 ile son derece entegre bir yap\u0131ya sahiptir. Bu, modern yar\u0131 iletken \u00fcretim hatlar\u0131na sorunsuz entegrasyon sa\u011flar, manuel m\u00fcdahaleyi azalt\u0131r ve s\u00fcre\u00e7 tutarl\u0131l\u0131\u011f\u0131n\u0131 ve operasyonel verimlili\u011fi art\u0131r\u0131r.<\/p>\n<p data-start=\"1312\" data-end=\"1615\">End\u00fcstriyel \u00f6l\u00e7ekte \u00fcretimi desteklemek i\u00e7in ekipman, s\u00fcrekli \u00e7ok f\u0131r\u0131nl\u0131 \u00e7al\u0131\u015fma kapasitesine sahip \u00e7ift odac\u0131kl\u0131 bir konfig\u00fcrasyona sahiptir. Ayda 1100'den fazla gofret ve proses optimizasyonu ile 1200 gofrete kadar \u00fcretim kapasitesiyle y\u00fcksek hacimli \u00fcretim ortamlar\u0131 i\u00e7in \u00e7ok uygundur.<\/p>\n<p data-start=\"1617\" data-end=\"1971\">Ekipman hem 6 in\u00e7 hem de 8 in\u00e7 SiC yonga plakalar\u0131 ile uyumludur ve daha b\u00fcy\u00fck yonga plakas\u0131 boyutlar\u0131na ge\u00e7i\u015f yapan \u00fcreticiler i\u00e7in esneklik sunar. Ayr\u0131ca, kal\u0131n epitaksiyel katman b\u00fcy\u00fctme ve hendek doldurma epitaksisinde m\u00fckemmel yetenek sergileyerek, geli\u015fmi\u015f y\u00fcksek voltaj ve y\u00fcksek g\u00fc\u00e7l\u00fc cihaz \u00fcretimi i\u00e7in \u00f6zellikle uygun hale getirir.<\/p>\n<p data-start=\"1973\" data-end=\"2214\">Buna ek olarak, optimize edilmi\u015f reakt\u00f6r tasar\u0131m\u0131 d\u00fc\u015f\u00fck hata yo\u011funlu\u011fu, geli\u015fmi\u015f verim ve d\u00fc\u015f\u00fck sahip olma maliyeti sa\u011flar. Sa\u011flam yap\u0131s\u0131 ve bak\u0131m dostu tasar\u0131m\u0131, uzun vadeli g\u00fcvenilirli\u011fi ve operasyonel istikrar\u0131 daha da art\u0131r\u0131r.<\/p>\n<h2 data-section-id=\"qpn8c9\" data-start=\"2221\" data-end=\"2252\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2078 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Temel Teknik Avantajlar<\/span><\/h2>\n<ul data-start=\"2254\" data-end=\"2704\">\n<li data-section-id=\"1q2t12k\" data-start=\"2254\" data-end=\"2321\">E\u015fit gaz da\u011f\u0131l\u0131m\u0131 i\u00e7in dikey hava ak\u0131\u015fl\u0131 du\u015f ba\u015fl\u0131\u011f\u0131 tasar\u0131m\u0131<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2322\" data-end=\"2387\">Hassas termal y\u00f6netim i\u00e7in \u00e7ok b\u00f6lgeli s\u0131cakl\u0131k kontrol\u00fc<\/li>\n<li data-section-id=\"1emeqzr\" data-start=\"2388\" data-end=\"2449\">Y\u00fcksek verimli \u00fcretim i\u00e7in \u00e7ift odac\u0131kl\u0131 konfig\u00fcrasyon<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2450\" data-end=\"2499\">D\u00fc\u015f\u00fck kusur yo\u011funlu\u011fu ve y\u00fcksek verim performans\u0131<\/li>\n<li data-section-id=\"h9m4ox\" data-start=\"2500\" data-end=\"2550\">EFEM entegrasyonu ile otomatik gofret i\u015fleme<\/li>\n<li data-section-id=\"bze71o\" data-start=\"2551\" data-end=\"2594\">6\u201d ve 8\u201d SiC gofretlerle uyumluluk<\/li>\n<li data-section-id=\"xhhop\" data-start=\"2595\" data-end=\"2655\">Kal\u0131n epitaksi ve hendek doldurma i\u015flemleri i\u00e7in optimize edilmi\u015ftir<\/li>\n<li data-section-id=\"1a3549x\" data-start=\"2656\" data-end=\"2704\">Basitle\u015ftirilmi\u015f bak\u0131m ile y\u00fcksek g\u00fcvenilirlik<\/li>\n<\/ul>\n<h2 data-section-id=\"ca04ra\" data-start=\"2711\" data-end=\"2737\"><span role=\"text\">S\u00fcre\u00e7 Performans\u0131<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2739\" data-end=\"3287\">\n<thead data-start=\"2739\" data-end=\"2768\">\n<tr data-start=\"2739\" data-end=\"2768\">\n<th class=\"\" data-start=\"2739\" data-end=\"2751\" data-col-size=\"sm\">Parametre<\/th>\n<th class=\"\" data-start=\"2751\" data-end=\"2768\" data-col-size=\"md\">\u015eartname<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2796\" data-end=\"3287\">\n<tr data-start=\"2796\" data-end=\"2884\">\n<td data-start=\"2796\" data-end=\"2809\" data-col-size=\"sm\">Verim<\/td>\n<td data-start=\"2809\" data-end=\"2884\" data-col-size=\"md\">\u22651100 gofret\/ay (\u00e7ift hazneli), 1200 gofret\/ay'a kadar (optimize edilmi\u015f)<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">Wafer Boyut Uyumlulu\u011fu<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">6\u201d \/ 8\u201d SiC epi-wafers<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">S\u0131cakl\u0131k Kontrol\u00fc<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">\u00c7oklu b\u00f6lge<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">Hava Ak\u0131\u015f Sistemi<\/td>\n<td data-start=\"2993\" data-end=\"3035\" data-col-size=\"md\">Dikey ayarlanabilir \u00e7ok b\u00f6lgeli hava ak\u0131\u015f\u0131<\/td>\n<\/tr>\n<tr data-start=\"3036\" data-end=\"3067\">\n<td data-start=\"3036\" data-end=\"3053\" data-col-size=\"sm\">D\u00f6n\u00fc\u015f H\u0131z\u0131<\/td>\n<td data-start=\"3053\" data-end=\"3067\" data-col-size=\"md\">0-1000 rpm<\/td>\n<\/tr>\n<tr data-start=\"3068\" data-end=\"3101\">\n<td data-start=\"3068\" data-end=\"3086\" data-col-size=\"sm\">Maksimum B\u00fcy\u00fcme Oran\u0131<\/td>\n<td data-start=\"3086\" data-end=\"3101\" data-col-size=\"md\">\u226560 \u03bcm\/saat<\/td>\n<\/tr>\n<tr data-start=\"3102\" data-end=\"3163\">\n<td data-start=\"3102\" data-end=\"3125\" data-col-size=\"sm\">Kal\u0131nl\u0131k Tekd\u00fczeli\u011fi<\/td>\n<td data-col-size=\"md\" data-start=\"3125\" data-end=\"3163\">\u22642% (optimize edilmi\u015f \u22641%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3164\" data-end=\"3224\">\n<td data-start=\"3164\" data-end=\"3184\" data-col-size=\"sm\">Doping D\u00fczg\u00fcnl\u00fc\u011f\u00fc<\/td>\n<td data-col-size=\"md\" data-start=\"3184\" data-end=\"3224\">\u22643% (optimize edilmi\u015f \u22641,5%, \u03c3\/avg, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3225\" data-end=\"3287\">\n<td data-start=\"3225\" data-end=\"3249\" data-col-size=\"sm\">Katil Kusur Yo\u011funlu\u011fu<\/td>\n<td data-col-size=\"md\" data-start=\"3249\" data-end=\"3287\">\u22640,2 cm-\u00b2 (0,01 cm-\u00b2'ye optimize edilmi\u015ftir)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"1w46w82\" data-start=\"3294\" data-end=\"3322\"><span role=\"text\">Uygulama Senaryolar\u0131<\/span><\/h2>\n<p data-start=\"3324\" data-end=\"3514\">Bu ekipman, \u00f6zellikle y\u00fcksek verimlilik, y\u00fcksek voltaj ve y\u00fcksek termal performans gerektiren end\u00fcstrilerde, geli\u015fmi\u015f SiC tabanl\u0131 yar\u0131 iletken cihazlar\u0131n \u00fcretiminde yayg\u0131n olarak kullan\u0131lmaktad\u0131r:<\/p>\n<ul data-start=\"3516\" data-end=\"4364\">\n<li data-section-id=\"qrtaas\" data-start=\"3516\" data-end=\"3707\">Elektrikli Ara\u00e7lar (EV'ler)<br data-start=\"3545\" data-end=\"3548\" \/>\u0130nvert\u00f6rler, yerle\u015fik \u015farj cihazlar\u0131 ve DC-DC d\u00f6n\u00fc\u015ft\u00fcr\u00fcc\u00fcler i\u00e7in SiC MOSFET'lerin ve g\u00fc\u00e7 mod\u00fcllerinin \u00fcretiminde kullan\u0131l\u0131r, enerji verimlili\u011fini ve s\u00fcr\u00fc\u015f menzilini art\u0131r\u0131r.<\/li>\n<li data-section-id=\"1j97evh\" data-start=\"3709\" data-end=\"3867\">Yenilenebilir Enerji Sistemleri<br data-start=\"3739\" data-end=\"3742\" \/>Fotovoltaik invert\u00f6rlerde ve enerji depolama sistemlerinde uygulanarak daha y\u00fcksek d\u00f6n\u00fc\u015f\u00fcm verimlili\u011fi ve sistem g\u00fcvenilirli\u011fi sa\u011flar.<\/li>\n<li data-section-id=\"8pfhmh\" data-start=\"3869\" data-end=\"4041\">End\u00fcstriyel G\u00fc\u00e7 Elektroni\u011fi<br data-start=\"3903\" data-end=\"3906\" \/>Y\u00fcksek g\u00fc\u00e7l\u00fc motor s\u00fcr\u00fcc\u00fcleri, end\u00fcstriyel otomasyon sistemleri ve kararl\u0131 ve verimli \u00e7al\u0131\u015fma gerektiren g\u00fc\u00e7 kayna\u011f\u0131 \u00fcniteleri i\u00e7in uygundur.<\/li>\n<li data-section-id=\"frfj8s\" data-start=\"4043\" data-end=\"4206\">Demiryolu Ta\u015f\u0131mac\u0131l\u0131\u011f\u0131 ve G\u00fc\u00e7 \u015eebekeleri<br data-start=\"4075\" data-end=\"4078\" \/>Ak\u0131ll\u0131 \u015febekelerde, \u00e7eki\u015f sistemlerinde ve g\u00fc\u00e7 aktar\u0131m altyap\u0131s\u0131nda kullan\u0131lan y\u00fcksek voltajl\u0131 ve y\u00fcksek frekansl\u0131 cihazlar\u0131 destekler.<\/li>\n<li data-section-id=\"1k6eb43\" data-start=\"4208\" data-end=\"4364\">\u00dcst D\u00fczey G\u00fc\u00e7 Cihazlar\u0131<br data-start=\"4236\" data-end=\"4239\" \/>Schottky diyotlar\u0131, MOSFET'ler ve yeni nesil y\u00fcksek voltaj bile\u015fenleri gibi geli\u015fmi\u015f SiC cihazlar\u0131n\u0131n \u00fcretimi i\u00e7in idealdir.<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"elc90z\" data-start=\"4371\" data-end=\"4381\"><span role=\"text\">SSS<\/span><\/h2>\n<h3 data-section-id=\"1f731tm\" data-start=\"4383\" data-end=\"4453\"><span role=\"text\">1. Bu epitaksi ekipman\u0131 hangi wafer boyutlar\u0131n\u0131 destekliyor?<\/span><\/h3>\n<p data-start=\"4454\" data-end=\"4606\">Sistem hem 6 in\u00e7 hem de 8 in\u00e7 SiC wafer'lar\u0131 destekleyerek \u00fcreticilerin mevcut \u00fcretim taleplerini kar\u015f\u0131larken gelecekteki \u00f6l\u00e7eklendirmeye de haz\u0131rlanmalar\u0131n\u0131 sa\u011fl\u0131yor.<\/p>\n<h3 data-section-id=\"8a4v60\" data-start=\"4613\" data-end=\"4683\"><span role=\"text\">2. Dikey hava ak\u0131\u015f\u0131 tasar\u0131m\u0131 ne gibi avantajlar sa\u011flar?<\/span><\/h3>\n<p data-start=\"4684\" data-end=\"4858\">Dikey hava ak\u0131\u015f\u0131 sistemi, yonga plakas\u0131 boyunca e\u015fit gaz da\u011f\u0131l\u0131m\u0131 sa\u011flayarak kal\u0131nl\u0131k tutarl\u0131l\u0131\u011f\u0131n\u0131 art\u0131r\u0131r, kusurlar\u0131 azalt\u0131r ve genel epitaksiyel kaliteyi art\u0131r\u0131r.<\/p>\n<h3 data-section-id=\"1rbmoqb\" data-start=\"4865\" data-end=\"4935\"><span role=\"text\">3. Bu ekipman y\u00fcksek hacimli \u00fcretim i\u00e7in uygun mu?<\/span><\/h3>\n<p data-start=\"4936\" data-end=\"5110\">Evet, sistem \u00e7ift odac\u0131kl\u0131 bir konfig\u00fcrasyona ve s\u00fcrekli \u00e7al\u0131\u015fma moduna sahiptir ve ayl\u0131k verimi 1100 gofreti a\u015fmaktad\u0131r. \u0130stikrarl\u0131, b\u00fcy\u00fck \u00f6l\u00e7ekli end\u00fcstriyel \u00fcretim i\u00e7in \u00e7ok uygundur ve tutarl\u0131 \u00e7\u0131kt\u0131, y\u00fcksek verim istikrar\u0131 ve uzun vadeli operasyonel verimlilik sa\u011flar.<\/p>","protected":false},"excerpt":{"rendered":"<p>Entegre Dikey Hava Ak\u0131ml\u0131 Silisyum Karb\u00fcr (SiC) Epitaksi Ekipman\u0131, 6 in\u00e7 ve 8 in\u00e7 SiC epi-wafer'lar\u0131n y\u00fcksek verimli \u00fcretimi i\u00e7in tasarlanm\u0131\u015f geli\u015fmi\u015f bir epitaksiyel b\u00fcy\u00fctme sistemidir.<\/p>","protected":false},"featured_media":2078,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[734,735,737,738,745,740,744,739,733,731,603,732,742,741,736,743],"class_list":{"0":"post-2077","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-sic-wafer","8":"product_tag-8-inch-sic-wafer","9":"product_tag-cvd-epitaxy-system","10":"product_tag-epitaxial-growth-system","11":"product_tag-ev-power-semiconductors","12":"product_tag-high-voltage-sic-devices","13":"product_tag-industrial-power-electronics","14":"product_tag-semiconductor-manufacturing-equipment","15":"product_tag-sic-epi-wafer-production","16":"product_tag-sic-epitaxy-equipment","17":"product_tag-sic-power-devices","18":"product_tag-silicon-carbide-epitaxy-reactor","19":"product_tag-thick-epitaxy-growth","20":"product_tag-trench-filling-epitaxy","21":"product_tag-vertical-airflow-epitaxy","22":"product_tag-wafer-epitaxy-reactor","23":"desktop-align-left","24":"tablet-align-left","25":"mobile-align-left","26":"ast-product-gallery-layout-horizontal-slider","27":"ast-product-tabs-layout-horizontal","29":"first","30":"instock","31":"shipping-taxable","32":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2077","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/comments?post=2077"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2077\/revisions"}],"predecessor-version":[{"id":2082,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product\/2077\/revisions\/2082"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media\/2078"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/media?parent=2077"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_brand?post=2077"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_cat?post=2077"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/tr\/wp-json\/wp\/v2\/product_tag?post=2077"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}