![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_growth_furnace_pvt_method_6inch_8inch_12_inch_low_energy_consumption1-300x300.webp\")
SiC b\u00fcy\u00fctme f\u0131r\u0131n\u0131 (PVT y\u00f6ntemi), 6 in\u00e7, 8 in\u00e7 ve 12 in\u00e7 silisyum karb\u00fcr (SiC) tek kristallerinin \u00fcretimi i\u00e7in tasarlanm\u0131\u015f y\u00fcksek performansl\u0131 bir sistemdir.<\/p>\nSiC b\u00fcy\u00fctme f\u0131r\u0131n\u0131 (PVT y\u00f6ntemi), 6 in\u00e7, 8 in\u00e7 ve 12 in\u00e7 silisyum karb\u00fcr (SiC) tek kristallerinin \u00fcretimi i\u00e7in tasarlanm\u0131\u015f y\u00fcksek performansl\u0131 bir sistemdir.<\/p>\n
Geli\u015fmi\u015f ind\u00fcksiyon \u0131s\u0131tma teknolojisini kullanan f\u0131r\u0131n, h\u0131zl\u0131 \u0131s\u0131tma, hassas s\u0131cakl\u0131k kontrol\u00fc ve d\u00fc\u015f\u00fck enerji t\u00fcketimi sa\u011flayarak end\u00fcstriyel \u00f6l\u00e7ekte SiC kristal b\u00fcy\u00fctme i\u00e7in ideal bir \u00e7\u00f6z\u00fcmd\u00fcr.<\/p>\n
G\u00fc\u00e7 elektroni\u011fi, RF cihazlar\u0131 ve yeni nesil yar\u0131 iletken uygulamalar\u0131 i\u00e7in SiC substratlar\u0131n \u00fcretiminde yayg\u0131n olarak kullan\u0131lmaktad\u0131r.<\/p>\n
\u0130nd\u00fcksiyonlu Is\u0131tma Sistemi
Grafit potan\u0131n do\u011frudan elektromanyetik \u0131s\u0131tmas\u0131, y\u00fcksek verimlilik ve h\u0131zl\u0131 termal tepki sa\u011flar<\/p>\n<\/li>\n
Ultra Hassas S\u0131cakl\u0131k Kontrol\u00fc
1\u00b0C'ye kadar do\u011fruluk, istikrarl\u0131 kristal b\u00fcy\u00fctme ko\u015fullar\u0131 sa\u011flar<\/p>\n<\/li>\n
D\u00fc\u015f\u00fck Enerji T\u00fcketimi
Optimize edilmi\u015f termal tasar\u0131m i\u015fletme maliyetini \u00f6nemli \u00f6l\u00e7\u00fcde azalt\u0131r<\/p>\n<\/li>\n
Y\u00fcksek Stabilite ve D\u00fc\u015f\u00fck Kontaminasyon
Temass\u0131z \u0131s\u0131tma + inert gaz ortam\u0131 kirlilikleri en aza indirir<\/p>\n<\/li>\n
B\u00fcy\u00fck \u00c7apl\u0131 Kristaller i\u00e7in \u00d6l\u00e7eklenebilir
6\u2033, 8\u2033 ve 12\u2033 SiC kristal b\u00fcy\u00fcmesini destekler<\/p>\n<\/li>\n<\/ul>\n
| Parametre<\/th>\n | \u015eartname<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|
| Boyutlar (L\u00d7W\u00d7H)<\/td>\n | 3200 \u00d7 1150 \u00d7 3600 mm (\u00f6zelle\u015ftirilebilir)<\/td>\n<\/tr>\n |
| F\u0131r\u0131n Haznesi \u00c7ap\u0131<\/td>\n | 400 mm<\/td>\n<\/tr>\n |
| Maksimum S\u0131cakl\u0131k<\/td>\n | 2400\u00b0C<\/td>\n<\/tr>\n |
| S\u0131cakl\u0131k Aral\u0131\u011f\u0131<\/td>\n | 900-3000\u00b0C<\/td>\n<\/tr>\n |
| S\u0131cakl\u0131k Do\u011frulu\u011fu<\/td>\n | \u00b11\u00b0C<\/td>\n<\/tr>\n |
| Is\u0131tma Y\u00f6ntemi<\/td>\n | \u0130nd\u00fcksiyonla Is\u0131tma<\/td>\n<\/tr>\n |
| G\u00fc\u00e7 Kayna\u011f\u0131<\/td>\n | 40 kW, 8-12 kHz<\/td>\n<\/tr>\n |
| Vakum Seviyesi<\/td>\n | 5 \u00d7 10-\u2074 Pa<\/td>\n<\/tr>\n |
| Bas\u0131n\u00e7 Aral\u0131\u011f\u0131<\/td>\n | 1-700 mbar<\/td>\n<\/tr>\n |
| S\u0131cakl\u0131k \u00d6l\u00e7\u00fcm\u00fc<\/td>\n | \u00c7ift renkli k\u0131z\u0131l\u00f6tesi<\/td>\n<\/tr>\n |
| Y\u00fckleme Y\u00f6ntemi<\/td>\n | Alttan y\u00fckleme<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\nTasar\u0131m Avantajlar\u0131<\/span><\/h2>\nYar\u0131 izolasyonlu ve iletken SiC kristal b\u00fcy\u00fcmesi ile uyumlu<\/p>\n<\/li>\n Pota d\u00f6nd\u00fcrme sistemi s\u0131cakl\u0131k homojenli\u011fini art\u0131r\u0131r<\/p>\n<\/li>\n Ayarlanabilir ind\u00fcksiyon bobini kald\u0131rma termal rahats\u0131zl\u0131\u011f\u0131 azalt\u0131r<\/p>\n<\/li>\n \u00c7ift katmanl\u0131 su so\u011futmal\u0131 kuvars hazne ekipman \u00f6mr\u00fcn\u00fc uzat\u0131r<\/p>\n<\/li>\n Ger\u00e7ek zamanl\u0131 \u00e7ift noktal\u0131 s\u0131cakl\u0131k izleme<\/p>\n<\/li>\n \u00c7oklu kontrol modlar\u0131: sabit g\u00fc\u00e7 \/ ak\u0131m \/ s\u0131cakl\u0131k<\/p>\n<\/li>\n Otomatik \u00e7al\u0131\u015fma i\u00e7in tek t\u0131kla ak\u0131ll\u0131 ba\u015flatma<\/p>\n<\/li>\n Verimli fabrika yerle\u015fimi i\u00e7in kompakt yap\u0131<\/p>\n<\/li>\n Y\u00fcksek hassasiyetli bas\u0131n\u00e7 kontrol\u00fc (\u00b11 Pa'ya kadar)<\/p>\n<\/li>\n<\/ul>\n Performans ve Uygulamalar<\/span><\/h2>\nSiC MOSFET'ler<\/p>\n<\/li>\n Schottky diyotlar\u0131<\/p>\n<\/li>\n RF cihazlar\u0131<\/p>\n<\/li>\n Elektrikli ara\u00e7lar (EV g\u00fc\u00e7 mod\u00fclleri)<\/p>\n<\/li>\n G\u00fcne\u015f enerjisi invert\u00f6rleri<\/p>\n<\/li>\n 5G ileti\u015fim sistemleri<\/p>\n<\/li>\n<\/ul>\n Kararl\u0131 termal kontrol ve optimize edilmi\u015f b\u00fcy\u00fcme ko\u015fullar\u0131 ile sistem, end\u00fcstriyel \u00fcretim i\u00e7in y\u00fcksek verim, tutarl\u0131l\u0131k ve \u00f6l\u00e7eklenebilirlik sa\u011flar.<\/p>\n
Kabiliyetlerimiz (ZMSH)<\/span><\/h2>\n
|
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/SiC-Growth-Furnace5.png\")
<\/p>\n