{"id":2400,"date":"2026-04-24T06:21:19","date_gmt":"2026-04-24T06:21:19","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2400"},"modified":"2026-04-24T06:21:22","modified_gmt":"2026-04-24T06:21:22","slug":"precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/sv\/product\/precision-silicon-ring-single-crystal-polycrystalline-for-semiconductor-plasma-etching\/","title":{"rendered":"Precisionskiselring (enkelkristall \/ polykristallin) f\u00f6r plasmaetsning av halvledare"},"content":{"rendered":"<p data-start=\"228\" data-end=\"558\">\u00a0\u00a0<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2404 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"Precisionskiselring (enkelkristall \/ polykristallin) f\u00f6r plasmaetsning av halvledare\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Precision-Silicon-Ring-Single-Crystal-Polycrystalline-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Kiselringen (Si Ring) \u00e4r en komponent som ofta anv\u00e4nds i utrustning f\u00f6r plasmabehandling av halvledare och fungerar som fokusring, kantring eller kammarinl\u00e4gg. Den spelar en nyckelroll n\u00e4r det g\u00e4ller att kontrollera plasmadistributionen, f\u00f6rb\u00e4ttra etsningens enhetlighet och skydda kritiska kammarkomponenter fr\u00e5n direkt exponering f\u00f6r h\u00f6genergiplasma.<\/p>\n<p data-start=\"560\" data-end=\"882\">Si-ringarna \u00e4r tillverkade av enkristallint kisel eller polykristallint kisel med h\u00f6g renhet och erbjuder utm\u00e4rkt kompatibilitet med processer f\u00f6r kiselskivor. Denna inneboende materialkompatibilitet minskar avsev\u00e4rt kontamineringsriskerna, vilket g\u00f6r kiselringar till ett f\u00f6rstahandsval i m\u00e5nga milj\u00f6er f\u00f6r tillverkning av halvledare.<\/p>\n<p data-start=\"884\" data-end=\"1239\">Under drift uts\u00e4tts kiselringarna f\u00f6r reaktiv plasma som genereras av gaser som CF\u2084, SF\u2086, NF\u2083 och Cl\u2082. Dessa f\u00f6rh\u00e5llanden orsakar gradvis materialerosion och ytf\u00f6rst\u00f6ring. D\u00e4rf\u00f6r klassificeras kiselringar som kritiska f\u00f6rbrukningsartiklar f\u00f6r halvledare och m\u00e5ste bytas ut regelbundet f\u00f6r att bibeh\u00e5lla optimal processprestanda och utbyte.<\/p>\n<p data-start=\"1241\" data-end=\"1430\">J\u00e4mf\u00f6rt med SiC-ringar \u00e4r kiselringar mer kostnadseffektiva och l\u00e4ttare att bearbeta, vilket g\u00f6r dem idealiska f\u00f6r applikationer d\u00e4r utbytescyklerna \u00e4r acceptabla och kostnadskontroll \u00e4r viktig.<\/p>\n<hr data-start=\"1432\" data-end=\"1435\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1437\" data-end=\"1457\">Viktiga funktioner<\/h2>\n<ul data-start=\"1458\" data-end=\"2054\">\n<li data-section-id=\"1wvx41j\" data-start=\"1458\" data-end=\"1549\">Kiselmaterial med h\u00f6g renhet: Finns i enkelkristallin och polykristallin form<\/li>\n<li data-section-id=\"16rlosp\" data-start=\"1550\" data-end=\"1653\">Utm\u00e4rkt processkompatibilitet: Idealisk f\u00f6r bearbetning av kiselskivor med l\u00e5g kontamineringsrisk<\/li>\n<li data-section-id=\"h5tu82\" data-start=\"1654\" data-end=\"1727\">Stabila elektriska egenskaper: St\u00f6djer konsekvent plasmabeteende<\/li>\n<li data-section-id=\"qwtj7n\" data-start=\"1728\" data-end=\"1814\">Precisionsbearbetning: Sn\u00e4va toleranser (&lt;10 \u03bcm) f\u00f6r avancerade halvledarverktyg<\/li>\n<li data-section-id=\"cd4ksl\" data-start=\"1815\" data-end=\"1903\">Flera alternativ f\u00f6r resistivitet: L\u00e4mplig f\u00f6r olika krav p\u00e5 plasmakontroll<\/li>\n<li data-section-id=\"vfz8a3\" data-start=\"1904\" data-end=\"1984\">Kostnadseffektiv l\u00f6sning: L\u00e4gre initialkostnad j\u00e4mf\u00f6rt med SiC-alternativ<\/li>\n<li data-section-id=\"1q6rj8k\" data-start=\"1985\" data-end=\"2054\">St\u00f6d f\u00f6r anpassad design: Komplexa geometrier och storlekar tillg\u00e4ngliga<\/li>\n<\/ul>\n<hr data-start=\"2056\" data-end=\"2059\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2061\" data-end=\"2093\">Tekniska specifikationer<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2095\" data-end=\"2793\">\n<thead data-start=\"2095\" data-end=\"2124\">\n<tr data-start=\"2095\" data-end=\"2124\">\n<th class=\"\" data-start=\"2095\" data-end=\"2107\" data-col-size=\"sm\">Parameter<\/th>\n<th class=\"\" data-start=\"2107\" data-end=\"2124\" data-col-size=\"md\">Specifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2152\" data-end=\"2793\">\n<tr data-start=\"2152\" data-end=\"2215\">\n<td data-start=\"2152\" data-end=\"2163\" data-col-size=\"sm\">Material<\/td>\n<td data-col-size=\"md\" data-start=\"2163\" data-end=\"2215\">Enkristallint kisel \/ polykristallint kisel<\/td>\n<\/tr>\n<tr data-start=\"2216\" data-end=\"2263\">\n<td data-start=\"2216\" data-end=\"2225\" data-col-size=\"sm\">Renhet<\/td>\n<td data-col-size=\"md\" data-start=\"2225\" data-end=\"2263\">\u2265 99,999% (5N halvledarkvalitet)<\/td>\n<\/tr>\n<tr data-start=\"2264\" data-end=\"2297\">\n<td data-start=\"2264\" data-end=\"2281\" data-col-size=\"sm\">Diameter (max)<\/td>\n<td data-col-size=\"md\" data-start=\"2281\" data-end=\"2297\">Upp till 480 mm<\/td>\n<\/tr>\n<tr data-start=\"2298\" data-end=\"2340\">\n<td data-start=\"2298\" data-end=\"2310\" data-col-size=\"sm\">Tjocklek<\/td>\n<td data-col-size=\"md\" data-start=\"2310\" data-end=\"2340\">Anpassad (typiskt 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2341\" data-end=\"2376\">\n<td data-start=\"2341\" data-end=\"2361\" data-col-size=\"sm\">Resistivitet (l\u00e5g)<\/td>\n<td data-col-size=\"md\" data-start=\"2361\" data-end=\"2376\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2377\" data-end=\"2414\">\n<td data-start=\"2377\" data-end=\"2400\" data-col-size=\"sm\">Resistivitet (Medium)<\/td>\n<td data-col-size=\"md\" data-start=\"2400\" data-end=\"2414\">1 - 4 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2415\" data-end=\"2452\">\n<td data-start=\"2415\" data-end=\"2436\" data-col-size=\"sm\">Resistivitet (h\u00f6g)<\/td>\n<td data-col-size=\"md\" data-start=\"2436\" data-end=\"2452\">70 - 90 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2453\" data-end=\"2492\">\n<td data-start=\"2453\" data-end=\"2484\" data-col-size=\"sm\">Enhetlig resistivitet (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2484\" data-end=\"2492\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2493\" data-end=\"2543\">\n<td data-start=\"2493\" data-end=\"2513\" data-col-size=\"sm\">Ytans tillst\u00e5nd<\/td>\n<td data-col-size=\"md\" data-start=\"2513\" data-end=\"2543\">Polerad \/ Lappad \/ Slipad<\/td>\n<\/tr>\n<tr data-start=\"2544\" data-end=\"2605\">\n<td data-start=\"2544\" data-end=\"2569\" data-col-size=\"sm\">Ytj\u00e4mnhet (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2569\" data-end=\"2605\">\u2264 0,8 \u03bcm (polerad kan vara l\u00e4gre)<\/td>\n<\/tr>\n<tr data-start=\"2606\" data-end=\"2639\">\n<td data-start=\"2606\" data-end=\"2628\" data-col-size=\"sm\">Maskinbearbetning Precision<\/td>\n<td data-col-size=\"md\" data-start=\"2628\" data-end=\"2639\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2640\" data-end=\"2682\">\n<td data-start=\"2640\" data-end=\"2651\" data-col-size=\"sm\">Planhet<\/td>\n<td data-col-size=\"md\" data-start=\"2651\" data-end=\"2682\">\u2264 30 \u03bcm (beroende p\u00e5 storlek)<\/td>\n<\/tr>\n<tr data-start=\"2683\" data-end=\"2728\">\n<td data-start=\"2683\" data-end=\"2695\" data-col-size=\"sm\">Typ av kant<\/td>\n<td data-col-size=\"md\" data-start=\"2695\" data-end=\"2728\">Avfasning \/ radie anpassningsbar<\/td>\n<\/tr>\n<tr data-start=\"2729\" data-end=\"2793\">\n<td data-start=\"2729\" data-end=\"2747\" data-col-size=\"sm\">Kvalitetskontroll<\/td>\n<td data-col-size=\"md\" data-start=\"2747\" data-end=\"2793\">Inga sprickor, flisor, repor eller f\u00f6roreningar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2795\" data-end=\"2798\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2800\" data-end=\"2820\">Till\u00e4mpningar<\/h2>\n<p data-start=\"2821\" data-end=\"2903\">Kiselringar \u00e4r viktiga i en m\u00e4ngd olika bearbetningsmilj\u00f6er f\u00f6r halvledare:<\/p>\n<ul data-start=\"2905\" data-end=\"3108\">\n<li data-section-id=\"qzqq98\" data-start=\"2905\" data-end=\"2943\">System f\u00f6r plasmaetsning (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"2944\" data-end=\"2987\">Kemisk f\u00f6r\u00e5ngningsdeposition (CVD\/PECVD)<\/li>\n<li data-section-id=\"1hekjdg\" data-start=\"2988\" data-end=\"3025\">Komponenter f\u00f6r fokusring \/ kantring<\/li>\n<li data-section-id=\"y1zl6l\" data-start=\"3026\" data-end=\"3065\">Kammarens skydds- och foderdelar<\/li>\n<li data-section-id=\"83pt8g\" data-start=\"3066\" data-end=\"3108\">Applikationer f\u00f6r plasmakontroll av wafer edge<\/li>\n<\/ul>\n<p data-start=\"3110\" data-end=\"3235\">De anv\u00e4nds ofta i b\u00e5de mogna och intermedi\u00e4ra processnoder d\u00e4r kostnadseffektivitet och stabil prestanda kr\u00e4vs.<\/p>\n<p data-start=\"3110\" data-end=\"3235\"><img decoding=\"async\" class=\"aligncenter wp-image-2406 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg\" alt=\"Precisionskiselring (enkelkristall \/ polykristallin) f\u00f6r plasmaetsning av halvledare\" width=\"1024\" height=\"681\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1024x681.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-300x199.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-768x510.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-1536x1021.jpg 1536w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-18x12.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0-600x399.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/nqhpoIZB7ZFQ0FgmKSApdpD5LVDKRh2mgeWJ0h_n8YC-oFDqn-Z2JB5pyoBfyG-_oDLzw_pC2C1A3AoLJoKcLErEuU3bYIhN8vq8CwcolHLoXu8EmdfU22zT2CiuFBN0qxhzObBOZwWh-dASuFxcJnit1n-yH8VsKHv8U2e2dzbKmApkzAOkXyVy8SRUL7r0.jpg 2048w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3237\" data-end=\"3240\" \/>\n<h2 data-section-id=\"1misgzs\" data-start=\"3242\" data-end=\"3274\">F\u00f6rdelar &amp; positionering<\/h2>\n<p data-start=\"3275\" data-end=\"3371\">Kiselringar ger en balanserad l\u00f6sning mellan prestanda och kostnad. J\u00e4mf\u00f6rt med SiC-ringar:<\/p>\n<ul data-start=\"3373\" data-end=\"3681\">\n<li data-section-id=\"qgkkrh\" data-start=\"3373\" data-end=\"3449\">L\u00e4gre kostnad: Idealisk f\u00f6r budgetk\u00e4nsliga scenarier eller scenarier med h\u00f6g ers\u00e4ttningsniv\u00e5<\/li>\n<li data-section-id=\"fe5ihf\" data-start=\"3450\" data-end=\"3533\">God processkompatibilitet: Speciellt l\u00e4mplig f\u00f6r kiselbaserade processer<\/li>\n<li data-section-id=\"1wgvfgt\" data-start=\"3534\" data-end=\"3604\">Flexibel tillverkning: L\u00e4ttare att bearbeta till komplexa konstruktioner<\/li>\n<li data-section-id=\"1855g4l\" data-start=\"3605\" data-end=\"3681\">Tillf\u00f6rlitlig prestanda: Bepr\u00f6vad i storskalig halvledarproduktion<\/li>\n<\/ul>\n<p data-start=\"3683\" data-end=\"3894\">Under extremt h\u00e5rda plasmaf\u00f6rh\u00e5llanden kan dock kiselringar slitas snabbare \u00e4n SiC-ringar. D\u00e4rf\u00f6r b\u00f6r materialvalet baseras p\u00e5 processintensitet, f\u00f6rv\u00e4ntad livsl\u00e4ngd och kostnads\u00f6verv\u00e4ganden.<\/p>\n<p data-start=\"3683\" data-end=\"3894\"><img decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"3896\" data-end=\"3899\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"3901\" data-end=\"3912\">VANLIGA FR\u00c5GOR<\/h2>\n<p data-start=\"3914\" data-end=\"4070\">F1: \u00c4r silikonringen en f\u00f6rbrukningsvara?<br data-start=\"3963\" data-end=\"3966\" \/>Ja, det anses vara en kritisk f\u00f6rbrukningsvara f\u00f6r halvledare p\u00e5 grund av gradvis erosion i plasmamilj\u00f6er.<\/p>\n<p data-start=\"4072\" data-end=\"4291\">F2: Vad \u00e4r skillnaden mellan enkristallina och polykristallina kiselringar?<br data-start=\"4160\" data-end=\"4163\" \/>Enkristallint kisel ger b\u00e4ttre j\u00e4mnhet och elektriska egenskaper, medan polykristallint kisel \u00e4r mer kostnadseffektivt.<\/p>\n<p data-start=\"4293\" data-end=\"4452\">F3: Kan kiselringen anpassas?<br data-start=\"4336\" data-end=\"4339\" \/>Ja, storlek, tjocklek, resistivitet, ytfinish och geometri kan alla anpassas efter dina ritningar.<\/p>\n<p data-start=\"4454\" data-end=\"4622\">Q4: Hur ofta beh\u00f6ver en silikonring bytas ut?<br data-start=\"4509\" data-end=\"4512\" \/>Det beror p\u00e5 processf\u00f6rh\u00e5llandena, men vanligtvis oftare \u00e4n SiC-ringar p\u00e5 grund av l\u00e4gre plasmabest\u00e4ndighet.<\/p>\n<p data-start=\"4624\" data-end=\"4743\">F5: Vad \u00e4r den typiska ledtiden?<br data-start=\"4662\" data-end=\"4665\" \/>Produktionen tar i allm\u00e4nhet 3-5 veckor beroende p\u00e5 specifikationer och antal.<\/p>","protected":false},"excerpt":{"rendered":"<p>Kiselringen (Si Ring) \u00e4r en komponent som ofta anv\u00e4nds i utrustning f\u00f6r plasmabehandling av halvledare och fungerar som fokusring, kantring eller kammarinl\u00e4gg. Den spelar en nyckelroll n\u00e4r det g\u00e4ller att kontrollera plasmadistributionen, f\u00f6rb\u00e4ttra etsningens enhetlighet och skydda kritiska kammarkomponenter fr\u00e5n direkt exponering f\u00f6r 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