{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/sv\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"CVD-ring av kiselkarbid SiC f\u00f6r plasmaetsning av halvledare"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"CVD-ring av kiselkarbid SiC f\u00f6r plasmaetsning av halvledare\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC-ringen (Silicon Carbide Ring) \u00e4r en h\u00f6gpresterande komponent som ofta anv\u00e4nds i utrustning f\u00f6r plasmabehandling av halvledare, s\u00e4rskilt i ets- och deponeringskammare. Produkten \u00e4r tillverkad av CVD-kiselkarbid (Chemical Vapor Deposition) och erbjuder exceptionell motst\u00e5ndskraft mot plasmaerosion, h\u00f6ga temperaturer och aggressiva kemiska milj\u00f6er.<\/p>\n<p data-start=\"579\" data-end=\"989\">Vid tillverkning av halvledare uts\u00e4tts kammarkomponenter kontinuerligt f\u00f6r reaktiva gaser som fluor- och klorbaserade kemikalier (CF\u2084, SF\u2086, Cl\u2082) samt h\u00f6genergetiskt jonbombardemang. Under s\u00e5dana f\u00f6rh\u00e5llanden tenderar traditionella kiselkomponenter att brytas ned snabbare. SiC-ringar ger d\u00e4remot betydligt b\u00e4ttre h\u00e5llbarhet, minskad partikelgenerering och f\u00f6rb\u00e4ttrad processtabilitet.<\/p>\n<p data-start=\"991\" data-end=\"1355\">Tack vare sin enast\u00e5ende mekaniska styrka, v\u00e4rmeledningsf\u00f6rm\u00e5ga och kemiska inertitet anses CVD SiC vara ett av de mest tillf\u00f6rlitliga materialen f\u00f6r n\u00e4sta generations halvledarutrustning. SiC-ringar installeras vanligtvis som fokusringar, kantringar eller skyddsringar f\u00f6r kammaren, vilket hj\u00e4lper till att kontrollera plasmadistributionen och skydda kritiska kammardelar.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">Dessa ringar klassificeras som kritiska f\u00f6rbrukningsvaror f\u00f6r halvledare och har en mycket l\u00e4ngre livsl\u00e4ngd j\u00e4mf\u00f6rt med konventionella kiselringar, vilket g\u00f6r dem idealiska f\u00f6r avancerade processnoder och tillverkningsmilj\u00f6er med h\u00f6g kapacitet.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">Viktiga funktioner<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">CVD SiC-material med h\u00f6g renhet: S\u00e4kerst\u00e4ller utm\u00e4rkt strukturell integritet och minimal kontaminering<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">Enast\u00e5ende plasmabest\u00e4ndighet: \u00d6verl\u00e4gsen best\u00e4ndighet mot fluor- och klorbaserad plasma<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">Stabilitet vid h\u00f6ga temperaturer: Bibeh\u00e5ller prestanda i bearbetningsmilj\u00f6er med h\u00f6ga temperaturer<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">L\u00e5g partikelgenerering: F\u00f6rb\u00e4ttrar waferutbytet och processens renhet<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">F\u00f6rl\u00e4ngd livsl\u00e4ngd: Vanligtvis flera g\u00e5nger l\u00e4ngre \u00e4n kiselkomponenter<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">Precisionsbearbetning: Sn\u00e4va toleranser (&lt;10 \u03bcm) f\u00f6r s\u00f6ml\u00f6s integrering i halvledarverktyg<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">Tekniska specifikationer<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">Parameter<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">Specifikation<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">Material<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD kiselkarbid (SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">Renhet<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99,9%<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">T\u00e4thet<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3,1 g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">Diameter (max)<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">Upp till 370 mm<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">Tjocklek<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">Anpassad (typiskt 5-30 mm)<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">Resistivitet (l\u00e5g)<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0,02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">Resistivitet (Medium)<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0,2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">Resistivitet (h\u00f6g)<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">Enhetlig resistivitet (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">Ytans tillst\u00e5nd<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">Mark (polering tillg\u00e4nglig p\u00e5 beg\u00e4ran)<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">Ytj\u00e4mnhet (Ra)<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1,6 \u03bcm (anpassningsbar)<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">Maskinbearbetning Precision<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">Termisk konduktivitet<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120-200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">H\u00e5rdhet<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9,2 Mohs<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">Kvalitetskontroll<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">Fri fr\u00e5n sprickor, flisor och f\u00f6roreningar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">Till\u00e4mpningar<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">SiC-ringar \u00e4r viktiga komponenter i halvledarutrustning d\u00e4r h\u00e5llbarhet och plasmabest\u00e4ndighet \u00e4r avg\u00f6rande:<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">System f\u00f6r plasmaetsning (ICP \/ RIE)<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">Kemisk f\u00f6r\u00e5ngningsdeposition (CVD\/PECVD)<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">Applikationer f\u00f6r fokusring\/kantring<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">Kammarinl\u00e4gg och skyddskomponenter<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">Plasmabehandlingsmilj\u00f6er med h\u00f6g densitet<\/li>\n<\/ul>\n<p data-start=\"3243\" data-end=\"3383\">De \u00e4r s\u00e4rskilt l\u00e4mpliga f\u00f6r avancerade noder och tuffa etsningsprocesser, d\u00e4r kiselkomponenter inte kan uppfylla kraven p\u00e5 livsl\u00e4ngd.<\/p>\n<p data-start=\"3243\" data-end=\"3383\"><img decoding=\"async\" class=\"aligncenter wp-image-2393 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg\" alt=\"\" width=\"1024\" height=\"511\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-1024x511.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-300x150.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-768x383.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-18x9.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva-600x299.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/V-XNjEkVLOxdQ3vNkqwRlwTnQIJEWLvn8yKCuqVOt3LGwjYhcj9HcJSqdlRSxOCdMdZ33IUySbpwQnVceltXtWhkg6VNrYi_ptiSJF92Api4RpFrek_-pbJFl5pgNytSMfwNYWSx43dQ6jT4QYV9yjBEYcR61Je4jzErkENr5eeHHxdHesqnUnHvdt1ORiva.jpg 1080w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"3385\" data-end=\"3388\" \/>\n<h2 data-section-id=\"j4gip\" data-start=\"3390\" data-end=\"3436\">Varf\u00f6r v\u00e4lja SiC-ring \u00f6ver kiselring?<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">J\u00e4mf\u00f6rt med traditionella kiselringar ger SiC-ringar en betydande f\u00f6rb\u00e4ttring av livsl\u00e4ngden och processtabiliteten. \u00c4ven om kiselringar \u00e4r mer kostnadseffektiva i b\u00f6rjan, slits de snabbare under aggressiva plasmaf\u00f6rh\u00e5llanden och kr\u00e4ver oftare byte.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">SiC-ringar, \u00e5 andra sidan, ger:<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">3-10\u00d7 l\u00e4ngre livsl\u00e4ngd<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">B\u00e4ttre motst\u00e5ndskraft mot kemisk korrosion<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">L\u00e4gre partikelf\u00f6roreningar<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">Minskad stillest\u00e5ndstid och underh\u00e5llskostnad<\/li>\n<\/ul>\n<p data-start=\"3905\" data-end=\"4056\">F\u00f6r avancerad halvledartillverkning \u00e4r den totala \u00e4gandekostnaden (TCO) ofta l\u00e4gre n\u00e4r SiC-komponenter anv\u00e4nds, trots den h\u00f6gre initialkostnaden.<\/p>\n<p data-start=\"3905\" data-end=\"4056\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4058\" data-end=\"4061\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4063\" data-end=\"4074\">VANLIGA FR\u00c5GOR<\/h2>\n<p data-start=\"4076\" data-end=\"4283\">F1: \u00c4r SiC-ringen en f\u00f6rbrukningsvara?<br data-start=\"4121\" data-end=\"4124\" \/>Ja, det anses vara en kritisk f\u00f6rbrukningsvara f\u00f6r halvledare. \u00c4ven om den har en l\u00e4ngre livsl\u00e4ngd \u00e4n kiseldelar, kommer den s\u00e5 sm\u00e5ningom att slitas under plasmaexponering.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">F2: Vad \u00e4r f\u00f6rdelen med CVD SiC-material?<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC ger extremt h\u00f6g renhet, t\u00e4t struktur och utm\u00e4rkt motst\u00e5ndskraft mot plasma och kemikalier, vilket g\u00f6r den idealisk f\u00f6r halvledartill\u00e4mpningar.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">F3: Kan SiC-ringen anpassas?<br data-start=\"4533\" data-end=\"4536\" \/>Ja, det kan vi. Diameter, tjocklek, resistivitet och ytbehandling kan anpassas utifr\u00e5n dina ritningar eller utrustningskrav.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">Q4: Hur l\u00e4nge h\u00e5ller en SiC-ring j\u00e4mf\u00f6rt med en kiselring?<br data-start=\"4735\" data-end=\"4738\" \/>Vanligtvis h\u00e5ller SiC-ringar 3-10 g\u00e5nger l\u00e4ngre beroende p\u00e5 processf\u00f6rh\u00e5llandena.<\/p>\n<p data-start=\"4816\" data-end=\"4928\">Q5: Vad \u00e4r ledtiden?<br data-start=\"4846\" data-end=\"4849\" \/>Produktionen tar vanligtvis 4-8 veckor beroende p\u00e5 designens komplexitet och kvantitet.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC-ringen (Silicon Carbide Ring) \u00e4r en h\u00f6gpresterande komponent som ofta anv\u00e4nds i utrustning f\u00f6r plasmabehandling av halvledare, s\u00e4rskilt i ets- och deponeringskammare. Produkten \u00e4r tillverkad av CVD-kiselkarbid (Chemical Vapor Deposition) och erbjuder exceptionell motst\u00e5ndskraft mot plasmaerosion, h\u00f6ga temperaturer och aggressiva kemiska milj\u00f6er.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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