{"id":1636,"date":"2026-03-17T07:52:18","date_gmt":"2026-03-17T07:52:18","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1636"},"modified":"2026-03-20T07:39:36","modified_gmt":"2026-03-20T07:39:36","slug":"6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/sv\/product\/6-8-inch-silicon-sic-wafer-quad-polishing-automation-line-with-cleaning-and-re-mounting-loop\/","title":{"rendered":"Automationslinje f\u00f6r Quad-Polishing av 6-8 tums kisel- och SiC-wafers med reng\u00f6rings- och ommonteringsloop"},"content":{"rendered":"<h2 data-start=\"323\" data-end=\"346\">Produkt\u00f6versikt<\/h2>\n<p data-start=\"348\" data-end=\"597\">Automationslinjen f\u00f6r fyrsidig polering av kisel- och SiC-wafers p\u00e5 6-8 tum med reng\u00f6rings- och ommonteringsloop \u00e4r en helt integrerad processplattform f\u00f6r efterpolering som \u00e4r utformad f\u00f6r att st\u00f6dja tillverkning av kisel- och kiselkarbidwafers i stora volymer.<\/p>\n<p data-start=\"599\" data-end=\"886\">Systemet kopplar samman polering med fyra huvuden, automatisk avmontering av wafers, hantering av keramiska b\u00e4rare, reng\u00f6ring av b\u00e4rare och precisions\u00e5termontering av wafers i ett kontinuerligt fl\u00f6de med sluten slinga, vilket eliminerar manuell hantering och s\u00e4kerst\u00e4ller maximal processtabilitet, repeterbarhet och avkastning.<\/p>\n<p data-start=\"888\" data-end=\"1066\">Den \u00e4r optimerad f\u00f6r wafers f\u00f6r krafthalvledare, SiC-substrat och avancerade f\u00f6rpackningsapplikationer d\u00e4r planhet, ytintegritet och kontamineringskontroll \u00e4r avg\u00f6rande.<\/p>\n<p data-start=\"888\" data-end=\"1066\"><img fetchpriority=\"high\" decoding=\"async\" class=\"aligncenter wp-image-1646 size-full\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg\" alt=\"\" width=\"800\" height=\"515\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100.jpg 800w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-300x193.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-768x494.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/1572413524100-600x386.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/><\/p>\n<h2 data-start=\"1073\" data-end=\"1107\">Processkoncept med slutet kretslopp<\/h2>\n<p data-start=\"1109\" data-end=\"1218\">Till skillnad fr\u00e5n traditionella halvmanuella poleringslinjer fungerar detta system som en riktig sluten carrier-cykel:<\/p>\n<p data-start=\"1220\" data-end=\"1292\">Polering \u2192 Avmontering \u2192 Reng\u00f6ring av b\u00e4rare \u2192 \u00c5termontering \u2192 Polering<\/p>\n<p data-start=\"1294\" data-end=\"1508\">Keramiska b\u00e4rare cirkulerar automatiskt i systemet, medan wafers avl\u00e4gsnas och \u00e5termonteras med stor precision under noggrant kontrollerade f\u00f6rh\u00e5llanden.<br data-start=\"1440\" data-end=\"1443\" \/>Denna arkitektur s\u00e4kerst\u00e4ller att varje poleringscykel b\u00f6rjar med:<\/p>\n<ul data-start=\"1509\" data-end=\"1622\">\n<li data-start=\"1509\" data-end=\"1538\">\n<p data-start=\"1511\" data-end=\"1538\">En ren b\u00e4raryta<\/p>\n<\/li>\n<li data-start=\"1539\" data-end=\"1573\">\n<p data-start=\"1541\" data-end=\"1573\">En exakt positionerad wafer<\/p>\n<\/li>\n<li data-start=\"1574\" data-end=\"1622\">\n<p data-start=\"1576\" data-end=\"1622\">Ett stabilt och repeterbart monteringsgr\u00e4nssnitt<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1624\" data-end=\"1733\">Resultatet \u00e4r f\u00e4rre waferbrott, j\u00e4mnare tjocklek och h\u00f6gre j\u00e4mnhet fr\u00e5n batch till batch.<\/p>\n<p data-start=\"1624\" data-end=\"1733\"><img decoding=\"async\" class=\"aligncenter wp-image-1647 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/01\/6-8-Inch-Silicon-SiC-Wafer-Quad-Polishing-Automation-Line-with-Cleaning-and-Re-Mounting-Loop-1024x1024.jpg\" alt=\"\" width=\"1024\" height=\"1024\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<h2 data-start=\"1740\" data-end=\"1782\">Processkritisk teknisk design<\/h2>\n<h3 data-start=\"1784\" data-end=\"1817\">Waferhantering med l\u00e5ga p\u00e5frestningar<\/h3>\n<p data-start=\"1818\" data-end=\"1951\">Speciella r\u00f6relseprofiler och avmonteringsbanor anv\u00e4nds f\u00f6r att kontrollera acceleration, kontaktkraft och separationsvinkel, vilket minskar:<\/p>\n<ul data-start=\"1952\" data-end=\"2019\">\n<li data-start=\"1952\" data-end=\"1969\">\n<p data-start=\"1954\" data-end=\"1969\">Kantflisning<\/p>\n<\/li>\n<li data-start=\"1970\" data-end=\"1986\">\n<p data-start=\"1972\" data-end=\"1986\">Mikrosprickor<\/p>\n<\/li>\n<li data-start=\"1987\" data-end=\"2019\">\n<p data-start=\"1989\" data-end=\"2019\">Stressinducerad skevhet hos wafers<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2021\" data-end=\"2136\">Detta \u00e4r s\u00e4rskilt viktigt f\u00f6r SiC-wafers, som \u00e4r h\u00e5rda, spr\u00f6da och mycket k\u00e4nsliga f\u00f6r mekaniska st\u00f6tar.<\/p>\n<h3 data-start=\"2143\" data-end=\"2185\">Rekonditionering av ultra-rena b\u00e4rare<\/h3>\n<p data-start=\"2186\" data-end=\"2365\">F\u00f6re varje ommonteringscykel \u00e5terst\u00e4lls keramiska b\u00e4rare till ett processf\u00e4rdigt yttillst\u00e5nd genom att avl\u00e4gsna slurryrester, fina partiklar och kemiska filmer.<br data-start=\"2348\" data-end=\"2351\" \/>Detta f\u00f6rhindrar:<\/p>\n<ul data-start=\"2366\" data-end=\"2458\">\n<li data-start=\"2366\" data-end=\"2396\">\n<p data-start=\"2368\" data-end=\"2396\">Repor orsakade av partiklar<\/p>\n<\/li>\n<li data-start=\"2397\" data-end=\"2431\">\n<p data-start=\"2399\" data-end=\"2431\">Lokal oj\u00e4mnhet vid polering<\/p>\n<\/li>\n<li data-start=\"2432\" data-end=\"2458\">\n<p data-start=\"2434\" data-end=\"2458\">Slumpm\u00e4ssiga ytdefekter<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2460\" data-end=\"2527\">som \u00e4r stora avkastningsd\u00f6dare i CMP- och quad-poleringsprocesser.<\/p>\n<h3 data-start=\"2534\" data-end=\"2585\">Precisionsmontering f\u00f6r enhetlig polering<\/h3>\n<p data-start=\"2586\" data-end=\"2616\">\u00c5termonteringsenheten styr:<\/p>\n<ul data-start=\"2617\" data-end=\"2697\">\n<li data-start=\"2617\" data-end=\"2638\">\n<p data-start=\"2619\" data-end=\"2638\">Monteringstryck<\/p>\n<\/li>\n<li data-start=\"2639\" data-end=\"2658\">\n<p data-start=\"2641\" data-end=\"2658\">Justering av wafer<\/p>\n<\/li>\n<li data-start=\"2659\" data-end=\"2697\">\n<p data-start=\"2661\" data-end=\"2697\">Planhet \u00f6ver hela lastb\u00e4raren<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2699\" data-end=\"2822\">Detta garanterar att alla wafers uts\u00e4tts f\u00f6r ett enhetligt poleringstryck under n\u00e4sta quad-poleringcykel, vilket leder till<\/p>\n<ul data-start=\"2823\" data-end=\"2926\">\n<li data-start=\"2823\" data-end=\"2867\">\n<p data-start=\"2825\" data-end=\"2867\">F\u00f6rb\u00e4ttrad TTV (total tjockleksvariation)<\/p>\n<\/li>\n<li data-start=\"2868\" data-end=\"2896\">\n<p data-start=\"2870\" data-end=\"2896\">B\u00e4ttre ytj\u00e4mnhet<\/p>\n<\/li>\n<li data-start=\"2897\" data-end=\"2926\">\n<p data-start=\"2899\" data-end=\"2926\">H\u00f6gre utbyte av anv\u00e4ndbara wafers<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"2933\" data-end=\"2962\">Flexibilitet i produktionen<\/h2>\n<p data-start=\"2964\" data-end=\"3062\">Systemet st\u00f6der flera wafer- och b\u00e4rarkonfigurationer, vilket g\u00f6r det m\u00f6jligt f\u00f6r fabrikerna att anpassa linjen efter behov:<\/p>\n<ul data-start=\"3063\" data-end=\"3163\">\n<li data-start=\"3063\" data-end=\"3089\">\n<p data-start=\"3065\" data-end=\"3089\">Maximal genomstr\u00f6mning<\/p>\n<\/li>\n<li data-start=\"3090\" data-end=\"3122\">\n<p data-start=\"3092\" data-end=\"3122\">Maximal kontroll av planhet<\/p>\n<\/li>\n<li data-start=\"3123\" data-end=\"3163\">\n<p data-start=\"3125\" data-end=\"3163\">Blandad 6-tums- och 8-tums-produktion<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"3165\" data-end=\"3203\">Detta g\u00f6r linjen l\u00e4mplig f\u00f6r b\u00e5da:<\/p>\n<ul data-start=\"3204\" data-end=\"3283\">\n<li data-start=\"3204\" data-end=\"3243\">\n<p data-start=\"3206\" data-end=\"3243\">Produktion av kraftutrustning i stora volymer<\/p>\n<\/li>\n<li data-start=\"3244\" data-end=\"3283\">\n<p data-start=\"3246\" data-end=\"3283\">H\u00f6gv\u00e4rdig bearbetning av SiC-substrat<\/p>\n<\/li>\n<\/ul>\n<h2 data-start=\"3290\" data-end=\"3317\">Typiska till\u00e4mpningar<\/h2>\n<ul data-start=\"3319\" data-end=\"3498\">\n<li data-start=\"3319\" data-end=\"3385\">\n<p data-start=\"3321\" data-end=\"3385\">Wafers f\u00f6r krafthalvledare i Si och SiC (MOSFET, IGBT, dioder)<\/p>\n<\/li>\n<li data-start=\"3386\" data-end=\"3425\">\n<p data-start=\"3388\" data-end=\"3425\">SiC-substrat och epitaxiala wafers<\/p>\n<\/li>\n<li data-start=\"3426\" data-end=\"3455\">\n<p data-start=\"3428\" data-end=\"3455\">Wafers f\u00f6r avancerade f\u00f6rpackningar<\/p>\n<\/li>\n<li data-start=\"3456\" data-end=\"3498\">\n<p data-start=\"3458\" data-end=\"3498\">Polerade kiselskivor med h\u00f6g precision<\/p>\n<\/li>\n<\/ul>\n<h3 data-start=\"58\" data-end=\"102\"><strong data-start=\"62\" data-end=\"102\">FAQ - Ytterligare tekniska fr\u00e5gor<\/strong><\/h3>\n<p data-start=\"104\" data-end=\"461\"><strong>F1: Hur minimerar systemet skivbrott f\u00f6r spr\u00f6da SiC-skivor?<\/strong><br data-start=\"179\" data-end=\"182\" \/>Linjen anv\u00e4nder avmonteringsalgoritmer med l\u00e5g belastning och kontrollerade r\u00f6relseprofiler, som noggrant hanterar acceleration, separationsvinkel och kontaktkraft. Detta f\u00f6rhindrar kantflisning, mikrosprickor och stressinducerad waferf\u00f6rvr\u00e4ngning, vilket \u00e4r vanliga problem med SiC-substrat.<\/p>\n<p data-start=\"468\" data-end=\"792\"><strong>F2: Kan reng\u00f6rings- och \u00e5termonteringsslingan hantera flera olika specifikationer f\u00f6r b\u00e4rare?<\/strong><br data-start=\"553\" data-end=\"556\" \/>Ja, buffert- och reng\u00f6ringsmodulerna f\u00f6r b\u00e4rare st\u00f6der flera olika diametrar p\u00e5 keramiska b\u00e4rare (t.ex. 485 mm och 576 mm) och antal kiselskivor per b\u00e4rare. Detta m\u00f6jligg\u00f6r produktion av 6-tums och 8-tums wafers i blandad storlek utan linjeavbrott.<\/p>\n<p data-start=\"799\" data-end=\"1201\"><strong>F3: Hur s\u00e4kerst\u00e4ller systemet repeterbar poleringskvalitet f\u00f6r olika batcher?<\/strong><br data-start=\"878\" data-end=\"881\" \/>Genom att kombinera extremt rena b\u00e4rarytor, precisionsinriktning av wafers och planhetskontroll monteras varje wafer under identiska f\u00f6rh\u00e5llanden. Detta garanterar konsekvent poleringstryck, j\u00e4mn materialavverkning och minimal TTV, vilket resulterar i stabilt utbyte och ytkvalitet i alla produktionssatser.<\/p>","protected":false},"excerpt":{"rendered":"<p>Automationslinjen f\u00f6r fyrsidig polering av kisel- och SiC-wafers p\u00e5 6-8 tum med reng\u00f6rings- och ommonteringsloop \u00e4r en helt integrerad processplattform f\u00f6r efterpolering som \u00e4r utformad f\u00f6r att st\u00f6dja tillverkning av kisel- och kiselkarbidwafers i stora volymer.<\/p>","protected":false},"featured_media":1642,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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