{"id":2316,"date":"2026-04-21T06:05:44","date_gmt":"2026-04-21T06:05:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2316"},"modified":"2026-04-21T06:05:45","modified_gmt":"2026-04-21T06:05:45","slug":"ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ru\/product\/ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication\/","title":{"rendered":"\u0423\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 \u0434\u043b\u044f \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f Si SiO2 \u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432 \u043f\u0440\u0438 \u0438\u0437\u0433\u043e\u0442\u043e\u0432\u043b\u0435\u043d\u0438\u0438 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432"},"content":{"rendered":"<p data-start=\"297\" data-end=\"643\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2320 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0423\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0434\u043b\u044f Si, SiO2 \u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432 - \u044d\u0442\u043e \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u0441\u0443\u0445\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f, \u043f\u0440\u0435\u0434\u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u043d\u0430\u044f \u0434\u043b\u044f \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043c\u0438\u043a\u0440\u043e\u0444\u0430\u0431\u0440\u0438\u043a \u0438 \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439. \u0418\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u044f \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 (IBE), \u0442\u0430\u043a\u0436\u0435 \u0438\u0437\u0432\u0435\u0441\u0442\u043d\u043e\u0435 \u043a\u0430\u043a \u0438\u043e\u043d\u043d\u043e\u0435 \u0444\u0440\u0435\u0437\u0435\u0440\u043e\u0432\u0430\u043d\u0438\u0435, \u044d\u0442\u043e \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u043e\u0435 \u0443\u0434\u0430\u043b\u0435\u043d\u0438\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430 \u043f\u043e\u0441\u0440\u0435\u0434\u0441\u0442\u0432\u043e\u043c \u0447\u0438\u0441\u0442\u043e \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430 \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u044f.<\/p>\n<p data-start=\"645\" data-end=\"961\">\u0412 \u043e\u0442\u043b\u0438\u0447\u0438\u0435 \u043e\u0442 \u0442\u0440\u0430\u0434\u0438\u0446\u0438\u043e\u043d\u043d\u044b\u0445 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u043f\u043b\u0430\u0437\u043c\u044b, \u043f\u0440\u0438 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0438 \u0438\u043e\u043d\u043d\u044b\u043c \u043f\u0443\u0447\u043a\u043e\u043c \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0430 \u043d\u0435 \u043f\u043e\u0434\u0432\u0435\u0440\u0433\u0430\u0435\u0442\u0441\u044f \u043f\u0440\u044f\u043c\u043e\u043c\u0443 \u0432\u043e\u0437\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u044e \u043f\u043b\u0430\u0437\u043c\u044b. \u042d\u0442\u043e \u0437\u043d\u0430\u0447\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u0441\u043d\u0438\u0436\u0430\u0435\u0442 \u0440\u0438\u0441\u043a \u043f\u043e\u0432\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u044f, \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u044f \u0438 \u043d\u0430\u043a\u043e\u043f\u043b\u0435\u043d\u0438\u044f \u0437\u0430\u0440\u044f\u0434\u0430 \u043f\u043e\u0434 \u0432\u043e\u0437\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u0435\u043c \u043f\u043b\u0430\u0437\u043c\u044b, \u0447\u0442\u043e \u0434\u0435\u043b\u0430\u0435\u0442 \u0435\u0433\u043e \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e \u043f\u043e\u0434\u0445\u043e\u0434\u044f\u0449\u0438\u043c \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0447\u0443\u0432\u0441\u0442\u0432\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0445 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u0438 \u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432.<\/p>\n<p data-start=\"963\" data-end=\"1148\">\u041e\u0431\u043b\u0430\u0434\u0430\u044f \u0442\u043e\u0447\u043d\u043e\u0441\u0442\u044c\u044e \u043d\u0430\u043d\u043e\u043c\u0435\u0442\u0440\u043e\u0432\u043e\u0433\u043e \u0443\u0440\u043e\u0432\u043d\u044f \u0438 \u043e\u0442\u043b\u0438\u0447\u043d\u043e\u0439 \u0443\u043f\u0440\u0430\u0432\u043b\u044f\u0435\u043c\u043e\u0441\u0442\u044c\u044e \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430, \u044d\u0442\u0430 \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u0448\u0438\u0440\u043e\u043a\u043e \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u0442\u0441\u044f \u0432 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432, \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a \u0438 \u0438\u0441\u0441\u043b\u0435\u0434\u043e\u0432\u0430\u043d\u0438\u044f\u0445 \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432.<\/p>\n<hr data-start=\"1150\" data-end=\"1153\" \/>\n<h2 data-section-id=\"17sw59i\" data-start=\"1155\" data-end=\"1184\"><span role=\"text\"><img decoding=\"async\" class=\"wp-image-2324 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png\" alt=\"\" width=\"458\" height=\"191\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-600x250.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7.png 680w\" sizes=\"(max-width: 458px) 100vw, 458px\" \/>\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0445\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0438<\/span><\/h2>\n<ul data-start=\"1186\" data-end=\"1929\">\n<li data-section-id=\"7yo1gz\" data-start=\"1186\" data-end=\"1324\">\u0421\u0432\u0435\u0440\u0445\u0432\u044b\u0441\u043e\u043a\u0430\u044f \u0442\u043e\u0447\u043d\u043e\u0441\u0442\u044c<br data-start=\"1212\" data-end=\"1215\" \/>\u0414\u043e\u0441\u0442\u0438\u0433\u0430\u0435\u0442\u0441\u044f \u0440\u0430\u0437\u0440\u0435\u0448\u0435\u043d\u0438\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u226410 \u043d\u043c, \u0447\u0442\u043e \u0441\u043e\u043e\u0442\u0432\u0435\u0442\u0441\u0442\u0432\u0443\u0435\u0442 \u0441\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u044b\u043c \u0442\u0440\u0435\u0431\u043e\u0432\u0430\u043d\u0438\u044f\u043c \u043a \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0430\u043c \u0438 \u043d\u0430\u043d\u043e\u0444\u0430\u0431\u0440\u0438\u043a\u0430\u0442\u0430\u043c.<\/li>\n<li data-section-id=\"csgjgf\" data-start=\"1326\" data-end=\"1497\">\u0412\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u044c \u043d\u0435\u0441\u0435\u043b\u0435\u043a\u0442\u0438\u0432\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<br data-start=\"1364\" data-end=\"1367\" \/>\u041e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432, \u0432\u043a\u043b\u044e\u0447\u0430\u044f \u043c\u0435\u0442\u0430\u043b\u043b\u044b, \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0438 \u0438 \u0434\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u0438, \u0431\u0435\u0437 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\u043f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u044f \u0441\u043b\u043e\u0436\u043d\u044b\u0439 \u043f\u0435\u0440\u0435\u043d\u043e\u0441 \u0440\u0438\u0441\u0443\u043d\u043a\u0430.<\/li>\n<li data-section-id=\"1ialgp0\" data-start=\"1669\" data-end=\"1793\">\u0411\u0435\u0437\u043f\u043b\u0430\u0437\u043c\u0435\u043d\u043d\u0430\u044f \u0441\u0440\u0435\u0434\u0430 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438<br data-start=\"1709\" data-end=\"1712\" \/>\u0423\u0441\u0442\u0440\u0430\u043d\u044f\u0435\u0442 \u043f\u043e\u0432\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u044f, \u0432\u044b\u0437\u0432\u0430\u043d\u043d\u044b\u0435 \u043f\u043b\u0430\u0437\u043c\u043e\u0439, \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u044f \u0431\u043e\u043b\u0435\u0435 \u0432\u044b\u0441\u043e\u043a\u0443\u044e \u043d\u0430\u0434\u0435\u0436\u043d\u043e\u0441\u0442\u044c \u0438 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c\u043d\u043e\u0441\u0442\u044c \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432.<\/li>\n<li data-section-id=\"1squn5z\" data-start=\"1795\" data-end=\"1929\">\u041e\u0442\u043b\u0438\u0447\u043d\u043e\u0435 \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u043e \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438<br data-start=\"1826\" data-end=\"1829\" \/>\u041f\u043e\u043b\u0443\u0447\u0430\u0435\u0442 \u0433\u043b\u0430\u0434\u043a\u0438\u0435 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438 \u0441 \u0443\u043c\u0435\u043d\u044c\u0448\u0435\u043d\u043d\u043e\u0439 \u0448\u0435\u0440\u043e\u0445\u043e\u0432\u0430\u0442\u043e\u0441\u0442\u044c\u044e, \u0447\u0442\u043e \u043e\u0447\u0435\u043d\u044c \u0432\u0430\u0436\u043d\u043e \u0434\u043b\u044f \u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0438 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u0439.<\/li>\n<\/ul>\n<hr data-start=\"1931\" data-end=\"1934\" \/>\n<h2 data-section-id=\"crb813\" data-start=\"1936\" data-end=\"1965\"><span role=\"text\">\u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043a\u043e\u043c\u043f\u043e\u043d\u0435\u043d\u0442\u044b \u0441\u0438\u0441\u0442\u0435\u043c\u044b<\/span><\/h2>\n<p data-start=\"1967\" data-end=\"2042\">\u041f\u043e\u043b\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0441\u043e\u0441\u0442\u043e\u0438\u0442 \u0438\u0437 \u043d\u0435\u0441\u043a\u043e\u043b\u044c\u043a\u0438\u0445 \u043a\u0440\u0438\u0442\u0438\u0447\u0435\u0441\u043a\u0438 \u0432\u0430\u0436\u043d\u044b\u0445 \u043f\u043e\u0434\u0441\u0438\u0441\u0442\u0435\u043c:<\/p>\n<h3 data-section-id=\"j86wbp\" data-start=\"2044\" data-end=\"2068\"><span role=\"text\">1. \u0412\u0430\u043a\u0443\u0443\u043c\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430<\/span><\/h3>\n<p data-start=\"2069\" data-end=\"2118\">\u041e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0432\u044b\u0441\u043e\u043a\u043e\u0432\u0430\u043a\u0443\u0443\u043c\u043d\u0443\u044e \u0441\u0440\u0435\u0434\u0443, \u043d\u0435\u043e\u0431\u0445\u043e\u0434\u0438\u043c\u0443\u044e \u0434\u043b\u044f:<\/p>\n<ul data-start=\"2119\" data-end=\"2193\">\n<li data-section-id=\"1vzt3vq\" data-start=\"2119\" data-end=\"2137\">\u0423\u0441\u0442\u043e\u0439\u0447\u0438\u0432\u043e\u0441\u0442\u044c \u0431\u0430\u043b\u043a\u0438<\/li>\n<li data-section-id=\"svkbf3\" data-start=\"2138\" data-end=\"2163\">\u041a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u0437\u0430\u0433\u0440\u044f\u0437\u043d\u0435\u043d\u0438\u044f<\/li>\n<li data-section-id=\"19d0yza\" data-start=\"2164\" data-end=\"2193\">\u0412\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u0430\u044f \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430<\/li>\n<\/ul>\n<h3 data-section-id=\"8jigvj\" data-start=\"2195\" data-end=\"2216\"><span role=\"text\">2. \u0418\u0441\u0442\u043e\u0447\u043d\u0438\u043a \u0438\u043e\u043d\u043e\u0432<\/span><\/h3>\n<p data-start=\"2217\" data-end=\"2272\">\u0413\u0435\u043d\u0435\u0440\u0438\u0440\u0443\u0435\u0442 \u0432\u044b\u0441\u043e\u043a\u043e\u044d\u043d\u0435\u0440\u0433\u0435\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u0438\u043e\u043d\u043d\u044b\u0439 \u043f\u0443\u0447\u043e\u043a (\u043e\u0431\u044b\u0447\u043d\u043e \u0438\u043e\u043d\u044b \u0430\u0440\u0433\u043e\u043d\u0430):<\/p>\n<ul data-start=\"2273\" data-end=\"2386\">\n<li data-section-id=\"116c4dh\" data-start=\"2273\" data-end=\"2315\">\u041e\u043f\u0440\u0435\u0434\u0435\u043b\u044f\u0435\u0442 \u0441\u043a\u043e\u0440\u043e\u0441\u0442\u044c \u0438 \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u043e\u0441\u0442\u044c \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/li>\n<li data-section-id=\"bdpzju\" data-start=\"2316\" data-end=\"2386\">\u041f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u0435\u0442 \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0435 \u0442\u0438\u043f\u044b \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u043e\u0432, \u0442\u0430\u043a\u0438\u0435 \u043a\u0430\u043a \u0440\u0430\u0434\u0438\u043e\u0447\u0430\u0441\u0442\u043e\u0442\u043d\u044b\u0435 \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u0438 \u0438 \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a\u0438 \u0438\u043e\u043d\u043e\u0432 \u041a\u0430\u0443\u0444\u043c\u0430\u043d\u0430<\/li>\n<\/ul>\n<h3 data-section-id=\"1tpsqxl\" data-start=\"2388\" data-end=\"2411\"><span role=\"text\">3. \u0421\u0442\u0430\u0434\u0438\u044f \u043f\u0440\u043e\u0431\u044b<\/span><\/h3>\n<ul data-start=\"2412\" data-end=\"2530\">\n<li data-section-id=\"d3z3he\" data-start=\"2412\" data-end=\"2468\">\u041f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u0435\u0442 \u043c\u043d\u043e\u0433\u043e\u043e\u0441\u0435\u0432\u043e\u0435 \u0432\u0440\u0430\u0449\u0435\u043d\u0438\u0435 \u0434\u043b\u044f \u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/li>\n<li data-section-id=\"15yipgz\" data-start=\"2469\" data-end=\"2530\">\u0412\u0441\u0442\u0440\u043e\u0435\u043d\u043d\u044b\u0439 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u044b\u0439 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u043f\u043e\u0432\u044b\u0448\u0430\u0435\u0442 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u044c \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430<\/li>\n<\/ul>\n<h3 data-section-id=\"qoosxq\" data-start=\"2532\" data-end=\"2557\"><span role=\"text\">4. \u0421\u0438\u0441\u0442\u0435\u043c\u0430 \u0443\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/span><\/h3>\n<ul data-start=\"2558\" data-end=\"2705\">\n<li data-section-id=\"1mqnqw1\" data-start=\"2558\" data-end=\"2587\">\u041f\u043e\u043b\u043d\u043e\u0441\u0442\u044c\u044e \u0430\u0432\u0442\u043e\u043c\u0430\u0442\u0438\u0437\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u0430\u044f \u0440\u0430\u0431\u043e\u0442\u0430<\/li>\n<li data-section-id=\"ymbyxd\" data-start=\"2588\" data-end=\"2643\">\u041e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0442\u043e\u0447\u043d\u044b\u0439 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u043f\u0430\u0440\u0430\u043c\u0435\u0442\u0440\u043e\u0432 \u0438 \u0432\u043e\u0441\u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u043c\u043e\u0441\u0442\u044c<\/li>\n<li data-section-id=\"1kjf28e\" data-start=\"2644\" data-end=\"2705\">\u0414\u043e\u043f\u043e\u043b\u043d\u0438\u0442\u0435\u043b\u044c\u043d\u043e\u0435 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data-start=\"2773\" data-end=\"2836\">\u041d\u0435\u043e\u0431\u0445\u043e\u0434\u0438\u043c \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0438\u0437\u043e\u043b\u044f\u0446\u0438\u043e\u043d\u043d\u044b\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432, \u0442\u0430\u043a\u0438\u0445 \u043a\u0430\u043a SiO\u2082 \u0438 Si\u2083N\u2084.<\/li>\n<\/ul>\n<hr data-start=\"2838\" data-end=\"2841\" \/>\n<h2 data-section-id=\"sgqumq\" data-start=\"2843\" data-end=\"2867\"><span role=\"text\">\u041f\u0440\u0438\u043d\u0446\u0438\u043f \u0440\u0430\u0431\u043e\u0442\u044b<\/span><\/h2>\n<p data-start=\"2869\" data-end=\"3006\"><img decoding=\"async\" class=\"size-medium wp-image-2321 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png\" alt=\"\" width=\"300\" height=\"235\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-15x12.png 15w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-600x469.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u0418\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u043e\u0441\u0443\u0449\u0435\u0441\u0442\u0432\u043b\u044f\u0435\u0442\u0441\u044f \u043f\u0443\u0442\u0435\u043c \u043d\u0430\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0432\u044b\u0441\u043e\u043a\u043e\u044d\u043d\u0435\u0440\u0433\u0435\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043a\u043e\u043b\u043b\u0438\u043c\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u043e\u0433\u043e \u0438\u043e\u043d\u043d\u043e\u0433\u043e \u043f\u0443\u0447\u043a\u0430 \u043d\u0430 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u044c \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430 \u043c\u0438\u0448\u0435\u043d\u0438 \u0432 \u0443\u0441\u043b\u043e\u0432\u0438\u044f\u0445 \u0432\u0430\u043a\u0443\u0443\u043c\u0430.<\/p>\n<p data-start=\"3008\" data-end=\"3253\">\u0418\u043e\u043d\u044b (\u043e\u0431\u044b\u0447\u043d\u043e Ar\u207a) \u0441\u0442\u0430\u043b\u043a\u0438\u0432\u0430\u044e\u0442\u0441\u044f \u0441 \u0430\u0442\u043e\u043c\u0430\u043c\u0438 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438, \u043f\u0435\u0440\u0435\u0434\u0430\u0432\u0430\u044f \u0438\u043c \u0438\u043c\u043f\u0443\u043b\u044c\u0441 \u0438 \u0432\u044b\u0437\u044b\u0432\u0430\u044f \u0432\u044b\u0431\u0440\u043e\u0441 \u0430\u0442\u043e\u043c\u043e\u0432 \u0447\u0435\u0440\u0435\u0437 \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u0435. \u042d\u0442\u043e\u0442 \u043f\u0440\u043e\u0446\u0435\u0441\u0441 \u0443\u0434\u0430\u043b\u044f\u0435\u0442 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b \u0441\u043b\u043e\u0439 \u0437\u0430 \u0441\u043b\u043e\u0435\u043c, \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u044f \u0442\u043e\u0447\u043d\u043e\u0435 \u043e\u043f\u0440\u0435\u0434\u0435\u043b\u0435\u043d\u0438\u0435 \u0440\u0438\u0441\u0443\u043d\u043a\u0430 \u0431\u0435\u0437 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u0440\u0435\u0430\u043a\u0446\u0438\u0439.<\/p>\n<p data-start=\"3255\" data-end=\"3296\">\u042d\u0442\u043e \u0434\u0435\u043b\u0430\u0435\u0442 IBE \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e \u043f\u043e\u0434\u0445\u043e\u0434\u044f\u0449\u0438\u043c \u0434\u043b\u044f:<\/p>\n<ul data-start=\"3297\" data-end=\"3403\">\n<li data-section-id=\"jy9ydi\" data-start=\"3297\" data-end=\"3333\">\u041f\u0435\u0440\u0435\u043d\u043e\u0441 \u0440\u0438\u0441\u0443\u043d\u043a\u0430 \u0441 \u0432\u044b\u0441\u043e\u043a\u0438\u043c \u0440\u0430\u0437\u0440\u0435\u0448\u0435\u043d\u0438\u0435\u043c<\/li>\n<li data-section-id=\"1ihgsm0\" data-start=\"3334\" data-end=\"3376\">\u041c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u0441 \u043d\u0438\u0437\u043a\u043e\u0439 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0439 \u0440\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0441\u0442\u044c\u044e<\/li>\n<li data-section-id=\"hl3mzt\" data-start=\"3377\" data-end=\"3403\">\u041c\u043d\u043e\u0433\u043e\u0441\u043b\u043e\u0439\u043d\u044b\u0435 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b<\/li>\n<\/ul>\n<hr data-start=\"3405\" data-end=\"3408\" \/>\n<h2 data-section-id=\"gimyd4\" data-start=\"3410\" data-end=\"3440\"><span role=\"text\">\u0412\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438 \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0438<\/span><\/h2>\n<h3 data-section-id=\"ww5vbk\" data-start=\"3442\" data-end=\"3469\"><span role=\"text\">\u041f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u0435\u043c\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b<\/span><\/h3>\n<ul data-start=\"3470\" data-end=\"3622\">\n<li data-section-id=\"4dwycu\" data-start=\"3470\" data-end=\"3504\">\u041c\u0435\u0442\u0430\u043b\u043b\u044b: Au, Pt, Cu, Ta, Al<\/li>\n<li data-section-id=\"12wc4i0\" data-start=\"3505\" data-end=\"3537\">\u041f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u0438: Si, GaAs<\/li>\n<li data-section-id=\"75kyg7\" data-start=\"3538\" data-end=\"3570\">\u0414\u0438\u044d\u043b\u0435\u043a\u0442\u0440\u0438\u043a\u0438: SiO\u2082, Si\u2083N\u2084<\/li>\n<li data-section-id=\"1xmdv1x\" data-start=\"3571\" data-end=\"3622\">\u041f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b: AlN, \u043a\u0435\u0440\u0430\u043c\u0438\u043a\u0430, \u043f\u043e\u043b\u0438\u043c\u0435\u0440\u044b<\/li>\n<\/ul>\n<hr data-start=\"3624\" data-end=\"3627\" \/>\n<h2 data-section-id=\"12vl3dy\" data-start=\"3629\" data-end=\"3656\"><span role=\"text\">\u0422\u0438\u043f\u0438\u0447\u043d\u044b\u0439 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0440\u043e\u0446\u0435\u0441\u0441<\/span><\/h2>\n<ol data-start=\"3658\" data-end=\"4078\">\n<li data-section-id=\"1lq2akh\" data-start=\"3658\" data-end=\"3742\">\u041f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0430 \u043e\u0431\u0440\u0430\u0437\u0446\u043e\u0432<br data-start=\"3683\" data-end=\"3686\" \/>\u041e\u0447\u0438\u0441\u0442\u0438\u0442\u0435 \u0438 \u0443\u0441\u0442\u0430\u043d\u043e\u0432\u0438\u0442\u0435 \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0443 \u0432 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e\u0439 \u043a\u0430\u043c\u0435\u0440\u0435<\/li>\n<li data-section-id=\"1uf7qj1\" data-start=\"3744\" data-end=\"3821\">\u041c\u0430\u0441\u043a\u0438\u0440\u043e\u0432\u043a\u0430<br data-start=\"3758\" data-end=\"3761\" \/>\u041d\u0430\u043d\u0435\u0441\u0438\u0442\u0435 \u0444\u043e\u0442\u043e\u0440\u0435\u0437\u0438\u0441\u0442 \u0438\u043b\u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0443\u044e \u043c\u0430\u0441\u043a\u0443 \u0434\u043b\u044f \u043e\u043f\u0440\u0435\u0434\u0435\u043b\u0435\u043d\u0438\u044f \u043e\u0431\u043b\u0430\u0441\u0442\u0435\u0439 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<\/li>\n<li data-section-id=\"1sq3ygn\" data-start=\"3823\" data-end=\"3910\">\u0413\u0435\u043d\u0435\u0440\u0430\u0446\u0438\u044f \u0438\u043e\u043d\u043d\u043e\u0433\u043e \u043f\u0443\u0447\u043a\u0430<br data-start=\"3849\" data-end=\"3852\" \/>\u0410\u043a\u0442\u0438\u0432\u0438\u0440\u0443\u0439\u0442\u0435 \u0438\u0441\u0442\u043e\u0447\u043d\u0438\u043a \u0438\u043e\u043d\u043e\u0432 \u0441 \u043f\u043e\u043c\u043e\u0449\u044c\u044e \u0438\u043d\u0435\u0440\u0442\u043d\u043e\u0433\u043e \u0433\u0430\u0437\u0430 (\u043e\u0431\u044b\u0447\u043d\u043e \u0430\u0440\u0433\u043e\u043d\u0430)<\/li>\n<li data-section-id=\"46esbg\" data-start=\"3912\" data-end=\"4006\">\u041f\u0440\u043e\u0446\u0435\u0441\u0441 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f<br data-start=\"3934\" data-end=\"3937\" \/>\u0420\u0435\u0433\u0443\u043b\u0438\u0440\u043e\u0432\u043a\u0430 \u044d\u043d\u0435\u0440\u0433\u0438\u0438 \u043b\u0443\u0447\u0430, \u0443\u0433\u043b\u0430 \u0438 \u0432\u0440\u0435\u043c\u0435\u043d\u0438 \u0434\u043b\u044f \u0434\u043e\u0441\u0442\u0438\u0436\u0435\u043d\u0438\u044f \u0436\u0435\u043b\u0430\u0435\u043c\u043e\u0439 \u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u044b<\/li>\n<li data-section-id=\"oeifr6\" data-start=\"4008\" data-end=\"4078\">\u0421\u043d\u044f\u0442\u0438\u0435 \u043c\u0430\u0441\u043a\u0438<br data-start=\"4027\" data-end=\"4030\" \/>\u0421\u043d\u0438\u043c\u0438\u0442\u0435 \u043c\u0430\u0441\u043a\u0443, \u0447\u0442\u043e\u0431\u044b \u0443\u0432\u0438\u0434\u0435\u0442\u044c \u043e\u043a\u043e\u043d\u0447\u0430\u0442\u0435\u043b\u044c\u043d\u044b\u0439 \u0432\u044b\u0442\u0440\u0430\u0432\u043b\u0435\u043d\u043d\u044b\u0439 \u0440\u0438\u0441\u0443\u043d\u043e\u043a<\/li>\n<\/ol>\n<hr data-start=\"4080\" data-end=\"4083\" \/>\n<h2 data-section-id=\"1myoacb\" data-start=\"4085\" data-end=\"4109\"><span role=\"text\">\u041e\u0431\u043b\u0430\u0441\u0442\u0438 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f<\/span><\/h2>\n<h3 data-section-id=\"bm5nu5\" data-start=\"4111\" data-end=\"4146\"><span role=\"text\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2322 aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png\" alt=\"\" width=\"724\" height=\"157\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-18x4.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-600x130.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6.png 680w\" sizes=\"(max-width: 724px) 100vw, 724px\" \/>\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432<\/span><\/h3>\n<ul data-start=\"4147\" data-end=\"4236\">\n<li data-section-id=\"13vctk4\" data-start=\"4147\" data-end=\"4180\">\u0412\u044b\u0432\u043e\u0434 \u0438\u043d\u0442\u0435\u0433\u0440\u0430\u043b\u044c\u043d\u044b\u0445 \u0441\u0445\u0435\u043c<\/li>\n<li data-section-id=\"ofwy8d\" data-start=\"4181\" data-end=\"4206\">\u0421\u0442\u0440\u0443\u043a\u0442\u0443\u0440\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u0435 \u0442\u043e\u043d\u043a\u0438\u0445 \u043f\u043b\u0435\u043d\u043e\u043a<\/li>\n<li data-section-id=\"1x3kzva\" data-start=\"4207\" data-end=\"4236\">\u0423\u0441\u043e\u0432\u0435\u0440\u0448\u0435\u043d\u0441\u0442\u0432\u043e\u0432\u0430\u043d\u043d\u043e\u0435 \u0438\u0437\u0433\u043e\u0442\u043e\u0432\u043b\u0435\u043d\u0438\u0435 \u0443\u0437\u043b\u043e\u0432<\/li>\n<\/ul>\n<h3 data-section-id=\"1tse075\" data-start=\"4238\" data-end=\"4261\"><span role=\"text\">\u041e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430<\/span><\/h3>\n<ul data-start=\"4262\" data-end=\"4356\">\n<li data-section-id=\"v6a7ly\" data-start=\"4262\" data-end=\"4309\">\u041f\u0440\u0435\u0446\u0438\u0437\u0438\u043e\u043d\u043d\u0430\u044f \u043e\u0431\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u0440\u0435\u0448\u0435\u0442\u043e\u043a \u0438 \u043b\u0438\u043d\u0437<\/li>\n<li data-section-id=\"lq2w9m\" data-start=\"4310\" data-end=\"4356\">\u041c\u043e\u0434\u0438\u0444\u0438\u043a\u0430\u0446\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438 \u043e\u043f\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043a\u043e\u043c\u043f\u043e\u043d\u0435\u043d\u0442\u043e\u0432<\/li>\n<\/ul>\n<h3 data-section-id=\"1wc0my6\" data-start=\"4358\" data-end=\"4380\"><span role=\"text\">\u041d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0438<\/span><\/h3>\n<ul data-start=\"4381\" data-end=\"4441\">\n<li data-section-id=\"178ey7v\" data-start=\"4381\" data-end=\"4441\">\u0418\u0437\u0433\u043e\u0442\u043e\u0432\u043b\u0435\u043d\u0438\u0435 \u043d\u0430\u043d\u043e\u043f\u0440\u043e\u0432\u043e\u0434\u043e\u0432, \u043d\u0430\u043d\u043e\u043f\u043e\u0440 \u0438 \u041c\u042d\u041c\u0421-\u0441\u0442\u0440\u0443\u043a\u0442\u0443\u0440<\/li>\n<\/ul>\n<h3 data-section-id=\"krs816\" data-start=\"4443\" data-end=\"4468\"><span role=\"text\">\u041c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432\u0435\u0434\u0435\u043d\u0438\u0435<\/span><\/h3>\n<ul data-start=\"4469\" data-end=\"4541\">\n<li data-section-id=\"18ntl16\" data-start=\"4469\" data-end=\"4506\">\u0410\u043d\u0430\u043b\u0438\u0437 \u0438 \u043c\u043e\u0434\u0438\u0444\u0438\u043a\u0430\u0446\u0438\u044f \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438<\/li>\n<li data-section-id=\"1b8wqpz\" data-start=\"4507\" data-end=\"4541\">\u041f\u043e\u0434\u0433\u043e\u0442\u043e\u0432\u043a\u0430 \u0444\u0443\u043d\u043a\u0446\u0438\u043e\u043d\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u043f\u043e\u043a\u0440\u044b\u0442\u0438\u044f<\/li>\n<\/ul>\n<hr data-start=\"4543\" data-end=\"4546\" \/>\n<h2 data-section-id=\"13lz0w7\" data-start=\"4548\" data-end=\"4591\"><span role=\"text\">\u041f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430 \u043f\u0435\u0440\u0435\u0434 \u043e\u0431\u044b\u0447\u043d\u044b\u043c \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435\u043c<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4593\" data-end=\"4927\">\n<thead data-start=\"4593\" data-end=\"4646\">\n<tr data-start=\"4593\" data-end=\"4646\">\n<th class=\"\" data-start=\"4593\" data-end=\"4603\" data-col-size=\"sm\">\u0425\u0430\u0440\u0430\u043a\u0442\u0435\u0440\u0438\u0441\u0442\u0438\u043a\u0430<\/th>\n<th class=\"\" data-start=\"4603\" data-end=\"4622\" data-col-size=\"sm\">\u0422\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u0438\u043e\u043d\u043d\u044b\u043c \u043b\u0443\u0447\u043e\u043c<\/th>\n<th class=\"\" data-start=\"4622\" data-end=\"4646\" data-col-size=\"sm\">\u0420\u0435\u0430\u043a\u0442\u0438\u0432\u043d\u043e\u0435 \u0438\u043e\u043d\u043d\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4697\" data-end=\"4927\">\n<tr data-start=\"4697\" data-end=\"4746\">\n<td data-start=\"4697\" data-end=\"4712\" data-col-size=\"sm\">\u0422\u0438\u043f \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430<\/td>\n<td data-start=\"4712\" data-end=\"4723\" data-col-size=\"sm\">\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0430\u044f<\/td>\n<td data-start=\"4723\" data-end=\"4746\" data-col-size=\"sm\">\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0435 + \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435<\/td>\n<\/tr>\n<tr data-start=\"4747\" data-end=\"4805\">\n<td data-start=\"4747\" data-end=\"4765\" data-col-size=\"sm\">\u0412\u043e\u0437\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u0435 \u043d\u0430 \u043f\u043b\u0430\u0437\u043c\u0443<\/td>\n<td data-start=\"4765\" data-end=\"4786\" data-col-size=\"sm\">\u0411\u0435\u0437 \u043f\u0440\u044f\u043c\u043e\u0433\u043e \u0432\u043e\u0437\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u044f<\/td>\n<td data-start=\"4786\" data-end=\"4805\" data-col-size=\"sm\">\u041f\u0440\u044f\u043c\u043e\u0435 \u0432\u043e\u0437\u0434\u0435\u0439\u0441\u0442\u0432\u0438\u0435<\/td>\n<\/tr>\n<tr data-start=\"4806\" data-end=\"4853\">\n<td data-start=\"4806\" data-end=\"4829\" data-col-size=\"sm\">\u0421\u0435\u043b\u0435\u043a\u0442\u0438\u0432\u043d\u043e\u0441\u0442\u044c \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432<\/td>\n<td data-start=\"4829\" data-end=\"4845\" data-col-size=\"sm\">\u041d\u0438\u0437\u043a\u0438\u0439 (\u0440\u0430\u0432\u043d\u043e\u043c\u0435\u0440\u043d\u044b\u0439)<\/td>\n<td data-start=\"4845\" data-end=\"4853\" data-col-size=\"sm\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<\/tr>\n<tr data-start=\"4854\" data-end=\"4893\">\n<td data-start=\"4854\" data-end=\"4871\" data-col-size=\"sm\">\u041f\u043e\u0432\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u0435 \u043f\u043e\u0432\u0435\u0440\u0445\u043d\u043e\u0441\u0442\u0438<\/td>\n<td data-start=\"4871\" data-end=\"4881\" data-col-size=\"sm\">\u041c\u0438\u043d\u0438\u043c\u0443\u043c<\/td>\n<td data-start=\"4881\" data-end=\"4893\" data-col-size=\"sm\">\u0412\u043e\u0437\u043c\u043e\u0436\u043d\u043e<\/td>\n<\/tr>\n<tr data-start=\"4894\" data-end=\"4927\">\n<td data-start=\"4894\" data-end=\"4906\" data-col-size=\"sm\">\u0422\u043e\u0447\u043d\u043e\u0441\u0442\u044c<\/td>\n<td data-start=\"4906\" data-end=\"4919\" data-col-size=\"sm\">\u0421\u0432\u0435\u0440\u0445\u0432\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<td data-start=\"4919\" data-end=\"4927\" data-col-size=\"sm\">\u0412\u044b\u0441\u043e\u043a\u0438\u0439<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4929\" data-end=\"4932\" \/>\n<h2 data-section-id=\"elc90z\" data-start=\"4934\" data-end=\"4944\"><span role=\"text\">\u0427\u0410\u0421\u0422\u041e \u0417\u0410\u0414\u0410\u0412\u0410\u0415\u041c\u042b\u0415 \u0412\u041e\u041f\u0420\u041e\u0421\u042b<\/span><\/h2>\n<h3 data-section-id=\"1h3z74f\" data-start=\"4946\" data-end=\"4978\"><span role=\"text\">\u0427\u0442\u043e \u0442\u0430\u043a\u043e\u0435 \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435\uff1f<\/span><\/h3>\n<p data-start=\"4979\" data-end=\"5122\">\u0418\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 - \u044d\u0442\u043e \u043f\u0440\u043e\u0446\u0435\u0441\u0441 \u0441\u0443\u0445\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f, \u043f\u0440\u0438 \u043a\u043e\u0442\u043e\u0440\u043e\u043c \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b \u0443\u0434\u0430\u043b\u044f\u0435\u0442\u0441\u044f \u043f\u0443\u0442\u0435\u043c \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u044f \u0432\u044b\u0441\u043e\u043a\u043e\u044d\u043d\u0435\u0440\u0433\u0435\u0442\u0438\u0447\u0435\u0441\u043a\u0438\u043c\u0438 \u0438\u043e\u043d\u0430\u043c\u0438 \u0432 \u0432\u0430\u043a\u0443\u0443\u043c\u043d\u043e\u0439 \u0441\u0440\u0435\u0434\u0435.<\/p>\n<h3 data-section-id=\"1oyreis\" data-start=\"5124\" data-end=\"5153\"><span role=\"text\">\u0420\u0430\u0437\u043d\u0438\u0446\u0430 \u043c\u0435\u0436\u0434\u0443 IBE \u0438 RIE\uff1f<\/span><\/h3>\n<ul data-start=\"5154\" data-end=\"5316\">\n<li data-section-id=\"6o7nxe\" data-start=\"5154\" data-end=\"5219\">\u041c\u0411\u041f: \u0447\u0438\u0441\u0442\u043e \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0439, \u0431\u0435\u0437 \u043a\u043e\u043d\u0442\u0430\u043a\u0442\u0430 \u0441 \u043f\u043b\u0430\u0437\u043c\u043e\u0439, \u0431\u043e\u043b\u0435\u0435 \u0432\u044b\u0441\u043e\u043a\u0430\u044f \u0442\u043e\u0447\u043d\u043e\u0441\u0442\u044c<\/li>\n<li data-section-id=\"d79ynl\" data-start=\"5220\" data-end=\"5316\">RIE: \u0441\u043e\u0447\u0435\u0442\u0430\u0435\u0442 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u0440\u0435\u0430\u043a\u0446\u0438\u0438 \u0441 \u043f\u043b\u0430\u0437\u043c\u043e\u0439, \u0431\u043e\u043b\u0435\u0435 \u0432\u044b\u0441\u043e\u043a\u0430\u044f \u0441\u0435\u043b\u0435\u043a\u0442\u0438\u0432\u043d\u043e\u0441\u0442\u044c, \u043d\u043e \u0431\u043e\u043b\u044c\u0448\u0438\u0439 \u0440\u0438\u0441\u043a \u043f\u043e\u0432\u0440\u0435\u0436\u0434\u0435\u043d\u0438\u044f<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>\u0423\u0441\u0442\u0430\u043d\u043e\u0432\u043a\u0430 \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u0434\u043b\u044f Si, SiO2 \u0438 \u043c\u0435\u0442\u0430\u043b\u043b\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u043e\u0432 - \u044d\u0442\u043e \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u0441\u0443\u0445\u043e\u0433\u043e \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f, \u043f\u0440\u0435\u0434\u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u043d\u0430\u044f \u0434\u043b\u044f \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043c\u0438\u043a\u0440\u043e\u0444\u0430\u0431\u0440\u0438\u043a \u0438 \u043d\u0430\u043d\u043e\u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439. \u0418\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u044f \u0438\u043e\u043d\u043d\u043e-\u043b\u0443\u0447\u0435\u0432\u043e\u0435 \u0442\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 (IBE), \u0442\u0430\u043a\u0436\u0435 \u0438\u0437\u0432\u0435\u0441\u0442\u043d\u043e\u0435 \u043a\u0430\u043a \u0438\u043e\u043d\u043d\u043e\u0435 \u0444\u0440\u0435\u0437\u0435\u0440\u043e\u0432\u0430\u043d\u0438\u0435, \u044d\u0442\u043e \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u043e\u0447\u043d\u043e\u0435 \u0443\u0434\u0430\u043b\u0435\u043d\u0438\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u0430 \u043f\u043e\u0441\u0440\u0435\u0434\u0441\u0442\u0432\u043e\u043c \u0447\u0438\u0441\u0442\u043e \u0444\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u043e\u0433\u043e \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430 \u043d\u0430\u043f\u044b\u043b\u0435\u043d\u0438\u044f.<\/p>","protected":false},"featured_media":2320,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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