{"id":1948,"date":"2026-03-17T07:21:48","date_gmt":"2026-03-17T07:21:48","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1948"},"modified":"2026-03-20T07:22:42","modified_gmt":"2026-03-20T07:22:42","slug":"sic-crystal-growth-furnace-pvt-lpe-ht-cvd-for-high-quality-silicon-carbide-single-crystal-production","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ru\/product\/sic-crystal-growth-furnace-pvt-lpe-ht-cvd-for-high-quality-silicon-carbide-single-crystal-production\/","title":{"rendered":"\u041f\u0435\u0447\u044c \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC (PVT \/ LPE \/ HT-CVD) \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0432\u044b\u0441\u043e\u043a\u043e\u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0445 \u043c\u043e\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 \u043a\u0430\u0440\u0431\u0438\u0434\u0430 \u043a\u0440\u0435\u043c\u043d\u0438\u044f"},"content":{"rendered":"<p data-start=\"204\" data-end=\"416\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-1950 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-300x259.webp\" alt=\"\" width=\"300\" height=\"259\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-300x259.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-14x12.webp 14w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method-600x518.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/sic_crystal_growth_furnace_pvt_lpe_ht_cvd_high_quality_sic_single_crystal_growth_method.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u041f\u0435\u0447\u044c \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC - \u0432\u0430\u0436\u043d\u0435\u0439\u0448\u0435\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0432\u044b\u0441\u043e\u043a\u043e\u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0445 \u043c\u043e\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 \u043a\u0430\u0440\u0431\u0438\u0434\u0430 \u043a\u0440\u0435\u043c\u043d\u0438\u044f (SiC), \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u043c\u044b\u0445 \u0432 \u0441\u0438\u043b\u043e\u0432\u043e\u0439 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0435, \u0440\u0430\u0434\u0438\u043e\u0447\u0430\u0441\u0442\u043e\u0442\u043d\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430\u0445 \u0438 \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u044f\u0445.<\/p>\n<p data-start=\"418\" data-end=\"489\">\u041d\u0430\u0448\u0438 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u044e\u0442 \u043c\u043d\u043e\u0436\u0435\u0441\u0442\u0432\u043e \u043e\u0441\u043d\u043e\u0432\u043d\u044b\u0445 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u0440\u043e\u0441\u0442\u0430, \u0432\u043a\u043b\u044e\u0447\u0430\u044f:<\/p>\n<ul data-start=\"491\" data-end=\"612\">\n<li data-section-id=\"12iy5p3\" data-start=\"491\" data-end=\"525\">\n<p data-start=\"493\" data-end=\"525\">\u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043d\u043e\u0441 \u043f\u0430\u0440\u043e\u0432 (PVT)<\/p>\n<\/li>\n<li data-section-id=\"yxgf5n\" data-start=\"526\" data-end=\"556\">\n<p data-start=\"528\" data-end=\"556\">\u0416\u0438\u0434\u043a\u043e\u0444\u0430\u0437\u043d\u0430\u044f \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f (LPE)<\/p>\n<\/li>\n<li data-section-id=\"ch2v4w\" data-start=\"557\" data-end=\"612\">\n<p data-start=\"559\" data-end=\"612\">\u0412\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u043e\u0435 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b (HT-CVD)<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"614\" data-end=\"833\">\u0411\u043b\u0430\u0433\u043e\u0434\u0430\u0440\u044f \u0442\u043e\u0447\u043d\u043e\u043c\u0443 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044e \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u044b, \u0432\u0430\u043a\u0443\u0443\u043c\u0430 \u0438 \u043f\u043e\u0442\u043e\u043a\u0430 \u0433\u0430\u0437\u0430 \u043f\u0435\u0447\u044c \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0438\u0432\u0430\u0435\u0442 \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0435 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC \u0441 \u043d\u0438\u0437\u043a\u0438\u043c \u0441\u043e\u0434\u0435\u0440\u0436\u0430\u043d\u0438\u0435\u043c \u0434\u0435\u0444\u0435\u043a\u0442\u043e\u0432 \u0438 \u0432\u044b\u0441\u043e\u043a\u043e\u0439 \u0447\u0438\u0441\u0442\u043e\u0442\u043e\u0439 \u0432 \u0440\u0430\u0437\u043c\u0435\u0440\u0430\u0445 4-6 \u0434\u044e\u0439\u043c\u043e\u0432, \u0430 \u0434\u043b\u044f \u0431\u043e\u043b\u044c\u0448\u0438\u0445 \u0434\u0438\u0430\u043c\u0435\u0442\u0440\u043e\u0432 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e \u0438\u0437\u0433\u043e\u0442\u043e\u0432\u043b\u0435\u043d\u0438\u0435 \u043d\u0430 \u0437\u0430\u043a\u0430\u0437.<\/p>\n<h2 data-section-id=\"z1sk7h\" data-start=\"840\" data-end=\"883\"><span role=\"text\">\u041c\u0435\u0442\u043e\u0434\u044b \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC \u0441 \u043f\u043e\u0434\u0434\u0435\u0440\u0436\u043a\u043e\u0439<\/span><\/h2>\n<h3 data-section-id=\"kspzpi\" data-start=\"885\" data-end=\"926\"><span role=\"text\">1. \u0424\u0438\u0437\u0438\u0447\u0435\u0441\u043a\u0438\u0439 \u043f\u0435\u0440\u0435\u043d\u043e\u0441 \u043f\u0430\u0440\u043e\u0432 (PVT)<\/span><\/h3>\n<p data-start=\"928\" data-end=\"1108\">\u041f\u0440\u0438\u043d\u0446\u0438\u043f \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430:<br data-start=\"950\" data-end=\"953\" \/><img decoding=\"async\" class=\"size-medium wp-image-1953 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-300x130.jpg\" alt=\"\" width=\"300\" height=\"130\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-300x130.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-18x8.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5-600x261.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method5.jpg 679w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u041f\u043e\u0440\u043e\u0448\u043e\u043a SiC \u0441\u0443\u0431\u043b\u0438\u043c\u0438\u0440\u0443\u0435\u0442\u0441\u044f \u043f\u0440\u0438 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0435 \u0432\u044b\u0448\u0435 2000\u00b0C. \u041f\u0430\u0440\u044b \u043f\u0435\u0440\u0435\u043d\u043e\u0441\u044f\u0442\u0441\u044f \u043f\u043e \u0433\u0440\u0430\u0434\u0438\u0435\u043d\u0442\u0443 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u044b \u0438 \u043f\u0435\u0440\u0435\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0437\u043e\u0432\u044b\u0432\u0430\u044e\u0442\u0441\u044f \u043d\u0430 \u0437\u0430\u0442\u0440\u0430\u0432\u043e\u0447\u043d\u043e\u043c \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0435.<\/p>\n<p data-start=\"1110\" data-end=\"1127\">\u041a\u043b\u044e\u0447\u0435\u0432\u044b\u0435 \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e\u0441\u0442\u0438:<\/p>\n<ul data-start=\"1128\" data-end=\"1374\">\n<li data-section-id=\"1m5h759\" data-start=\"1128\" data-end=\"1177\">\n<p data-start=\"1130\" data-end=\"1177\">\u0422\u0438\u0433\u0435\u043b\u044c \u0438 \u0434\u0435\u0440\u0436\u0430\u0442\u0435\u043b\u044c \u0434\u043b\u044f \u0441\u0435\u043c\u044f\u043d \u0438\u0437 \u0432\u044b\u0441\u043e\u043a\u043e\u0447\u0438\u0441\u0442\u043e\u0433\u043e \u0433\u0440\u0430\u0444\u0438\u0442\u0430<\/p>\n<\/li>\n<li data-section-id=\"obcs2k\" data-start=\"1178\" data-end=\"1239\">\n<p data-start=\"1180\" data-end=\"1239\">\u0412\u0441\u0442\u0440\u043e\u0435\u043d\u043d\u0430\u044f \u0442\u0435\u0440\u043c\u043e\u043f\u0430\u0440\u0430 + \u0438\u043d\u0444\u0440\u0430\u043a\u0440\u0430\u0441\u043d\u044b\u0439 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u044b<\/p>\n<\/li>\n<li data-section-id=\"1ahok9n\" data-start=\"1240\" data-end=\"1284\">\n<p data-start=\"1242\" data-end=\"1284\">\u0421\u0438\u0441\u0442\u0435\u043c\u0430 \u0443\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u044f \u043f\u043e\u0442\u043e\u043a\u043e\u043c \u0432\u0430\u043a\u0443\u0443\u043c\u0430 \u0438 \u0438\u043d\u0435\u0440\u0442\u043d\u043e\u0433\u043e \u0433\u0430\u0437\u0430<\/p>\n<\/li>\n<li data-section-id=\"ltafbu\" data-start=\"1285\" data-end=\"1324\">\n<p data-start=\"1287\" data-end=\"1324\">\u0410\u0432\u0442\u043e\u043c\u0430\u0442\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u0443\u043f\u0440\u0430\u0432\u043b\u0435\u043d\u0438\u0435 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u043c \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u043c \u043d\u0430 \u0431\u0430\u0437\u0435 \u041f\u041b\u041a<\/p>\n<\/li>\n<li data-section-id=\"1ubyld1\" data-start=\"1325\" data-end=\"1374\">\n<p data-start=\"1327\" data-end=\"1374\">\u0418\u043d\u0442\u0435\u0433\u0440\u0430\u0446\u0438\u044f \u0441\u0438\u0441\u0442\u0435\u043c \u043e\u0445\u043b\u0430\u0436\u0434\u0435\u043d\u0438\u044f \u0438 \u043e\u0447\u0438\u0441\u0442\u043a\u0438 \u0432\u044b\u0445\u043b\u043e\u043f\u043d\u044b\u0445 \u0433\u0430\u0437\u043e\u0432<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1376\" data-end=\"1391\">\u041f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430:<\/p>\n<ul data-start=\"1392\" data-end=\"1507\">\n<li data-section-id=\"1skc6sa\" data-start=\"1392\" data-end=\"1432\">\n<p data-start=\"1394\" data-end=\"1432\">\u0417\u0440\u0435\u043b\u0430\u044f \u0438 \u0448\u0438\u0440\u043e\u043a\u043e \u0440\u0430\u0441\u043f\u0440\u043e\u0441\u0442\u0440\u0430\u043d\u0435\u043d\u043d\u0430\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u044f<\/p>\n<\/li>\n<li data-section-id=\"696hi4\" data-start=\"1433\" data-end=\"1466\">\n<p data-start=\"1435\" data-end=\"1466\">\u041e\u0442\u043d\u043e\u0441\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u043d\u0438\u0437\u043a\u0430\u044f \u0441\u0442\u043e\u0438\u043c\u043e\u0441\u0442\u044c \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u044f<\/p>\n<\/li>\n<li data-section-id=\"4ihzdk\" data-start=\"1467\" data-end=\"1507\">\n<p data-start=\"1469\" data-end=\"1507\">\u041f\u043e\u0434\u0445\u043e\u0434\u0438\u0442 \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043e\u0431\u044a\u0435\u043c\u043d\u044b\u0445 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"1509\" data-end=\"1526\">\u041f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u044f:<\/p>\n<ul data-start=\"1527\" data-end=\"1590\">\n<li data-section-id=\"16plruj\" data-start=\"1527\" data-end=\"1590\">\n<p data-start=\"1529\" data-end=\"1590\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u043e\u043b\u0443\u0438\u0437\u043e\u043b\u0438\u0440\u0443\u044e\u0449\u0438\u0445 \u0438 \u043f\u0440\u043e\u0432\u043e\u0434\u044f\u0449\u0438\u0445 \u043f\u043e\u0434\u043b\u043e\u0436\u0435\u043a SiC<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"1lkfnea\" data-start=\"1597\" data-end=\"1659\"><span role=\"text\">2. \u0412\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u043e\u0435 \u0445\u0438\u043c\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0441\u0430\u0436\u0434\u0435\u043d\u0438\u0435 \u0438\u0437 \u043f\u0430\u0440\u043e\u0432\u043e\u0439 \u0444\u0430\u0437\u044b (HT-CVD)<\/span><\/h3>\n<p data-start=\"1661\" data-end=\"1794\"><img decoding=\"async\" class=\"size-medium wp-image-1954 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-300x96.jpg\" alt=\"\" width=\"300\" height=\"96\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-300x96.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-18x6.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6-600x192.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method6.jpg 669w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u041f\u0440\u0438\u043d\u0446\u0438\u043f \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430:<br data-start=\"1683\" data-end=\"1686\" \/>\u0412\u044b\u0441\u043e\u043a\u043e\u0447\u0438\u0441\u0442\u044b\u0435 \u0433\u0430\u0437\u044b (\u043d\u0430\u043f\u0440\u0438\u043c\u0435\u0440, SiH\u2084 + C\u2082H\u2084 \/ C\u2083H\u2088) \u0440\u0430\u0437\u043b\u0430\u0433\u0430\u044e\u0442\u0441\u044f \u043f\u0440\u0438 1800-2300\u00b0C \u0438 \u043e\u0441\u0430\u0436\u0434\u0430\u044e\u0442 SiC \u043d\u0430 \u0437\u0430\u0442\u0440\u0430\u0432\u043e\u0447\u043d\u044b\u0439 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b.<\/p>\n<p data-start=\"1796\" data-end=\"1813\">\u041a\u043b\u044e\u0447\u0435\u0432\u044b\u0435 \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e\u0441\u0442\u0438:<\/p>\n<ul data-start=\"1814\" data-end=\"2010\">\n<li data-section-id=\"136qfh6\" data-start=\"1814\" data-end=\"1864\">\n<p data-start=\"1816\" data-end=\"1864\">\u0418\u043d\u0434\u0443\u043a\u0446\u0438\u043e\u043d\u043d\u044b\u0439 \u043d\u0430\u0433\u0440\u0435\u0432 \u0441 \u043f\u043e\u043c\u043e\u0449\u044c\u044e \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043c\u0430\u0433\u043d\u0438\u0442\u043d\u043e\u0439 \u043c\u0443\u0444\u0442\u044b<\/p>\n<\/li>\n<li data-section-id=\"a59yxr\" data-start=\"1865\" data-end=\"1919\">\n<p data-start=\"1867\" data-end=\"1919\">\u0421\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u043f\u043e\u0434\u0430\u0447\u0438 \u0433\u0430\u0437\u0430 (He \/ H\u2082 \u0433\u0430\u0437\u044b-\u043d\u043e\u0441\u0438\u0442\u0435\u043b\u0438)<\/p>\n<\/li>\n<li data-section-id=\"1cbw0ya\" data-start=\"1920\" data-end=\"1980\">\n<p data-start=\"1922\" data-end=\"1980\">\u0423\u043f\u0440\u0430\u0432\u043b\u044f\u0435\u043c\u044b\u0439 \u0433\u0440\u0430\u0434\u0438\u0435\u043d\u0442 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u044b \u0434\u043b\u044f \u043a\u043e\u043d\u0434\u0435\u043d\u0441\u0430\u0446\u0438\u0438 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432<\/p>\n<\/li>\n<li data-section-id=\"xx40zc\" data-start=\"1981\" data-end=\"2010\">\n<p data-start=\"1983\" data-end=\"2010\">\u0412\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u044c \u0442\u043e\u0447\u043d\u043e\u0433\u043e \u043b\u0435\u0433\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2012\" data-end=\"2027\">\u041f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430:<\/p>\n<ul data-start=\"2028\" data-end=\"2102\">\n<li data-section-id=\"xejhn5\" data-start=\"2028\" data-end=\"2050\">\n<p data-start=\"2030\" data-end=\"2050\">\u041d\u0438\u0437\u043a\u0430\u044f \u043f\u043b\u043e\u0442\u043d\u043e\u0441\u0442\u044c \u0434\u0435\u0444\u0435\u043a\u0442\u043e\u0432<\/p>\n<\/li>\n<li data-section-id=\"126pemv\" data-start=\"2051\" data-end=\"2074\">\n<p data-start=\"2053\" data-end=\"2074\">\u0412\u044b\u0441\u043e\u043a\u0430\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u044c\u043d\u0430\u044f \u0447\u0438\u0441\u0442\u043e\u0442\u0430<\/p>\n<\/li>\n<li data-section-id=\"u0lupt\" data-start=\"2075\" data-end=\"2102\">\n<p data-start=\"2077\" data-end=\"2102\">\u0413\u0438\u0431\u043a\u0438\u0439 \u0434\u043e\u043f\u0438\u043d\u0433-\u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2104\" data-end=\"2121\">\u041f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u044f:<\/p>\n<ul data-start=\"2122\" data-end=\"2185\">\n<li data-section-id=\"1b8jolu\" data-start=\"2122\" data-end=\"2185\">\n<p data-start=\"2124\" data-end=\"2185\">\u0412\u044b\u0441\u043e\u043a\u043e\u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0438\u0442\u0435\u043b\u044c\u043d\u044b\u0435 \u043f\u043b\u0430\u0441\u0442\u0438\u043d\u044b SiC \u0434\u043b\u044f \u0441\u043e\u0432\u0440\u0435\u043c\u0435\u043d\u043d\u044b\u0445 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u043d\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"1gxz1d4\" data-start=\"2192\" data-end=\"2229\"><span role=\"text\">3. \u0416\u0438\u0434\u043a\u043e\u0444\u0430\u0437\u043d\u0430\u044f \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f (LPE)<\/span><\/h3>\n<p data-start=\"2231\" data-end=\"2390\"><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-1955 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-300x133.jpg\" alt=\"\" width=\"300\" height=\"133\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-300x133.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-18x8.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7-600x266.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Sic-Crystal-Growth-Furnace-PVT-LPE-HT-CVD-High-Quality-Sic-Single-Crystal-Growth-Method7.jpg 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u041f\u0440\u0438\u043d\u0446\u0438\u043f \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430:<br data-start=\"2253\" data-end=\"2256\" \/>Si \u0438 C \u0440\u0430\u0441\u0442\u0432\u043e\u0440\u044f\u044e\u0442\u0441\u044f \u0432 \u0432\u044b\u0441\u043e\u043a\u043e\u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u043d\u043e\u043c \u0440\u0430\u0441\u0442\u0432\u043e\u0440\u0435 (~1800\u00b0C), \u0430 SiC \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0438\u0437\u0443\u0435\u0442\u0441\u044f \u0438\u0437 \u043f\u0435\u0440\u0435\u0441\u044b\u0449\u0435\u043d\u043d\u043e\u0433\u043e \u0440\u0430\u0441\u043f\u043b\u0430\u0432\u0430 \u043f\u0440\u0438 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u0438\u0440\u0443\u0435\u043c\u043e\u043c \u043e\u0445\u043b\u0430\u0436\u0434\u0435\u043d\u0438\u0438.<\/p>\n<p data-start=\"2392\" data-end=\"2409\">\u041a\u043b\u044e\u0447\u0435\u0432\u044b\u0435 \u043e\u0441\u043e\u0431\u0435\u043d\u043d\u043e\u0441\u0442\u0438:<\/p>\n<ul data-start=\"2410\" data-end=\"2570\">\n<li data-section-id=\"1l354m9\" data-start=\"2410\" data-end=\"2449\">\n<p data-start=\"2412\" data-end=\"2449\">\u0412\u044b\u0441\u043e\u043a\u043e\u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0439 \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u044b\u0439 \u0440\u043e\u0441\u0442 \u0441\u043b\u043e\u0435\u0432<\/p>\n<\/li>\n<li data-section-id=\"1f5uz6v\" data-start=\"2450\" data-end=\"2488\">\n<p data-start=\"2452\" data-end=\"2488\">\u041d\u0438\u0437\u043a\u0430\u044f \u043f\u043b\u043e\u0442\u043d\u043e\u0441\u0442\u044c \u0434\u0435\u0444\u0435\u043a\u0442\u043e\u0432 \u0438 \u0432\u044b\u0441\u043e\u043a\u0430\u044f \u0447\u0438\u0441\u0442\u043e\u0442\u0430<\/p>\n<\/li>\n<li data-section-id=\"1da15oj\" data-start=\"2489\" data-end=\"2531\">\n<p data-start=\"2491\" data-end=\"2531\">\u041e\u0442\u043d\u043e\u0441\u0438\u0442\u0435\u043b\u044c\u043d\u043e \u043d\u0438\u0437\u043a\u0438\u0435 \u0442\u0440\u0435\u0431\u043e\u0432\u0430\u043d\u0438\u044f \u043a \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u044e<\/p>\n<\/li>\n<li data-section-id=\"apgmow\" data-start=\"2532\" data-end=\"2570\">\n<p data-start=\"2534\" data-end=\"2570\">\u041c\u0430\u0441\u0448\u0442\u0430\u0431\u0438\u0440\u0443\u0435\u043c\u043e\u0441\u0442\u044c \u0434\u043b\u044f \u043f\u0440\u043e\u043c\u044b\u0448\u043b\u0435\u043d\u043d\u043e\u0433\u043e \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2572\" data-end=\"2587\">\u041f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430:<\/p>\n<ul data-start=\"2588\" data-end=\"2646\">\n<li data-section-id=\"1lh17wx\" data-start=\"2588\" data-end=\"2609\">\n<p data-start=\"2590\" data-end=\"2609\">\u0411\u043e\u043b\u0435\u0435 \u043d\u0438\u0437\u043a\u0430\u044f \u0441\u0442\u043e\u0438\u043c\u043e\u0441\u0442\u044c \u0440\u043e\u0441\u0442\u0430<\/p>\n<\/li>\n<li data-section-id=\"7sa3sd\" data-start=\"2610\" data-end=\"2646\">\n<p data-start=\"2612\" data-end=\"2646\">\u0423\u043b\u0443\u0447\u0448\u0435\u043d\u043d\u043e\u0435 \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u043e \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u043e\u0433\u043e \u0441\u043b\u043e\u044f<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"2648\" data-end=\"2665\">\u041f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u044f:<\/p>\n<ul data-start=\"2666\" data-end=\"2761\">\n<li data-section-id=\"u4ixfp\" data-start=\"2666\" data-end=\"2710\">\n<p data-start=\"2668\" data-end=\"2710\">\u042d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u044b\u0439 \u0440\u043e\u0441\u0442 \u0441\u043b\u043e\u0435\u0432 \u043d\u0430 \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0430\u0445 SiC<\/p>\n<\/li>\n<li data-section-id=\"5zhtvl\" data-start=\"2711\" data-end=\"2761\">\n<p data-start=\"2713\" data-end=\"2761\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u0432\u044b\u0441\u043e\u043a\u043e\u044d\u0444\u0444\u0435\u043a\u0442\u0438\u0432\u043d\u044b\u0445 \u0441\u0438\u043b\u043e\u0432\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"1ttn0lq\" data-start=\"2768\" data-end=\"2795\"><span role=\"text\">\u0422\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0438\u0435 \u043f\u0440\u0435\u0438\u043c\u0443\u0449\u0435\u0441\u0442\u0432\u0430<\/span><\/h2>\n<ul data-start=\"2797\" data-end=\"3035\">\n<li data-section-id=\"js25p8\" data-start=\"2797\" data-end=\"2837\">\n<p data-start=\"2799\" data-end=\"2837\">\u0420\u0430\u0431\u043e\u0442\u0430 \u043f\u0440\u0438 \u0432\u044b\u0441\u043e\u043a\u0438\u0445 \u0442\u0435\u043c\u043f\u0435\u0440\u0430\u0442\u0443\u0440\u0430\u0445 (&gt;2000\u00b0C)<\/p>\n<\/li>\n<li data-section-id=\"1jqlm2f\" data-start=\"2838\" data-end=\"2876\">\n<p data-start=\"2840\" data-end=\"2876\">\u0421\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u044b\u0439 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u0432\u0430\u043a\u0443\u0443\u043c\u0430 \u0438 \u043f\u043e\u0442\u043e\u043a\u0430 \u0433\u0430\u0437\u0430<\/p>\n<\/li>\n<li data-section-id=\"gf25zn\" data-start=\"2877\" data-end=\"2911\">\n<p data-start=\"2879\" data-end=\"2911\">\u041f\u0435\u0440\u0435\u0434\u043e\u0432\u0430\u044f \u0441\u0438\u0441\u0442\u0435\u043c\u0430 \u0430\u0432\u0442\u043e\u043c\u0430\u0442\u0438\u0437\u0430\u0446\u0438\u0438 PLC<\/p>\n<\/li>\n<li data-section-id=\"1oe212f\" data-start=\"2912\" data-end=\"2974\">\n<p data-start=\"2914\" data-end=\"2974\">\u041d\u0430\u0441\u0442\u0440\u0430\u0438\u0432\u0430\u0435\u043c\u0430\u044f \u043a\u043e\u043d\u0441\u0442\u0440\u0443\u043a\u0446\u0438\u044f \u043f\u0435\u0447\u0438 (\u0440\u0430\u0437\u043c\u0435\u0440, \u043a\u043e\u043d\u0444\u0438\u0433\u0443\u0440\u0430\u0446\u0438\u044f, \u043f\u0440\u043e\u0446\u0435\u0441\u0441)<\/p>\n<\/li>\n<li data-section-id=\"1qtodg6\" data-start=\"2975\" data-end=\"3035\">\n<p data-start=\"2977\" data-end=\"3035\">\u0421\u043e\u0432\u043c\u0435\u0441\u0442\u0438\u043c\u043e\u0441\u0442\u044c \u0441 4-6-\u0434\u044e\u0439\u043c\u043e\u0432\u044b\u043c\u0438 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u0430\u043c\u0438 SiC (\u0441 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u044c\u044e \u0440\u0430\u0441\u0448\u0438\u0440\u0435\u043d\u0438\u044f)<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"i1urdn\" data-start=\"3042\" data-end=\"3065\"><span role=\"text\">\u041d\u0430\u0448\u0438 \u0432\u043e\u0437\u043c\u043e\u0436\u043d\u043e\u0441\u0442\u0438<\/span><\/h2>\n<h3 data-section-id=\"1euwnkw\" data-start=\"3067\" data-end=\"3094\"><span role=\"text\">1. \u041f\u043e\u0441\u0442\u0430\u0432\u043a\u0430 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u044f<\/span><\/h3>\n<p data-start=\"3095\" data-end=\"3164\">\u041c\u044b \u043f\u0440\u0435\u0434\u043b\u0430\u0433\u0430\u0435\u043c \u043f\u043e\u043b\u043d\u043e\u0441\u0442\u044c\u044e \u0441\u043f\u0440\u043e\u0435\u043a\u0442\u0438\u0440\u043e\u0432\u0430\u043d\u043d\u044b\u0435 \u043f\u0435\u0447\u0438 \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC, \u043f\u0440\u0435\u0434\u043d\u0430\u0437\u043d\u0430\u0447\u0435\u043d\u043d\u044b\u0435 \u0434\u043b\u044f:<\/p>\n<ul data-start=\"3165\" data-end=\"3275\">\n<li data-section-id=\"o9p6qu\" data-start=\"3165\" data-end=\"3200\">\n<p data-start=\"3167\" data-end=\"3200\">\u0412\u044b\u0441\u043e\u043a\u043e\u0447\u0438\u0441\u0442\u044b\u0439 \u043f\u043e\u043b\u0443\u0438\u0437\u043e\u043b\u0438\u0440\u0443\u044e\u0449\u0438\u0439 SiC<\/p>\n<\/li>\n<li data-section-id=\"11vwiq6\" data-start=\"3201\" data-end=\"3238\">\n<p data-start=\"3203\" data-end=\"3238\">\u041f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u0440\u043e\u0432\u043e\u0434\u044f\u0449\u0438\u0445 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC<\/p>\n<\/li>\n<li data-section-id=\"10vy7s\" data-start=\"3239\" data-end=\"3275\">\n<p data-start=\"3241\" data-end=\"3275\">\u0422\u0440\u0435\u0431\u043e\u0432\u0430\u043d\u0438\u044f \u043a \u0441\u0435\u0440\u0438\u0439\u043d\u043e\u043c\u0443 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0443<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"phctqp\" data-start=\"3282\" data-end=\"3323\"><span role=\"text\">2. \u041f\u043e\u0441\u0442\u0430\u0432\u043a\u0430 \u0441\u044b\u0440\u044c\u044f \u0438 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432<\/span><\/h3>\n<p data-start=\"3324\" data-end=\"3334\">\u041c\u044b \u043f\u043e\u0441\u0442\u0430\u0432\u043b\u044f\u0435\u043c:<\/p>\n<ul data-start=\"3335\" data-end=\"3401\">\n<li data-section-id=\"1ggi3jo\" data-start=\"3335\" data-end=\"3359\">\n<p data-start=\"3337\" data-end=\"3359\">\u0418\u0441\u0445\u043e\u0434\u043d\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b SiC<\/p>\n<\/li>\n<li data-section-id=\"h3kpam\" data-start=\"3360\" data-end=\"3377\">\n<p data-start=\"3362\" data-end=\"3377\">\u041a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u044b \u0441\u0435\u043c\u044f\u043d<\/p>\n<\/li>\n<li data-section-id=\"1rb4g8j\" data-start=\"3378\" data-end=\"3401\">\n<p data-start=\"3380\" data-end=\"3401\">\u0420\u0430\u0441\u0445\u043e\u0434\u043d\u044b\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u0434\u043b\u044f \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0447\u0435\u0441\u043a\u0438\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432<\/p>\n<\/li>\n<\/ul>\n<p data-start=\"3403\" data-end=\"3479\">\u0412\u0441\u0435 \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b \u043f\u0440\u043e\u0445\u043e\u0434\u044f\u0442 \u0441\u0442\u0440\u043e\u0433\u0438\u0439 \u043a\u043e\u043d\u0442\u0440\u043e\u043b\u044c \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0430 \u0434\u043b\u044f \u043e\u0431\u0435\u0441\u043f\u0435\u0447\u0435\u043d\u0438\u044f \u0441\u0442\u0430\u0431\u0438\u043b\u044c\u043d\u043e\u0441\u0442\u0438 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u0430.<\/p>\n<h3 data-section-id=\"lzu290\" data-start=\"3486\" data-end=\"3531\"><span role=\"text\">3. \u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u0438 \u043e\u043f\u0442\u0438\u043c\u0438\u0437\u0430\u0446\u0438\u044f \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432<\/span><\/h3>\n<p data-start=\"3532\" data-end=\"3562\">\u041d\u0430\u0448\u0430 \u043a\u043e\u043c\u0430\u043d\u0434\u0430 \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u043e\u0432 \u043f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u0435\u0442:<\/p>\n<ul data-start=\"3563\" data-end=\"3669\">\n<li data-section-id=\"1hou4gz\" data-start=\"3563\" data-end=\"3593\">\n<p data-start=\"3565\" data-end=\"3593\">\u0420\u0430\u0437\u0440\u0430\u0431\u043e\u0442\u043a\u0430 \u0438\u043d\u0434\u0438\u0432\u0438\u0434\u0443\u0430\u043b\u044c\u043d\u044b\u0445 \u043f\u0440\u043e\u0446\u0435\u0441\u0441\u043e\u0432<\/p>\n<\/li>\n<li data-section-id=\"1t2cez5\" data-start=\"3594\" data-end=\"3627\">\n<p data-start=\"3596\" data-end=\"3627\">\u041e\u043f\u0442\u0438\u043c\u0438\u0437\u0430\u0446\u0438\u044f \u043f\u0430\u0440\u0430\u043c\u0435\u0442\u0440\u043e\u0432 \u0440\u043e\u0441\u0442\u0430<\/p>\n<\/li>\n<li data-section-id=\"1bd6gqh\" data-start=\"3628\" data-end=\"3669\">\n<p data-start=\"3630\" data-end=\"3669\">\u041f\u043e\u0432\u044b\u0448\u0435\u043d\u0438\u0435 \u0443\u0440\u043e\u0436\u0430\u0439\u043d\u043e\u0441\u0442\u0438 \u0438 \u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0430 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432<\/p>\n<\/li>\n<\/ul>\n<h3 data-section-id=\"sd0tuu\" data-start=\"3676\" data-end=\"3715\"><span role=\"text\">4. \u041e\u0431\u0443\u0447\u0435\u043d\u0438\u0435 \u0438 \u0442\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u0430\u044f \u043f\u043e\u0434\u0434\u0435\u0440\u0436\u043a\u0430<\/span><\/h3>\n<p data-start=\"3716\" data-end=\"3725\">\u041c\u044b \u043f\u0440\u0435\u0434\u043b\u0430\u0433\u0430\u0435\u043c:<\/p>\n<ul data-start=\"3726\" data-end=\"3832\">\n<li data-section-id=\"8xwlms\" data-start=\"3726\" data-end=\"3755\">\n<p data-start=\"3728\" data-end=\"3755\">\u041e\u0431\u0443\u0447\u0435\u043d\u0438\u0435 \u043d\u0430 \u043c\u0435\u0441\u0442\u0435 \/ \u0434\u0438\u0441\u0442\u0430\u043d\u0446\u0438\u043e\u043d\u043d\u043e<\/p>\n<\/li>\n<li data-section-id=\"113ldb5\" data-start=\"3756\" data-end=\"3788\">\n<p data-start=\"3758\" data-end=\"3788\">\u0420\u0443\u043a\u043e\u0432\u043e\u0434\u0441\u0442\u0432\u043e \u043f\u043e \u044d\u043a\u0441\u043f\u043b\u0443\u0430\u0442\u0430\u0446\u0438\u0438 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u044f<\/p>\n<\/li>\n<li data-section-id=\"19iv12h\" data-start=\"3789\" data-end=\"3832\">\n<p data-start=\"3791\" data-end=\"3832\">\u0422\u0435\u0445\u043d\u0438\u0447\u0435\u0441\u043a\u043e\u0435 \u043e\u0431\u0441\u043b\u0443\u0436\u0438\u0432\u0430\u043d\u0438\u0435 \u0438 \u0443\u0441\u0442\u0440\u0430\u043d\u0435\u043d\u0438\u0435 \u043d\u0435\u0438\u0441\u043f\u0440\u0430\u0432\u043d\u043e\u0441\u0442\u0435\u0439<\/p>\n<\/li>\n<\/ul>\n<h2 data-section-id=\"elc90z\" data-start=\"3839\" data-end=\"3849\"><span role=\"text\">\u0427\u0410\u0421\u0422\u041e \u0417\u0410\u0414\u0410\u0412\u0410\u0415\u041c\u042b\u0415 \u0412\u041e\u041f\u0420\u041e\u0421\u042b<\/span><\/h2>\n<p data-start=\"3851\" data-end=\"4022\">\u0412\u043e\u043f\u0440\u043e\u0441 1: \u041a\u0430\u043a\u043e\u0432\u044b \u043e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043c\u0435\u0442\u043e\u0434\u044b \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC?<br data-start=\"3904\" data-end=\"3907\" \/>\u041e: \u041e\u0441\u043d\u043e\u0432\u043d\u044b\u0435 \u043c\u0435\u0442\u043e\u0434\u044b \u0432\u043a\u043b\u044e\u0447\u0430\u044e\u0442 PVT, HT-CVD \u0438 LPE, \u043a\u0430\u0436\u0434\u044b\u0439 \u0438\u0437 \u043a\u043e\u0442\u043e\u0440\u044b\u0445 \u043f\u043e\u0434\u0445\u043e\u0434\u0438\u0442 \u0434\u043b\u044f \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0445 \u043e\u0431\u043b\u0430\u0441\u0442\u0435\u0439 \u043f\u0440\u0438\u043c\u0435\u043d\u0435\u043d\u0438\u044f \u0438 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0445 \u0446\u0435\u043b\u0435\u0439.<\/p>\n<p data-start=\"4024\" data-end=\"4230\">\u0412\u043e\u043f\u0440\u043e\u0441 2: \u0427\u0442\u043e \u0442\u0430\u043a\u043e\u0435 \u0436\u0438\u0434\u043a\u043e\u0444\u0430\u0437\u043d\u0430\u044f \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u044f (LPE)?<br data-start=\"4067\" data-end=\"4070\" \/>\u041e: LPE - \u044d\u0442\u043e \u043c\u0435\u0442\u043e\u0434 \u0440\u043e\u0441\u0442\u0430 \u043d\u0430 \u043e\u0441\u043d\u043e\u0432\u0435 \u0440\u0430\u0441\u0442\u0432\u043e\u0440\u0430, \u043f\u0440\u0438 \u043a\u043e\u0442\u043e\u0440\u043e\u043c \u043d\u0430\u0441\u044b\u0449\u0435\u043d\u043d\u044b\u0439 \u0440\u0430\u0441\u043f\u043b\u0430\u0432 \u043c\u0435\u0434\u043b\u0435\u043d\u043d\u043e \u043e\u0445\u043b\u0430\u0436\u0434\u0430\u0435\u0442\u0441\u044f \u0434\u043b\u044f \u0441\u0442\u0438\u043c\u0443\u043b\u0438\u0440\u043e\u0432\u0430\u043d\u0438\u044f \u0440\u043e\u0441\u0442\u0430 \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 \u043d\u0430 \u043f\u043e\u0434\u043b\u043e\u0436\u043a\u0435, \u0447\u0442\u043e \u043f\u043e\u0437\u0432\u043e\u043b\u044f\u0435\u0442 \u043f\u043e\u043b\u0443\u0447\u0430\u0442\u044c \u0432\u044b\u0441\u043e\u043a\u043e\u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0435 \u044d\u043f\u0438\u0442\u0430\u043a\u0441\u0438\u0430\u043b\u044c\u043d\u044b\u0435 \u0441\u043b\u043e\u0438.<\/p>\n<h2 data-section-id=\"1wz3rnt\" data-start=\"4237\" data-end=\"4278\"><span role=\"text\">\u041f\u043e\u0447\u0435\u043c\u0443 \u0441\u0442\u043e\u0438\u0442 \u0432\u044b\u0431\u0440\u0430\u0442\u044c \u043d\u0430\u0448\u0443 \u043f\u0435\u0447\u044c \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f SiC?<\/span><\/h2>\n<ul data-start=\"4280\" data-end=\"4496\">\n<li data-section-id=\"1nz5fyj\" data-start=\"4280\" data-end=\"4330\">\n<p data-start=\"4282\" data-end=\"4330\">\u041f\u043e\u0434\u0442\u0432\u0435\u0440\u0436\u0434\u0435\u043d\u043d\u044b\u0439 \u0438\u043d\u0436\u0435\u043d\u0435\u0440\u043d\u044b\u0439 \u043e\u043f\u044b\u0442 \u0440\u0430\u0431\u043e\u0442\u044b \u0441 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435\u043c SiC<\/p>\n<\/li>\n<li data-section-id=\"dw2cfr\" data-start=\"4331\" data-end=\"4382\">\n<p data-start=\"4333\" data-end=\"4382\">\u0421\u043e\u0432\u043c\u0435\u0441\u0442\u0438\u043c\u043e\u0441\u0442\u044c \u0441 \u043d\u0435\u0441\u043a\u043e\u043b\u044c\u043a\u0438\u043c\u0438 \u043c\u0435\u0442\u043e\u0434\u0430\u043c\u0438 (PVT \/ HT-CVD \/ LPE)<\/p>\n<\/li>\n<li data-section-id=\"xciqsn\" data-start=\"4383\" data-end=\"4435\">\n<p data-start=\"4385\" data-end=\"4435\">\u0418\u043d\u0434\u0438\u0432\u0438\u0434\u0443\u0430\u043b\u044c\u043d\u044b\u0435 \u0440\u0435\u0448\u0435\u043d\u0438\u044f \u0434\u043b\u044f \u0440\u0430\u0437\u043b\u0438\u0447\u043d\u044b\u0445 \u043c\u0430\u0441\u0448\u0442\u0430\u0431\u043e\u0432 \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430<\/p>\n<\/li>\n<li data-section-id=\"s3dika\" data-start=\"4436\" data-end=\"4496\">\n<p data-start=\"4438\" data-end=\"4496\">\u041f\u043e\u0434\u0434\u0435\u0440\u0436\u043a\u0430 \u043f\u043e\u043b\u043d\u043e\u0433\u043e \u0436\u0438\u0437\u043d\u0435\u043d\u043d\u043e\u0433\u043e \u0446\u0438\u043a\u043b\u0430 (\u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 + \u043c\u0430\u0442\u0435\u0440\u0438\u0430\u043b\u044b + \u043f\u0440\u043e\u0446\u0435\u0441\u0441)<\/p>\n<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p data-start=\"204\" data-end=\"416\">\u041f\u0435\u0447\u044c \u0434\u043b\u044f \u0432\u044b\u0440\u0430\u0449\u0438\u0432\u0430\u043d\u0438\u044f \u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 SiC - \u0432\u0430\u0436\u043d\u0435\u0439\u0448\u0435\u0435 \u043e\u0431\u043e\u0440\u0443\u0434\u043e\u0432\u0430\u043d\u0438\u0435 \u0434\u043b\u044f \u043f\u0440\u043e\u0438\u0437\u0432\u043e\u0434\u0441\u0442\u0432\u0430 \u0432\u044b\u0441\u043e\u043a\u043e\u043a\u0430\u0447\u0435\u0441\u0442\u0432\u0435\u043d\u043d\u044b\u0445 \u043c\u043e\u043d\u043e\u043a\u0440\u0438\u0441\u0442\u0430\u043b\u043b\u043e\u0432 \u043a\u0430\u0440\u0431\u0438\u0434\u0430 \u043a\u0440\u0435\u043c\u043d\u0438\u044f (SiC), \u0438\u0441\u043f\u043e\u043b\u044c\u0437\u0443\u0435\u043c\u044b\u0445 \u0432 \u0441\u0438\u043b\u043e\u0432\u043e\u0439 \u044d\u043b\u0435\u043a\u0442\u0440\u043e\u043d\u0438\u043a\u0435, \u0440\u0430\u0434\u0438\u043e\u0447\u0430\u0441\u0442\u043e\u0442\u043d\u044b\u0445 \u0443\u0441\u0442\u0440\u043e\u0439\u0441\u0442\u0432\u0430\u0445 \u0438 \u043f\u0435\u0440\u0435\u0434\u043e\u0432\u044b\u0445 \u043f\u043e\u043b\u0443\u043f\u0440\u043e\u0432\u043e\u0434\u043d\u0438\u043a\u043e\u0432\u044b\u0445 \u043f\u0440\u0438\u043b\u043e\u0436\u0435\u043d\u0438\u044f\u0445.<\/p>\n<p data-start=\"418\" data-end=\"489\">\u041d\u0430\u0448\u0438 \u0441\u0438\u0441\u0442\u0435\u043c\u044b \u043f\u043e\u0434\u0434\u0435\u0440\u0436\u0438\u0432\u0430\u044e\u0442 \u043c\u043d\u043e\u0436\u0435\u0441\u0442\u0432\u043e \u043e\u0441\u043d\u043e\u0432\u043d\u044b\u0445 \u0442\u0435\u0445\u043d\u043e\u043b\u043e\u0433\u0438\u0439 \u0440\u043e\u0441\u0442\u0430, \u0432\u043a\u043b\u044e\u0447\u0430\u044f:<\/p>","protected":false},"featured_media":1949,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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