{"id":2870,"date":"2026-08-19T08:08:07","date_gmt":"2026-08-19T08:08:07","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2870"},"modified":"2026-08-19T08:41:32","modified_gmt":"2026-08-19T08:41:32","slug":"300mm-wafer-dicing-services-guide","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/pl\/300mm-wafer-dicing-services-guide\/","title":{"rendered":"300mm Wafer Dicing Services Guide: Blade Selection, Kerf, Chipping, Tolerance and Cleanliness Requirements"},"content":{"rendered":"<p>As 300 mm wafers become increasingly common in semiconductor manufacturing, advanced packaging, MEMS, photonics, sensor development and materials research, customers often need more than full-wafer processing. A 300 mm wafer may need to be divided into individual dies, rectangular substrates, test coupons or smaller samples for downstream evaluation.<\/p>\n\n\n\n<p>For these projects, <a href=\"https:\/\/www.zmsh-semitech.com\/pl\/produkty\/\"><strong><mark style=\"background-color:rgba(0, 0, 0, 0);color:#0693e3\" class=\"has-inline-color\">300 mm wafer dicing<\/mark><\/strong> i<\/a>s one of the most widely used precision separation processes.<\/p>\n\n\n\n<p>However, a successful dicing project cannot be defined only by the final sample dimensions. The supplier must also consider the dicing blade, blade thickness, kerf width, front-side and backside chipping, dimensional tolerance, wafer thickness, surface films, dicing tape, cooling water and post-dicing cleanliness.<\/p>\n\n\n\n<p>Modern production dicing saws are specifically available for \u03a6300 mm wafers, including fully automatic dual-spindle systems designed for high-throughput semiconductor processing.<\/p>\n\n\n\n<p>This guide explains the key parameters customers should specify when requesting <strong>300 mm wafer dicing services<\/strong>.<\/p>\n\n\n\n<figure class=\"wp-block-image size-large\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1024\" height=\"768\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-1024x768.png\" alt=\"\" class=\"wp-image-2873\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-1024x768.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-300x225.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-768x576.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-16x12.png 16w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1-600x450.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/08\/300mm-Wafer-Dicing-Services-Guide-1.png 1448w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n\n\n\n<h2 class=\"wp-block-heading\">What Is 300mm Wafer Dicing?<\/h2>\n\n\n\n<p>Wafer dicing is the process of separating a semiconductor wafer along predetermined cutting lines.<\/p>\n\n\n\n<p>For a 300 mm wafer, the output may include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>individual semiconductor dies;<\/li>\n\n\n\n<li>square samples;<\/li>\n\n\n\n<li>rectangular coupons;<\/li>\n\n\n\n<li>sensor substrates;<\/li>\n\n\n\n<li>photonic device pieces;<\/li>\n\n\n\n<li>materials-analysis samples;<\/li>\n\n\n\n<li>test structures;<\/li>\n\n\n\n<li>custom research substrates.<\/li>\n<\/ul>\n\n\n\n<p>A typical example might involve converting one 300 mm silicon wafer into:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>10 \u00d7 10 mm coupons;<\/li>\n\n\n\n<li>15 \u00d7 15 mm samples;<\/li>\n\n\n\n<li>20 \u00d7 20 mm pieces;<\/li>\n\n\n\n<li>25 \u00d7 25 mm substrates;<\/li>\n\n\n\n<li>custom rectangular dimensions.<\/li>\n<\/ul>\n\n\n\n<p>Blade dicing physically cuts the substrate using a diamond abrasive blade mounted on a high-speed spindle. DISCO describes blade dicing as a mechanical cutting process widely used for semiconductor ICs and other precision components.<\/p>\n\n\n\n<p>The apparent simplicity of the process can be misleading.<\/p>\n\n\n\n<p>The final quality depends on many interacting parameters, including:<\/p>\n\n\n\n<p><strong>blade specification + wafer structure + cutting conditions + mounting + cooling + cleaning + inspection.<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Why 300mm Wafer Dicing Requires Careful Process Planning<\/h2>\n\n\n\n<p>A 300 mm wafer contains a relatively large usable area. A small error in cut position or street width can therefore affect many samples across a single wafer.<\/p>\n\n\n\n<p>The processing plan should consider:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>wafer diameter;<\/li>\n\n\n\n<li>wafer thickness;<\/li>\n\n\n\n<li>material;<\/li>\n\n\n\n<li>device layout;<\/li>\n\n\n\n<li>die dimensions;<\/li>\n\n\n\n<li>scribe street width;<\/li>\n\n\n\n<li>allowable kerf;<\/li>\n\n\n\n<li>surface films;<\/li>\n\n\n\n<li>backside layers;<\/li>\n\n\n\n<li>wafer bow and warp;<\/li>\n\n\n\n<li>dicing tape;<\/li>\n\n\n\n<li>acceptable chipping;<\/li>\n\n\n\n<li>contamination requirements.<\/li>\n<\/ul>\n\n\n\n<p>Processed device wafers require even more care because the cutting path may contain:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>metal layers;<\/li>\n\n\n\n<li>low-k dielectric materials;<\/li>\n\n\n\n<li>passivation;<\/li>\n\n\n\n<li>polyimide;<\/li>\n\n\n\n<li>oxide;<\/li>\n\n\n\n<li>nitride;<\/li>\n\n\n\n<li>backside metal;<\/li>\n\n\n\n<li>die attach film.<\/li>\n<\/ul>\n\n\n\n<p>For high-load cutting conditions, blade rigidity can become important. DISCO notes that blade deflection or instability under demanding conditions can contribute to slanted or wavy cuts, while higher-strength blade designs can improve processing stability.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Blade Selection for 300mm Wafer Dicing<\/h2>\n\n\n\n<p>The blade is one of the most important variables in a mechanical dicing process.<\/p>\n\n\n\n<p>A dicing blade is not simply a thin metal disc. Its performance is influenced by:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>diamond grit size;<\/li>\n\n\n\n<li>diamond concentration;<\/li>\n\n\n\n<li>bonding material;<\/li>\n\n\n\n<li>blade thickness;<\/li>\n\n\n\n<li>blade exposure;<\/li>\n\n\n\n<li>blade stiffness;<\/li>\n\n\n\n<li>wear characteristics.<\/li>\n<\/ul>\n\n\n\n<p>DISCO offers semiconductor dicing blades in multiple grit sizes, concentrations and bond structures because different workpieces require different cutting characteristics.<\/p>\n\n\n\n<p>There is therefore no single &#8220;best wafer dicing blade&#8221; for every 300 mm wafer.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Electroformed Bond Blades<\/h2>\n\n\n\n<p>Electroformed blades are widely used for silicon and compound semiconductor wafer dicing.<\/p>\n\n\n\n<p>Commercial electroformed blades are available in extremely thin configurations. DISCO&#8217;s NBC-Z series, for example, covers blade thicknesses from approximately <strong>0.015 mm to 0.3 mm<\/strong>, depending on the specific configuration.<\/p>\n\n\n\n<p>Ultra-thin blades can be useful where:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>the dicing street is narrow;<\/li>\n\n\n\n<li>material loss must be minimized;<\/li>\n\n\n\n<li>die density is high;<\/li>\n\n\n\n<li>kerf control is important.<\/li>\n<\/ul>\n\n\n\n<p>However, simply choosing the thinnest available blade is not always the correct engineering decision.<\/p>\n\n\n\n<p>Blade strength, wafer thickness, cutting depth, feed speed and material structure must also be considered.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Resin and Metal Bond Blades<\/h2>\n\n\n\n<p>Other applications may use resin or metal bond systems.<\/p>\n\n\n\n<p>Different bond materials provide different combinations of:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>cutting ability;<\/li>\n\n\n\n<li>blade rigidity;<\/li>\n\n\n\n<li>wear rate;<\/li>\n\n\n\n<li>blade life;<\/li>\n\n\n\n<li>surface quality.<\/li>\n<\/ul>\n\n\n\n<p>DISCO describes resin-bond blades as useful for brittle materials such as glass and crystal because of their cutting characteristics, while metal-bond designs can provide high rigidity and long life in harder or high-load applications.<\/p>\n\n\n\n<p>For a 300 mm silicon wafer, blade selection should therefore be based on the actual wafer stack rather than wafer diameter alone.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Why Grit Size Matters<\/h2>\n\n\n\n<p>Diamond grit size strongly affects how the blade interacts with the wafer.<\/p>\n\n\n\n<p>For thin silicon wafers, finer abrasive grit can help reduce backside chipping.<\/p>\n\n\n\n<p>In one DISCO processing example involving a 25 \u00b5m-thick silicon wafer, a finer #4800 blade produced significantly less backside chipping than a #2000 blade used under the compared conditions.<\/p>\n\n\n\n<p>This does not mean one grit size should be universally specified.<\/p>\n\n\n\n<p>Instead, it illustrates an important principle:<\/p>\n\n\n\n<blockquote class=\"wp-block-quote is-layout-flow wp-block-quote-is-layout-flow\">\n<p><strong>Blade grit should be selected according to wafer thickness, required edge quality and process conditions.<\/strong><\/p>\n<\/blockquote>\n\n\n\n<h2 class=\"wp-block-heading\">What Is Kerf Width?<\/h2>\n\n\n\n<p><strong>Kerf<\/strong> is the material removed by the cutting process.<\/p>\n\n\n\n<p>During blade dicing, the blade creates a narrow channel between the separated pieces.<\/p>\n\n\n\n<p>This width affects:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>die spacing;<\/li>\n\n\n\n<li>usable wafer area;<\/li>\n\n\n\n<li>number of dies per wafer;<\/li>\n\n\n\n<li>minimum scribe street;<\/li>\n\n\n\n<li>dimensional layout;<\/li>\n\n\n\n<li>material yield.<\/li>\n<\/ul>\n\n\n\n<p>The kerf should therefore be considered during sample layout rather than after the cutting program has already been defined.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Blade Thickness vs Kerf Width<\/h2>\n\n\n\n<p>Blade thickness and actual kerf width are related, but they should not automatically be treated as identical values.<\/p>\n\n\n\n<p>The resulting cut can be influenced by:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>blade thickness;<\/li>\n\n\n\n<li>blade runout;<\/li>\n\n\n\n<li>blade wear;<\/li>\n\n\n\n<li>lateral movement;<\/li>\n\n\n\n<li>spindle condition;<\/li>\n\n\n\n<li>material response;<\/li>\n\n\n\n<li>processing parameters.<\/li>\n<\/ul>\n\n\n\n<p>Blade wear can change cutting geometry. DISCO specifically notes that deformation of a blade tip during extended processing can cause <strong>kerf widening and sporadic chipping<\/strong>.<\/p>\n\n\n\n<p>For precision projects, an RFQ should therefore distinguish between:<\/p>\n\n\n\n<p><strong>blade thickness<\/strong><\/p>\n\n\n\n<p>oraz<\/p>\n\n\n\n<p><strong>maximum acceptable kerf width.<\/strong><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Why Kerf Matters for 300mm Wafers<\/h2>\n\n\n\n<p>Consider two hypothetical layouts.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Layout A<\/h3>\n\n\n\n<p>Die size:<\/p>\n\n\n\n<p><strong>10 \u00d7 10 mm<\/strong><\/p>\n\n\n\n<p>Street:<\/p>\n\n\n\n<p>Relatively wide<\/p>\n\n\n\n<p>In this case, moderate kerf variation may not significantly affect the usable die area.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Layout B<\/h3>\n\n\n\n<p>Die size:<\/p>\n\n\n\n<p><strong>2 \u00d7 20 mm<\/strong><\/p>\n\n\n\n<p>Street:<\/p>\n\n\n\n<p>Very narrow<\/p>\n\n\n\n<p>Here, kerf width becomes much more important because even a small increase in cutting width can reduce available die area or damage structures near the street.<\/p>\n\n\n\n<p>For high-density layouts, cutting-street design should therefore be reviewed before dicing.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">What Is Wafer Dicing Chipping?<\/h2>\n\n\n\n<p>Chipping refers to small pieces of brittle material breaking away near the cut edge.<\/p>\n\n\n\n<p>It may occur on:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>the wafer front side;<\/li>\n\n\n\n<li>the backside;<\/li>\n\n\n\n<li>the die corners;<\/li>\n\n\n\n<li>both sides of the cut.<\/li>\n<\/ul>\n\n\n\n<p>Typical concerns include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>front-side chipping;<\/li>\n\n\n\n<li>backside chipping;<\/li>\n\n\n\n<li>corner chipping;<\/li>\n\n\n\n<li>microcracks;<\/li>\n\n\n\n<li>edge fracture.<\/li>\n<\/ul>\n\n\n\n<p>Chipping becomes especially important when active devices, metallization or fragile structures are located close to the dicing street.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Why Backside Chipping Matters<\/h2>\n\n\n\n<p>Backside chipping may reduce die mechanical strength or create fracture initiation points.<\/p>\n\n\n\n<p>Thin wafers can become particularly sensitive.<\/p>\n\n\n\n<p>DISCO reports that backside chipping tends to become more difficult to control as wafer thickness decreases, which is one reason specialized blades and cutting conditions are used for thin-wafer dicing.<\/p>\n\n\n\n<p>For thinned wafers, customers should always provide the actual wafer thickness in the RFQ.<\/p>\n\n\n\n<p>Do not simply state:<\/p>\n\n\n\n<p><strong>&#8220;Thin wafer.&#8221;<\/strong><\/p>\n\n\n\n<p>Specify, for example:<\/p>\n\n\n\n<p><strong>Wafer thickness: 100 \u00b5m<\/strong><\/p>\n\n\n\n<p>lub<\/p>\n\n\n\n<p><strong>Wafer thickness: 50 \u00b5m<\/strong><\/p>\n\n\n\n<p>because these conditions can require very different process settings from a standard-thickness wafer.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Main Factors Affecting Chipping<\/h2>\n\n\n\n<p>Chipping can be influenced by:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Blade Grit<\/h3>\n\n\n\n<p>The abrasive size affects the mechanical interaction between the blade and wafer.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Blade Condition<\/h3>\n\n\n\n<p>A worn or poorly conditioned blade may produce less stable cuts.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Feed Speed<\/h3>\n\n\n\n<p>Higher throughput is desirable, but excessive cutting load can compromise edge quality.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Pr\u0119dko\u015b\u0107 wrzeciona<\/h3>\n\n\n\n<p>Spindle speed interacts with blade design, material and feed rate.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">G\u0142\u0119boko\u015b\u0107 ci\u0119cia<\/h3>\n\n\n\n<p>Full-depth cutting into the dicing tape differs from partial-depth grooving.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Grubo\u015b\u0107 p\u0142ytki<\/h3>\n\n\n\n<p>Thin and thick substrates present different mechanical challenges.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Surface Films<\/h3>\n\n\n\n<p>Metals, polymers and brittle dielectric materials can modify cutting behavior.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Wafer Mounting<\/h3>\n\n\n\n<p>Poor support can contribute to vibration, movement or breakage.<\/p>\n\n\n\n<p>Because these parameters interact, chipping limits should normally be defined as a finished-part requirement rather than attempting to prescribe every machine parameter to the dicing supplier.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Front-Side and Backside Chipping Specifications<\/h2>\n\n\n\n<p>For precision projects, customers may specify allowable chipping dimensions.<\/p>\n\n\n\n<p>For example, the drawing may define separate limits for:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>maximum front-side chip;<\/li>\n\n\n\n<li>maximum backside chip;<\/li>\n\n\n\n<li>maximum corner defect;<\/li>\n\n\n\n<li>cracks not permitted.<\/li>\n<\/ul>\n\n\n\n<p>The exact allowable values depend on the application.<\/p>\n\n\n\n<p>A research coupon may accept more edge damage than:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>a MEMS device;<\/li>\n\n\n\n<li>a photonic chip;<\/li>\n\n\n\n<li>a high-reliability semiconductor die;<\/li>\n\n\n\n<li>a thin power device.<\/li>\n<\/ul>\n\n\n\n<p>There is no universal chipping limit suitable for every wafer.<\/p>\n\n\n\n<p>The acceptance criteria should therefore be agreed before production.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Dimensional Tolerance in Wafer Dicing<\/h2>\n\n\n\n<p>Customers frequently request:<\/p>\n\n\n\n<p><strong>20 \u00d7 20 mm silicon samples<\/strong><\/p>\n\n\n\n<p>without specifying a tolerance.<\/p>\n\n\n\n<p>From a manufacturing perspective, this specification is incomplete.<\/p>\n\n\n\n<p>A complete requirement should look more like:<\/p>\n\n\n\n<p><strong>20.00 \u00d7 20.00 mm, tolerance \u00b1X mm<\/strong><\/p>\n\n\n\n<p>where the permitted value is selected according to the actual application.<\/p>\n\n\n\n<p>Tolerance requirements can include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>length;<\/li>\n\n\n\n<li>width;<\/li>\n\n\n\n<li>squareness;<\/li>\n\n\n\n<li>parallelism;<\/li>\n\n\n\n<li>cut-position accuracy;<\/li>\n\n\n\n<li>die-to-pattern alignment;<\/li>\n\n\n\n<li>kerf;<\/li>\n\n\n\n<li>edge chipping.<\/li>\n<\/ul>\n\n\n\n<p>Very tight tolerances may require additional alignment, metrology and process qualification.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Patterned vs Unpatterned Wafers<\/h2>\n\n\n\n<p>The dicing strategy differs significantly between blank wafers and device wafers.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Blank Wafer<\/h3>\n\n\n\n<p>For an unpatterned silicon wafer, the cut layout can normally be referenced to:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>wafer center;<\/li>\n\n\n\n<li>notch;<\/li>\n\n\n\n<li>flat;<\/li>\n\n\n\n<li>wafer edge.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Patterned Wafer<\/h3>\n\n\n\n<p>A patterned wafer may require alignment to:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>dicing streets;<\/li>\n\n\n\n<li>fiducial marks;<\/li>\n\n\n\n<li>device structures;<\/li>\n\n\n\n<li>alignment marks.<\/li>\n<\/ul>\n\n\n\n<p>If cut position relative to the pattern is important, the customer should provide:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>wafer map;<\/li>\n\n\n\n<li>drawing;<\/li>\n\n\n\n<li>die dimensions;<\/li>\n\n\n\n<li>street width;<\/li>\n\n\n\n<li>alignment reference;<\/li>\n\n\n\n<li>acceptable offset.<\/li>\n<\/ul>\n\n\n\n<p>Do not rely only on nominal die size.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Dicing Tape and Wafer Mounting<\/h2>\n\n\n\n<p>Before conventional blade dicing, the wafer is normally supported so that individual pieces remain controlled after separation.<\/p>\n\n\n\n<p>Dicing tape mounted on a frame is commonly used for this purpose. DISCO supplies tape frames specifically designed to hold wafers and other workpieces during dicing, including configurations intended for large wafers.<\/p>\n\n\n\n<p>Tape selection can depend on:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>wafer thickness;<\/li>\n\n\n\n<li>die dimensions;<\/li>\n\n\n\n<li>subsequent pickup;<\/li>\n\n\n\n<li>backside material;<\/li>\n\n\n\n<li>temperature exposure;<\/li>\n\n\n\n<li>cleaning process.<\/li>\n<\/ul>\n\n\n\n<p>Small dies and fragile samples may require special consideration to prevent movement or loss after cutting.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Cleanliness During Wafer Dicing<\/h2>\n\n\n\n<p>Mechanical dicing generates debris.<\/p>\n\n\n\n<p>Possible contamination sources include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>silicon particles;<\/li>\n\n\n\n<li>abrasive particles;<\/li>\n\n\n\n<li>blade bond material;<\/li>\n\n\n\n<li>metal particles;<\/li>\n\n\n\n<li>tape residue;<\/li>\n\n\n\n<li>process-water contamination.<\/li>\n<\/ul>\n\n\n\n<p>Cleanliness becomes especially important when diced pieces will return to:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>a cleanroom;<\/li>\n\n\n\n<li>lithography;<\/li>\n\n\n\n<li>bonding;<\/li>\n\n\n\n<li>thin-film deposition;<\/li>\n\n\n\n<li>optical processing;<\/li>\n\n\n\n<li>semiconductor metrology.<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Why DI Water Is Used<\/h2>\n\n\n\n<p>Blade dicing commonly uses deionized water during the cutting process.<\/p>\n\n\n\n<p>DI water performs important functions including cooling and removal of cutting debris. DISCO notes that semiconductor dicing saws use DI water during silicon wafer cutting, and dedicated systems can provide DI-water production, temperature control, filtration and wastewater management.<\/p>\n\n\n\n<p>Effective water control is therefore part of process stability as well as cleanliness.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Particle Removal During Dicing<\/h2>\n\n\n\n<p>Simply flowing water over the wafer does not guarantee that every particle will be removed.<\/p>\n\n\n\n<p>Specialized cleaning technologies can improve debris removal.<\/p>\n\n\n\n<p>DISCO describes atomizing nozzles that combine water and high-pressure air to generate fine droplets capable of removing particles from wafer surfaces during dicing.<\/p>\n\n\n\n<p>Particle adhesion can also remain a concern after spinner cleaning. DISCO reports that process additives can be used in some applications to reduce particle adhesion and residue after dicing and cleaning.<\/p>\n\n\n\n<p>For high-cleanliness applications, customers should therefore specify the expected post-dicing condition rather than assuming &#8220;dicing service&#8221; automatically includes semiconductor-grade cleaning.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Post-Dicing Cleaning Requirements<\/h2>\n\n\n\n<p>Depending on the project, cleaning may include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>DI water rinse;<\/li>\n\n\n\n<li>spray cleaning;<\/li>\n\n\n\n<li>spinner cleaning;<\/li>\n\n\n\n<li>particle removal;<\/li>\n\n\n\n<li>drying;<\/li>\n\n\n\n<li>clean handling;<\/li>\n\n\n\n<li>cleanroom packaging.<\/li>\n<\/ul>\n\n\n\n<p>For wafers containing sensitive structures, cleaning compatibility must be confirmed in advance.<\/p>\n\n\n\n<p>Some devices may be sensitive to:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>water;<\/li>\n\n\n\n<li>high-pressure spray;<\/li>\n\n\n\n<li>mechanical load;<\/li>\n\n\n\n<li>chemical additives.<\/li>\n<\/ul>\n\n\n\n<p>This is particularly relevant for MEMS or wafers containing open cavities and fragile structures.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">When Blade Dicing May Not Be the Best Method<\/h2>\n\n\n\n<p>Blade dicing is widely used, but it is not the only singulation technology.<\/p>\n\n\n\n<p>Alternatives include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>laser full-cut dicing;<\/li>\n\n\n\n<li>stealth dicing;<\/li>\n\n\n\n<li>plasma dicing.<\/li>\n<\/ul>\n\n\n\n<p>For example, DISCO&#8217;s stealth-dicing process modifies an internal region of the wafer and can produce a narrower required cutting street because it generates very little conventional kerf. It is also a dry process and can be advantageous for some contamination-sensitive applications.<\/p>\n\n\n\n<p>Laser full-cut processes are also used for certain thin silicon wafers.<\/p>\n\n\n\n<p>The appropriate choice depends on:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>wafer thickness;<\/li>\n\n\n\n<li>material;<\/li>\n\n\n\n<li>device structure;<\/li>\n\n\n\n<li>allowed kerf;<\/li>\n\n\n\n<li>contamination sensitivity;<\/li>\n\n\n\n<li>throughput;<\/li>\n\n\n\n<li>edge-quality requirement.<\/li>\n<\/ul>\n\n\n\n<p>For many standard silicon and research-wafer applications, however, blade dicing remains a practical and mature option.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Post-Dicing Inspection<\/h2>\n\n\n\n<p>A complete dicing project should include inspection appropriate to the final application.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Dimensional Inspection<\/h3>\n\n\n\n<p>Verify:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>sample length;<\/li>\n\n\n\n<li>sample width;<\/li>\n\n\n\n<li>dimensional tolerance;<\/li>\n\n\n\n<li>cut location.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Kerf Inspection<\/h3>\n\n\n\n<p>Confirm that the cutting width remains within the agreed process window where required.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Edge Inspection<\/h3>\n\n\n\n<p>Check:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>front-side chipping;<\/li>\n\n\n\n<li>backside chipping;<\/li>\n\n\n\n<li>cracks;<\/li>\n\n\n\n<li>corner damage.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Surface Inspection<\/h3>\n\n\n\n<p>Check for:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>particles;<\/li>\n\n\n\n<li>scratches;<\/li>\n\n\n\n<li>stains;<\/li>\n\n\n\n<li>tape residue;<\/li>\n\n\n\n<li>handling marks.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Pattern Alignment Inspection<\/h3>\n\n\n\n<p>For patterned wafers, verify that the cutting line remains within the intended dicing street.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Quantity Verification<\/h3>\n\n\n\n<p>Confirm the number of usable samples produced.<\/p>\n\n\n\n<p>For high-value wafers, the inspection method and reporting format should be agreed before processing.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Example 1: 300mm Silicon Wafer to 20 \u00d7 20mm Coupons<\/h2>\n\n\n\n<p>Consider a research project with:<\/p>\n\n\n\n<p><strong>Starting wafer<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Material: Silicon<\/li>\n\n\n\n<li>Diameter: 300 mm<\/li>\n\n\n\n<li>Thickness: 775 \u00b5m<\/li>\n\n\n\n<li>Surface: Double-side polished<\/li>\n\n\n\n<li>Pattern: None<\/li>\n<\/ul>\n\n\n\n<p><strong>Required samples<\/strong><\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>20 \u00d7 20 mm<\/li>\n\n\n\n<li>Custom quantity<\/li>\n\n\n\n<li>Controlled edge chipping<\/li>\n\n\n\n<li>Cleaned after dicing<\/li>\n<\/ul>\n\n\n\n<p>The process might include:<\/p>\n\n\n\n<p><strong>Incoming wafer inspection<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Dicing layout optimization<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Tape mounting<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Blade selection<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Dicing<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Czyszczenie i suszenie<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Kontrola wymiarowa<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Edge inspection<\/strong><\/p>\n\n\n\n<p>\u2193<\/p>\n\n\n\n<p><strong>Opakowanie<\/strong><\/p>\n\n\n\n<p>The usable quantity depends on the cutting layout, wafer-edge exclusion and process allowance.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Example 2: 300mm Patterned Device Wafer<\/h2>\n\n\n\n<p>A more demanding specification might include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>300 mm silicon wafer;<\/li>\n\n\n\n<li>patterned front side;<\/li>\n\n\n\n<li>100 \u00b5m wafer thickness;<\/li>\n\n\n\n<li>backside metal;<\/li>\n\n\n\n<li>narrow dicing street;<\/li>\n\n\n\n<li>individual dies required.<\/li>\n<\/ul>\n\n\n\n<p>Before dicing, the processor needs to understand:<\/p>\n\n\n\n<ol start=\"1\" class=\"wp-block-list\">\n<li>What is the street width?<\/li>\n\n\n\n<li>What is the minimum permitted kerf?<\/li>\n\n\n\n<li>What is the allowable front-side chipping?<\/li>\n\n\n\n<li>What is the allowable backside chipping?<\/li>\n\n\n\n<li>Is the backside metal continuous?<\/li>\n\n\n\n<li>Are low-k materials present?<\/li>\n\n\n\n<li>Is alignment to fiducials required?<\/li>\n\n\n\n<li>What cleaning method is permitted?<\/li>\n\n\n\n<li>What tape or carrier requirements apply?<\/li>\n\n\n\n<li>How should finished dies be delivered?<\/li>\n<\/ol>\n\n\n\n<p>This should be treated as a process-qualification project rather than a simple cutting job.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Example 3: 300mm Glass or Specialty Wafer<\/h2>\n\n\n\n<p>The phrase &#8220;300 mm wafer dicing&#8221; does not necessarily mean silicon.<\/p>\n\n\n\n<p>Large substrates may also include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>fused silica;<\/li>\n\n\n\n<li>borosilicate glass;<\/li>\n\n\n\n<li>quartz;<\/li>\n\n\n\n<li>sapphire;<\/li>\n\n\n\n<li>compound semiconductors;<\/li>\n\n\n\n<li>bonded substrates.<\/li>\n<\/ul>\n\n\n\n<p>Brittle materials often require different blade systems from conventional silicon. DISCO, for example, offers resin-bond blades specifically intended for difficult-to-cut brittle materials such as glass and crystal.<\/p>\n\n\n\n<p>Always identify the exact material in an RFQ.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">How to Prepare a 300mm Wafer Dicing RFQ<\/h2>\n\n\n\n<p>Providing complete technical information can significantly reduce quotation time.<\/p>\n\n\n\n<p>A useful RFQ should include:<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Wafer Information<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>material;<\/li>\n\n\n\n<li>wafer diameter;<\/li>\n\n\n\n<li>wafer thickness;<\/li>\n\n\n\n<li>quantity;<\/li>\n\n\n\n<li>polished side;<\/li>\n\n\n\n<li>wafer orientation;<\/li>\n\n\n\n<li>patterned or blank condition.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Film Structure<\/h3>\n\n\n\n<p>Identify:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>SiO\u2082;<\/li>\n\n\n\n<li>SiN;<\/li>\n\n\n\n<li>metals;<\/li>\n\n\n\n<li>polyimide;<\/li>\n\n\n\n<li>photoresist;<\/li>\n\n\n\n<li>low-k layers;<\/li>\n\n\n\n<li>backside metal;<\/li>\n\n\n\n<li>bonded layers;<\/li>\n\n\n\n<li>other coatings.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Finished Sample<\/h3>\n\n\n\n<p>Provide:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>length;<\/li>\n\n\n\n<li>width;<\/li>\n\n\n\n<li>dimensional tolerance;<\/li>\n\n\n\n<li>quantity per wafer;<\/li>\n\n\n\n<li>required total quantity.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Dicing Street<\/h3>\n\n\n\n<p>Specify:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>street width;<\/li>\n\n\n\n<li>street layout;<\/li>\n\n\n\n<li>minimum clearance to active areas.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Kerf Requirement<\/h3>\n\n\n\n<p>If important, provide:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>maximum kerf;<\/li>\n\n\n\n<li>preferred street width;<\/li>\n\n\n\n<li>minimum device-to-cut clearance.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Chipping Requirement<\/h3>\n\n\n\n<p>Define acceptable:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>front-side chipping;<\/li>\n\n\n\n<li>backside chipping;<\/li>\n\n\n\n<li>cracks;<\/li>\n\n\n\n<li>corner damage.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Cleanliness<\/h3>\n\n\n\n<p>Indicate whether you require:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>standard post-dicing cleaning;<\/li>\n\n\n\n<li>DI water cleaning;<\/li>\n\n\n\n<li>low-particle handling;<\/li>\n\n\n\n<li>cleanroom packaging;<\/li>\n\n\n\n<li>specific particle inspection.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">Delivery Form<\/h3>\n\n\n\n<p>Specify whether the samples should remain:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>on dicing tape;<\/li>\n\n\n\n<li>in a frame;<\/li>\n\n\n\n<li>individually picked;<\/li>\n\n\n\n<li>packaged in trays;<\/li>\n\n\n\n<li>packaged in wafer carriers;<\/li>\n\n\n\n<li>individually separated.<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Common Mistakes When Requesting 300mm Wafer Dicing<\/h2>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 1: Specifying Only Sample Size<\/h3>\n\n\n\n<p>&#8220;Please dice into 10 \u00d7 10 mm pieces&#8221; does not define dimensional tolerance or edge quality.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 2: Ignoring Kerf<\/h3>\n\n\n\n<p>If the layout is dense, the cutting width must be included in the wafer map.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 3: Not Reporting Wafer Thickness<\/h3>\n\n\n\n<p>A 775 \u00b5m wafer and a 50 \u00b5m wafer cannot automatically use the same process.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 4: Forgetting Surface Films<\/h3>\n\n\n\n<p>Metal, polymers and brittle dielectric films can strongly influence the dicing strategy.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 5: Not Defining Chipping<\/h3>\n\n\n\n<p>&#8220;Good edge quality&#8221; is subjective.<\/p>\n\n\n\n<p>A measurable acceptance limit is preferable.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 6: Assuming Cleaning Is Automatic<\/h3>\n\n\n\n<p>Different applications have very different cleanliness requirements.<\/p>\n\n\n\n<p>State whether the diced samples will return to a semiconductor cleanroom.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Mistake 7: Sending a Patterned Wafer Without a Map<\/h3>\n\n\n\n<p>For device wafers, provide a clear dicing drawing or wafer map.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Blade Dicing vs Laser Dicing<\/h2>\n\n\n\n<p>For some projects, customers may need to compare mechanical blade dicing with laser-based methods.<\/p>\n\n\n\n<figure class=\"wp-block-table\"><table class=\"has-fixed-layout\"><tbody><tr><th>Requirement<\/th><th>Blade Dicing<\/th><th>Laser \/ Stealth Dicing<\/th><\/tr><tr><td>Standard silicon wafer<\/td><td>Doskona\u0142y<\/td><td>Application dependent<\/td><\/tr><tr><td>Mature process<\/td><td>Doskona\u0142y<\/td><td>Excellent for selected applications<\/td><\/tr><tr><td>Physical kerf<\/td><td>Tak<\/td><td>Can be smaller depending on process<\/td><\/tr><tr><td>Cutting water<\/td><td>Normally required<\/td><td>Some methods are dry<\/td><\/tr><tr><td>Mechanical blade contact<\/td><td>Tak<\/td><td>No blade contact<\/td><\/tr><tr><td>Narrow street<\/td><td>Blade dependent<\/td><td>Potential advantage<\/td><\/tr><tr><td>Thick substrate<\/td><td>Process dependent<\/td><td>Process dependent<\/td><\/tr><tr><td>Sensitive MEMS structure<\/td><td>Requires evaluation<\/td><td>Some dry methods may be advantageous<\/td><\/tr><tr><td>Equipment\/process cost<\/td><td>Application dependent<\/td><td>Application dependent<\/td><\/tr><\/tbody><\/table><\/figure>\n\n\n\n<p>The correct method should be selected according to the wafer stack and final device requirements rather than by technology name alone.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">How to Evaluate a 300mm Wafer Dicing Supplier<\/h2>\n\n\n\n<p>For B2B semiconductor projects, useful supplier capabilities include:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>300 mm wafer handling;<\/li>\n\n\n\n<li>precision dicing saws;<\/li>\n\n\n\n<li>multiple blade specifications;<\/li>\n\n\n\n<li>thin-wafer capability;<\/li>\n\n\n\n<li>patterned-wafer alignment;<\/li>\n\n\n\n<li>customized cutting layouts;<\/li>\n\n\n\n<li>edge inspection;<\/li>\n\n\n\n<li>dimensional inspection;<\/li>\n\n\n\n<li>post-dicing cleaning;<\/li>\n\n\n\n<li>clean packaging;<\/li>\n\n\n\n<li>engineering evaluation before production.<\/li>\n<\/ul>\n\n\n\n<p>Traceability is also valuable when multiple customer wafers, dicing blades or process recipes are involved.<\/p>\n\n\n\n<h2 class=\"wp-block-heading\">Wnioski<\/h2>\n\n\n\n<p>Successful <strong>300 mm wafer dicing<\/strong> requires more than choosing a dicing saw and defining the final die size.<\/p>\n\n\n\n<p>The dicing result is influenced by:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>blade type;<\/li>\n\n\n\n<li>blade thickness;<\/li>\n\n\n\n<li>grit size;<\/li>\n\n\n\n<li>bond material;<\/li>\n\n\n\n<li>kerf width;<\/li>\n\n\n\n<li>wafer thickness;<\/li>\n\n\n\n<li>cutting parameters;<\/li>\n\n\n\n<li>front-side chipping;<\/li>\n\n\n\n<li>backside chipping;<\/li>\n\n\n\n<li>dimensional tolerance;<\/li>\n\n\n\n<li>wafer mounting;<\/li>\n\n\n\n<li>DI-water management;<\/li>\n\n\n\n<li>particle removal;<\/li>\n\n\n\n<li>post-dicing inspection.<\/li>\n<\/ul>\n\n\n\n<p>For blank 300 mm silicon wafers being converted into research coupons, the process may be relatively straightforward.<\/p>\n\n\n\n<p>For thin, patterned, metallized or device-processed wafers, the project should be treated as a customized precision-dicing process.<\/p>\n\n\n\n<p>When requesting a quotation, provide the <strong>wafer material, diameter, thickness, film structure, sample dimensions, tolerance, street width, kerf requirement, acceptable chipping, cleanliness requirement and delivery format<\/strong>.<\/p>\n\n\n\n<p>A complete specification allows the dicing supplier to choose an appropriate blade and process window while reducing the risk of excessive kerf, edge damage, contamination and unusable samples.<\/p>","protected":false},"excerpt":{"rendered":"<p>As 300 mm wafers become increasingly common in semiconductor manufacturing, advanced packaging, MEMS, photonics, sensor development and materials research, customers often need more than full-wafer processing. A 300 mm wafer may need to be divided into individual dies, rectangular substrates, test coupons or smaller samples for downstream evaluation. 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