{"id":2426,"date":"2026-04-27T05:56:44","date_gmt":"2026-04-27T05:56:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2426"},"modified":"2026-06-17T02:41:29","modified_gmt":"2026-06-17T02:41:29","slug":"ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate\/","title":{"rendered":"MEMS \ub9c8\uc774\ud06c\ub85c\uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4 \uc804\ub3c4\uc131 \uae30\ud310\uc6a9 \ud2f0\ud0c0\ub284\/\uad6c\ub9ac \uae08\uc18d \ucf54\ud305 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ud2f0\ud0c0\ub284 \uad6c\ub9ac \uc2a4\ud37c\ud130\ub9c1 \uc6e8\uc774\ud37c"},"content":{"rendered":"

\"\"Ti\/Cu \uae08\uc18d \ucf54\ud305 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub294 \uace0\uae09 \uc5f0\uad6c \ubc0f \uc0b0\uc5c5 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud55c \ud45c\uc900 \uc804\ub3c4\uc131 \ubc0f \uacf5\uc815 \ud638\ud658 \uae30\ud310\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uae30\uc220\uacfc \uae08\uc18d \ubc15\ub9c9 \ucf54\ud305\uc744 \uacb0\ud569\ud558\uc5ec \uc804\uae30, \ud654\ud559 \ubc0f \ubbf8\uc138 \uc81c\uc870 \uacf5\uc815\uc744 \uc704\ud55c \uc548\uc815\uc801\uc778 \ud50c\ub7ab\ud3fc\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

Ti\/Cu \ucf54\ud305 \uc2dc\uc2a4\ud15c\uc758 \uad6c\uc870\ub294 \uae30\uacc4\uc801 \uc2e0\ub8b0\uc131\uacfc \uae30\ub2a5\uc801 \uc804\ub3c4\uc131\uc744 \ubaa8\ub450 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \ud2b9\ud788 \uc548\uc815\uc801\uc778 \uae08\uc18d \uc778\ud130\ud398\uc774\uc2a4, \uade0\uc77c\ud55c \ud45c\uba74 \uc804\ub3c4\uc131, \ud45c\uc900 \ubc18\ub3c4\uccb4 \uacf5\uc815 \uae30\uc220\uacfc\uc758 \ud638\ud658\uc131\uc774 \uc694\uad6c\ub418\ub294 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\uc774 \uc81c\ud488\uc740 \uc6e8\uc774\ud37c \ud06c\uae30, \uae30\ud310 \uc720\ud615 \ubc0f \ud544\ub984 \ub450\uaed8\uc758 \ub9de\ucda4\ud654\ub97c \uc9c0\uc6d0\ud558\ubbc0\ub85c \uc18c\uaddc\ubaa8 \uc5f0\uad6c \uc2e4\ud5d8\uacfc \ud30c\uc77c\ub7ff \uc0dd\uc0b0 \ud658\uacbd \ubaa8\ub450\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\n

\"\"\uc8fc\uc694 \uae30\ub2a5<\/strong><\/span><\/h2>\n
    \n
  • \uac15\ub825\ud55c \uc811\ucc29 \uc131\ub2a5<\/strong>
    \ud2f0\ud0c0\ub284 \uc811\ucc29\uce35\uc740 \uad6c\ub9ac \ud544\ub984\uacfc \uc2e4\ub9ac\ucf58 \uae30\ud310 \uc0ac\uc774\uc758 \uc811\ucc29\ub825\uc744 \ud06c\uac8c \ud5a5\uc0c1\uc2dc\ucf1c \ubc15\ub9ac \ubc0f \ubc15\ub9ac \uc704\ud5d8\uc744 \uc904\uc785\ub2c8\ub2e4.<\/li>\n
  • \ub192\uc740 \uc804\uae30 \uc804\ub3c4\uc131<\/strong>
    \uad6c\ub9ac \ud45c\uba74\uce35\uc740 \ub514\ubc14\uc774\uc2a4 \ud14c\uc2a4\ud2b8 \ubc0f \uc804\ub3c4\uc131 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \ub0ae\uc740 \uc800\ud56d\uacfc \uc548\uc815\uc801\uc778 \uc804\uae30\uc801 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n
  • \ub6f0\uc5b4\ub09c \ud544\ub984 \uade0\uc77c\uc131<\/strong>
    \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1\uc740 \uc804\uccb4 \uc6e8\uc774\ud37c\uc5d0 \uac78\uccd0 \uade0\uc77c\ud55c \ucf54\ud305 \ub450\uaed8\uc640 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74 \ud615\ud0dc\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n
  • \uc6b0\uc218\ud55c \ud504\ub85c\uc138\uc2a4 \ud638\ud658\uc131<\/strong>
    \ub9ac\uc18c\uadf8\ub798\ud53c, \uc5d0\uce6d, \uc804\uae30 \ub3c4\uae08, \uc99d\ucc29 \ubc0f \ud45c\uc900 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uacfc \ud638\ud658\ub429\ub2c8\ub2e4.<\/li>\n
  • \uc720\uc5f0\ud55c \uc0ac\uc6a9\uc790 \uc9c0\uc815<\/strong>
    \ub2e4\uc591\ud55c \uc6e8\uc774\ud37c \ud06c\uae30, \uae30\ud310 \uc720\ud615 \ubc0f \uae08\uc18d\uce35 \ub450\uaed8 \uc870\ud569\uc73c\ub85c \uc81c\uacf5\ub429\ub2c8\ub2e4.<\/li>\n<\/ul>\n
    \n

    \"\"\uc77c\ubc18\uc801\uc778 \uad6c\uc870<\/strong><\/span><\/h2>\n

    \uae30\ud310 + \ud2f0\ud0c0\ub284 \uc811\ucc29\uce35 + \uad6c\ub9ac \uc804\ub3c4\uc131 \uce35<\/strong><\/p>\n

      \n
    • \uae30\ud310: \uc2e4\ub9ac\ucf58\/\uc11d\uc601\/\uc720\ub9ac(\uc635\uc158)<\/li>\n
    • \uc811\ucc29\uce35: \ud2f0\ud0c0\ub284(Ti)<\/li>\n
    • \uc804\ub3c4\uc131 \uce35: \uad6c\ub9ac(Cu)<\/li>\n
    • \uc99d\ucc29 \ubc29\ubc95: \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1<\/li>\n<\/ul>\n

      Ti \uce35\uc740 \uae30\ud310\uacfc \uad6c\ub9ac \ud544\ub984 \uc0ac\uc774\uc758 \uacc4\uba74 \uacb0\ud569\uce35 \uc5ed\ud560\uc744 \ud558\uc5ec \uad6c\uc870\uc801 \uc548\uc815\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. Cu \uce35\uc740 \uc804\uae30 \ubc0f \uacf5\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \uae30\ub2a5\uc131 \uc804\ub3c4\uc131 \ud45c\uba74\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

      \n

      \uc0ac\uc591<\/strong><\/span><\/h2>\n
      \n
      \n\n\n\n\n\n\n\n\n\n\n\n\n
      \ud56d\ubaa9<\/th>\n\uc124\uba85<\/th>\n<\/tr>\n<\/thead>\n
      \uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n2\uc778\uce58, 4\uc778\uce58, 6\uc778\uce58, 8\uc778\uce58, \uc0ac\uc6a9\uc790 \uc9c0\uc815 \ud06c\uae30<\/td>\n<\/tr>\n
      \uae30\ud310 \uc7ac\uc9c8<\/td>\n\uc2e4\ub9ac\ucf58, \uc11d\uc601, BF33 \uc720\ub9ac(\uc635\uc158)<\/td>\n<\/tr>\n
      \ud06c\ub9ac\uc2a4\ud0c8 \ubc29\ud5a5<\/td>\n, \ub4f1.<\/td>\n<\/tr>\n
      \uc800\ud56d\ub960<\/td>\n\ub0ae\uc74c\/\uc911\uac04\/\ub192\uc74c(\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uac00\ub2a5)<\/td>\n<\/tr>\n
      Ti \ub450\uaed8<\/td>\n10~50nm(\uc77c\ubc18\uc801\uc778 \ubc94\uc704)<\/td>\n<\/tr>\n
      Cu \ub450\uaed8<\/td>\n50nm - 1\u00b5m(\uc2a4\ud37c\ud130\ub9c1), \uc804\uae30 \ub3c4\uae08\uc744 \ud1b5\ud574 \ub354 \ub450\uaebc\uc6cc\uc9d0<\/td>\n<\/tr>\n
      \ucf54\ud305 \ubc29\ubc95<\/td>\n\ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1<\/td>\n<\/tr>\n
      \ucf54\ud305\uba74<\/td>\n\ub2e8\uba74 \ub610\ub294 \uc591\uba74<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
      \n

      \"\"\uc81c\uc870 \ud504\ub85c\uc138\uc2a4<\/strong><\/span><\/h2>\n

      Ti\/Cu \uae08\uc18d \ucf54\ud305 \uc6e8\uc774\ud37c\ub294 \uc9c4\uacf5 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc0dd\uc0b0\ub429\ub2c8\ub2e4. \uba3c\uc800 \ud2f0\ud0c0\ub284 \uce35\uc744 \uc138\ucc99\ub41c \uc2e4\ub9ac\ucf58 \ud45c\uba74\uc5d0 \uc99d\ucc29\ud558\uc5ec \uc811\ucc29\ub825\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4. \uadf8\ub7f0 \ub2e4\uc74c \ud2f0\ud0c0\ub284 \ud544\ub984 \uc704\uc5d0 \uad6c\ub9ac \uce35\uc744 \uc99d\ucc29\ud558\uc5ec \uade0\uc77c\ud55c \uc804\ub3c4\uc131 \ud45c\uba74\uc744 \ud615\uc131\ud569\ub2c8\ub2e4.<\/p>\n

      \ub354 \ub450\uaebc\uc6b4 \uad6c\ub9ac \ud544\ub984\uc774 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0, \uc2a4\ud37c\ud130\ub9c1\ub41c \uad6c\ub9ac \uce35\uc744 \uc804\uae30 \ub3c4\uae08\uc744 \uc704\ud55c \uc2dc\ub4dc \uce35\uc73c\ub85c \uc0ac\uc6a9\ud558\uc5ec \uac15\ub825\ud55c \uc811\ucc29\ub825\uc744 \uc720\uc9c0\ud558\uba74\uc11c \ubbf8\ud06c\ub860 \uc218\uc900\uc758 \ub450\uaed8\ub97c \ub2ec\uc131\ud560 \uc218 \uc788\ub3c4\ub85d \uae08\uc18d\uc744 \ucd94\uac00\ub85c \uc131\uc7a5\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

      \uc774 \uc870\ud569 \ud504\ub85c\uc138\uc2a4\ub294 \ub192\uc740 \ud544\ub984 \ud488\uc9c8\uacfc \uc720\uc5f0\ud55c \uae30\ub2a5 \ud655\uc7a5\uc744 \ubaa8\ub450 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

      \n

      \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong><\/span><\/h2>\n
        \n
      • \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4 \uc5f0\uad6c \ubc0f \ud504\ub85c\ud1a0\ud0c0\uc774\ud551<\/li>\n
      • \uc634 \uc811\ucd09 \ubc0f \uc804\uadf9 \uc81c\uc791<\/li>\n
      • MEMS \ubbf8\uc138 \uad6c\uc870 \uc2dc\ub4dc \ub808\uc774\uc5b4 \uac1c\ubc1c<\/li>\n
      • RDL \ubc0f \ub450\uaebc\uc6b4 \uad6c\ub9ac \uad6c\uc870\uc6a9 \uc804\uae30 \ub3c4\uae08 \ubca0\uc774\uc2a4<\/li>\n
      • \ubc15\ub9c9 \ubc0f \ub098\ub178 \uc18c\uc7ac \uc131\uc7a5 \uc5f0\uad6c<\/li>\n
      • \ud45c\uba74 \uc804\ub3c4\ub3c4 \ud14c\uc2a4\ud2b8 \ubc0f \uc7ac\ub8cc \ubd84\uc11d<\/li>\n
      • SEM, AFM \ubc0f \ud45c\uba74 \uacc4\uce21 \uc2dc\ub8cc \uc900\ube44<\/li>\n
      • \uc0dd\uccb4 \uc804\uae30 \ud654\ud559 \uc13c\uc11c \ubc0f \ub9c8\uc774\ud06c\ub85c\uc5b4\ub808\uc774 \ud50c\ub7ab\ud3fc<\/li>\n<\/ul>\n
        \n

        \ub2e8\uc77c \uae08\uc18d \ucf54\ud305\uacfc \ube44\uad50\ud55c \uc7a5\uc810<\/strong><\/span><\/h2>\n

        \uc2e4\ub9ac\ucf58\uc5d0 \uc9c1\uc811 \uad6c\ub9ac\ub97c \ucf54\ud305\ud558\ub294 \uac83\uacfc \ube44\uad50\ud588\uc744 \ub54c, Ti\/Cu \uad6c\uc870\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n

          \n
        • \uc5f4 \ubc0f \ud654\ud559\uc801 \uc2a4\ud2b8\ub808\uc2a4\uc5d0 \ub300\ud55c \uc811\ucc29 \uc548\uc815\uc131 \ud5a5\uc0c1<\/li>\n
        • \uad6c\ub9ac \ubc15\ub9ac \ub610\ub294 \uade0\uc5f4 \uc704\ud5d8 \uac10\uc18c<\/li>\n
        • \ubbf8\uc138 \uc81c\uc870 \ub2e8\uacc4\uc758 \uacf5\uc815 \uc218\uc728 \ud5a5\uc0c1<\/li>\n
        • \uc2dc\uac04\uc774 \uc9c0\ub0a8\uc5d0 \ub530\ub77c \ub354\uc6b1 \uc548\uc815\uc801\uc778 \uc804\uae30 \uc131\ub2a5<\/li>\n
        • \ub2e4\ub2e8\uacc4 \ubc18\ub3c4\uccb4 \uacf5\uc815\uacfc\uc758 \ud638\ud658\uc131 \ud5a5\uc0c1<\/li>\n<\/ul>\n

          \ub530\ub77c\uc11c \uc5f0\uad6c\uc2e4\uacfc \uc0b0\uc5c5 R&D \ud658\uacbd \ubaa8\ub450\uc5d0 \ub354\uc6b1 \uc548\uc815\uc801\uc778 \uc194\ub8e8\uc158\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

          \n

          \uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/strong><\/span><\/h2>\n

          Q1: \uad6c\ub9ac \ucf54\ud305 \uc544\ub798\uc5d0 \ud2f0\ud0c0\ub284\uc744 \uc0ac\uc6a9\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong>
          \ud2f0\ud0c0\ub284\uc740 \uad6c\ub9ac\uc640 \uc2e4\ub9ac\ucf58 \uae30\ud310 \uc0ac\uc774\uc758 \uc811\ucc29\ub825\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \uc811\ucc29\uce35 \uc5ed\ud560\uc744 \ud558\uc5ec \uac00\uacf5 \ubc0f \uc0ac\uc6a9 \uc911 \ubc15\ub9ac\ub97c \ubc29\uc9c0\ud569\ub2c8\ub2e4.<\/p>\n

          Q2: \uad6c\ub9ac \ub450\uaed8\ub97c \ub298\ub9b4 \uc218 \uc788\ub098\uc694?<\/strong>
          \uc608. \uc2a4\ud37c\ud130\ub9c1\ub41c \uad6c\ub9ac\ub97c \uc804\uae30 \ub3c4\uae08\uc744 \uc704\ud55c \uc2dc\ub4dc \ub808\uc774\uc5b4\ub85c \uc0ac\uc6a9\ud558\uc5ec \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ub354 \ub450\uaebc\uc6b4 \uae08\uc18d \uce35\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

          Q3: \uc6e8\uc774\ud37c\uc758 \uc591\uba74\uc744 \ucf54\ud305\ud560 \uc218 \uc788\uc2b5\ub2c8\uae4c?<\/strong>
          \uc608. \uc694\uccad \uc2dc \ub2e8\uba74 \ub610\ub294 \uc591\uba74 \ucf54\ud305 \uc635\uc158\uc744 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

          Q4: \uc5b4\ub5a4 \uae30\ud310 \uc635\uc158\uc744 \uc0ac\uc6a9\ud560 \uc218 \uc788\ub098\uc694?<\/strong>
          \ud45c\uc900 \uc2e4\ub9ac\ucf58\uc774 \uac00\uc7a5 \uc77c\ubc18\uc801\uc774\uc9c0\ub9cc \ud2b9\uc218 \uad11\ud559 \ub610\ub294 \ud654\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc11d\uc601 \ubc0f \uc720\ub9ac \uae30\ud310\ub3c4 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

          Ti\/Cu \uae08\uc18d \ucf54\ud305 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub294 \ub9c8\uadf8\ub124\ud2b8\ub860 \uc2a4\ud37c\ud130\ub9c1 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc2e4\ub9ac\ucf58 \uae30\ud310 \uc704\uc5d0 \ud2f0\ud0c0\ub284 \uc811\ucc29\uce35\uacfc \uad6c\ub9ac \uc804\ub3c4\uc131\uce35\uc744 \uc99d\ucc29\ud558\uc5ec \uc81c\uc870\ud55c \uace0\ud488\uc9c8 \uae30\ub2a5\uc131 \uc6e8\uc774\ud37c\uc785\ub2c8\ub2e4. \ud2f0\ud0c0\ub284 \uce35\uc740 \ud544\ub984 \uc811\ucc29\ub825\uacfc \uc548\uc815\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\uace0, \uad6c\ub9ac \uce35\uc740 \uc6b0\uc218\ud55c \uc804\uae30 \uc804\ub3c4\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc774 \uc81c\ud488\uc740 \ub9c8\uc774\ud06c\ub85c \uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4, MEMS \uc81c\uc870, \uc2e4\ud5d8\uc2e4 \uc5f0\uad6c \ubc0f \ubc15\ub9c9 \uacf5\uc815 \uac1c\ubc1c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2428,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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