{"id":2419,"date":"2026-04-27T02:15:07","date_gmt":"2026-04-27T02:15:07","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2419"},"modified":"2026-06-11T09:57:44","modified_gmt":"2026-06-11T09:57:44","slug":"6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/6-inch-n-type-6h-sic-epitaxy-wafer-for-mems-uv-sensors-graphene-growth\/","title":{"rendered":"MEMS, UV \uc13c\uc11c \ubc0f \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \uc704\ud55c 6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c"},"content":{"rendered":"<p data-start=\"298\" data-end=\"758\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2422 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-300x300.png\" alt=\"MEMS, UV \uc13c\uc11c \ubc0f \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \uc704\ud55c 6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\ub294 MEMS \uc7a5\uce58, \uc790\uc678\uc120(UV) \uc13c\uc11c, \uc5d0\ud53c\ud0dd\uc2dc \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \ud3ec\ud568\ud55c \uace0\uae09 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \ubc18\ub3c4\uccb4 \uae30\ud310\uc785\ub2c8\ub2e4. \uace0\ud488\uc9c8 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \ub2e8\uacb0\uc815\uc73c\ub85c \uc81c\uc870\ub41c \uc774 \uc6e8\uc774\ud37c\ub294 \uc6b0\uc218\ud55c \uc804\uae30\uc801, \uc5f4\uc801, \uae30\uacc4\uc801 \ud2b9\uc131\uc744 \uacb0\ud569\ud558\uc5ec \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc7ac\ub8cc\uac00 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc5c6\ub294 \uae4c\ub2e4\ub85c\uc6b4 \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc778 \uc120\ud0dd\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"760\" data-end=\"1144\">\ud45c\uc900 \uc9c1\uacbd 150mm(6\uc778\uce58)\uc640 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ub41c \ub450\uaed8 350\u00b5m\uc758 \uc774 \uc6e8\uc774\ud37c\ub294 \ub6f0\uc5b4\ub09c \uae30\uacc4\uc801 \uc548\uc815\uc131\uacfc \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc81c\uc870 \uc7a5\ube44\uc640\uc758 \uacf5\uc815 \ud638\ud658\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. 6H \ud3f4\ub9ac\ud0c0\uc785\uc740 \uc57d 2.96eV\uc758 \ub113\uc740 \ubc34\ub4dc\uac2d\uc744 \uac16\ucd94\uace0 \uc788\uc5b4 \uace0\uc628, \uace0\ubc29\uc0ac\uc120 \ubc0f \ud654\ud559\uc801\uc73c\ub85c \uacf5\uaca9\uc801\uc778 \uc870\uac74\uc5d0\uc11c \ud6a8\uc728\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"1146\" data-end=\"1535\">\uac01 \uc6e8\uc774\ud37c\ub294 \ucca8\ub2e8 \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP) \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc5d0\ud53c \uc900\ube44 \ud45c\uba74\uc73c\ub85c \ucc98\ub9ac\ub429\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ud45c\uba74 \uac70\uce60\uae30\uac00 \ub9e4\uc6b0 \ub0ae\uace0 \ud45c\uba74 \uc190\uc0c1\uc774 \ucd5c\uc18c\ud654\ub418\uba70 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD)\uacfc \uac19\uc740 \uc5d0\ud53c\ud0dd\uc15c \uce35 \uc131\uc7a5 \uacf5\uc815\uc5d0 \ucd5c\uc801\uc758 \uc870\uac74\uc774 \ubcf4\uc7a5\ub429\ub2c8\ub2e4. \uadf8 \uacb0\uacfc \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc774 \ud5a5\uc0c1\ub418\uace0 \uc218\uc728\uc774 \ub192\uc544\uc9c0\uba70 \uc911\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uc2e0\ub8b0\uc131\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n<hr data-start=\"1537\" data-end=\"1540\" \/>\n<h3 data-section-id=\"pm8yra\" data-start=\"1542\" data-end=\"1562\"><span role=\"text\"><strong data-start=\"1546\" data-end=\"1562\"><img decoding=\"async\" class=\"alignright wp-image-2420 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-300x300.png\" alt=\"MEMS, UV \uc13c\uc11c \ubc0f \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \uc704\ud55c 6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6-Inch-N-Type-6H-SiC-Epitaxy-Wafer-for-MEMS-UV-Sensors-Graphene-Growth-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uc8fc\uc694 \uae30\ub2a5<\/strong><\/span><\/h3>\n<p data-start=\"1564\" data-end=\"1857\"><strong data-start=\"1564\" data-end=\"1613\">\uace0\ud488\uc9c8 \uc131\uc7a5\uc744 \uc704\ud55c \uc5d0\ud53c\ud0dd\uc2dc \uc900\ube44 \ud45c\uba74<\/strong><br data-start=\"1613\" data-end=\"1616\" \/>\uc6e8\uc774\ud37c\ub294 \uac70\uc6b8\uacfc \uac19\uc740 CMP \uc5f0\ub9c8 \ud45c\uba74\uc73c\ub85c \uc81c\uacf5\ub418\uc5b4 \ub098\ub178\ubbf8\ud130 \uc774\ud558\uc758 \uac70\uce60\uae30\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud2b9\ud788 \uadf8\ub798\ud540 \ud615\uc131 \ubc0f \uc790\uc678\uc120\uc5d0 \ubbfc\uac10\ud55c \uc18c\uc790 \uc81c\uc791\uc744 \uc704\ud55c \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5 \uacf5\uc815\uacfc\uc758 \ub6f0\uc5b4\ub09c \ud638\ud658\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1859\" data-end=\"2228\"><strong data-start=\"1859\" data-end=\"1904\">MEMS \ubc0f \uc5f4\uc545\ud55c \ud658\uacbd\uc5d0 \ucd5c\uc801\ud654\ub428<\/strong><br data-start=\"1904\" data-end=\"1907\" \/>6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\ub294 500\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c\ub3c4 \uc131\ub2a5\uc744 \uc720\uc9c0\ud558\uba70 \ub6f0\uc5b4\ub09c \uc5f4 \uc548\uc815\uc131\uc744 \ubcf4\uc5ec\uc90d\ub2c8\ub2e4. \ub192\uc740 \uae30\uacc4\uc801 \uac15\ub3c4\uc640 \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc73c\ub85c \ud56d\uacf5\uc6b0\uc8fc, \uc5d0\ub108\uc9c0, \uc0b0\uc5c5\uc6a9 \ubaa8\ub2c8\ud130\ub9c1 \uc2dc\uc2a4\ud15c\uacfc \uac19\uc740 \uadf9\ud55c \ud658\uacbd\uc5d0\uc11c \uc791\ub3d9\ud558\ub294 MEMS \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"2230\" data-end=\"2542\"><strong data-start=\"2230\" data-end=\"2273\">UV \uc13c\uc11c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \ub113\uc740 \ubc34\ub4dc\uac2d<\/strong><br data-start=\"2273\" data-end=\"2276\" \/>\ubc34\ub4dc\uac2d\uc774 \uc57d 2.96eV\uc778 \uc774 \uc6e8\uc774\ud37c\ub294 \uac00\uc2dc\uad11\uc120 \ud30c\uc7a5\uc5d0\ub294 \ubbfc\uac10\ud558\uc9c0 \uc54a\uc73c\uba74\uc11c\ub3c4 \uc790\uc678\uc120\uc5d0\ub294 \uc790\uc5f0\uc801\uc73c\ub85c \ubbfc\uac10\ud569\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud654\uc5fc \uac10\uc9c0, \ud658\uacbd \ubaa8\ub2c8\ud130\ub9c1 \ubc0f \ubc29\uc704 \uc2dc\uc2a4\ud15c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ud0dc\uc591\uc5f4 \ube14\ub77c\uc778\ub4dc UV \uc13c\uc11c\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"2544\" data-end=\"2797\"><strong data-start=\"2544\" data-end=\"2577\">\uc548\uc815\uc801\uc778 \uc804\uae30 \uc131\ub2a5<\/strong><br data-start=\"2577\" data-end=\"2580\" \/>\uc9c8\uc18c \ub3c4\ud551\uc740 \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 N\ud615 \uc804\ub3c4\uc131\uc744 \ubcf4\uc7a5\ud558\uc5ec \uc77c\uad00\ub41c \uc804\uae30\uc801 \ud2b9\uc131\uacfc \uc548\uc815\uc801\uc778 \uc634 \uc811\ucd09 \ud615\uc131\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4. \uc774\ub294 \uc815\ubc00 \uac10\uc9c0 \uc7a5\uce58 \ubc0f \uad11\uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"2799\" data-end=\"3045\"><strong data-start=\"2799\" data-end=\"2833\">\uc81c\uc5b4\ub41c \ud06c\ub9ac\uc2a4\ud0c8 \ubc29\ud5a5<\/strong><br data-start=\"2833\" data-end=\"2836\" \/>\uc774 \uc6e8\uc774\ud37c\ub294 (\u00b10.5\u00b0)\uc744 \ud5a5\ud55c 4\u00b0 \ucd95\uc678 \ubc29\ud5a5\uc774 \ud2b9\uc9d5\uc73c\ub85c, \uc2a4\ud15d \ud50c\ub85c\uc6b0 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc744 \ucd09\uc9c4\ud558\uace0 \ud45c\uba74 \uacb0\ud568\uc744 \uc904\uc785\ub2c8\ub2e4. \uc774\ub294 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791 \uc2dc \uade0\uc77c\uc131\uacfc \ubc18\ubcf5\uc131\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<hr data-start=\"3047\" data-end=\"3050\" \/>\n<h3 data-section-id=\"1lhszvz\" data-start=\"3052\" data-end=\"3072\"><span role=\"text\"><strong data-start=\"3056\" data-end=\"3072\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong><\/span><\/h3>\n<p data-start=\"3074\" data-end=\"3397\"><strong data-start=\"3074\" data-end=\"3112\">\uadf9\ud55c \ud658\uacbd\uc758 MEMS \ub514\ubc14\uc774\uc2a4<\/strong><br data-start=\"3112\" data-end=\"3115\" \/>6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\ub294 \uace0\uc628 \ubc0f \uace0\uc751\ub825 \ud658\uacbd\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uc555\ub825 \uc13c\uc11c \ubc0f \uac00\uc18d\ub3c4\uacc4\uc640 \uac19\uc740 MEMS \uc13c\uc11c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uce58\ub294 \uc11d\uc720 \ubc0f \uac00\uc2a4 \ud0d0\uc0ac, \uc790\ub3d9\ucc28 \uc2dc\uc2a4\ud15c, \ud56d\uacf5 \uc6b0\uc8fc \ud130\ube48 \ubaa8\ub2c8\ud130\ub9c1\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"3399\" data-end=\"3701\"><strong data-start=\"3399\" data-end=\"3425\">\uc194\ub77c \ube14\ub77c\uc778\ub4dc UV \uc13c\uc11c<\/strong><br data-start=\"3425\" data-end=\"3428\" \/>\ub113\uc740 \ubc34\ub4dc\uac2d \ub355\ubd84\uc5d0 \uc774 \uc6e8\uc774\ud37c\ub294 \uac00\uc2dc\uad11\uc120\uc758 \uac04\uc12d \uc5c6\uc774 \uc790\uc678\uc120\uc744 \uc815\ud655\ud558\uac8c \uac10\uc9c0\ud560 \uc218 \uc788\ub294 UV \uad11\uac80\ucd9c\uae30\ub97c \uc81c\uc870\ud558\ub294 \ub370 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4. \uc774 \uae30\ub2a5\uc740 \ubd88\uaf43 \uac10\uc9c0 \uc2dc\uc2a4\ud15c\uacfc \ucca8\ub2e8 \uad11\ud559 \uac10\uc9c0 \uae30\uc220\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"3703\" data-end=\"4038\"><strong data-start=\"3703\" data-end=\"3732\">\uadf8\ub798\ud540 \uc131\uc7a5 \uae30\ud310<\/strong><br data-start=\"3732\" data-end=\"3735\" \/>\uc6e8\uc774\ud37c\ub294 \uc5d0\ud53c\ud0dd\uc15c \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \uc704\ud55c \uace0\ud488\uc9c8 \uae30\ud310 \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. \uace0\uc628 \uc9c4\uacf5 \uc870\uac74\uc5d0\uc11c \uc2e4\ub9ac\ucf58 \uc6d0\uc790\ub294 SiC \ud45c\uba74\uc5d0\uc11c \uc2b9\ud654\ud558\uc5ec \uc798 \uc815\ub3c8\ub41c \uadf8\ub798\ud540 \uce35\uc744 \ub0a8\uae41\ub2c8\ub2e4. \uc774 \uacf5\uc815\uc740 \ucca8\ub2e8 \uc804\uc790 \uc81c\ud488, \uace0\uc18d \uc7a5\uce58 \ubc0f \uc591\uc790 \uc5f0\uad6c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p data-start=\"4040\" data-end=\"4248\"><strong data-start=\"4040\" data-end=\"4075\">\uace0\uae09 \uad11\uc804\uc790 \uc2dc\uc2a4\ud15c<\/strong><br data-start=\"4075\" data-end=\"4078\" \/>6H-SiC\uc758 \uad11\ud559\uc801 \ud22c\uba85\uc131\uacfc \uc7ac\ub8cc \uc548\uc815\uc131\uc740 UV \uad11 \ub2e4\uc774\uc624\ub4dc \ubc0f \uace0\uc8fc\ud30c \ubd80\ud488\uc744 \ud3ec\ud568\ud55c \ud2b9\uc218 \uad11\uc804\uc790 \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"4040\" data-end=\"4248\"><img decoding=\"async\" class=\"alignnone wp-image-2423 size-large\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-1024x570.jpg\" alt=\"\" width=\"1024\" height=\"570\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-1024x570.jpg 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-300x167.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-768x427.jpg 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-18x10.jpg 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633-600x334.jpg 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/20260410143732_21633.jpg 1132w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<hr data-start=\"4250\" data-end=\"4253\" \/>\n<h3 data-section-id=\"gqkziz\" data-start=\"4255\" data-end=\"4287\"><span role=\"text\"><strong data-start=\"4259\" data-end=\"4287\">\uae30\uc220 \uc0ac\uc591<\/strong><\/span><\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4289\" data-end=\"4762\">\n<thead data-start=\"4289\" data-end=\"4317\">\n<tr data-start=\"4289\" data-end=\"4317\">\n<th class=\"\" data-start=\"4289\" data-end=\"4300\" data-col-size=\"sm\">\uc18d\uc131<\/th>\n<th class=\"\" data-start=\"4300\" data-end=\"4317\" data-col-size=\"sm\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4343\" data-end=\"4762\">\n<tr data-start=\"4343\" data-end=\"4373\">\n<td data-start=\"4343\" data-end=\"4354\" data-col-size=\"sm\">\uc7ac\ub8cc<\/td>\n<td data-start=\"4354\" data-end=\"4373\" data-col-size=\"sm\">SiC \ub2e8\uacb0\uc815<\/td>\n<\/tr>\n<tr data-start=\"4374\" data-end=\"4404\">\n<td data-start=\"4374\" data-end=\"4385\" data-col-size=\"sm\">\uc9c0\ub984<\/td>\n<td data-start=\"4385\" data-end=\"4404\" data-col-size=\"sm\">150mm(6\uc778\uce58)<\/td>\n<\/tr>\n<tr data-start=\"4405\" data-end=\"4427\">\n<td data-start=\"4405\" data-end=\"4417\" data-col-size=\"sm\">\ub450\uaed8<\/td>\n<td data-start=\"4417\" data-end=\"4427\" data-col-size=\"sm\">350 \u00b5m<\/td>\n<\/tr>\n<tr data-start=\"4428\" data-end=\"4445\">\n<td data-start=\"4428\" data-end=\"4439\" data-col-size=\"sm\">\ud3f4\ub9ac\ud0c0\uc785<\/td>\n<td data-start=\"4439\" data-end=\"4445\" data-col-size=\"sm\">6H<\/td>\n<\/tr>\n<tr data-start=\"4446\" data-end=\"4493\">\n<td data-start=\"4446\" data-end=\"4466\" data-col-size=\"sm\">\uc804\ub3c4\uc131 \uc720\ud615<\/td>\n<td data-start=\"4466\" data-end=\"4493\" data-col-size=\"sm\">N\ud615(\uc9c8\uc18c \ub3c4\ud551)<\/td>\n<\/tr>\n<tr data-start=\"4494\" data-end=\"4535\">\n<td data-start=\"4494\" data-end=\"4508\" data-col-size=\"sm\">\uc624\ub9ac\uc5d4\ud14c\uc774\uc158<\/td>\n<td data-start=\"4508\" data-end=\"4535\" data-col-size=\"sm\">4\u00b0  \u00b10.5\u00b0 \ubc29\ud5a5<\/td>\n<\/tr>\n<tr data-start=\"4536\" data-end=\"4577\">\n<td data-start=\"4536\" data-end=\"4553\" data-col-size=\"sm\">\ud45c\uba74 \ub9c8\uac10<\/td>\n<td data-start=\"4553\" data-end=\"4577\" data-col-size=\"sm\">SPS\/DSP\/CMP\/MP<\/td>\n<\/tr>\n<tr data-start=\"4578\" data-end=\"4628\">\n<td data-start=\"4578\" data-end=\"4596\" data-col-size=\"sm\">\ud45c\uba74 \ud488\uc9c8<\/td>\n<td data-start=\"4596\" data-end=\"4628\" data-col-size=\"sm\">\uc5d0\ud53c\ud0dd\uc2dc-\ub808\ub514(CMP \uad11\ud0dd)<\/td>\n<\/tr>\n<tr data-start=\"4629\" data-end=\"4651\">\n<td data-start=\"4629\" data-end=\"4639\" data-col-size=\"sm\">\ubc34\ub4dc\uac2d<\/td>\n<td data-start=\"4639\" data-end=\"4651\" data-col-size=\"sm\">~2.96 eV<\/td>\n<\/tr>\n<tr data-start=\"4652\" data-end=\"4711\">\n<td data-start=\"4652\" data-end=\"4672\" data-col-size=\"sm\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \ud3ec\ucee4\uc2a4<\/td>\n<td data-start=\"4672\" data-end=\"4711\" data-col-size=\"sm\">MEMS \/ UV \uc13c\uc11c \/ \uadf8\ub798\ud540 \uc131\uc7a5<\/td>\n<\/tr>\n<tr data-start=\"4712\" data-end=\"4762\">\n<td data-start=\"4712\" data-end=\"4724\" data-col-size=\"sm\">\ud328\ud0a4\uc9d5<\/td>\n<td data-start=\"4724\" data-end=\"4762\" data-col-size=\"sm\">\uce74\uc138\ud2b8 \ub610\ub294 \ub2e8\uc77c \uc6e8\uc774\ud37c \ucee8\ud14c\uc774\ub108<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4764\" data-end=\"4767\" \/>\n<h3 data-section-id=\"hon8q3\" data-start=\"4769\" data-end=\"4798\"><span role=\"text\"><strong data-start=\"4773\" data-end=\"4798\">\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc635\uc158<\/strong><\/span><\/h3>\n<p data-start=\"4800\" data-end=\"4924\">\ud2b9\uc815 \ud504\ub85c\uc138\uc2a4 \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 \uc720\uc5f0\ud55c \uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc11c\ube44\uc2a4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4. \uc0ac\uc6a9 \uac00\ub2a5\ud55c \uc635\uc158\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n<ul data-start=\"4925\" data-end=\"5094\">\n<li data-section-id=\"1lxj8fe\" data-start=\"4925\" data-end=\"4949\">\ub9de\ucda4\ud615 \uc6e8\uc774\ud37c \ub450\uaed8<\/li>\n<li data-section-id=\"1tiep3q\" data-start=\"4950\" data-end=\"5010\">\ub2e4\uc591\ud55c \uc624\ud504\ucef7 \uac01\ub3c4(\ucd95 \ubc29\ud5a5 \ub610\ub294 \ub9de\ucda4\ud615 \ubc29\ud5a5)<\/li>\n<li data-section-id=\"7igfpb\" data-start=\"5011\" data-end=\"5057\">\ub3c4\ud551 \ub18d\ub3c4 \ubc0f \uc800\ud56d \uc81c\uc5b4<\/li>\n<li data-section-id=\"1le2z9t\" data-start=\"5058\" data-end=\"5094\">\ud45c\uba74 \ub9c8\uac10 \ubc0f \uc5f0\ub9c8 \ub4f1\uae09<\/li>\n<\/ul>\n<p data-start=\"5096\" data-end=\"5240\">\uc774\ub97c \ud1b5\ud574 \uc5f0\uad6c, \ud504\ub85c\ud1a0\ud0c0\uc774\ud551, \ud30c\uc77c\ub7ff \uaddc\ubaa8 \uc0dd\uc0b0 \ub4f1 \ub2e4\uc591\ud55c \uc5d0\ud53c\ud0dd\uc15c \uacf5\uc815 \ubc0f \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\uc640\uc758 \ud638\ud658\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<hr data-start=\"5242\" data-end=\"5245\" \/>\n<h3 data-section-id=\"134q5fn\" data-start=\"5247\" data-end=\"5259\"><span role=\"text\"><strong data-start=\"5251\" data-end=\"5259\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/strong><\/span><\/h3>\n<p data-start=\"5261\" data-end=\"5507\"><strong data-start=\"5261\" data-end=\"5311\">Q1: \uc774 \uc6e8\uc774\ud37c\uc5d0\uc11c \u201c\uc5d0\ud53c \ub808\ub514\u201d\ub294 \ubb34\uc5c7\uc744 \uc758\ubbf8\ud558\ub098\uc694?<\/strong><br data-start=\"5311\" data-end=\"5314\" \/>A: \uc6e8\uc774\ud37c \ud45c\uba74\uc744 CMP \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc815\ubc00\ud558\uac8c \uc5f0\ub9c8\ud558\uc5ec \ub9e4\uc6b0 \ub0ae\uc740 \uac70\uce60\uae30\ub97c \ub2ec\uc131\ud568\uc73c\ub85c\uc368 \ucd94\uac00 \uac00\uacf5 \uc5c6\uc774 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc5d0 \uc989\uc2dc \uc801\ud569\ud558\uac8c \ub9cc\ub4e4\uc5c8\uc74c\uc744 \uc758\ubbf8\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"5509\" data-end=\"5690\"><strong data-start=\"5509\" data-end=\"5559\">Q2: \ub2e4\ub978 \ud3f4\ub9ac\ud0c0\uc785 \ub300\uc2e0 6H-SiC\ub97c \uc0ac\uc6a9\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br data-start=\"5559\" data-end=\"5562\" \/>A: 6H-SiC\ub294 \ubc34\ub4dc\uac2d\uacfc \uacb0\uc815 \uad6c\uc870\ub85c \uc778\ud574 \uc790\uc678\uc120 \uac10\uc9c0, \uadf8\ub798\ud540 \uc131\uc7a5 \ubc0f \uad11\ud559 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"5692\" data-end=\"5885\"><strong data-start=\"5692\" data-end=\"5749\">Q3: \uc774 \uc6e8\uc774\ud37c\ub294 \uc0b0\uc5c5 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud569\ub2c8\uae4c?<\/strong><br data-start=\"5749\" data-end=\"5752\" \/>A: \uc608, 6\uc778\uce58 \uc6e8\uc774\ud37c\ub294 \ud488\uc9c8 \ub4f1\uae09 \ubc0f \uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ud30c\uc77c\ub7ff \uc0dd\uc0b0 \ubc0f \uace0\uae09 R&amp;D\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<p data-start=\"5887\" data-end=\"6040\"><strong data-start=\"5887\" data-end=\"5935\">Q4: \ub9de\ucda4\ud615 \uc0ac\uc591\uc744 \uc694\uccad\ud560 \uc218 \uc788\ub098\uc694?<\/strong><br data-start=\"5935\" data-end=\"5938\" \/>A: \uc608, \ub450\uaed8, \ubc29\ud5a5, \ub3c4\ud551 \ubc0f \ud45c\uba74 \ub9c8\uac10\uc744 \ud3ec\ud568\ud55c \uc804\uccb4 \uc0ac\uc6a9\uc790 \uc9c0\uc815\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n<hr data-start=\"6042\" data-end=\"6045\" \/>\n<h3 data-section-id=\"fel0y\" data-start=\"6047\" data-end=\"6105\"><span role=\"text\"><strong data-start=\"6051\" data-end=\"6105\">\uc774 6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\ub97c \uc120\ud0dd\ud574\uc57c \ud558\ub294 \uc774\uc720<\/strong><\/span><\/h3>\n<p data-start=\"6107\" data-end=\"6393\">\uc774 \uc6e8\uc774\ud37c\ub294 \uc77c\uad00\ub41c \uc131\ub2a5, \ub192\uc740 \uc7ac\ub8cc \ud488\uc9c8, \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uacf5\uc815\uacfc\uc758 \ub6f0\uc5b4\ub09c \ud638\ud658\uc131\uc744 \uc81c\uacf5\ud558\ub3c4\ub85d \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. MEMS, UV \uac10\uc9c0 \ubc0f \uadf8\ub798\ud540 \uae30\ubc18 \uae30\uc220\uc744 \uc704\ud55c \uc2e0\ub8b0\ud560 \uc218 \uc788\ub294 \uae30\ud310\uc744 \ucc3e\ub294 \uc5d4\uc9c0\ub2c8\uc5b4\uc640 \uc5f0\uad6c\uc790\uc5d0\uac8c \uc774\uc0c1\uc801\uc778 \uc194\ub8e8\uc158\uc785\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>6\uc778\uce58 N\ud615 6H SiC \uc5d0\ud53c\ud0dd\uc2dc \uc6e8\uc774\ud37c\ub294 MEMS \uc7a5\uce58, \uc790\uc678\uc120(UV) \uc13c\uc11c, \uc5d0\ud53c\ud0dd\uc2dc \uadf8\ub798\ud540 \uc131\uc7a5\uc744 \ud3ec\ud568\ud55c \uace0\uae09 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \ubc18\ub3c4\uccb4 \uae30\ud310\uc785\ub2c8\ub2e4. \uace0\ud488\uc9c8 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \ub2e8\uacb0\uc815\uc73c\ub85c \uc81c\uc870\ub41c \uc774 \uc6e8\uc774\ud37c\ub294 \uc6b0\uc218\ud55c \uc804\uae30\uc801, \uc5f4\uc801, \uae30\uacc4\uc801 \ud2b9\uc131\uc744 \uacb0\ud569\ud558\uc5ec \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc7ac\ub8cc\uac00 \uc548\uc815\uc801\uc73c\ub85c \uc791\ub3d9\ud560 \uc218 \uc5c6\ub294 \uae4c\ub2e4\ub85c\uc6b4 \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc778 \uc120\ud0dd\uc774 \ub420 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2420,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[729],"product_tag":[734,1259,1263,1262,1268,1257,1266,1258,1265,1267,1260,1264,1261,692],"class_list":{"0":"post-2419","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-wafer","7":"product_tag-6-inch-sic-wafer","8":"product_tag-6h-sic-substrate","9":"product_tag-epi-ready-sic-wafer","10":"product_tag-graphene-growth-sic-wafer","11":"product_tag-high-temperature-semiconductor-wafer","12":"product_tag-n-type-6h-sic-wafer","13":"product_tag-sic-cmp-polished-wafer","14":"product_tag-sic-epitaxy-wafer","15":"product_tag-sic-wafer-350um","16":"product_tag-sic-wafer-customization","17":"product_tag-sic-wafer-for-mems","18":"product_tag-silicon-carbide-wafer-supplier","19":"product_tag-uv-sensor-sic-wafer","20":"product_tag-wide-bandgap-semiconductor","21":"desktop-align-left","22":"tablet-align-left","23":"mobile-align-left","24":"ast-product-gallery-layout-horizontal-slider","25":"ast-product-tabs-layout-horizontal","27":"first","28":"instock","29":"shipping-taxable","30":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2419","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/comments?post=2419"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2419\/revisions"}],"predecessor-version":[{"id":2425,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2419\/revisions\/2425"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media\/2420"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media?parent=2419"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2419"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2419"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2419"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}