{"id":2411,"date":"2026-04-24T06:30:17","date_gmt":"2026-04-24T06:30:17","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2411"},"modified":"2026-04-24T06:30:19","modified_gmt":"2026-04-24T06:30:19","slug":"cvd-silicon-carbide-sic-electrode-for-semiconductor-plasma-systems","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/cvd-silicon-carbide-sic-electrode-for-semiconductor-plasma-systems\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc6a9 CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc804\uadf9"},"content":{"rendered":"<p data-start=\"231\" data-end=\"634\">SiC \uc804\uadf9(\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc804\uadf9)\uc740 \uc5d0\uce6d, \uc99d\ucc29 \ubc0f \ud45c\uba74 \ucc98\ub9ac \uc7a5\ube44\ub97c \ud3ec\ud568\ud55c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \ubd80\ud488\uc785\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc804\uadf9\uc5d0 \ube44\ud574 SiC \uc804\uadf9\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \uc7a5\uc810\uc774 \uc788\uc2b5\ub2c8\ub2e4.<img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2414 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-300x300.png\" alt=\"\ubc18\ub3c4\uccb4 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc6a9 CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc804\uadf9\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uadf9\ud55c\uc758 \ucc98\ub9ac \uc870\uac74\uc5d0\uc11c\ub3c4 \ub0b4\uad6c\uc131\uc774 \ud06c\uac8c \ud5a5\uc0c1\ub418\uace0 \ub0b4\ud50c\ub77c\uc988\ub9c8\uc131\uc774 \uc6b0\uc218\ud558\uba70 \uc791\ub3d9 \uc218\uba85\uc774 \uae38\uc5b4\uc9d1\ub2c8\ub2e4.<\/p>\n<p data-start=\"636\" data-end=\"980\">\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub41c \uc774 \uc804\uadf9\uc740 \uc5f4 \uc804\ub3c4\uc131\uacfc \ud654\ud559\uc801 \uc548\uc815\uc131\uc774 \ub6f0\uc5b4\ub09c \uace0\ubc00\ub3c4 \uace0\uc21c\ub3c4 \uad6c\uc870\uac00 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. \ub530\ub77c\uc11c \uace0\uc5d0\ub108\uc9c0 \ud50c\ub77c\uc988\ub9c8, CF\u2084, SF\u2086, NF\u2083, Cl\u2082\uc640 \uac19\uc740 \uacf5\uaca9\uc801\uc778 \uac00\uc2a4 \ubc0f \uace0\uc628\uc774 \ubc1c\uc0dd\ud558\ub294 \ud658\uacbd\uc5d0 \ud2b9\ud788 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"982\" data-end=\"1287\">\ud50c\ub77c\uc988\ub9c8 \ucc54\ubc84\uc5d0\uc11c \uc804\uadf9\uc740 \uc804\uae30\uc7a5, \ud50c\ub77c\uc988\ub9c8 \ubc00\ub3c4 \ubc0f \uacf5\uc815 \uade0\uc77c\uc131\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud569\ub2c8\ub2e4. SiC \uc804\uadf9\uc740 \uc7a5\uc2dc\uac04 \ub3d9\uc548 \uc548\uc815\uc801\uc778 \uc804\uae30\uc801 \ud2b9\uc131\uc744 \uc720\uc9c0\ud558\uc5ec \ub4dc\ub9ac\ud504\ud2b8\ub97c \uc904\uc774\uace0 \uc785\uc790 \uc624\uc5fc\uc744 \ucd5c\uc18c\ud654\ud558\uba70 \uc77c\uad00\ub41c \uc6e8\uc774\ud37c \ucc98\ub9ac \uacb0\uacfc\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1289\" data-end=\"1521\">SiC \uc804\uadf9\uc740 \ub0b4\uad6c\uc131\uacfc \uc131\ub2a5\uc73c\ub85c \uc778\ud574 \ubc18\ub3c4\uccb4 \ud575\uc2ec \uc18c\ubaa8\ud488(\uc218\uba85\uc774 \uae34 \ub9c8\ubaa8 \ubd80\ud488)\uc73c\ub85c \ubd84\ub958\ub418\uba70 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ub178\ub4dc \ubc0f \uace0\ucc98\ub9ac\ub7c9 \uc0dd\uc0b0 \ud658\uacbd\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<hr data-start=\"1523\" data-end=\"1526\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1528\" data-end=\"1548\">\uc8fc\uc694 \uae30\ub2a5<\/h2>\n<p><strong style=\"font-size: 16px; font-style: normal;\" data-start=\"1639\" data-end=\"1669\"><img decoding=\"async\" class=\"alignright wp-image-2412 size-medium\" style=\"font-weight: 400;\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-300x300.png\" alt=\"\ubc18\ub3c4\uccb4 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c\uc6a9 CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc804\uadf9\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/strong><\/p>\n<ul data-start=\"1549\" data-end=\"2244\">\n<li data-section-id=\"9sfaj1\" data-start=\"1549\" data-end=\"1636\"><strong data-start=\"1551\" data-end=\"1583\">\uace0\uc21c\ub3c4 CVD SiC \uc18c\uc7ac<\/strong>: \ud654\ud559\uc801 \ubd88\ud65c\uc131\uc774 \ub6f0\uc5b4\ub09c \uace0\ubc00\ub3c4 \uad6c\uc870<\/li>\n<li data-section-id=\"qsf5dr\" data-start=\"1637\" data-end=\"1741\"><strong data-start=\"1639\" data-end=\"1669\">\ub6f0\uc5b4\ub09c \ud50c\ub77c\uc988\ub9c8 \ub0b4\uc131<\/strong>: \ubd88\uc18c \ubc0f \uc5fc\uc18c \uae30\ubc18 \ud658\uacbd\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc131\ub2a5 \uc81c\uacf5<\/li>\n<li data-section-id=\"1rcxb8u\" data-start=\"1742\" data-end=\"1821\"><strong data-start=\"1744\" data-end=\"1771\">\ub9e4\uc6b0 \uae34 \uc11c\ube44\uc2a4 \uc218\uba85<\/strong>: \uc77c\ubc18\uc801\uc73c\ub85c \uc2e4\ub9ac\ucf58 \uc804\uadf9\ubcf4\ub2e4 3~10\ubc30 \ub354 \uae38\ub2e4.<\/li>\n<li data-section-id=\"pe85cr\" data-start=\"1822\" data-end=\"1900\"><strong data-start=\"1824\" data-end=\"1851\">\ub0ae\uc740 \ud30c\ud2f0\ud074 \uc0dd\uc131<\/strong>: \uc218\uc728 \ud5a5\uc0c1 \ubc0f \uc624\uc5fc \uc704\ud5d8 \uac10\uc18c<\/li>\n<li data-section-id=\"1eryen9\" data-start=\"1901\" data-end=\"1983\"><strong data-start=\"1903\" data-end=\"1932\">\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/strong>: \ubc29\uc5f4 \ubc0f \uacf5\uc815 \uc548\uc815\uc131 \ud5a5\uc0c1<\/li>\n<li data-section-id=\"12bf6b0\" data-start=\"1984\" data-end=\"2071\"><strong data-start=\"1986\" data-end=\"2018\">\uc548\uc815\uc801\uc778 \uc804\uae30\uc801 \ud2b9\uc131<\/strong>: \uae34 \uc0ac\uc774\ud074 \ub3d9\uc548 \uc77c\uad00\ub41c \uc800\ud56d \uc720\uc9c0<\/li>\n<li data-section-id=\"183ojww\" data-start=\"2072\" data-end=\"2161\"><strong data-start=\"2074\" data-end=\"2097\">\uc815\ubc00 \uac00\uacf5<\/strong>: \ubc18\ub3c4\uccb4 \ub4f1\uae09 \uc9d1\uc801\ub3c4\ub97c \uc704\ud55c \uc5c4\uaca9\ud55c \ud5c8\uc6a9 \uc624\ucc28(&lt;10\u03bcm)<\/li>\n<li data-section-id=\"1116895\" data-start=\"2162\" data-end=\"2244\"><strong data-start=\"2164\" data-end=\"2198\">\ub9de\ucda4\ud615 \uac00\uc2a4 \ubd84\ubc30 \uc124\uacc4<\/strong>: \uade0\uc77c\ud55c \ud50c\ub77c\uc988\ub9c8\ub97c \uc704\ud55c \ucd5c\uc801\ud654\ub41c \ud640 \ud328\ud134<\/li>\n<\/ul>\n<hr data-start=\"2246\" data-end=\"2249\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2251\" data-end=\"2283\">\uae30\uc220 \uc0ac\uc591<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2285\" data-end=\"3017\">\n<thead data-start=\"2285\" data-end=\"2314\">\n<tr data-start=\"2285\" data-end=\"2314\">\n<th class=\"\" data-start=\"2285\" data-end=\"2297\" data-col-size=\"sm\">\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th class=\"\" data-start=\"2297\" data-end=\"2314\" data-col-size=\"sm\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2342\" data-end=\"3017\">\n<tr data-start=\"2342\" data-end=\"2382\">\n<td data-start=\"2342\" data-end=\"2353\" data-col-size=\"sm\">\uc7ac\ub8cc<\/td>\n<td data-col-size=\"sm\" data-start=\"2353\" data-end=\"2382\">CVD \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC)<\/td>\n<\/tr>\n<tr data-start=\"2383\" data-end=\"2403\">\n<td data-start=\"2383\" data-end=\"2392\" data-col-size=\"sm\">\uc21c\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"2392\" data-end=\"2403\">\u2265 99.9%<\/td>\n<\/tr>\n<tr data-start=\"2404\" data-end=\"2429\">\n<td data-start=\"2404\" data-end=\"2414\" data-col-size=\"sm\">\ubc00\ub3c4<\/td>\n<td data-col-size=\"sm\" data-start=\"2414\" data-end=\"2429\">\u2265 3.1g\/cm\u00b3<\/td>\n<\/tr>\n<tr data-start=\"2430\" data-end=\"2463\">\n<td data-start=\"2430\" data-end=\"2447\" data-col-size=\"sm\">\uc9c0\ub984(\ucd5c\ub300)<\/td>\n<td data-col-size=\"sm\" data-start=\"2447\" data-end=\"2463\">\ucd5c\ub300 330mm<\/td>\n<\/tr>\n<tr data-start=\"2464\" data-end=\"2506\">\n<td data-start=\"2464\" data-end=\"2476\" data-col-size=\"sm\">\ub450\uaed8<\/td>\n<td data-col-size=\"sm\" data-start=\"2476\" data-end=\"2506\">\uc0ac\uc6a9\uc790 \uc9c0\uc815(\uc77c\ubc18\uc801\uc73c\ub85c 5~50mm)<\/td>\n<\/tr>\n<tr data-start=\"2507\" data-end=\"2542\">\n<td data-start=\"2507\" data-end=\"2527\" data-col-size=\"sm\">\uc800\ud56d\ub960(\ub0ae\uc74c)<\/td>\n<td data-start=\"2527\" data-end=\"2542\" data-col-size=\"sm\">&lt; 0.02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2543\" data-end=\"2583\">\n<td data-start=\"2543\" data-end=\"2566\" data-col-size=\"sm\">\uc800\ud56d\ub960(\uc911\uac04)<\/td>\n<td data-start=\"2566\" data-end=\"2583\" data-col-size=\"sm\">0.2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2584\" data-end=\"2619\">\n<td data-start=\"2584\" data-end=\"2605\" data-col-size=\"sm\">\uc800\ud56d\ub960(\ub192\uc74c)<\/td>\n<td data-start=\"2605\" data-end=\"2619\" data-col-size=\"sm\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2620\" data-end=\"2659\">\n<td data-start=\"2620\" data-end=\"2651\" data-col-size=\"sm\">\uc800\ud56d\ub960 \uade0\uc77c\uc131(RRG)<\/td>\n<td data-start=\"2651\" data-end=\"2659\" data-col-size=\"sm\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2660\" data-end=\"2711\">\n<td data-start=\"2660\" data-end=\"2680\" data-col-size=\"sm\">\uac00\uc2a4 \uad6c\uba4d \uc9c0\ub984<\/td>\n<td data-start=\"2680\" data-end=\"2711\" data-col-size=\"sm\">0.2 - 0.8mm(\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uac00\ub2a5)<\/td>\n<\/tr>\n<tr data-start=\"2712\" data-end=\"2762\">\n<td data-start=\"2712\" data-end=\"2732\" data-col-size=\"sm\">\ud45c\uba74 \uc0c1\ud0dc<\/td>\n<td data-start=\"2732\" data-end=\"2762\" data-col-size=\"sm\">\uadf8\ub77c\uc6b4\ub4dc(\uad11\ud0dd \uc635\uc158)<\/td>\n<\/tr>\n<tr data-start=\"2763\" data-end=\"2800\">\n<td data-start=\"2763\" data-end=\"2788\" data-col-size=\"sm\">\ud45c\uba74 \uac70\uce60\uae30(Ra)<\/td>\n<td data-start=\"2788\" data-end=\"2800\" data-col-size=\"sm\">\u2264 1.6\u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2801\" data-end=\"2834\">\n<td data-start=\"2801\" data-end=\"2823\" data-col-size=\"sm\">\uac00\uacf5 \uc815\ubc00\ub3c4<\/td>\n<td data-start=\"2823\" data-end=\"2834\" data-col-size=\"sm\">&lt; 10\u03bcm \ubbf8\ub9cc<\/td>\n<\/tr>\n<tr data-start=\"2835\" data-end=\"2877\">\n<td data-start=\"2835\" data-end=\"2858\" data-col-size=\"sm\">\uc5f4 \uc804\ub3c4\uc131<\/td>\n<td data-start=\"2858\" data-end=\"2877\" data-col-size=\"sm\">120 - 200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2878\" data-end=\"2902\">\n<td data-start=\"2878\" data-end=\"2889\" data-col-size=\"sm\">\uacbd\ub3c4<\/td>\n<td data-start=\"2889\" data-end=\"2902\" data-col-size=\"sm\">~9.2 \ubaa8\uc2a4<\/td>\n<\/tr>\n<tr data-start=\"2903\" data-end=\"2963\">\n<td data-start=\"2903\" data-end=\"2931\" data-col-size=\"sm\">\ucd5c\ub300 \uc791\ub3d9 \uc628\ub3c4<\/td>\n<td data-start=\"2931\" data-end=\"2963\" data-col-size=\"sm\">&gt; 1000\u00b0C \uc774\uc0c1(\uacf5\uc815\uc5d0 \ub530\ub77c \ub2e4\ub984)<\/td>\n<\/tr>\n<tr data-start=\"2964\" data-end=\"3017\">\n<td data-start=\"2964\" data-end=\"2982\" data-col-size=\"sm\">\ud488\uc9c8 \uad00\ub9ac<\/td>\n<td data-start=\"2982\" data-end=\"3017\" data-col-size=\"sm\">\uade0\uc5f4, \uce69, \uc624\uc5fc \uc5c6\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3019\" data-end=\"3022\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"3024\" data-end=\"3044\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n<p>&nbsp;<\/p>\n<p data-start=\"3045\" data-end=\"3157\">SiC \uc804\uadf9\uc740 \ub192\uc740 \ub0b4\uad6c\uc131\uacfc \uc548\uc815\uc131\uc774 \uc694\uad6c\ub418\ub294 \ubc18\ub3c4\uccb4 \uacf5\uc815 \ud658\uacbd\uc5d0\uc11c \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n<ul data-start=\"3159\" data-end=\"3352\">\n<li data-section-id=\"qzqq98\" data-start=\"3159\" data-end=\"3197\">\ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \uc2dc\uc2a4\ud15c(ICP\/RIE)\n<p style=\"font-size: 16px; font-style: normal; font-weight: 400;\"><img decoding=\"async\" class=\"size-medium wp-image-2405 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF-300x225.jpg\" alt=\"\" width=\"300\" height=\"225\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF-300x225.jpg 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF-16x12.jpg 16w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF.jpg 600w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<\/li>\n<li data-section-id=\"x5dp28\" data-start=\"3198\" data-end=\"3234\">CVD\/PECVD \uc99d\ucc29 \uc7a5\ube44<\/li>\n<li data-section-id=\"i266u8\" data-start=\"3235\" data-end=\"3264\">\uace0\ucd9c\ub825 \ud50c\ub77c\uc988\ub9c8 \uc2dc\uc2a4\ud15c<\/li>\n<li data-section-id=\"12l2f4p\" data-start=\"3265\" data-end=\"3305\">\uc6e8\uc774\ud37c \ud45c\uba74 \uc218\uc815 \uacf5\uc815<\/li>\n<li data-section-id=\"1aetczy\" data-start=\"3306\" data-end=\"3352\">\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub178\ub4dc<\/li>\n<\/ul>\n<p data-start=\"3354\" data-end=\"3517\">\ud2b9\ud788 \ub2e4\uc74c\uacfc \uac19\uc740 \uacbd\uc6b0\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4. <strong data-start=\"3389\" data-end=\"3443\">\uac00\ud639\ud55c \ud50c\ub77c\uc988\ub9c8 \uc870\uac74\uacfc \uae34 \uc0dd\uc0b0 \uc8fc\uae30<\/strong>, \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc804\uadf9\uc73c\ub85c\ub294 \uc218\uba85 \uc694\uac74\uc744 \ucda9\uc871\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4.<\/p>\n<hr data-start=\"3519\" data-end=\"3522\" \/>\n<h2 data-section-id=\"ey806o\" data-start=\"3524\" data-end=\"3566\">\uc2e4\ub9ac\ucf58 \uc804\uadf9 \ub300\ube44 \uc7a5\uc810<\/h2>\n<p data-start=\"3567\" data-end=\"3673\">\uae30\uc874 \uc2e4\ub9ac\ucf58 \uc804\uadf9\uc5d0 \ube44\ud574 SiC \uc804\uadf9\uc740 \uc0c1\ub2f9\ud55c \uc131\ub2a5 \ud5a5\uc0c1\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n<ul data-start=\"3675\" data-end=\"4062\">\n<li data-section-id=\"c0wgoq\" data-start=\"3675\" data-end=\"3754\"><strong data-start=\"3677\" data-end=\"3698\">\uc218\uba85 \uc5f0\uc7a5<\/strong>: \uacf5\uaca9\uc801\uc778 \ud50c\ub77c\uc988\ub9c8 \uc870\uac74\uc5d0\uc11c 3~10\ubc30 \ub354 \uae38\uc5b4\uc9d0<\/li>\n<li data-section-id=\"vh54cx\" data-start=\"3755\" data-end=\"3832\"><strong data-start=\"3757\" data-end=\"3790\">\uc6b0\uc218\ud55c \ub0b4\uc2dd\uc131<\/strong>: \ubd88\uc18c \ubc0f \uc5fc\uc18c \uac00\uc2a4\ub97c \uacac\ub525\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1f80iwa\" data-start=\"3833\" data-end=\"3909\"><strong data-start=\"3835\" data-end=\"3867\">\uc785\uc790 \uc624\uc5fc \uac10\uc18c<\/strong>: \uc218\uc728 \ubc0f \uacf5\uc815 \uccad\uacb0\ub3c4 \ud5a5\uc0c1<\/li>\n<li data-section-id=\"bvfjdw\" data-start=\"3910\" data-end=\"3989\"><strong data-start=\"3912\" data-end=\"3942\">\ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131 \ud5a5\uc0c1<\/strong>: \uc77c\uad00\ub41c \ud50c\ub77c\uc988\ub9c8 \ud2b9\uc131 \uc720\uc9c0<\/li>\n<li data-section-id=\"wemy35\" data-start=\"3990\" data-end=\"4062\"><strong data-start=\"3992\" data-end=\"4020\">\uc720\uc9c0\ubcf4\uc218 \ube44\uc6a9 \uc808\uac10<\/strong>: \uad50\uccb4 \ube48\ub3c4 \ubc0f \ub2e4\uc6b4\ud0c0\uc784 \uac10\uc18c<\/li>\n<\/ul>\n<p data-start=\"4064\" data-end=\"4199\">\ucd08\uae30 \ube44\uc6a9\uc740 \ub354 \ub192\uc9c0\ub9cc SiC \uc804\uadf9\uc740 \ud558\uc774\uc5d4\ub4dc \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \ucd1d\uc18c\uc720\ube44\uc6a9(TCO)\uc774 \ub0ae\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"4064\" data-end=\"4199\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2383 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\" alt=\"\" width=\"1024\" height=\"486\" srcset=\"\" sizes=\"(max-width: 1024px) 100vw, 1024px\" data-srcset=\"\" \/><\/p>\n<hr data-start=\"4201\" data-end=\"4204\" \/>\n<h2 data-section-id=\"cpu4ih\" data-start=\"4206\" data-end=\"4217\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n<p data-start=\"4219\" data-end=\"4384\"><strong data-start=\"4219\" data-end=\"4266\">Q1: SiC \uc804\uadf9\uc740 \uc18c\ubaa8\ud488\uc778\uac00\uc694?<\/strong><br data-start=\"4266\" data-end=\"4269\" \/>\uc608. \uc911\uc694\ud55c \ubc18\ub3c4\uccb4 \uc18c\ubaa8\ud488\uc774\uc9c0\ub9cc \uc2e4\ub9ac\ucf58 \uc804\uadf9\uc5d0 \ube44\ud574 \uc218\uba85\uc774 \ud6e8\uc52c \ub354 \uae41\ub2c8\ub2e4.<\/p>\n<p data-start=\"4386\" data-end=\"4570\"><strong data-start=\"4386\" data-end=\"4432\">Q2: \uc2e4\ub9ac\ucf58 \uc804\uadf9 \ub300\uc2e0 SiC\ub97c \uc120\ud0dd\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br data-start=\"4432\" data-end=\"4435\" \/>SiC\ub294 \ud50c\ub77c\uc988\ub9c8 \uc800\ud56d\uc131\uc774 \uc6b0\uc218\ud558\uace0 \uc218\uba85\uc774 \uae38\uba70 \uc785\uc790 \ubc1c\uc0dd\uc774 \uc801\uc5b4 \uc5f4\uc545\ud55c \ucc98\ub9ac \ud658\uacbd\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"4572\" data-end=\"4739\"><strong data-start=\"4572\" data-end=\"4612\">Q3: \uc804\uadf9\uc744 \uc0ac\uc6a9\uc790 \uc9c0\uc815\ud560 \uc218 \uc788\ub098\uc694?<\/strong><br data-start=\"4612\" data-end=\"4615\" \/>\uc608. \ud06c\uae30, \ub450\uaed8, \uc800\ud56d\ub960, \uac00\uc2a4 \uad6c\uba4d \ub514\uc790\uc778 \ubc0f \ud45c\uba74 \ub9c8\uac10\uc740 \ubaa8\ub450 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ub9de\ucda4 \uc124\uc815\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"4741\" data-end=\"4878\"><strong data-start=\"4741\" data-end=\"4784\">Q4: \uc5b4\ub5a4 \uc0b0\uc5c5\uc5d0\uc11c SiC \uc804\uadf9\uc744 \uc0ac\uc6a9\ud558\ub098\uc694?<\/strong><br data-start=\"4784\" data-end=\"4787\" \/>\uc8fc\ub85c \ubc18\ub3c4\uccb4 \uc81c\uc870, \ud2b9\ud788 \ud50c\ub77c\uc988\ub9c8 \uc5d0\uce6d \ubc0f \uc99d\ucc29 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC \uc804\uadf9(\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc804\uadf9)\uc740 \uc5d0\uce6d, \uc99d\ucc29 \ubc0f \ud45c\uba74 \ucc98\ub9ac \uc7a5\ube44\ub97c \ud3ec\ud568\ud55c \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ud50c\ub77c\uc988\ub9c8 \ucc98\ub9ac \uc2dc\uc2a4\ud15c\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \ubd80\ud488\uc785\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc804\uadf9\uc5d0 \ube44\ud574 \ub0b4\uad6c\uc131\uc774 \ud06c\uac8c \ud5a5\uc0c1\ub418\uace0 \ud50c\ub77c\uc988\ub9c8 \uc800\ud56d\uc131\uc774 \uc6b0\uc218\ud558\uba70 \uadf9\ud55c\uc758 \ucc98\ub9ac \uc870\uac74\uc5d0\uc11c \uc791\ub3d9 \uc218\uba85\uc774 \uae38\uc5b4\uc9c4 SiC \uc804\uadf9\uc740 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub41c \uc804\uadf9\uc740 \uc5f4 \uc804\ub3c4\uc131\uacfc \ud654\ud559\uc801 \uc548\uc815\uc131\uc774 \ub6f0\uc5b4\ub09c \uace0\ubc00\ub3c4 \uace0\uc21c\ub3c4 \uad6c\uc870\uac00 \ud2b9\uc9d5\uc785\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2414,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[],"class_list":{"0":"post-2411","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"desktop-align-left","8":"tablet-align-left","9":"mobile-align-left","10":"ast-product-gallery-layout-horizontal-slider","11":"ast-product-tabs-layout-horizontal","13":"first","14":"instock","15":"shipping-taxable","16":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2411","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/comments?post=2411"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2411\/revisions"}],"predecessor-version":[{"id":2416,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2411\/revisions\/2416"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media\/2414"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media?parent=2411"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2411"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2411"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2411"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}