{"id":2360,"date":"2026-04-22T07:08:49","date_gmt":"2026-04-22T07:08:49","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2360"},"modified":"2026-04-22T07:13:29","modified_gmt":"2026-04-22T07:13:29","slug":"ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/ai350ht-medium-beam-high-temperature-ion-implantation-system-for-6-8-inch-sic-and-silicon-wafer-processing\/","title":{"rendered":"6\/8\uc778\uce58 SiC \ubc0f \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub97c \uc704\ud55c Ai350HT \uc911\ud615 \ube54 \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c"},"content":{"rendered":"

\"6\/8\uc778\uce58Ai350HT(\uc911\uac04 \ube54) \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uacfc SiC \uacf5\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \uace0\uc5d0\ub108\uc9c0 \ubc0f \uace0\uc628 \ub3c4\ud551 \uacf5\uc815\uc744 \uc704\ud574 \uac1c\ubc1c\ub41c \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\uc785\ub2c8\ub2e4.<\/p>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 5kV ~ 350kV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub97c \uc9c0\uc6d0\ud558\uc5ec \uc595\uc740 \uc8fc\uc785 \ubc0f \uae4a\uc740 \uc8fc\uc785 \uacf5\uc815\uc744 \ubaa8\ub450 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \ucd5c\ub300 500\u00b0C\uae4c\uc9c0 \uc791\ub3d9\ud560 \uc218 \uc788\ub294 \uace0\uc628 \uc815\uc804\uae30 \ucc99\uc774 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc5b4 \uc8fc\uc785 \uc911 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\ub97c \uac1c\uc120\ud558\uace0 \uaca9\uc790 \uc190\uc0c1\uc744 \uc904\uc77c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5\uacfc \uace0\uc815\ubc00 \uc81c\uc5b4\uac00 \uacb0\ud569\ub41c \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc0f \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \ubaa8\ub450 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\n

\ud2b9\uc9d5<\/h2>\n

\uace0\uc628 \uc774\uc2dd \uae30\ub2a5<\/h3>\n

\ucd5c\ub300 500\u00b0C\uae4c\uc9c0 \uc9c0\uc6d0\ud558\ub294 \uace0\uc628 \uc815\uc804\uae30 \ucc99\uc774 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc5b4 \uace0\uae09 \uacf5\uc815\uc744 \uc704\ud55c \ud5a5\uc0c1\ub41c \uc8fc\uc785 \ud6a8\uc728\uacfc \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\uac00 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n

\ub113\uc740 \uc5d0\ub108\uc9c0 \ubc94\uc704<\/h3>\n

5-350keV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub294 \uc595\uc740 \uc811\ud569 \ud615\uc131\ubd80\ud130 \uae4a\uc740 \uc0bd\uc785 \uacf5\uc815\uae4c\uc9c0 \uc720\uc5f0\ud55c \uc0bd\uc785 \uc694\uac74\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uc815\ubc00 \ube54 \uc81c\uc5b4<\/h3>\n

\uac01\ub3c4 \uc815\ud655\ub3c4 \u2264 0.2\u00b0, \ube54 \ud3c9\ud589\ub3c4 \u2264 0.2\u00b0, \uade0\uc77c\uc131 \u2264 0.5%, \ubc18\ubcf5\uc131 \u2264 0.5%\ub85c \uc815\ud655\ud55c \uc784\ud50c\ub780\ud2b8 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5<\/h3>\n

\ube54 \uc548\uc815\uc131\uc740 \uc2dc\uac04\ub2f9 10% \uc774\ub0b4\ub85c \uc81c\uc5b4\ub418\uc5b4 \uae34 \uc0dd\uc0b0 \uc8fc\uae30 \ub3d9\uc548 \uc77c\uad00\ub41c \uacf5\uc815 \ud488\uc9c8\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

\uc7a5\uc218\uba85 \uc774\uc628 \uc18c\uc2a4<\/h3>\n

\uc0ac\uc6a9 \uc218\uba85\uc774 150\uc2dc\uac04 \uc774\uc0c1\uc778 \uae08\uc18d Al \uc774\uc628 \uc18c\uc2a4\ub97c \uc7a5\ucc29\ud558\uc5ec \uc720\uc9c0\ubcf4\uc218 \ube48\ub3c4\ub97c \uc904\uc774\uace0 \uac00\ub3d9 \uc2dc\uac04\uc744 \uac1c\uc120\ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \ucc98\ub9ac\ub7c9 \uc131\ub2a5<\/h3>\n

\uc2dc\uac04\ub2f9 200\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9\uc744 \uc9c0\uc6d0\ud558\uc5ec \ubc18\ub3c4\uccb4 \uc0dd\uc0b0 \ud658\uacbd\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uae09 \ud504\ub85c\uc138\uc2a4 \ud638\ud658\uc131<\/h3>\n

SiC \uacf5\uc815 \ubc0f \uae30\uc874 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc640 \ud638\ud658\ub429\ub2c8\ub2e4.<\/p>\n

\"\"\"\"<\/p>\n

\n

\uc8fc\uc694 \uc0ac\uc591<\/h2>\n

\ud504\ub85c\uc138\uc2a4 \ub9e4\uac1c\ubcc0\uc218<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n6-8\uc778\uce58<\/td>\n<\/tr>\n
\uc5d0\ub108\uc9c0 \ubc94\uc704<\/td>\n5-350 keV<\/td>\n<\/tr>\n
\uc774\uc2dd\ub41c \uc694\uc18c<\/td>\nC, Al, B, P, N, He, Ar<\/td>\n<\/tr>\n
\uc6a9\ub7c9 \ubc94\uc704<\/td>\n1E11-1E17 \uc774\uc628\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\ube54 \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ube54 \uc548\uc815\uc131<\/td>\n\u2264 10%\/\uc2dc\uac04(\uc2dc\uac04\ub2f9 \u22641\ud68c \ube54 \uc911\ub2e8 \ub610\ub294 \uc544\ud06c \ubc1c\uc0dd)<\/td>\n<\/tr>\n
\ube54 \ubcd1\ub82c \ucc98\ub9ac<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc774\uc2dd \uc815\ud655\ub3c4<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc784\ud50c\ub780\ud2b8 \uac01\ub3c4 \ubc94\uc704<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
\uac01\ub3c4 \uc815\ud655\ub3c4<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n
\uade0\uc77c\uc131(1\u03c3)<\/td>\n\u2264 0.5%(P+, 1E14, 100keV)<\/td>\n<\/tr>\n
\ubc18\ubcf5\uc131(1\u03c3)<\/td>\n\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc2dc\uc2a4\ud15c \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ucc98\ub9ac\ub7c9<\/td>\n\u2265 \uc2dc\uac04\ub2f9 200\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac<\/td>\n<\/tr>\n
\ucd5c\ub300 \ucc99 \uc628\ub3c4<\/td>\n500\u00b0C<\/td>\n<\/tr>\n
\uc7a5\ube44 \ud06c\uae30<\/td>\n6270 \u00d7 3500 \u00d7 3000 mm<\/td>\n<\/tr>\n
\uc9c4\uacf5 \ub808\ubca8<\/td>\n5E-7 \ud1a0\ub974<\/td>\n<\/tr>\n
\uc5d1\uc2a4\ub808\uc774 \ub204\ucd9c<\/td>\n\u2264 0.3 \u03bcSv\/h<\/td>\n<\/tr>\n
\uc2a4\uce94 \ubaa8\ub4dc<\/td>\n\uc218\ud3c9 \uc815\uc804\uae30 \uc2a4\uce90\ub2dd + \uc218\uc9c1 \uae30\uacc4\uc2dd \uc2a4\uce90\ub2dd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\uc801\uc6a9 \ubd84\uc57c<\/h2>\n

SiC \ubc18\ub3c4\uccb4 \uc81c\uc870<\/h3>\n

\uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uacf5\uc815\uc774 \ud544\uc694\ud55c \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc18c\uc790 \uc81c\uc791\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc18\ub3c4\uccb4 \uacf5\uc815<\/h3>\n

6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc6e8\uc774\ud37c\uc758 CMOS \ubc0f \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870\uc5d0 \uc801\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uace0\uc628 \uc774\uc2dd \ud504\ub85c\uc138\uc2a4<\/h3>\n

\uacb0\uc815 \uc190\uc0c1\uc744 \uc904\uc774\uace0 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\ub97c \uac1c\uc120\ud558\uae30 \uc704\ud574 \uc628\ub3c4\ub97c \ub192\uc5ec\uc57c \ud558\ub294 \uacf5\uc815\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791<\/h3>\n

\uc2ec\ubd80 \uc0bd\uc785 \ubc0f \uace0\uc5d0\ub108\uc9c0 \uacf5\uc815\uc774 \ud544\uc694\ud55c \uc804\ub825 \ubc18\ub3c4\uccb4 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uace0\uae09 \uc7ac\ub8cc \uacf5\ud559<\/h3>\n

\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc7ac\ub8cc \ubc0f \uacf5\uc815 \uac1c\ubc1c \ud658\uacbd\uc5d0\uc11c \uc774\uc628 \uc8fc\uc785\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

1. Ai350HT\uac00 \uc9c0\uc6d0\ud558\ub294 \uc6e8\uc774\ud37c \ud06c\uae30<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud558\uba70 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc0f SiC \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778 \ubaa8\ub450\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

2. \uc774\uc2dd \uc2dc \uc9c0\uc6d0\ub418\ub294 \ucd5c\ub300 \uc628\ub3c4\ub294 \uc5bc\ub9c8\uc785\ub2c8\uae4c?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 \uae30\uacc4\uc2dd \ud074\ub7a8\ud551\uc774 \uc788\ub294 \uac00\uc5f4\uc2dd \uc815\uc804\uae30 \ucc99\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucd5c\ub300 500\u00b0C\uc758 \uace0\uc628 \uc774\uc2dd\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

3. SiC \uacf5\uc815\uc5d0\uc11c \uc774 \uc2dc\uc2a4\ud15c\uc758 \uc8fc\uc694 \uc7a5\uc810\uc740 \ubb34\uc5c7\uc785\ub2c8\uae4c?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 \uace0\uc628 \uc131\ub2a5, \uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5, SiC \uacf5\uc815\uacfc\uc758 \ud638\ud658\uc131\uc744 \uacb0\ud569\ud558\uc5ec \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

Ai350HT(\uc911\uac04 \ube54) \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uacfc SiC \uacf5\uc815 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \uace0\uc5d0\ub108\uc9c0 \ubc0f \uace0\uc628 \ub3c4\ud551 \uacf5\uc815\uc744 \uc704\ud574 \uac1c\ubc1c\ub41c \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\uc785\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2361,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1177],"product_tag":[1189,1190,1194,1178,1181,1186,1199,1196,1195,1198],"class_list":{"0":"post-2360","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-ion-implantation-equipment","7":"product_tag-6-inch-wafer-equipment","8":"product_tag-8-inch-wafer-processing","9":"product_tag-high-temperature-ion-implantation","10":"product_tag-ion-implantation-system","11":"product_tag-lsi-manufacturing-equipment","12":"product_tag-medium-beam-ion-implanter","13":"product_tag-power-device-fabrication-equipment","14":"product_tag-semiconductor-doping-machine","15":"product_tag-sic-implantation-equipment","16":"product_tag-wide-bandgap-semiconductor-equipment","17":"desktop-align-left","18":"tablet-align-left","19":"mobile-align-left","20":"ast-product-gallery-layout-horizontal-slider","21":"ast-product-gallery-with-no-image","22":"ast-product-tabs-layout-horizontal","24":"first","25":"instock","26":"shipping-taxable","27":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2360","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/comments?post=2360"}],"version-history":[{"count":4,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2360\/revisions"}],"predecessor-version":[{"id":2367,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2360\/revisions\/2367"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media\/2361"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media?parent=2360"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2360"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2360"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2360"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}