{"id":2354,"date":"2026-04-22T06:34:59","date_gmt":"2026-04-22T06:34:59","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2354"},"modified":"2026-04-22T07:16:34","modified_gmt":"2026-04-22T07:16:34","slug":"ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/ai300-medium-beam-high-temperature-ion-implantation-system-for-12-inch-wafer-processing\/","title":{"rendered":"12\uc778\uce58 \uc6e8\uc774\ud37c \uacf5\uc815\uc744 \uc704\ud55c Ai300(\ubbf8\ub514\uc5c4 \ube54) \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c"},"content":{"rendered":"

\"12\uc778\uce58Ai300(\ubbf8\ub514\uc5c4 \ube54) \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 12\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc0f \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uace0\uae09 \ub3c4\ud551 \uacf5\uc815\uc744 \uc704\ud574 \uac1c\ubc1c\ub41c \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\ub85c, SiC \uacf5\uc815 \ub77c\uc778\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4.<\/p>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 5kV ~ 300kV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub97c \uc9c0\uc6d0\ud558\ubbc0\ub85c \uc595\uc740 \uc811\ud569 \ud615\uc131\ubd80\ud130 \uae4a\uc740 \ub3c4\ud551 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uae4c\uc9c0 \uc720\uc5f0\ud558\uac8c \uc8fc\uc785\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ucd5c\ub300 400\u00b0C\uc758 \uace0\uc628 \uac00\uc5f4 \uc6e8\uc774\ud37c \uc2a4\ud14c\uc774\uc9c0\uac00 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc5b4 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\uac00 \ud5a5\uc0c1\ub418\uace0 \uc784\ud50c\ub780\ud2b8 \uc911 \uaca9\uc790 \uc190\uc0c1\uc774 \uac10\uc18c\ud569\ub2c8\ub2e4.<\/p>\n

\uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5, \uace0\uc815\ubc00 \uc81c\uc5b4, \ub300\uaddc\ubaa8 \uc9d1\uc801 \ud68c\ub85c \uacf5\uc815\uacfc\uc758 \ud638\ud658\uc131\uc744 \uac16\ucd98 Ai300 \uc2dc\uc2a4\ud15c\uc740 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud658\uacbd\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\n

\ud2b9\uc9d5<\/h2>\n

\uace0\uc628 \uc784\ud50c\ub780\ud2b8 \uae30\ub2a5<\/h3>\n

\ucd5c\ub300 400\u00b0C\uc758 \uc628\ub3c4\ub97c \uc9c0\uc6d0\ud558\ub294 \uac00\uc5f4 \uc6e8\uc774\ud37c \uc2a4\ud14c\uc774\uc9c0\uac00 \uc7a5\ucc29\ub418\uc5b4 \uc788\uc5b4 \uc8fc\uc785 \ud488\uc9c8\uacfc \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654 \ud6a8\uc728\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n

\ub113\uc740 \uc5d0\ub108\uc9c0 \ubc94\uc704<\/h3>\n

5~300keV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub294 \ucca8\ub2e8 \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\ub97c \uc704\ud55c \uc595\uc740 \uc784\ud50c\ub780\ud2b8 \ubc0f \uae4a\uc740 \uc784\ud50c\ub780\ud2b8 \uacf5\uc815\uc744 \ubaa8\ub450 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uc815\ubc00 \ube54 \uc81c\uc5b4<\/h3>\n

\uac01\ub3c4 \uc815\ud655\ub3c4 \u2264 0.1\u00b0, \ube54 \ud3c9\ud589\ub3c4 \u2264 0.1\u00b0, \uade0\uc77c\uc131 \u2264 0.5%, \ubc18\ubcf5\uc131 \u2264 0.5%\uc758 \uace0\uc815\ubc00 \uc784\ud50c\ub780\ud2b8\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \ucc98\ub9ac\ub7c9 \uc131\ub2a5<\/h3>\n

\uc2dc\uac04\ub2f9 \ucd5c\ub300 500\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9\uc744 \uc9c0\uc6d0\ud558\uc5ec \ub300\ub7c9 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uae09 \uc774\uc628 \uc18c\uc2a4 \uae30\ub2a5<\/h3>\n

\ub2e4\uc591\ud55c \ubc18\ub3c4\uccb4 \uacf5\uc815 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 C, B, P, N, He, Ar \ub4f1 \uc5ec\ub7ec \uc784\ud50c\ub780\ud2b8 \uc6d0\uc18c\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

LSI \ud504\ub85c\uc138\uc2a4 \ud638\ud658\uc131<\/h3>\n

\ub300\uaddc\ubaa8 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870 \uacf5\uc815 \ubc0f \uace0\uae09 \uc7a5\uce58 \uc81c\uc791\uacfc \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub429\ub2c8\ub2e4.<\/p>\n

\"\" \"\"<\/p>\n

\n

\uc8fc\uc694 \uc0ac\uc591<\/h2>\n

\ud504\ub85c\uc138\uc2a4 \ub9e4\uac1c\ubcc0\uc218<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n12\uc778\uce58<\/td>\n<\/tr>\n
\uc5d0\ub108\uc9c0 \ubc94\uc704<\/td>\n5-300 keV<\/td>\n<\/tr>\n
\uc774\uc2dd\ub41c \uc694\uc18c<\/td>\nC, B, P, N, He, Ar<\/td>\n<\/tr>\n
\uc6a9\ub7c9 \ubc94\uc704<\/td>\n1E11-1E16 \uc774\uc628\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\ube54 \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ube54 \uc548\uc815\uc131<\/td>\n\u2264 10%\/\uc2dc\uac04(\uc2dc\uac04\ub2f9 \u22641\ud68c \ube54 \uc911\ub2e8 \ub610\ub294 \uc544\ud06c \ubc1c\uc0dd)<\/td>\n<\/tr>\n
\ube54 \ubcd1\ub82c \ucc98\ub9ac<\/td>\n\u2264 0.1\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc774\uc2dd \uc815\ud655\ub3c4<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc784\ud50c\ub780\ud2b8 \uac01\ub3c4 \ubc94\uc704<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
\uac01\ub3c4 \uc815\ud655\ub3c4<\/td>\n\u2264 0.1\u00b0<\/td>\n<\/tr>\n
\uade0\uc77c\uc131(1\u03c3)<\/td>\n\u2264 0.5%(P+, 1E14, 100keV)<\/td>\n<\/tr>\n
\ubc18\ubcf5\uc131(1\u03c3)<\/td>\n\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc2dc\uc2a4\ud15c \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ucc98\ub9ac\ub7c9<\/td>\n\u2265 \uc2dc\uac04\ub2f9 500\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac<\/td>\n<\/tr>\n
\ucd5c\ub300 \uc784\ud50c\ub780\ud2b8 \uc628\ub3c4<\/td>\n400\u00b0C<\/td>\n<\/tr>\n
\uc7a5\ube44 \ud06c\uae30<\/td>\n6400 \u00d7 3640 \u00d7 3100mm<\/td>\n<\/tr>\n
\uc9c4\uacf5 \ub808\ubca8<\/td>\n5E-7 \ud1a0\ub974<\/td>\n<\/tr>\n
\uc5d1\uc2a4\ub808\uc774 \ub204\ucd9c<\/td>\n\u2264 0.3 \u03bcSv\/h<\/td>\n<\/tr>\n
\uc2a4\uce94 \ubaa8\ub4dc<\/td>\n\uc218\ud3c9 \uc815\uc804\uae30 \uc2a4\uce90\ub2dd + \uc218\uc9c1 \uae30\uacc4\uc2dd \uc2a4\uce90\ub2dd<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\uc801\uc6a9 \ubd84\uc57c<\/h2>\n

SiC \ubc18\ub3c4\uccb4 \ucc98\ub9ac<\/h3>\n

\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc18c\uc790 \uc81c\uc791\uc5d0 \uc0ac\uc6a9\ub418\uba70 \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \uc7ac\ub8cc\uc5d0 \ud544\uc694\ud55c \uace0\uc628 \uc784\ud50c\ub780\ud2b8 \uacf5\uc815\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc18\ub3c4\uccb4 \uc81c\uc870<\/h3>\n

CMOS \ubc0f \uace0\uae09 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870\ub97c \uc704\ud55c 12\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uc0dd\uc0b0 \ub77c\uc778\uc5d0 \uc801\uc6a9 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uc628 \uc774\uc2dd \ud504\ub85c\uc138\uc2a4<\/h3>\n

\uacb0\ud568\uc744 \uc904\uc774\uace0 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\ub97c \uac1c\uc120\ud558\uae30 \uc704\ud574 \uc6e8\uc774\ud37c \uc628\ub3c4\ub97c \ub192\uc5ec\uc57c \ud558\ub294 \uc784\ud50c\ub780\ud2b8 \uacf5\uc815\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791<\/h3>\n

\uc815\ubc00\ud55c \ub3c4\ud551\uacfc \uace0\uc5d0\ub108\uc9c0 \uc8fc\uc785\uc774 \ud544\uc694\ud55c \uc804\ub825 \ubc18\ub3c4\uccb4 \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\ucca8\ub2e8 \uc9d1\uc801 \ud68c\ub85c \uc0dd\uc0b0<\/h3>\n

\uace0\uc815\ubc00 \ubc0f \ub192\uc740 \ucc98\ub9ac\ub7c9 \uc694\uac74\uc744 \uac16\ucd98 LSI \ud504\ub85c\uc138\uc2a4 \ud1b5\ud569\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

1. Ai300 \uc2dc\uc2a4\ud15c\uc740 \uc5b4\ub5a4 \uc6e8\uc774\ud37c \ud06c\uae30\ub97c \uc9c0\uc6d0\ud558\ub098\uc694?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 12\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc73c\uba70 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

2. \uace0\uc628 \uc774\uc2dd \uae30\ub2a5\uc758 \uc8fc\uc694 \uc7a5\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 \ucd5c\ub300 400\u00b0C\uae4c\uc9c0 \uc784\ud50c\ub780\ud2b8\ub97c \uc9c0\uc6d0\ud558\ubbc0\ub85c \uaca9\uc790 \uc190\uc0c1\uc744 \uc904\uc774\uace0 \ub3c4\ud380\ud2b8 \ud65c\uc131\ud654\ub97c \uac1c\uc120\ud558\uba70 \uc804\ubc18\uc801\uc778 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \ud5a5\uc0c1\uc2dc\ud0a4\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4.<\/p>\n

3. \uc2dc\uc2a4\ud15c\uc740 \uc5b4\ub5a4 \uc218\uc900\uc758 \uc815\ubc00\ub3c4\uc640 \uc0dd\uc0b0 \ud6a8\uc728\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\uae4c?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 0.1\ub3c4 \uc774\ub0b4\uc758 \uac01\ub3c4 \uc815\ud655\ub3c4, 0.1\ub3c4 \uc774\ub0b4\uc758 \ube54 \ud3c9\ud589\ub3c4, 0.5% \uc774\ub0b4\uc758 \uade0\uc77c\uc131 \ubc0f \ubc18\ubcf5\uc131\uc744 \uc81c\uacf5\ud558\uba70 \uc2dc\uac04\ub2f9 \ucd5c\ub300 500\uc7a5\uc758 \uc6e8\uc774\ud37c\ub97c \ucc98\ub9ac\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

Ai300(\ubbf8\ub514\uc5c4 \ube54) \uace0\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 12\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc2e4\ub9ac\ucf58 \uae30\ubc18 \ubc0f \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uace0\uae09 \ub3c4\ud551 \uacf5\uc815\uc744 \uc704\ud574 \uac1c\ubc1c\ub41c \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\ub85c, SiC \uacf5\uc815 \ub77c\uc778\uc744 \ud3ec\ud568\ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2357,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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