{"id":2346,"date":"2026-04-22T05:56:29","date_gmt":"2026-04-22T05:56:29","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2346"},"modified":"2026-04-22T07:25:08","modified_gmt":"2026-04-22T07:25:08","slug":"ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/ai250-medium-beam-room-temperature-ion-implantation-system-for-6-8-inch-silicon-wafer-processing\/","title":{"rendered":"6-8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \uacf5\uc815\uc744 \uc704\ud55c Ai250(\ubbf8\ub514\uc5c4 \ube54) \uc0c1\uc628 \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c"},"content":{"rendered":"

\"\"Ai250(\ubbf8\ub514\uc5c4 \ube54) \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\ub85c\uc11c \uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5, \ub192\uc740 \uc8fc\uc785 \uc815\ud655\ub3c4 \ubc0f \uc548\uc815\uc801\uc778 \uc120\ub7c9 \uc81c\uc5b4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 5kV~250kV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub97c \uc9c0\uc6d0\ud558\uc5ec \uc595\uc740 \uc774\uc628 \uc8fc\uc785\uacfc \uae4a\uc740 \uc774\uc628 \uc8fc\uc785 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \ubaa8\ub450 \uc9c0\uc6d0\ud569\ub2c8\ub2e4. \uad11\ubc94\uc704\ud55c \ubc18\ub3c4\uccb4 \ub3c4\ud551 \uacf5\uc815\uc5d0 \uc801\ud569\ud558\uba70 LSI \uc81c\uc870 \uc694\uad6c \uc0ac\ud56d\uacfc \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub429\ub2c8\ub2e4.<\/p>\n

\n

\ud2b9\uc9d5<\/h2>\n

\uc548\uc815\uc801\uc778 \ubbf8\ub514\uc5c4 \ube54 \uc131\ub2a5<\/h3>\n

\uae34 \uc0dd\uc0b0 \uc8fc\uae30 \ub3d9\uc548 \uc548\uc815\uc801\uc778 \uc774\uc628 \ube54 \ucd9c\ub825\uc744 \ubcf4\uc7a5\ud558\uc5ec \uacf5\uc815 \uc77c\uad00\uc131\uc744 \uac1c\uc120\ud558\uace0 \ubcc0\ub3d9\uc131\uc744 \uc904\uc785\ub2c8\ub2e4.<\/p>\n

\uad11\ubc94\uc704\ud55c \uc5d0\ub108\uc9c0 \ubc94\uc704 \uae30\ub2a5<\/h3>\n

5-250keV\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub294 \ub2e4\uc591\ud55c \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\uc640 \ud504\ub85c\uc138\uc2a4 \ub178\ub4dc\uc5d0 \ub300\ud55c \uc720\uc5f0\ud55c \uc784\ud50c\ub780\ud2b8 \uc694\uad6c \uc0ac\ud56d\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\uace0\uc815\ubc00 \uacf5\uc815 \uc81c\uc5b4<\/h3>\n

\uac01\ub3c4 \uc815\ud655\ub3c4 \u2264 0.2\u00b0, \ube54 \ud3c9\ud589\ub3c4 \u2264 0.2\u00b0, \uade0\uc77c\uc131 \u2264 0.5%, \ubc18\ubcf5\uc131 \u2264 0.5%\uc758 \uace0\uc815\ubc00 \uc774\uc2dd \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \ucc98\ub9ac\ub7c9 \uc131\ub2a5<\/h3>\n

\uc2dc\uac04\ub2f9 200\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud558\uc5ec \uc911\ub300\ud615 \ubc18\ub3c4\uccb4 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\ud328\ud134 \uc784\ud50c\ub780\ud2b8 \uae30\ub2a5<\/h3>\n

\ub2e8\uc77c \uc6e8\uc774\ud37c\uc5d0 \ub2e4\uc911 \uc601\uc5ed \ubc0f \ucffc\ub4dc\ub7f0\ud2b8 \uc784\ud50c\ub780\ud2b8\ub97c \uc9c0\uc6d0\ud558\uc5ec \uacf5\uc815 \uc720\uc5f0\uc131\uc744 \uac1c\uc120\ud558\uace0 \uac1c\ubc1c \ube44\uc6a9\uc744 \uc808\uac10\ud569\ub2c8\ub2e4.<\/p>\n

LSI \ud504\ub85c\uc138\uc2a4 \ud638\ud658\uc131<\/h3>\n

LSI \ubc18\ub3c4\uccb4 \uc81c\uc870 \uacf5\uc815\uacfc \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub429\ub2c8\ub2e4.<\/p>\n

\"\"<\/p>\n

\n

\uc8fc\uc694 \uc0ac\uc591<\/h2>\n

\ud504\ub85c\uc138\uc2a4 \ub9e4\uac1c\ubcc0\uc218<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n6-8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c<\/td>\n<\/tr>\n
\uc5d0\ub108\uc9c0 \ubc94\uc704<\/td>\n5-250 keV<\/td>\n<\/tr>\n
\uc774\uc2dd\ub41c \uc694\uc18c<\/td>\nB+, P+, As+, Ar+, N+, H+<\/td>\n<\/tr>\n
\uc6a9\ub7c9 \ubc94\uc704<\/td>\n5E11-1E16 \uc774\uc628\/cm\u00b2<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\ube54 \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ucd5c\ub300 \ube54 \uc804\ub958<\/td>\nAr+ \u2265 1300 \u03bcA @ \u2265220 keV
\nB+ \u2265 1000 \u03bcA @ \u2265220 keV
\nP+ \u2265 1300 \u03bcA @ \u2265220 keV
\nN+ \u2265 1000 \u03bcA @ \u2265220 keV<\/td>\n<\/tr>\n
\ube54 \uc548\uc815\uc131<\/td>\n\u2264 15%\/\uc2dc\uac04(\ube54 \uc911\ub2e8 \ubc0f \uc544\ud0b9 \u2264 \uc2dc\uac04\ub2f9 1\ud68c)<\/td>\n<\/tr>\n
\ube54 \ubcd1\ub82c \ucc98\ub9ac<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc774\uc2dd \uc815\ud655\ub3c4<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc784\ud50c\ub780\ud2b8 \uac01\ub3c4 \ubc94\uc704<\/td>\n0\u00b0-45\u00b0<\/td>\n<\/tr>\n
\uac01\ub3c4 \uc815\ud655\ub3c4<\/td>\n\u2264 0.2\u00b0<\/td>\n<\/tr>\n
\uade0\uc77c\uc131(1\u03c3)<\/td>\n\u2264 0.5%(B+, 2E14, 150keV)<\/td>\n<\/tr>\n
\ubc18\ubcf5\uc131(1\u03c3)<\/td>\n\u2264 0.5%<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc2dc\uc2a4\ud15c \uc131\ub2a5<\/h3>\n
\n
\n\n\n\n\n\n\n\n\n\n
\ud56d\ubaa9<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\ucc98\ub9ac\ub7c9<\/td>\n\u2265 \uc2dc\uac04\ub2f9 200\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac<\/td>\n<\/tr>\n
\uc9c4\uacf5 \ub808\ubca8<\/td>\n< 5E-7 \ud1a0\ub974<\/td>\n<\/tr>\n
\uc5d1\uc2a4\ub808\uc774 \ub204\ucd9c<\/td>\n\u2264 0.6 \u03bcSv\/h<\/td>\n<\/tr>\n
\uc2a4\uce94 \ubaa8\ub4dc<\/td>\n\uc218\ud3c9 \uc815\uc804\uae30 \uc2a4\uce90\ub2dd + \uc218\uc9c1 \uae30\uacc4\uc2dd \uc2a4\uce90\ub2dd<\/td>\n<\/tr>\n
\uc7a5\ube44 \ud06c\uae30<\/td>\n5600 \u00d7 3300 \u00d7 2600mm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n

\uc801\uc6a9 \ubd84\uc57c<\/h2>\n

\ubc18\ub3c4\uccb4 \uc7a5\uce58 \uc81c\uc870<\/h3>\n

CMOS \ub17c\ub9ac \uc18c\uc790 \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\uba70 \ud2b8\ub79c\uc9c0\uc2a4\ud130 \ud615\uc131\uc744 \uc704\ud55c \uc815\ubc00\ud55c \ub3c4\ud380\ud2b8 \uc8fc\uc785\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc9d1\uc801 \ud68c\ub85c \uc81c\uc791<\/h3>\n

\uace0\uc815\ubc00 \ub3c4\ud551 \uc81c\uc5b4\uac00 \ud544\uc694\ud55c LSI \ubc0f \ucca8\ub2e8 IC \uc81c\uc870 \uacf5\uc815\uc5d0 \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\uc595\uace0 \uae4a\uc740 \uc815\uc158 \ud615\uc131<\/h3>\n

\uc18c\uc2a4\/\ub4dc\ub808\uc778 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ubc0f \uc811\ud569\ubd80 \uae4a\uc774 \uc81c\uc5b4\ub97c \uc704\ud55c \uc784\ud50c\ub780\ud2b8 \ud504\ub85c\uc138\uc2a4\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

\ub3c4\ud310\ud2b8 \uc5d4\uc9c0\ub2c8\uc5b4\ub9c1<\/h3>\n

\uc815\ud655\ud55c \uc774\uc628 \uc8fc\uc785\uc744 \ud1b5\ud574 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\uc758 \uc804\uae30\uc801 \ud2b9\uc131\uc744 \uc81c\uc5b4\ud558\ub294 \ub370 \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

\ud504\ub85c\uc138\uc2a4 \uac1c\ubc1c \ubc0f R&D<\/h3>\n

\ubc18\ub3c4\uccb4 \uacf5\uc815 \uac1c\ubc1c, \ud30c\uc77c\ub7ff \uc0dd\uc0b0 \ubc0f \uc2e4\ud5d8 \uc7a5\uce58 \uc81c\uc791\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\n

\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

1. Ai250\uc774 \uc9c0\uc6d0\ud558\ub294 \uc6e8\uc774\ud37c \ud06c\uae30<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud558\uba70 \uc8fc\ub958 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

2. \uc2dc\uc2a4\ud15c\uc758 \uc5d0\ub108\uc9c0 \ubc94\uc704\ub294 \uc5b4\ub5bb\uac8c \ub418\ub098\uc694?<\/h3>\n

\uc5d0\ub108\uc9c0 \ubc94\uc704\ub294 5kV~250kV\ub85c, \ubc18\ub3c4\uccb4 \uc18c\uc790 \uc81c\uc791\uc744 \uc704\ud55c \uc595\uc740 \uc8fc\uc785 \ubc0f \uae4a\uc740 \uc8fc\uc785 \uacf5\uc815\uc744 \ubaa8\ub450 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n

3. \uc2dc\uc2a4\ud15c\uc740 \uc5b4\ub5a4 \uc218\uc900\uc758 \ud504\ub85c\uc138\uc2a4 \uc815\ud655\ub3c4\ub97c \uc81c\uacf5\ud569\ub2c8\uae4c?<\/h3>\n

\uc774 \uc2dc\uc2a4\ud15c\uc740 0.2\u00b0 \uc774\ub0b4\uc758 \uac01\ub3c4 \uc815\ud655\ub3c4, 0.2\u00b0 \uc774\ub0b4\uc758 \ube54 \ud3c9\ud589\ub3c4, 0.5% \uc774\ub0b4\uc758 \uade0\uc77c\uc131 \ubc0f \ubc18\ubcf5\uc131\uc744 \uc81c\uacf5\ud558\uc5ec \uc548\uc815\uc801\uc774\uace0 \ub192\uc740 \uc218\uc728\uc758 \uc0dd\uc0b0 \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

Ai250(\ubbf8\ub514\uc5c4 \ube54) \uc774\uc628 \uc8fc\uc785 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc6a9\uc73c\ub85c \uc124\uacc4\ub418\uc5c8\uc2b5\ub2c8\ub2e4. \ucca8\ub2e8 \uc9d1\uc801 \ud68c\ub85c \uc81c\uc870 \uacf5\uc815\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc911\uc804\ub958 \uc774\uc628 \uc8fc\uc785\uae30\ub85c\uc11c \uc548\uc815\uc801\uc778 \ube54 \uc131\ub2a5, \ub192\uc740 \uc8fc\uc785 \uc815\ud655\ub3c4 \ubc0f \uc548\uc815\uc801\uc778 \uc120\ub7c9 \uc81c\uc5b4\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2347,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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