{"id":2316,"date":"2026-04-21T06:05:44","date_gmt":"2026-04-21T06:05:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2316"},"modified":"2026-04-21T06:05:45","modified_gmt":"2026-04-21T06:05:45","slug":"ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/ion-beam-etching-machine-for-si-sio2-and-metal-materials-in-semiconductor-fabrication\/","title":{"rendered":"\ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0\uc11c Si SiO2 \ubc0f \uae08\uc18d \uc7ac\ub8cc\uc6a9 \uc774\uc628 \ube54 \uc5d0\uce6d \uae30\uacc4"},"content":{"rendered":"<p data-start=\"297\" data-end=\"643\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2320 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-300x300.webp 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-150x150.webp 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-12x12.webp 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-600x600.webp 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication-100x100.webp 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication.webp 750w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>Si, SiO2 \ubc0f \uae08\uc18d \uc7ac\ub8cc\uc6a9 \uc774\uc628 \ube54 \uc5d0\uce6d \uc7a5\ube44\ub294 \ucca8\ub2e8 \ubbf8\uc138 \uc81c\uc870 \ubc0f \ub098\ub178 \uae30\uc220 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc815\ubc00 \uac74\uc2dd \uc5d0\uce6d \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. \uc774\uc628 \ubc00\ub9c1\uc774\ub77c\uace0\ub3c4 \ud558\ub294 \uc774\uc628 \ube54 \uc5d0\uce6d(IBE)\uc744 \ud65c\uc6a9\ud558\ub294 \uc774 \uc7a5\ube44\ub294 \uc21c\uc218\ud55c \ubb3c\ub9ac\uc801 \uc2a4\ud37c\ud130\ub9c1 \uacf5\uc815\uc744 \ud1b5\ud574 \uace0\ub3c4\uc758 \uc7ac\ub8cc \uc81c\uac70\ub97c \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"645\" data-end=\"961\">\uae30\uc874\uc758 \ud50c\ub77c\uc988\ub9c8 \uae30\ubc18 \uc5d0\uce6d \uae30\uc220\uacfc \ub2ec\ub9ac \uc774\uc628 \ube54 \uc5d0\uce6d\uc740 \uae30\ud310\uc744 \ud50c\ub77c\uc988\ub9c8\uc5d0 \uc9c1\uc811 \ub178\ucd9c\uc2dc\ud0a4\uc9c0 \uc54a\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ud50c\ub77c\uc988\ub9c8\ub85c \uc778\ud55c \uc190\uc0c1, \uc624\uc5fc, \uc804\ud558 \ucd95\uc801\uc758 \uc704\ud5d8\uc744 \ud06c\uac8c \uc904\uc5ec\uc8fc\ubbc0\ub85c \ubbfc\uac10\ud55c \ubc18\ub3c4\uccb4 \ubc0f \uad11\ud559 \uc7a5\uce58 \uc81c\uc870\uc5d0 \ud2b9\ud788 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"963\" data-end=\"1148\">\ub098\ub178\ubbf8\ud130 \uc218\uc900\uc758 \uc815\ubc00\ub3c4\uc640 \ub6f0\uc5b4\ub09c \uacf5\uc815 \uc81c\uc5b4\uc131\uc744 \uac16\ucd98 \uc774 \uc2dc\uc2a4\ud15c\uc740 \ubc18\ub3c4\uccb4 \uc81c\uc870, \ubc15\ub9c9 \uacf5\uc815 \ubc0f \ucca8\ub2e8 \uc7ac\ub8cc \uc5f0\uad6c\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n<hr data-start=\"1150\" data-end=\"1153\" \/>\n<h2 data-section-id=\"17sw59i\" data-start=\"1155\" data-end=\"1184\"><span role=\"text\"><img decoding=\"async\" class=\"wp-image-2324 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png\" alt=\"\" width=\"458\" height=\"191\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-300x125.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7-600x250.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication7.png 680w\" sizes=\"(max-width: 458px) 100vw, 458px\" \/>\uc8fc\uc694 \uae30\uc220\uc801 \ud2b9\uc9d5<\/span><\/h2>\n<ul data-start=\"1186\" data-end=\"1929\">\n<li data-section-id=\"7yo1gz\" data-start=\"1186\" data-end=\"1324\">\ub9e4\uc6b0 \ub192\uc740 \uc815\ubc00\ub3c4<br data-start=\"1212\" data-end=\"1215\" \/>\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ubc0f \ub098\ub178 \uc81c\uc870 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud558\ub294 \u226410nm\uc758 \uc5d0\uce6d \ud574\uc0c1\ub3c4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"csgjgf\" data-start=\"1326\" data-end=\"1497\">\ube44\uc120\ud0dd\uc801 \uc5d0\uce6d \uae30\ub2a5<br data-start=\"1364\" data-end=\"1367\" \/>\uae08\uc18d, \ubc18\ub3c4\uccb4, \uc720\uc804\uccb4 \ub4f1 \ub2e4\uc591\ud55c \uc7ac\ub8cc\uc5d0 \ud654\ud559\uc801 \uc758\uc874\uc131 \uc5c6\uc774 \uade0\uc77c\ud55c \uc5d0\uce6d\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1xlwjqh\" data-start=\"1499\" data-end=\"1667\">\uc774\ubc29\uc131 \ubc0f \ubc29\ud5a5\uc131 \uc81c\uc5b4<br data-start=\"1540\" data-end=\"1543\" \/>\uc870\uc815 \uac00\ub2a5\ud55c \uc774\uc628 \ube54 \uac01\ub3c4\ub85c \uc774\ubc29\uc131 \ubc0f \ub4f1\ubc29\uc131 \uc5d0\uce6d \ud504\ub85c\ud30c\uc77c\uc774 \ubaa8\ub450 \uac00\ub2a5\ud558\uc5ec \ubcf5\uc7a1\ud55c \ud328\ud134 \uc804\uc1a1\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1ialgp0\" data-start=\"1669\" data-end=\"1793\">\ud50c\ub77c\uc988\ub9c8\uac00 \uc5c6\ub294 \ucc98\ub9ac \ud658\uacbd<br data-start=\"1709\" data-end=\"1712\" \/>\ud50c\ub77c\uc988\ub9c8\ub85c \uc778\ud55c \uc190\uc0c1\uc744 \uc81c\uac70\ud558\uc5ec \ub514\ubc14\uc774\uc2a4 \uc2e0\ub8b0\uc131\uacfc \uc218\uc728\uc744 \ub192\uc785\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1squn5z\" data-start=\"1795\" data-end=\"1929\">\ub6f0\uc5b4\ub09c \ud45c\uba74 \ud488\uc9c8<br data-start=\"1826\" data-end=\"1829\" \/>\uad11\ud559 \ubc0f \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc911\uc694\ud55c \uac70\uce60\uae30\uac00 \uac10\uc18c\ub41c \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<hr data-start=\"1931\" data-end=\"1934\" \/>\n<h2 data-section-id=\"crb813\" data-start=\"1936\" data-end=\"1965\"><span role=\"text\">\ud575\uc2ec \uc2dc\uc2a4\ud15c \uad6c\uc131 \uc694\uc18c<\/span><\/h2>\n<p data-start=\"1967\" data-end=\"2042\">\uc644\uc804\ud55c \uc774\uc628 \ube54 \uc5d0\uce6d \uc2dc\uc2a4\ud15c\uc740 \uba87 \uac00\uc9c0 \uc911\uc694\ud55c \ud558\uc704 \uc2dc\uc2a4\ud15c\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4:<\/p>\n<h3 data-section-id=\"j86wbp\" data-start=\"2044\" data-end=\"2068\"><span role=\"text\">1. \uc9c4\uacf5 \uc2dc\uc2a4\ud15c<\/span><\/h3>\n<p data-start=\"2069\" data-end=\"2118\">\uace0\uc9c4\uacf5 \ud658\uacbd\uc5d0 \ud544\uc218\uc801\uc778 \uace0\uc9c4\uacf5 \ud658\uacbd\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n<ul data-start=\"2119\" data-end=\"2193\">\n<li data-section-id=\"1vzt3vq\" data-start=\"2119\" data-end=\"2137\">\ube54 \uc548\uc815\uc131<\/li>\n<li data-section-id=\"svkbf3\" data-start=\"2138\" data-end=\"2163\">\uc624\uc5fc \uc81c\uc5b4<\/li>\n<li data-section-id=\"19d0yza\" data-start=\"2164\" data-end=\"2193\">\uace0\uc815\ubc00 \ucc98\ub9ac<\/li>\n<\/ul>\n<h3 data-section-id=\"8jigvj\" data-start=\"2195\" data-end=\"2216\"><span role=\"text\">2. \uc774\uc628 \uc18c\uc2a4<\/span><\/h3>\n<p data-start=\"2217\" data-end=\"2272\">\uace0\uc5d0\ub108\uc9c0 \uc774\uc628 \ube54(\uc77c\ubc18\uc801\uc73c\ub85c \uc544\ub974\uace4 \uc774\uc628)\uc744 \uc0dd\uc131\ud569\ub2c8\ub2e4:<\/p>\n<ul data-start=\"2273\" data-end=\"2386\">\n<li data-section-id=\"116c4dh\" data-start=\"2273\" data-end=\"2315\">\uc5d0\uce6d \uc18d\ub3c4 \ubc0f \uade0\uc77c\uc131 \uacb0\uc815<\/li>\n<li data-section-id=\"bdpzju\" data-start=\"2316\" data-end=\"2386\">RF \ubc0f \uce74\uc6b0\ud504\ub9cc \uc774\uc628 \uc18c\uc2a4\uc640 \uac19\uc740 \ub2e4\uc591\ud55c \uc18c\uc2a4 \uc720\ud615 \uc9c0\uc6d0<\/li>\n<\/ul>\n<h3 data-section-id=\"1tpsqxl\" data-start=\"2388\" data-end=\"2411\"><span role=\"text\">3. \uc0d8\ud50c \uc2a4\ud14c\uc774\uc9c0<\/span><\/h3>\n<ul data-start=\"2412\" data-end=\"2530\">\n<li data-section-id=\"d3z3he\" data-start=\"2412\" data-end=\"2468\">\uade0\uc77c\ud55c \uc5d0\uce6d\uc744 \uc704\ud55c \ub2e4\ucd95 \ud68c\uc804 \uc9c0\uc6d0<\/li>\n<li data-section-id=\"15yipgz\" data-start=\"2469\" data-end=\"2530\">\ud1b5\ud569 \uc628\ub3c4 \uc81c\uc5b4\ub85c \ud504\ub85c\uc138\uc2a4 \uc548\uc815\uc131 \ud5a5\uc0c1<\/li>\n<\/ul>\n<h3 data-section-id=\"qoosxq\" data-start=\"2532\" data-end=\"2557\"><span role=\"text\">4. \uc81c\uc5b4 \uc2dc\uc2a4\ud15c<\/span><\/h3>\n<ul data-start=\"2558\" data-end=\"2705\">\n<li data-section-id=\"1mqnqw1\" data-start=\"2558\" data-end=\"2587\">\uc644\uc804 \uc790\ub3d9\ud654\ub41c \uc6b4\uc601<\/li>\n<li data-section-id=\"ymbyxd\" data-start=\"2588\" data-end=\"2643\">\uc815\ubc00\ud55c \ud30c\ub77c\ubbf8\ud130 \uc81c\uc5b4 \ubc0f \ubc18\ubcf5\uc131 \uc9c0\uc6d0<\/li>\n<li data-section-id=\"1kjf28e\" data-start=\"2644\" data-end=\"2705\">\uace0\uae09 \ud504\ub85c\uc138\uc2a4 \uc81c\uc5b4\ub97c \uc704\ud55c \uc5d4\ub4dc\ud3ec\uc778\ud2b8 \uac10\uc9c0(\uc635\uc158)<\/li>\n<\/ul>\n<h3 data-section-id=\"97rafg\" data-start=\"2707\" data-end=\"2729\"><span role=\"text\">5. \uc911\ud654\uc81c<\/span><\/h3>\n<ul data-start=\"2730\" data-end=\"2836\">\n<li data-section-id=\"12j0ebp\" data-start=\"2730\" data-end=\"2772\">\uc5d0\uce6d \uc911 \uc804\ud558 \ucd95\uc801 \ubc29\uc9c0<\/li>\n<li data-section-id=\"1o4nvb1\" data-start=\"2773\" data-end=\"2836\">SiO\u2082 \ubc0f Si\u2083N\u2084\uc640 \uac19\uc740 \ub2e8\uc5f4\uc7ac\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<hr data-start=\"2838\" data-end=\"2841\" \/>\n<h2 data-section-id=\"sgqumq\" data-start=\"2843\" data-end=\"2867\"><span role=\"text\">\uc791\ub3d9 \uc6d0\ub9ac<\/span><\/h2>\n<p data-start=\"2869\" data-end=\"3006\"><img decoding=\"async\" class=\"size-medium wp-image-2321 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png\" alt=\"\" width=\"300\" height=\"235\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-300x235.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-15x12.png 15w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1-600x469.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-1.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uc774\uc628 \ube54 \uc5d0\uce6d\uc740 \uc9c4\uacf5 \uc870\uac74\uc5d0\uc11c \uace0\uc5d0\ub108\uc9c0\uc758 \uc870\uc900\ub41c \uc774\uc628 \ube54\uc744 \ub300\uc0c1 \uc7ac\ub8cc \ud45c\uba74\uc73c\ub85c \ud5a5\ud558\uac8c \ud558\uc5ec \uc791\ub3d9\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"3008\" data-end=\"3253\">\uc774\uc628(\uc77c\ubc18\uc801\uc73c\ub85c Ar\u207a)\uc740 \ud45c\uba74 \uc6d0\uc790\uc640 \ucda9\ub3cc\ud558\uc5ec \uc6b4\ub3d9\ub7c9\uc744 \uc804\ub2ec\ud558\uace0 \ubb3c\ub9ac\uc801 \uc2a4\ud37c\ud130\ub9c1\uc744 \ud1b5\ud574 \uc6d0\uc790\ub97c \ubc29\ucd9c\ud569\ub2c8\ub2e4. \uc774 \ud504\ub85c\uc138\uc2a4\ub294 \uc7ac\ub8cc\ub97c \ud55c \uce35\uc529 \uc81c\uac70\ud558\uc5ec \ud654\ud559 \ubc18\uc751 \uc5c6\uc774 \uc815\ubc00\ud55c \ud328\ud134\uc744 \uc815\uc758\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"3255\" data-end=\"3296\">\ub530\ub77c\uc11c IBE\ub294 \ud2b9\ud788 \ub2e4\uc74c\uacfc \uac19\uc740 \uacbd\uc6b0\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4:<\/p>\n<ul data-start=\"3297\" data-end=\"3403\">\n<li data-section-id=\"jy9ydi\" data-start=\"3297\" data-end=\"3333\">\uace0\ud574\uc0c1\ub3c4 \ud328\ud134 \uc804\uc1a1<\/li>\n<li data-section-id=\"1ihgsm0\" data-start=\"3334\" data-end=\"3376\">\ud654\ud559\uc801 \ubc18\uc751\uc131\uc774 \ub0ae\uc740 \uc7ac\ub8cc<\/li>\n<li data-section-id=\"hl3mzt\" data-start=\"3377\" data-end=\"3403\">\ub2e4\uce35 \uad6c\uc870<\/li>\n<\/ul>\n<hr data-start=\"3405\" data-end=\"3408\" \/>\n<h2 data-section-id=\"gimyd4\" data-start=\"3410\" data-end=\"3440\"><span role=\"text\">\ucc98\ub9ac \uae30\ub2a5<\/span><\/h2>\n<h3 data-section-id=\"ww5vbk\" data-start=\"3442\" data-end=\"3469\"><span role=\"text\">\uc9c0\uc6d0\ub418\ub294 \uc790\ub8cc<\/span><\/h3>\n<ul data-start=\"3470\" data-end=\"3622\">\n<li data-section-id=\"4dwycu\" data-start=\"3470\" data-end=\"3504\">\uae08\uc18d: Au, Pt, Cu, Ta, Al<\/li>\n<li data-section-id=\"12wc4i0\" data-start=\"3505\" data-end=\"3537\">\ubc18\ub3c4\uccb4: Si, GaAs<\/li>\n<li data-section-id=\"75kyg7\" data-start=\"3538\" data-end=\"3570\">\uc720\uc804\uccb4: SiO\u2082, Si\u2083N\u2084<\/li>\n<li data-section-id=\"1xmdv1x\" data-start=\"3571\" data-end=\"3622\">\ucca8\ub2e8 \uc7ac\ub8cc: AlN, \uc138\ub77c\ubbf9, \ud3f4\ub9ac\uba38<\/li>\n<\/ul>\n<hr data-start=\"3624\" data-end=\"3627\" \/>\n<h2 data-section-id=\"12vl3dy\" data-start=\"3629\" data-end=\"3656\"><span role=\"text\">\uc77c\ubc18\uc801\uc778 \ud504\ub85c\uc138\uc2a4 \ud750\ub984<\/span><\/h2>\n<ol data-start=\"3658\" data-end=\"4078\">\n<li data-section-id=\"1lq2akh\" data-start=\"3658\" data-end=\"3742\">\uc0d8\ud50c \uc900\ube44<br data-start=\"3683\" data-end=\"3686\" \/>\uc9c4\uacf5 \ucc54\ubc84\uc5d0\uc11c \uae30\ud310\uc744 \uccad\uc18c\ud558\uace0 \uc7a5\ucc29\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1uf7qj1\" data-start=\"3744\" data-end=\"3821\">\ub9c8\uc2a4\ud0b9<br data-start=\"3758\" data-end=\"3761\" \/>\ud3ec\ud1a0\ub808\uc9c0\uc2a4\ud2b8 \ub610\ub294 \uba54\ud0c8 \ub9c8\uc2a4\ud06c\ub97c \uc801\uc6a9\ud558\uc5ec \uc5d0\uce6d \uc601\uc5ed\uc744 \uc815\uc758\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1sq3ygn\" data-start=\"3823\" data-end=\"3910\">\uc774\uc628 \ube54 \uc0dd\uc131<br data-start=\"3849\" data-end=\"3852\" \/>\ubd88\ud65c\uc131 \uac00\uc2a4(\uc77c\ubc18\uc801\uc73c\ub85c \uc544\ub974\uace4)\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc774\uc628 \uc18c\uc2a4 \ud65c\uc131\ud654<\/li>\n<li data-section-id=\"46esbg\" data-start=\"3912\" data-end=\"4006\">\uc5d0\uce6d \ud504\ub85c\uc138\uc2a4<br data-start=\"3934\" data-end=\"3937\" \/>\ube54 \uc5d0\ub108\uc9c0, \uac01\ub3c4 \ubc0f \uc2dc\uac04\uc744 \uc870\uc815\ud558\uc5ec \uc6d0\ud558\ub294 \uad6c\uc870\ub97c \ub2ec\uc131\ud558\uc138\uc694.<\/li>\n<li data-section-id=\"oeifr6\" data-start=\"4008\" data-end=\"4078\">\ub9c8\uc2a4\ud06c \uc81c\uac70<br data-start=\"4027\" data-end=\"4030\" \/>\ub9c8\uc2a4\ud06c\ub97c \uc81c\uac70\ud558\uc5ec \ucd5c\uc885 \uc5d0\uce6d \ud328\ud134\uc744 \ub4dc\ub7ec\ub0b4\uae30<\/li>\n<\/ol>\n<hr data-start=\"4080\" data-end=\"4083\" \/>\n<h2 data-section-id=\"1myoacb\" data-start=\"4085\" data-end=\"4109\"><span role=\"text\">\uc801\uc6a9 \ubd84\uc57c<\/span><\/h2>\n<h3 data-section-id=\"bm5nu5\" data-start=\"4111\" data-end=\"4146\"><span role=\"text\"><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-2322 aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png\" alt=\"\" width=\"724\" height=\"157\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-300x65.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-18x4.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6-600x130.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ion-Beam-Etching-Machine-for-Si-SiO2-and-Metal-Materials-in-Semiconductor-Fabrication6.png 680w\" sizes=\"(max-width: 724px) 100vw, 724px\" \/>\ubc18\ub3c4\uccb4 \uc81c\uc870<\/span><\/h3>\n<ul data-start=\"4147\" data-end=\"4236\">\n<li data-section-id=\"13vctk4\" data-start=\"4147\" data-end=\"4180\">\uc9d1\uc801 \ud68c\ub85c \ud328\ud130\ub2dd<\/li>\n<li data-section-id=\"ofwy8d\" data-start=\"4181\" data-end=\"4206\">\ubc15\ub9c9 \uad6c\uc870\ud654<\/li>\n<li data-section-id=\"1x3kzva\" data-start=\"4207\" data-end=\"4236\">\uace0\uae09 \ub178\ub4dc \uc81c\uc791<\/li>\n<\/ul>\n<h3 data-section-id=\"1tse075\" data-start=\"4238\" data-end=\"4261\"><span role=\"text\">\uad11\ud559 \uc7a5\uce58<\/span><\/h3>\n<ul data-start=\"4262\" data-end=\"4356\">\n<li data-section-id=\"v6a7ly\" data-start=\"4262\" data-end=\"4309\">\uaca9\uc790 \ubc0f \ub80c\uc988\uc758 \uc815\ubc00 \uac00\uacf5<\/li>\n<li data-section-id=\"lq2w9m\" data-start=\"4310\" data-end=\"4356\">\uad11\ud559 \ubd80\ud488\uc758 \ud45c\uba74 \uc218\uc815<\/li>\n<\/ul>\n<h3 data-section-id=\"1wc0my6\" data-start=\"4358\" data-end=\"4380\"><span role=\"text\">\ub098\ub178 \uae30\uc220<\/span><\/h3>\n<ul data-start=\"4381\" data-end=\"4441\">\n<li data-section-id=\"178ey7v\" data-start=\"4381\" data-end=\"4441\">\ub098\ub178 \uc640\uc774\uc5b4, \ub098\ub178 \uae30\uacf5 \ubc0f MEMS \uad6c\uc870\ubb3c \uc81c\uc791<\/li>\n<\/ul>\n<h3 data-section-id=\"krs816\" data-start=\"4443\" data-end=\"4468\"><span role=\"text\">\uc7ac\ub8cc \uacfc\ud559<\/span><\/h3>\n<ul data-start=\"4469\" data-end=\"4541\">\n<li data-section-id=\"18ntl16\" data-start=\"4469\" data-end=\"4506\">\ud45c\uba74 \ubd84\uc11d \ubc0f \uc218\uc815<\/li>\n<li data-section-id=\"1b8wqpz\" data-start=\"4507\" data-end=\"4541\">\uae30\ub2a5\uc131 \ucf54\ud305 \uc900\ube44<\/li>\n<\/ul>\n<hr data-start=\"4543\" data-end=\"4546\" \/>\n<h2 data-section-id=\"13lz0w7\" data-start=\"4548\" data-end=\"4591\"><span role=\"text\">\uae30\uc874 \uc5d0\uce6d \ub300\ube44 \uc7a5\uc810<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"4593\" data-end=\"4927\">\n<thead data-start=\"4593\" data-end=\"4646\">\n<tr data-start=\"4593\" data-end=\"4646\">\n<th class=\"\" data-start=\"4593\" data-end=\"4603\" data-col-size=\"sm\">\uae30\ub2a5<\/th>\n<th class=\"\" data-start=\"4603\" data-end=\"4622\" data-col-size=\"sm\">\uc774\uc628 \ube54 \uc5d0\uce6d<\/th>\n<th class=\"\" data-start=\"4622\" data-end=\"4646\" data-col-size=\"sm\">\ubc18\uc751\uc131 \uc774\uc628 \uc5d0\uce6d<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"4697\" data-end=\"4927\">\n<tr data-start=\"4697\" data-end=\"4746\">\n<td data-start=\"4697\" data-end=\"4712\" data-col-size=\"sm\">\ud504\ub85c\uc138\uc2a4 \uc720\ud615<\/td>\n<td data-start=\"4712\" data-end=\"4723\" data-col-size=\"sm\">\ubb3c\ub9ac\uc801<\/td>\n<td data-start=\"4723\" data-end=\"4746\" data-col-size=\"sm\">\ubb3c\ub9ac + \ud654\ud559<\/td>\n<\/tr>\n<tr data-start=\"4747\" data-end=\"4805\">\n<td data-start=\"4747\" data-end=\"4765\" data-col-size=\"sm\">\ud50c\ub77c\uc988\ub9c8 \ub178\ucd9c<\/td>\n<td data-start=\"4765\" data-end=\"4786\" data-col-size=\"sm\">\uc9c1\uc811 \ub178\ucd9c \uc5c6\uc74c<\/td>\n<td data-start=\"4786\" data-end=\"4805\" data-col-size=\"sm\">\uc9c1\uc811 \ub178\ucd9c<\/td>\n<\/tr>\n<tr data-start=\"4806\" data-end=\"4853\">\n<td data-start=\"4806\" data-end=\"4829\" data-col-size=\"sm\">\uc7ac\ub8cc \uc120\ud0dd\uc131<\/td>\n<td data-start=\"4829\" data-end=\"4845\" data-col-size=\"sm\">\ub0ae\uc74c(\uade0\uc77c)<\/td>\n<td data-start=\"4845\" data-end=\"4853\" data-col-size=\"sm\">\ub192\uc74c<\/td>\n<\/tr>\n<tr data-start=\"4854\" data-end=\"4893\">\n<td data-start=\"4854\" data-end=\"4871\" data-col-size=\"sm\">\ud45c\uba74 \uc190\uc0c1<\/td>\n<td data-start=\"4871\" data-end=\"4881\" data-col-size=\"sm\">\ucd5c\uc18c<\/td>\n<td data-start=\"4881\" data-end=\"4893\" data-col-size=\"sm\">\uac00\ub2a5<\/td>\n<\/tr>\n<tr data-start=\"4894\" data-end=\"4927\">\n<td data-start=\"4894\" data-end=\"4906\" data-col-size=\"sm\">\uc815\ubc00\ub3c4<\/td>\n<td data-start=\"4906\" data-end=\"4919\" data-col-size=\"sm\">\ub9e4\uc6b0 \ub192\uc74c<\/td>\n<td data-start=\"4919\" data-end=\"4927\" data-col-size=\"sm\">\ub192\uc74c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"4929\" data-end=\"4932\" \/>\n<h2 data-section-id=\"elc90z\" data-start=\"4934\" data-end=\"4944\"><span role=\"text\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/span><\/h2>\n<h3 data-section-id=\"1h3z74f\" data-start=\"4946\" data-end=\"4978\"><span role=\"text\">\uc774\uc628 \ube54 \uc5d0\uce6d\uc774\ub780 \ubb34\uc5c7\uc778\uac00\uc694?<\/span><\/h3>\n<p data-start=\"4979\" data-end=\"5122\">\uc774\uc628 \ube54 \uc5d0\uce6d\uc740 \uc9c4\uacf5 \ud658\uacbd\uc5d0\uc11c \uace0\uc5d0\ub108\uc9c0 \uc774\uc628\uc744 \uc0ac\uc6a9\ud558\uc5ec \ubb3c\ub9ac\uc801 \uc2a4\ud37c\ud130\ub9c1\uc744 \ud1b5\ud574 \uc7ac\ub8cc\ub97c \uc81c\uac70\ud558\ub294 \uac74\uc2dd \uc5d0\uce6d \uacf5\uc815\uc785\ub2c8\ub2e4.<\/p>\n<h3 data-section-id=\"1oyreis\" data-start=\"5124\" data-end=\"5153\"><span role=\"text\">IBE\uc640 RIE\uc758 \ucc28\uc774\uc810?<\/span><\/h3>\n<ul data-start=\"5154\" data-end=\"5316\">\n<li data-section-id=\"6o7nxe\" data-start=\"5154\" data-end=\"5219\">IBE: \uc21c\uc218 \ubb3c\ub9ac\uc801, \ud50c\ub77c\uc988\ub9c8 \uc811\ucd09 \uc5c6\uc74c, \ub192\uc740 \uc815\ubc00\ub3c4<\/li>\n<li data-section-id=\"d79ynl\" data-start=\"5220\" data-end=\"5316\">RIE: \ud654\ud559 \ubc18\uc751\uacfc \ud50c\ub77c\uc988\ub9c8\ub97c \uacb0\ud569\ud558\uc5ec \uc120\ud0dd\uc131\uc774 \ub192\uc9c0\ub9cc \uc190\uc0c1 \uc704\ud5d8\uc774 \ub354 \ud07d\ub2c8\ub2e4.<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"<p>Si, SiO2 \ubc0f \uae08\uc18d \uc7ac\ub8cc\uc6a9 \uc774\uc628 \ube54 \uc5d0\uce6d \uc7a5\ube44\ub294 \ucca8\ub2e8 \ubbf8\uc138 \uc81c\uc870 \ubc0f \ub098\ub178 \uae30\uc220 \uc751\uc6a9 \ubd84\uc57c\ub97c \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc815\ubc00 \uac74\uc2dd \uc5d0\uce6d \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. \uc774\uc628 \ubc00\ub9c1\uc774\ub77c\uace0\ub3c4 \ud558\ub294 \uc774\uc628 \ube54 \uc5d0\uce6d(IBE)\uc744 \ud65c\uc6a9\ud558\ub294 \uc774 \uc7a5\ube44\ub294 \uc21c\uc218\ud55c \ubb3c\ub9ac\uc801 \uc2a4\ud37c\ud130\ub9c1 \uacf5\uc815\uc744 \ud1b5\ud574 \uace0\ub3c4\uc758 \uc7ac\ub8cc \uc81c\uac70\ub97c \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2320,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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