{"id":2196,"date":"2026-04-14T06:34:45","date_gmt":"2026-04-14T06:34:45","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2196"},"modified":"2026-04-14T06:34:48","modified_gmt":"2026-04-14T06:34:48","slug":"2-inch-6h-n-silicon-carbide-wafer","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/2-inch-6h-n-silicon-carbide-wafer\/","title":{"rendered":"2\uc778\uce58 6H-N \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc6e8\uc774\ud37c"},"content":{"rendered":"

\"2\uc778\uce582\uc778\uce58 6H-N \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc6e8\uc774\ud37c\ub294 \uc5f0\uad6c \ubc0f \ub514\ubc14\uc774\uc2a4 \uc218\uc900\uc758 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ub2e8\uacb0\uc815 \uae30\ud310\uc785\ub2c8\ub2e4. 6H \ud3f4\ub9ac\ud0c0\uc785\uc740 \uc721\uac01\ud615 \uacb0\uc815 \uad6c\uc870\ub85c \uae4c\ub2e4\ub85c\uc6b4 \uc870\uac74\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc804\uae30 \uc804\ub3c4\uc131\uacfc \uc6b0\uc218\ud55c \uc5f4 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc57d 3.02eV\uc758 \ubc34\ub4dc\uac2d\uc744 \uac00\uc9c4 6H-SiC\ub294 \uace0\uc804\uc555, \uace0\uc628, \uace0\uc8fc\ud30c \uc870\uac74 \ub4f1 \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc18c\uc7ac\uac00 \uc2e4\ud328\ud558\ub294 \ud658\uacbd\uc5d0\uc11c\ub3c4 \uc791\ub3d9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ucd08\uae30 \ub2e8\uacc4\uc758 \ub514\ubc14\uc774\uc2a4 \ud504\ub85c\ud1a0\ud0c0\uc774\ud551, \uc7ac\ub8cc \ud14c\uc2a4\ud2b8 \ubc0f \ud2b9\uc218 \uc804\uc790 \ubd80\ud488 \uc81c\uc791\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

ZMSH SiC \uc6e8\uc774\ud37c\ub294 \uc77c\uad00\ub41c \uc800\ud56d\ub960, \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4, \ub192\uc740 \ud45c\uba74 \ud488\uc9c8\uc744 \ubcf4\uc7a5\ud558\uae30 \uc704\ud574 \uc81c\uc5b4\ub41c \uacb0\uc815 \uc131\uc7a5 \uae30\uc220\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \ud30c\ub77c\ubbf8\ud130\ub294 \uc7ac\ud604 \uac00\ub2a5\ud55c \uc2e4\ud5d8 \uacb0\uacfc\uc640 \uc548\uc815\uc801\uc778 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud558\ub294 \ub370 \ub9e4\uc6b0 \uc911\uc694\ud569\ub2c8\ub2e4.<\/p>\n

\uc8fc\uc694 \uae30\ub2a5<\/h2>\n

N\ud615 \uc804\ub3c4\uc131 \uad6c\uc870<\/h3>\n

\uc6e8\uc774\ud37c\ub294 N\ud615\uc73c\ub85c \ub3c4\ud551\ub418\uc5b4 \ubc18\ub3c4\uccb4 \uc18c\uc790 \uc81c\uc791 \ubc0f \uc804\uae30\uc801 \ud2b9\uc131\ud654 \uc2e4\ud5d8\uc5d0 \uc801\ud569\ud55c \uc548\uc815\uc801\uc778 \uc804\uc790 \uc804\ub3c4 \uacbd\ub85c\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n

\uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc18c\uc7ac<\/h3>\n

3.02eV\uc758 \ubc34\ub4dc\uac2d\uc744 \uac00\uc9c4 SiC\ub294 \uc2e4\ub9ac\ucf58\uc5d0 \ube44\ud574 \ud6e8\uc52c \ub192\uc740 \uc804\uae30\uc7a5 \uac15\ub3c4\ub97c \uc9c0\uc6d0\ud558\uc5ec \uace0\uc804\uc555 \uc791\ub3d9\uacfc \ud5a5\uc0c1\ub41c \ub514\ubc14\uc774\uc2a4 \ud6a8\uc728\uc744 \uac00\ub2a5\ud558\uac8c \ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \uc5f4 \uc804\ub3c4\uc131<\/h3>\n

SiC\ub294 \uc5f4 \uc804\ub3c4\uc131\uc774 \ub6f0\uc5b4\ub098 \ud65c\uc131 \ub514\ubc14\uc774\uc2a4 \uc601\uc5ed\uc5d0\uc11c \uc5f4\uc744 \ud6a8\uc728\uc801\uc73c\ub85c \ubc29\ucd9c\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub530\ub77c\uc11c \ub514\ubc14\uc774\uc2a4 \uc548\uc815\uc131\uc774 \ud5a5\uc0c1\ub418\uace0 \uace0\uc804\ub825 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0\uc11c \uc791\ub3d9 \uc218\uba85\uc774 \uc5f0\uc7a5\ub429\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \uae30\uacc4\uc801 \uac15\ub3c4<\/h3>\n

\ubaa8\uc2a4 \uacbd\ub3c4\uac00 \uc57d 9.2\uc778 SiC \uc6e8\uc774\ud37c\ub294 \uc81c\uc791 \uc911 \uae30\uacc4\uc801 \uc190\uc0c1, \ud45c\uba74 \ub9c8\ubaa8, \uac00\uacf5 \uc2a4\ud2b8\ub808\uc2a4\uc5d0 \ub300\ud55c \uc800\ud56d\ub825\uc774 \uac15\ud569\ub2c8\ub2e4.<\/p>\n

\ub192\uc740 \uace0\uc7a5 \uc804\uae30\uc7a5<\/h3>\n

\ub192\uc740 \ud30c\uad34 \uc804\uacc4 \uac15\ub3c4\ub294 \ub192\uc740 \uc804\uc555 \ud5c8\uc6a9 \uc624\ucc28\ub97c \uc720\uc9c0\ud558\uba74\uc11c \ucef4\ud329\ud2b8\ud55c \ub514\ubc14\uc774\uc2a4 \uad6c\uc870\ub97c \uac00\ub2a5\ud558\uac8c \ud558\ubbc0\ub85c SiC\ub294 \ucca8\ub2e8 \uc804\ub825 \uc804\uc790 \uc7a5\uce58\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uae30\uc220 \uc0ac\uc591<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\ub9e4\uac1c\ubcc0\uc218<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
\uc7ac\ub8cc<\/td>\n\ub2e8\uacb0\uc815 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc<\/td>\n<\/tr>\n
\ube0c\ub79c\ub4dc<\/td>\nZMSH<\/td>\n<\/tr>\n
\ud3f4\ub9ac\ud0c0\uc785<\/td>\n6H-N<\/td>\n<\/tr>\n
\uc9c0\ub984<\/td>\n2\uc778\uce58(50.8mm)<\/td>\n<\/tr>\n
\ub450\uaed8<\/td>\n350 \u03bcm \/ 650 \u03bcm<\/td>\n<\/tr>\n
\uc804\ub3c4\uc131 \uc720\ud615<\/td>\nN\ud615<\/td>\n<\/tr>\n
\ud45c\uba74 \ub9c8\uac10<\/td>\nCMP \ud3f4\ub9ac\uc2dc\ub4dc \uc2dc\ud398\uc774\uc2a4<\/td>\n<\/tr>\n
C-\ud398\uc774\uc2a4 \ucc98\ub9ac<\/td>\n\uae30\uacc4\uc2dd \uad11\ud0dd<\/td>\n<\/tr>\n
\ud45c\uba74 \uac70\uce60\uae30<\/td>\nRa < 0.2nm(Si-\uba74)<\/td>\n<\/tr>\n
\uc800\ud56d\ub960<\/td>\n0.015 - 0.028 \u03a9-cm<\/td>\n<\/tr>\n
\uc0c9\uc0c1<\/td>\n\ud22c\uba85\/\uc5f0\ub179\uc0c9<\/td>\n<\/tr>\n
\ud328\ud0a4\uc9d5<\/td>\n\ub2e8\uc77c \uc6e8\uc774\ud37c \ucee8\ud14c\uc774\ub108<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

6H-SiC\uc758 \uc7ac\ub8cc \ud2b9\uc131<\/h2>\n
\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\uc18d\uc131<\/th>\n\uac00\uce58<\/th>\n<\/tr>\n<\/thead>\n
\uaca9\uc790 \ub9e4\uac1c\ubcc0\uc218<\/td>\na = 3.073 \u00c5, c = 15.117 \u00c5<\/td>\n<\/tr>\n
\ubaa8\uc2a4 \uacbd\ub3c4<\/td>\n\u2248 9.2<\/td>\n<\/tr>\n
\ubc00\ub3c4<\/td>\n3.21g\/cm\u00b3<\/td>\n<\/tr>\n
\uc5f4\ud33d\ucc3d \uacc4\uc218<\/td>\n4-5 \u00d710-\u2076 \/K<\/td>\n<\/tr>\n
\uad74\uc808\ub960(750nm)<\/td>\nn\u2080 = 2.60, n\u2091 = 2.65<\/td>\n<\/tr>\n
\uc720\uc804\uccb4 \uc0c1\uc218<\/td>\n\u2248 9.66<\/td>\n<\/tr>\n
\uc5f4 \uc804\ub3c4\uc131<\/td>\n~3.7-3.9W\/cm-K<\/td>\n<\/tr>\n
\ubc34\ub4dc\uac2d<\/td>\n3.02 eV<\/td>\n<\/tr>\n
\uace0\uc7a5 \uc804\uae30\uc7a5<\/td>\n3-5 \u00d710\u2076 V\/cm<\/td>\n<\/tr>\n
\ud3ec\ud654 \ub4dc\ub9ac\ud504\ud2b8 \uc18d\ub3c4<\/td>\n2.0 \u00d710\u2075 m\/s<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

\uc774\ub7ec\ud55c \uace0\uc720\ud55c \ubb3c\ub9ac\uc801 \ud2b9\uc131\uc73c\ub85c \uc778\ud574 6H-SiC\ub294 \uadf9\ud55c\uc758 \uc804\uae30 \ubc0f \uc5f4 \uc870\uac74\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc131\ub2a5\uc774 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\"2\uc778\uce58\uc81c\uc870 \ud504\ub85c\uc138\uc2a4<\/h2>\n

SiC \ub2e8\uacb0\uc815 \uc6e8\uc774\ud37c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub2e4\uc74c\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc0dd\uc0b0\ub429\ub2c8\ub2e4. \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1(PVT) \ubc29\ubc95<\/strong>, \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \uc131\uc219\ud55c \uc0b0\uc5c5 \uacf5\uc815\uc785\ub2c8\ub2e4.<\/p>\n

\uc774 \uacfc\uc815\uc5d0\uc11c \uace0\uc21c\ub3c4 SiC \uc6d0\uc7ac\ub8cc\ub294 2000\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc2b9\ud654\ub429\ub2c8\ub2e4. \uc99d\uae30 \uc885\uc740 \uc2e0\uc911\ud558\uac8c \uc81c\uc5b4\ub41c \uc5f4 \uad6c\ubc30\ub97c \ud1b5\ud574 \uc774\uc1a1\ub418\uace0 \uc2dc\ub4dc \uacb0\uc815\uc5d0\uc11c \uc7ac\uacb0\uc815\ub418\uc5b4 \ub2e8\uacb0\uc815 \uc789\uacf3(\ubd88)\uc744 \ud615\uc131\ud569\ub2c8\ub2e4. \uc131\uc7a5 \ud6c4 \ubd88\uc740 \uc2ac\ub77c\uc774\uc2a4, \ub7a9\ud551, \uc5f0\ub9c8 \ubc0f \uc138\ucc99 \ub2e8\uacc4\ub97c \uac70\uccd0 \uc6e8\uc774\ud37c\ub85c \uac00\uacf5\ub429\ub2c8\ub2e4.<\/p>\n

\ub514\ubc14\uc774\uc2a4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc758 \uacbd\uc6b0 \uc6e8\uc774\ud37c\ub294 \ucd94\uac00\uc801\uc778 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5<\/strong>, \ub97c \uc0ac\uc6a9\ud558\uc5ec \ub3c4\ud551 \ub18d\ub3c4\uc640 \uce35 \ub450\uaed8\ub97c \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \ub2e8\uacc4\ub294 MOSFET \ubc0f \ub2e4\uc774\uc624\ub4dc \uc81c\uc791\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h2>\n

\uc804\ub825 \uc804\uc790<\/h3>\n

2\uc778\uce58 6H-N SiC \uc6e8\uc774\ud37c\ub294 \ub2e4\uc774\uc624\ub4dc, MOSFET \uad6c\uc870, \uc804\ub825 \ubaa8\ub4c8\uc744 \ube44\ub86f\ud55c \uc804\ub825 \ubc18\ub3c4\uccb4 \uc7a5\uce58\uc758 \uac1c\ubc1c \ubc0f \ud504\ub85c\ud1a0\ud0c0\uc785 \uc81c\uc791\uc5d0 \uc0ac\uc6a9\ub429\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc7a5\uce58\ub294 \uc5d0\ub108\uc9c0 \ubcc0\ud658 \uc2dc\uc2a4\ud15c\uacfc \uc804\ub825 \uad00\ub9ac \ud68c\ub85c\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4.<\/p>\n

\uace0\uc628 \uc804\uc790 \uc81c\ud488<\/h3>\n

SiC \uc18c\uc7ac\ub294 \uace0\uc628\uc5d0\uc11c\ub3c4 \uc548\uc815\uc801\uc778 \uc804\uae30 \uc131\ub2a5\uc744 \uc720\uc9c0\ud558\ubbc0\ub85c \ud56d\uacf5 \uc6b0\uc8fc \uc804\uc790 \uc7a5\uce58, \uc0b0\uc5c5\uc6a9 \ubaa8\ub2c8\ud130\ub9c1 \uc2dc\uc2a4\ud15c \ubc0f \uc5d0\ub108\uc9c0 \uc778\ud504\ub77c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\ubc18\ub3c4\uccb4 \uc5f0\uad6c \ubc0f \uac1c\ubc1c<\/h3>\n

2\uc778\uce58 \uc6e8\uc774\ud37c\ub294 \uac00\uc6a9\uc131\uacfc \ube44\uc6a9 \ud6a8\uc728\uc131\uc73c\ub85c \uc778\ud574 \ub300\ud559 \uc2e4\ud5d8\uc2e4, \uc5f0\uad6c \uae30\uad00, \ud30c\uc77c\ub7ff \uc0dd\uc0b0 \ud658\uacbd\uc5d0\uc11c \uc7ac\ub8cc \uc5f0\uad6c \ubc0f \uc7a5\uce58 \uc2e4\ud5d8\uc744 \uc704\ud574 \ub110\ub9ac \uc0ac\uc6a9\ub418\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uad11\uc804\uc790 \ubc0f \ud2b9\uc218 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/h3>\n

\ub610\ud55c SiC\ub294 \ud2b9\uc815 \ud30c\uc7a5 \ubc94\uc704\uc5d0\uc11c \uad11\ud559\uc801 \ud22c\uba85\uc131\uc744 \ub098\ud0c0\ub0b4\ubbc0\ub85c \ud2b9\uc218\ud55c \uad11\uc790 \ubc0f \uad11\uc804\uc790 \uc5f0\uad6c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n

\uc7a5\uc810\"2\uc778\uce58<\/h2>\n

2\uc778\uce58 SiC \uc6e8\uc774\ud37c \ud50c\ub7ab\ud3fc\uc740 \uc5f0\uad6c \uac1c\ubc1c\uc5d0 \uc5ec\ub7ec \uac00\uc9c0 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4:<\/p>\n

    \n
  • \ub354 \ud070 \uc6e8\uc774\ud37c \ud06c\uae30\uc5d0 \ube44\ud574 \ube44\uc6a9 \uc808\uac10<\/li>\n
  • \uc2e4\ud5d8\uc2e4 \uaddc\ubaa8\uc758 \uc2e4\ud5d8\uc744 \uc704\ud55c \uc190\uc26c\uc6b4 \ud578\ub4e4\ub9c1<\/li>\n
  • \uc2e0\uc18d\ud55c \ud504\ub85c\ud1a0\ud0c0\uc774\ud551 \ubc0f \ud504\ub85c\uc138\uc2a4 \ud14c\uc2a4\ud2b8\uc5d0 \uc801\ud569<\/li>\n
  • \uc7ac\ud604 \uac00\ub2a5\ud55c \uacb0\uacfc\ub97c \uc704\ud55c \uc548\uc815\uc801\uc778 \ud06c\ub9ac\uc2a4\ud0c8 \ud488\uc9c8<\/li>\n
  • \uc5f0\uad6c \uc694\uad6c\uc5d0 \ub9de\ub294 \uc720\uc5f0\ud55c \uc0ac\uc6a9\uc790 \uc9c0\uc815 \uc635\uc158<\/li>\n<\/ul>\n

    \uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h2>\n

    Q1: 6H-SiC\uc640 4H-SiC\uc758 \ucc28\uc774\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/h3>\n

    6H-SiC\uc640 4H-SiC\ub294 \uc11c\ub85c \ub2e4\ub978 \uacb0\uc815 \ud3f4\ub9ac\ud0c0\uc785\uc785\ub2c8\ub2e4. 4H-SiC\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub354 \ub192\uc740 \uc804\uc790 \uc774\ub3d9\ub3c4\ub97c \uc81c\uacf5\ud558\uba70 \uc0c1\uc6a9 \uc804\ub825 \uc7a5\uce58\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ubc18\uba74, 6H-SiC\ub294 \uc548\uc815\uc801\uc778 \uc804\uae30\uc801 \uac70\ub3d9\uc744 \uc81c\uacf5\ud558\uba70 \uc5f0\uad6c \ubc0f \ud2b9\uc815 \uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc77c\ubc18\uc801\uc73c\ub85c \uc0ac\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n

    Q2: \uc6e8\uc774\ud37c\uc5d0\ub294 \uc5b4\ub5a4 \ud45c\uba74 \ucc98\ub9ac\uac00 \uc801\uc6a9\ub418\ub098\uc694?<\/h3>\n

    Si-\uba74\uc740 \ud654\ud559\uc801 \uae30\uacc4 \uc5f0\ub9c8(CMP)\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc5f0\ub9c8\ud558\uc5ec \ub9e4\uc6b0 \ub9e4\ub044\ub7ec\uc6b4 \ud45c\uba74 \ud488\uc9c8(Ra <0.2 nm)\uc744 \uad6c\ud604\ud569\ub2c8\ub2e4. C-\ud398\uc774\uc2a4\ub294 \ub2e4\uc591\ud55c \uac00\uacf5 \uc694\uad6c \uc0ac\ud56d\uc744 \uc9c0\uc6d0\ud558\uae30 \uc704\ud574 \uae30\uacc4\uc801\uc73c\ub85c \uc5f0\ub9c8\ub429\ub2c8\ub2e4.<\/p>\n

    Q3: \uc6e8\uc774\ud37c \uc0ac\uc591\uc744 \ub9de\ucda4\ud654\ud560 \uc218 \uc788\ub098\uc694?<\/h3>\n

    \uc608. ZMSH\ub294 \uace0\uac1d\uc758 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub530\ub77c \ub450\uaed8, \ub3c4\ud551 \ub18d\ub3c4, \uc800\ud56d\ub960 \ubc94\uc704, \ud45c\uba74 \ucc98\ub9ac \ub4f1 \ub9de\ucda4\ud615 \uc635\uc158\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"

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