![\"4H-N](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd2-300x300.webp\")
<\/p>\n6\uc778\uce58 4H-N \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc \uc6e8\uc774\ud37c\ub294 \ucc28\uc138\ub300 \uc804\ub825 \uc804\uc790 \uc7a5\uce58\ub97c \uc704\ud574 \uc124\uacc4\ub41c \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uae30\ud310\uc785\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58 \uc18c\uc7ac\uc5d0 \ube44\ud574 SiC\ub294 \ud6e8\uc52c \ub354 \ub192\uc740 \ud30c\uad34 \uc804\uae30\uc7a5 \uac15\ub3c4, \uc6b0\uc218\ud55c \uc5f4 \uc804\ub3c4\uc131, \uace0\uc628 \ubc0f \uace0\uc804\uc555 \uc870\uac74\uc5d0\uc11c \uc548\uc815\uc801\uc778 \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n
\uc57d 3.26eV\uc758 \ub113\uc740 \ubc34\ub4dc\uac2d \ub355\ubd84\uc5d0 SiC \uae30\ubc18 \ub514\ubc14\uc774\uc2a4\ub294 \ub354 \ub192\uc740 \uc804\uc555\uacfc \uc2a4\uc704\uce6d \uc8fc\ud30c\uc218\uc5d0\uc11c \uc791\ub3d9\ud558\uba74\uc11c \uc5d0\ub108\uc9c0 \uc190\uc2e4\uc744 \ub0ae\ucd9c \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uadf8 \uacb0\uacfc SiC\ub294 \uc804\uae30 \uc790\ub3d9\ucc28, \uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c, \uc0b0\uc5c5\uc6a9 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58 \ub4f1 \uace0\ud6a8\uc728 \uc804\ub825 \ubcc0\ud658 \uc2dc\uc2a4\ud15c\uc758 \ud575\uc2ec \uc18c\uc7ac\ub85c \uc790\ub9ac \uc7a1\uc558\uc2b5\ub2c8\ub2e4.<\/p>\n
6\uc778\uce58(150mm\uae09) \uc6e8\uc774\ud37c \ud3ec\ub9f7\uc740 \ud604\uc7ac SiC \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc758 \uc8fc\ub958 \uc0b0\uc5c5 \ud45c\uc900\uc785\ub2c8\ub2e4. \uc0dd\uc0b0 \uc218\uc728, \uacf5\uc815 \uc131\uc219\ub3c4, \ube44\uc6a9 \ud6a8\uc728\uc131 \uac04\uc5d0 \ucd5c\uc801\uc758 \uade0\ud615\uc744 \uc81c\uacf5\ud558\uc5ec \ub300\ub7c9 \uc0dd\uc0b0 \ubc0f \uace0\uae09 \uc5f0\uad6c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ubaa8\ub450 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n
4H-SiC\ub294 \uacb0\uc815 \ub300\uce6d\uc131\uacfc \uc804\uae30\uc801 \uc131\ub2a5\uc774 \uc6b0\uc218\ud558\uc5ec \uc804\ub825 \uc804\uc790 \uc81c\ud488\uc5d0\uc11c \uac00\uc7a5 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \ud3f4\ub9ac\ud0c0\uc785\uc785\ub2c8\ub2e4.<\/p>\n
\uc8fc\uc694 \uace0\uc720 \uc18d\uc131\uc740 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n
\uc774\ub7ec\ud55c \ud2b9\uc131\uc73c\ub85c \uc778\ud574 SiC\ub294 \uace0\ucd9c\ub825, \uace0\ud6a8\uc728 \ubc18\ub3c4\uccb4 \ub514\ubc14\uc774\uc2a4\uc5d0 \ub9e4\uc6b0 \uc911\uc694\ud55c \uc18c\uc7ac\uc785\ub2c8\ub2e4.<\/p>\n
![\"6\uc778\uce58](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd4-300x300.webp\")
\uacb0\uc815 \uc131\uc7a5 \ubc0f \uc81c\uc870 \uacf5\uc815<\/h2>\nSiC \uc6e8\uc774\ud37c\ub294 \uc77c\ubc18\uc801\uc73c\ub85c \ub300\ub7c9 SiC \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \uc131\uc219\ud55c \uc0b0\uc5c5 \uacf5\uc815\uc778 \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1(PVT) \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uc5ec \uc81c\uc870\ub429\ub2c8\ub2e4.<\/p>\n
\uc774 \uacfc\uc815\uc5d0\uc11c \uace0\uc21c\ub3c4 SiC \ubd84\ub9d0\uc740 2000\u00b0C \uc774\uc0c1\uc758 \uc628\ub3c4\uc5d0\uc11c \uc2b9\ud654\ub429\ub2c8\ub2e4. \uc99d\uae30\uc0c1 \uc885\uc740 \uc2e0\uc911\ud558\uac8c \uc81c\uc5b4\ub41c \uc5f4 \uad6c\ubc30\ub85c \uc774\uc1a1\ub418\uace0 \uc885\uc790 \uacb0\uc815\uc5d0\uc11c \uc7ac\uacb0\uc815\ub418\uc5b4 \ub2e8\uacb0\uc815 \ubd80\ub97c \ud615\uc131\ud569\ub2c8\ub2e4.<\/p>\n
\uacb0\uc815\uc774 \uc131\uc7a5\ud55c \ud6c4 \uc7ac\ub8cc\ub294 \ub2e4\uc74c\uacfc \uac19\uc740 \uacfc\uc815\uc744 \uac70\uce69\ub2c8\ub2e4:<\/p>\n
\ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc744 \uc704\ud574 \ucd94\uac00\uc801\uc778 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(CVD) \uc5d0\ud53c\ud0dd\uc15c \uacf5\uc815\uc744 \uc801\uc6a9\ud558\uc5ec \ub3c4\ud551 \ub18d\ub3c4\uc640 \ub450\uaed8\ub97c \uc81c\uc5b4\ud55c \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc744 \ud615\uc131\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n
| \uc18d\uc131<\/th>\n | Z \ub4f1\uae09(\ud504\ub85c\ub355\uc158 \ub4f1\uae09)<\/th>\n | D \ub4f1\uae09(\uc5d4\uc9c0\ub2c8\uc5b4\ub9c1 \ub4f1\uae09)<\/th>\n<\/tr>\n<\/thead>\n |
|---|---|---|
| \uc9c0\ub984<\/td>\n | 149.5 - 150.0mm<\/td>\n | 149.5 - 150.0mm<\/td>\n<\/tr>\n |
| \ud3f4\ub9ac\ud0c0\uc785<\/td>\n | 4H-SiC<\/td>\n | 4H-SiC<\/td>\n<\/tr>\n |
| \ub450\uaed8<\/td>\n | 350 \u00b1 15 \u00b5m<\/td>\n | 350 \u00b1 25 \u00b5m<\/td>\n<\/tr>\n |
| \uc804\ub3c4\uc131 \uc720\ud615<\/td>\n | N\ud615<\/td>\n | N\ud615<\/td>\n<\/tr>\n |
| \ucd95\uc678 \uac01\ub3c4<\/td>\n | 4.0\u00b0 \u00b1 0.5\u00b0 \ubc29\ud5a5<\/td>\n | 4.0\u00b0 \u00b1 0.5\u00b0 \ubc29\ud5a5<\/td>\n<\/tr>\n |
| \uc800\ud56d\ub960<\/td>\n | 0.015 - 0.024 \u03a9-cm<\/td>\n | 0.015 - 0.028 \u03a9-cm<\/td>\n<\/tr>\n |
| \ub9c8\uc774\ud06c\ub85c\ud30c\uc774\ud504 \ubc00\ub3c4<\/td>\n | \u2264 0.2cm-\u00b2<\/td>\n | \u2264 15cm-\u00b2<\/td>\n<\/tr>\n |
| \ud45c\uba74 \uac70\uce60\uae30(Ra)<\/td>\n | \u2264 1nm<\/td>\n | \u2264 1nm<\/td>\n<\/tr>\n |
| CMP \ub7ec\ud504\ub2c8\uc2a4<\/td>\n | \u2264 0.2nm<\/td>\n | \u2264 0.5nm<\/td>\n<\/tr>\n |
| LTV<\/td>\n | \u2264 2.5 \u00b5m<\/td>\n | \u2264 5 \u00b5m<\/td>\n<\/tr>\n |
| TTV<\/td>\n | \u2264 6 \u00b5m<\/td>\n | \u2264 15 \u00b5m<\/td>\n<\/tr>\n |
| \ud65c<\/td>\n | \u2264 25 \u00b5m<\/td>\n | \u2264 40 \u00b5m<\/td>\n<\/tr>\n |
| \uc6cc\ud504<\/td>\n | \u2264 35 \u00b5m<\/td>\n | \u2264 60 \u00b5m<\/td>\n<\/tr>\n |
| \uc5e3\uc9c0 \uc81c\uc678<\/td>\n | 3mm<\/td>\n | 3mm<\/td>\n<\/tr>\n |
| \ud328\ud0a4\uc9d5<\/td>\n | \uce74\uc138\ud2b8 \/ \ub2e8\uc77c \uc6e8\uc774\ud37c<\/td>\n | \uce74\uc138\ud2b8 \/ \ub2e8\uc77c \uc6e8\uc774\ud37c<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
|
![\"6\uc778\uce58](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/6_inch_silicon_carbide_sic_wafer_for_ar_glasses_mos_sbd1-300x300.webp\")
\ud488\uc9c8 \uad00\ub9ac \ubc0f \uac80\uc0ac<\/h2>\n