{"id":2084,"date":"2026-04-03T02:35:11","date_gmt":"2026-04-03T02:35:11","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2084"},"modified":"2026-04-03T02:36:56","modified_gmt":"2026-04-03T02:36:56","slug":"split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/split-type-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"6\u201d\/8\u201d \uc5d0\ud53c \uc6e8\uc774\ud37c\uc6a9 \ubd84\ud560\ud615 \uc218\uc9c1 \uae30\ub958 SiC \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44"},"content":{"rendered":"<p data-start=\"207\" data-end=\"731\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2087 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\ubd84\ud560\ud615 \uc218\uc9c1 \uae30\ub958 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc5d0\ud53c \uc6e8\uc774\ud37c\uc758 \uace0\ud6a8\uc728 \uc0dd\uc0b0\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. \ubaa8\ub4c8\uc2dd \ubd84\ud560\ud615 \uc544\ud0a4\ud14d\ucc98\ub97c \ud2b9\uc9d5\uc73c\ub85c \ud558\ub294 \uc774 \uc7a5\ube44\ub294 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \ubc30\uae30 \ubaa8\ub4c8 \ubc0f EFEM\/PM\/TM \ubaa8\ub4c8\uc744 \uadf8\ub808\uc774\uc874 \ub610\ub294 \uba54\uc790\ub2cc \uc601\uc5ed\uc5d0 \ub3c5\ub9bd\uc801\uc73c\ub85c \uc124\uce58\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub7ec\ud55c \uc720\uc5f0\uc131 \ub355\ubd84\uc5d0 SMIF \ubaa8\ub4c8\uacfc \uc624\ubc84\ud5e4\ub4dc \ud06c\ub808\uc778 \uc5f0\uacb0\uc744 \ud1b5\ud574 \uc644\uc804\ud55c \uc790\ub3d9\ud654 \uae30\ub2a5\uc744 \uc720\uc9c0\ud558\uba74\uc11c \ucd5c\uc2e0 \ud339 \ud658\uacbd\uc5d0 \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"733\" data-end=\"1139\">\uc774 \uc7a5\ube44\ub294 \ub2e4\uc911 \uad6c\uc5ed \uc628\ub3c4 \ud544\ub4dc \uc81c\uc5b4\uc640 \uacb0\ud569\ub41c \ud601\uc2e0\uc801\uc778 \uc218\uc9c1 \uae30\ub958 \uc124\uacc4\ub97c \ud1b5\ud574 \uace0\uc131\ub2a5 SiC \uc804\ub825 \uc18c\uc790\uc5d0 \ud544\uc218\uc801\uc778 \uade0\uc77c\ud55c \ub450\uaed8\uc640 \uc548\uc815\uc801\uc778 \ub3c4\ud551 \ub18d\ub3c4\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4. EFEM \uc6e8\uc774\ud37c \ucc98\ub9ac \ubc0f \uace0\uc628 \uc6e8\uc774\ud37c \uc774\uc1a1\uc744 \ud3ec\ud568\ud55c \uc644\uc804 \uc790\ub3d9\ud654\ub97c \ud1b5\ud574 \uc218\ub3d9 \uac1c\uc785\uc744 \uc904\uc774\uace0 \uacf5\uc815 \uc77c\uad00\uc131\uc744 \ub192\uc774\uba70 \uc6b4\uc601 \ud6a8\uc728\uc131\uc744 \uac1c\uc120\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1141\" data-end=\"1628\">\uc774 \uc2dc\uc2a4\ud15c\uc740 \ub4c0\uc5bc \ucc54\ubc84 \uc5f0\uc18d \uba40\ud2f0 \ud37c\ub2c8\uc2a4 \uc6b4\uc601\uc744 \uc9c0\uc6d0\ud558\uc5ec \uacf5\uc815 \ucd5c\uc801\ud654\ub97c \ud1b5\ud574 \uc6d4 1100\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c\uc640 \uc6d4 \ucd5c\ub300 1200\uac1c\uc758 \uc6e8\uc774\ud37c\ub97c \uc0dd\uc0b0\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. 6\uc778\uce58 \ubc0f 8\uc778\uce58 \uc6e8\uc774\ud37c \ubaa8\ub450\uc640 \uc644\ubcbd\ud558\uac8c \ud638\ud658\ub418\ub3c4\ub85d \uc124\uacc4\ub418\uc5b4 \ub354 \ud070 \uc6e8\uc774\ud37c \ud06c\uae30\ub85c \uc804\ud658\ud558\ub294 \uc81c\uc870\uc5c5\uccb4\uc5d0 \uc720\uc5f0\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub610\ud55c \uc774 \uc7a5\ube44\ub294 \uace0\uc555 \ud6c4\ub9c9 \uc131\uc7a5\uacfc \ud2b8\ub80c\uce58 \ucda9\uc804 \uc5d0\ud53c\ud0dd\uc2dc\uac00 \uac00\ub2a5\ud558\uc5ec \ucca8\ub2e8 \uace0\uc804\uc555 \ubc0f \uace0\uc804\ub825 SiC \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1630\" data-end=\"1829\">\uacac\uace0\ud55c \ubd84\ud560\ud615 \uad6c\uc870\ub294 \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4, \ub192\uc740 \uc218\uc728, \uac04\uc18c\ud654\ub41c \uc720\uc9c0\ubcf4\uc218 \ubc0f \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uc744 \ubcf4\uc7a5\ud558\uc5ec \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5c5\uccb4\uc758 \ucd1d\uc18c\uc720\ube44\uc6a9\uc744 \ucd5c\uc18c\ud654\ud569\ub2c8\ub2e4.<\/p>\n<h3 data-section-id=\"xj0uai\" data-start=\"1836\" data-end=\"1866\"><img decoding=\"async\" class=\"size-medium wp-image-2091 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uc8fc\uc694 \uae30\uc220\uc801 \uc774\uc810<\/h3>\n<ul data-start=\"1867\" data-end=\"2438\">\n<li data-section-id=\"wpnig9\" data-start=\"1867\" data-end=\"1961\">\uc804\uc6d0, \ubc30\uae30 \ubc0f EFEM \ubaa8\ub4c8\uc744 \ub3c5\ub9bd\uc801\uc73c\ub85c \uc124\uce58\ud560 \uc218 \uc788\ub294 \ubd84\ud560\ud615 \ubaa8\ub4c8 \uc124\uacc4<\/li>\n<li data-section-id=\"151uc73\" data-start=\"1962\" data-end=\"2039\">\uc6e8\uc774\ud37c \uc804\uccb4\uc5d0 \uade0\uc77c\ud55c \uac00\uc2a4 \ubd84\ud3ec\ub97c \uc704\ud55c \uc218\uc9c1 \uae30\ub958 \uc0e4\uc6cc \ud5e4\ub4dc<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2040\" data-end=\"2105\">\uc815\ubc00\ud55c \uc5f4 \uad00\ub9ac\ub97c \uc704\ud55c \ub2e4\uc911 \uad6c\uc5ed \uc628\ub3c4 \uc81c\uc5b4<\/li>\n<li data-section-id=\"c5t7pm\" data-start=\"2106\" data-end=\"2167\">\ub192\uc740 \ucc98\ub9ac\ub7c9 \uc0dd\uc0b0\uc744 \uc704\ud55c \ub4c0\uc5bc \ucc54\ubc84 \uad6c\uc131<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2168\" data-end=\"2217\">\ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4 \ubc0f \ub192\uc740 \uc218\uc728 \uc131\ub2a5<\/li>\n<li data-section-id=\"1rmzhz1\" data-start=\"2218\" data-end=\"2293\">EFEM \ubc0f \uc624\ubc84\ud5e4\ub4dc \ud06c\ub808\uc778 \ud1b5\ud569\uc744 \ud1b5\ud55c \uc644\uc804 \uc790\ub3d9\ud654\ub41c \uc6e8\uc774\ud37c \ucc98\ub9ac<\/li>\n<li data-section-id=\"1o0wgtg\" data-start=\"2294\" data-end=\"2334\">6\u201d \ubc0f 8\u201d SiC \uc6e8\uc774\ud37c\uc640 \ud638\ud658 \uac00\ub2a5<\/li>\n<li data-section-id=\"1vtm55j\" data-start=\"2335\" data-end=\"2390\">\ud6c4\ub9c9 \ubc0f \ud2b8\ub80c\uce58 \ucda9\uc804 \uc5d0\ud53c\ud0dd\uc2dc\uc5d0 \ucd5c\uc801\ud654\ub428<\/li>\n<li data-section-id=\"1usg9u4\" data-start=\"2391\" data-end=\"2438\">\ub192\uc740 \uc2e0\ub8b0\uc131\uacfc \uac04\uc18c\ud654\ub41c \uc720\uc9c0\ubcf4\uc218<\/li>\n<\/ul>\n<h3 data-section-id=\"4v9b11\" data-start=\"2445\" data-end=\"2470\">\ud504\ub85c\uc138\uc2a4 \uc131\ub2a5<\/h3>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2472\" data-end=\"3023\">\n<thead data-start=\"2472\" data-end=\"2501\">\n<tr data-start=\"2472\" data-end=\"2501\">\n<th class=\"\" data-start=\"2472\" data-end=\"2484\" data-col-size=\"sm\">\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th class=\"\" data-start=\"2484\" data-end=\"2501\" data-col-size=\"md\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2532\" data-end=\"3023\">\n<tr data-start=\"2532\" data-end=\"2620\">\n<td data-start=\"2532\" data-end=\"2545\" data-col-size=\"sm\">\ucc98\ub9ac\ub7c9<\/td>\n<td data-start=\"2545\" data-end=\"2620\" data-col-size=\"md\">\u2265\uc6d4 1100\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c(\ub4c0\uc5bc \ucc54\ubc84), \ucd5c\ub300 1200\uac1c \uc6e8\uc774\ud37c\/\uc6d4(\ucd5c\uc801\ud654)<\/td>\n<\/tr>\n<tr data-start=\"2621\" data-end=\"2674\">\n<td data-start=\"2621\" data-end=\"2648\" data-col-size=\"sm\">\uc6e8\uc774\ud37c \ud06c\uae30 \ud638\ud658\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2648\" data-end=\"2674\">6\u201d \/ 8\u201d SiC \uc5d0\ud53c \uc6e8\uc774\ud37c<\/td>\n<\/tr>\n<tr data-start=\"2675\" data-end=\"2711\">\n<td data-start=\"2675\" data-end=\"2697\" data-col-size=\"sm\">\uc628\ub3c4 \uc81c\uc5b4<\/td>\n<td data-col-size=\"md\" data-start=\"2697\" data-end=\"2711\">\ub2e4\uc911 \uc601\uc5ed<\/td>\n<\/tr>\n<tr data-start=\"2712\" data-end=\"2771\">\n<td data-start=\"2712\" data-end=\"2729\" data-col-size=\"sm\">\uacf5\uae30 \ud750\ub984 \uc2dc\uc2a4\ud15c<\/td>\n<td data-col-size=\"md\" data-start=\"2729\" data-end=\"2771\">\uc218\uc9c1\uc73c\ub85c \uc870\uc808 \uac00\ub2a5\ud55c \ub2e4\uc911 \uad6c\uc5ed \uacf5\uae30 \ud750\ub984<\/td>\n<\/tr>\n<tr data-start=\"2772\" data-end=\"2803\">\n<td data-start=\"2772\" data-end=\"2789\" data-col-size=\"sm\">\ud68c\uc804 \uc18d\ub3c4<\/td>\n<td data-col-size=\"md\" data-start=\"2789\" data-end=\"2803\">0-1000 rpm<\/td>\n<\/tr>\n<tr data-start=\"2804\" data-end=\"2837\">\n<td data-start=\"2804\" data-end=\"2822\" data-col-size=\"sm\">\ucd5c\ub300 \uc131\uc7a5\ub960<\/td>\n<td data-col-size=\"md\" data-start=\"2822\" data-end=\"2837\">\u226560 \u03bcm\/\uc2dc\uac04<\/td>\n<\/tr>\n<tr data-start=\"2838\" data-end=\"2899\">\n<td data-start=\"2838\" data-end=\"2861\" data-col-size=\"sm\">\ub450\uaed8 \uade0\uc77c\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2861\" data-end=\"2899\">\u22642%(\ucd5c\uc801\ud654\ub41c \u22641%, \u03c3\/\ud3c9\uade0, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"2900\" data-end=\"2960\">\n<td data-start=\"2900\" data-end=\"2920\" data-col-size=\"sm\">\ub3c4\ud551 \uade0\uc77c\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2920\" data-end=\"2960\">\u22643%(\ucd5c\uc801\ud654\ub41c \u22641.5%, \u03c3\/\ud3c9\uade0, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"2961\" data-end=\"3023\">\n<td data-start=\"2961\" data-end=\"2985\" data-col-size=\"sm\">\ud0ac\ub7ec \uacb0\ud568 \ubc00\ub3c4<\/td>\n<td data-col-size=\"md\" data-start=\"2985\" data-end=\"3023\">\u22640.2cm-\u00b2(0.01cm-\u00b2\ub85c \ucd5c\uc801\ud654\ub428)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 data-section-id=\"mn7c2p\" data-start=\"3030\" data-end=\"3057\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc2dc\ub098\ub9ac\uc624<\/h3>\n<p data-start=\"3059\" data-end=\"3280\">\ubd84\ud560\ud615 \uc218\uc9c1 \uae30\ub958 SiC \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 \ud2b9\ud788 \uace0\ud6a8\uc728, \uace0\uc804\uc555 \ubc0f \ub192\uc740 \uc5f4 \uc131\ub2a5\uc774 \ud544\uc694\ud55c \uc0b0\uc5c5\uc5d0\uc11c \uace0\uc131\ub2a5 SiC \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n<p data-start=\"3282\" data-end=\"3471\"><strong data-start=\"3282\" data-end=\"3309\">\uc804\uae30 \uc790\ub3d9\ucc28(EV)<\/strong><br data-start=\"3309\" data-end=\"3312\" \/>\uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30, DC-DC \ucee8\ubc84\ud130\uc6a9 SiC MOSFET \ubc0f \uc804\ub825 \ubaa8\ub4c8 \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\uc5b4 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uacfc \uc8fc\ud589 \uac70\ub9ac\ub97c \uac1c\uc120\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"3473\" data-end=\"3622\"><strong data-start=\"3473\" data-end=\"3501\">\uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c<\/strong><br data-start=\"3501\" data-end=\"3504\" \/>\ud0dc\uc591\uad11 \uc778\ubc84\ud130 \ubc0f \uc5d0\ub108\uc9c0 \uc800\uc7a5 \uc2dc\uc2a4\ud15c\uc5d0 \uc801\uc6a9\ub418\uc5b4 \ubcc0\ud658 \ud6a8\uc728\uacfc \uc2e0\ub8b0\uc131\uc744 \ub192\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"3624\" data-end=\"3794\"><strong data-start=\"3624\" data-end=\"3656\">\uc0b0\uc5c5\uc6a9 \uc804\ub825 \uc804\uc790<\/strong><br data-start=\"3656\" data-end=\"3659\" \/>\uc548\uc815\uc801\uc774\uace0 \ud6a8\uc728\uc801\uc778 \uc791\ub3d9\uc774 \ud544\uc694\ud55c \uace0\ucd9c\ub825 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c, \uc0b0\uc5c5 \uc790\ub3d9\ud654 \uc2dc\uc2a4\ud15c, \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"3796\" data-end=\"3957\"><strong data-start=\"3796\" data-end=\"3826\">\ucca0\ub3c4 \uc6b4\uc1a1 \ubc0f \uc804\ub825\ub9dd<\/strong><br data-start=\"3826\" data-end=\"3829\" \/>\uc2a4\ub9c8\ud2b8 \uadf8\ub9ac\ub4dc, \uacac\uc778 \uc2dc\uc2a4\ud15c, \uc1a1\uc804 \uc778\ud504\ub77c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uace0\uc804\uc555 \ubc0f \uace0\uc8fc\ud30c \uc7a5\uce58\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"3959\" data-end=\"4113\"><strong data-start=\"3959\" data-end=\"3985\">\ud558\uc774\uc5d4\ub4dc \uc804\ub825 \uc7a5\uce58<\/strong><br data-start=\"3985\" data-end=\"3988\" \/>\uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc, MOSFET \ubc0f \ucc28\uc138\ub300 \uace0\uc804\uc555 \ubd80\ud488\uacfc \uac19\uc740 \uace0\uae09 SiC \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"3959\" data-end=\"4113\"><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h3 data-section-id=\"6toqgg\" data-start=\"4120\" data-end=\"4129\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/h3>\n<p data-start=\"4131\" data-end=\"4359\"><strong data-start=\"4131\" data-end=\"4206\">1. \uc774 \ubd84\ud560\ud615 \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 \uc5b4\ub5a4 \uc6e8\uc774\ud37c \ud06c\uae30\ub97c \uc9c0\uc6d0\ud558\ub098\uc694?<\/strong><br data-start=\"4206\" data-end=\"4209\" \/>\uc774 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc6e8\uc774\ud37c\ub97c \ubaa8\ub450 \uc9c0\uc6d0\ud558\ubbc0\ub85c \uc81c\uc870\uc5c5\uccb4\ub294 \ud604\uc7ac\uc758 \uc0dd\uc0b0 \uc218\uc694\ub97c \ucda9\uc871\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ud5a5\ud6c4 \ud655\uc7a5\uc5d0 \ub300\ube44\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"4361\" data-end=\"4591\"><strong data-start=\"4361\" data-end=\"4417\">2. \ubd84\ud560\ud615 \ub514\uc790\uc778\uc758 \uc7a5\uc810\uc740 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong><br data-start=\"4417\" data-end=\"4420\" \/>\ubaa8\ub4c8\uc2dd \ubd84\ud560 \uc124\uacc4\ub85c \uc804\uc6d0, \ubc30\uae30 \ubc0f EFEM \ubaa8\ub4c8\uc744 \ub3c5\ub9bd\uc801\uc73c\ub85c \uc124\uce58\ud560 \uc218 \uc788\uc5b4 \ud339 \ub808\uc774\uc544\uc6c3\uc758 \uc720\uc5f0\uc131\uc774 \ud5a5\uc0c1\ub418\uace0 \uc720\uc9c0\ubcf4\uc218 \ud3b8\uc758\uc131\uc774 \ud5a5\uc0c1\ub429\ub2c8\ub2e4.<\/p>\n<p data-start=\"4593\" data-end=\"4809\"><strong data-start=\"4593\" data-end=\"4661\">3. \uc218\uc9c1 \uacf5\uae30 \ud750\ub984 \uc124\uacc4\ub294 \uc5d0\ud53c\ud0dd\uc2dc \ud488\uc9c8\uc744 \uc5b4\ub5bb\uac8c \uac1c\uc120\ud558\ub098\uc694?<\/strong><br data-start=\"4661\" data-end=\"4664\" 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\ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>\ubd84\ud560\ud615 \uc218\uc9c1 \uae30\ub958 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc5d0\ud53c \uc6e8\uc774\ud37c\uc758 \uace0\ud6a8\uc728 \uc0dd\uc0b0\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. \ubaa8\ub4c8\uc2dd \ubd84\ud560\ud615 \uc544\ud0a4\ud14d\ucc98\uac00 \ud2b9\uc9d5\uc778 \uc774 \uc7a5\ube44\ub294 \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58, \ubc30\uae30 \ubaa8\ub4c8 \ubc0f EFEM\/PM\/TM \ubaa8\ub4c8\uc744 \uadf8\ub808\uc774\uc874 \ub610\ub294 \uba54\uc790\ub2cc \uc601\uc5ed\uc5d0 \ub3c5\ub9bd\uc801\uc73c\ub85c \uc124\uce58\ud560 \uc218 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