{"id":2077,"date":"2026-04-03T02:07:51","date_gmt":"2026-04-03T02:07:51","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2077"},"modified":"2026-04-03T02:09:04","modified_gmt":"2026-04-03T02:09:04","slug":"integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/","title":{"rendered":"6\u201d\/8\u201d \uc5d0\ud53c \uc6e8\uc774\ud37c\uc6a9 \ud1b5\ud569 \uc218\uc9c1 \uae30\ub958 SiC \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44"},"content":{"rendered":"<p data-start=\"187\" data-end=\"641\"><img fetchpriority=\"high\" decoding=\"async\" class=\"size-medium wp-image-2079 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\ud1b5\ud569 \uc218\uc9c1 \uae30\ub958 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc5d0\ud53c \uc6e8\uc774\ud37c\uc758 \uace0\ud6a8\uc728 \uc0dd\uc0b0\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. \uc804\ub825 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc758 \uc99d\uac00\ud558\ub294 \uc218\uc694\ub97c \ucda9\uc871\ud558\ub3c4\ub85d \uc124\uacc4\ub41c \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc815\ubc00\ud55c \uc5f4 \uc81c\uc5b4, \ucd5c\uc801\ud654\ub41c \uac00\uc2a4 \ud750\ub984 \uc5ed\ud559 \ubc0f \uc9c0\ub2a5\ud615 \uc790\ub3d9\ud654\ub97c \ud1b5\ud569\ud558\uc5ec \uade0\uc77c\uc131, \ucc98\ub9ac\ub7c9 \ubc0f \uacb0\ud568 \uc81c\uc5b4\uc5d0\uc11c \ud0c1\uc6d4\ud55c \uc131\ub2a5\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"643\" data-end=\"982\">\uc774 \uc2dc\uc2a4\ud15c\uc758 \ud575\uc2ec\uc740 \ud601\uc2e0\uc801\uc778 \uc218\uc9c1 \uae30\ub958 \uc0e4\uc6cc\ud5e4\ub4dc \uc124\uacc4\ub85c \uc6e8\uc774\ud37c \ud45c\uba74 \uc804\uccb4\uc5d0 \uacf5\uc815 \uac00\uc2a4\ub97c \uade0\uc77c\ud558\uac8c \ubd84\ubc30\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ub2e4\uc911 \uad6c\uc5ed \uc628\ub3c4 \ud544\ub4dc \uc81c\uc5b4\uc640 \uacb0\ud569\ud558\uc5ec \uace0\uc131\ub2a5 SiC \uc804\ub825 \uc18c\uc790\uc5d0 \ud544\uc218\uc801\uc778 \uc6b0\uc218\ud55c \ub450\uaed8 \uade0\uc77c\uc131\uacfc \uc548\uc815\uc801\uc778 \ub3c4\ud551 \ub18d\ub3c4\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"984\" data-end=\"1310\">\uc774 \uc2dc\uc2a4\ud15c\uc740 \uace0\uc628 \uc6e8\uc774\ud37c \uc774\uc1a1 \uba54\ucee4\ub2c8\uc998\uacfc \ud568\uaed8 EFEM \uc2dc\uc2a4\ud15c\uc744 \ud1b5\ud55c \uc790\ub3d9\ud654\ub41c \uc6e8\uc774\ud37c \ucc98\ub9ac\uc640 \uace0\ub3c4\ub85c \ud1b5\ud569\ub41c \uad6c\uc870\ub97c \ucc44\ud0dd\ud558\uace0 \uc788\uc2b5\ub2c8\ub2e4. \uc774\ub97c \ud1b5\ud574 \ucd5c\uc2e0 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ub77c\uc778\uc5d0 \uc6d0\ud65c\ud558\uac8c \ud1b5\ud569\ud558\uace0 \uc218\ub3d9 \uac1c\uc785\uc744 \uc904\uc774\uba70 \uacf5\uc815 \uc77c\uad00\uc131\uacfc \uc6b4\uc601 \ud6a8\uc728\uc131\uc744 \uac1c\uc120\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"1312\" data-end=\"1615\">\uc774 \uc7a5\ube44\ub294 \uc0b0\uc5c5 \uaddc\ubaa8\uc758 \uc81c\uc870\ub97c \uc9c0\uc6d0\ud558\uae30 \uc704\ud574 \uc5f0\uc18d \uba40\ud2f0 \ud37c\ub2c8\uc2a4 \uc791\ub3d9\uc774 \uac00\ub2a5\ud55c \ub4c0\uc5bc \ucc54\ubc84 \uad6c\uc131\uc774 \ud2b9\uc9d5\uc785\ub2c8\ub2e4. \uc6d4 1100\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c \ucc98\ub9ac\ub7c9\uacfc \uacf5\uc815 \ucd5c\uc801\ud654\ub97c \ud1b5\ud574 \ucd5c\ub300 1200\uac1c\uc758 \uc6e8\uc774\ud37c\ub97c \ucc98\ub9ac\ud560 \uc218 \uc788\uc5b4 \ub300\ub7c9 \uc0dd\uc0b0 \ud658\uacbd\uc5d0 \ub9e4\uc6b0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1617\" data-end=\"1971\">\uc774 \uc7a5\ube44\ub294 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc6e8\uc774\ud37c\uc640 \ubaa8\ub450 \ud638\ud658\ub418\ubbc0\ub85c \ub354 \ud070 \uc6e8\uc774\ud37c \ud06c\uae30\ub85c \uc804\ud658\ud558\ub294 \uc81c\uc870\uc5c5\uccb4\uc5d0 \uc720\uc5f0\uc131\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4. \ub610\ud55c \ub450\uaebc\uc6b4 \uc5d0\ud53c\ud0dd\uc2dc \uce35 \uc131\uc7a5\uacfc \ud2b8\ub80c\uce58 \ucda9\uc804 \uc5d0\ud53c\ud0dd\uc2dc\uc5d0\uc11c \ud0c1\uc6d4\ud55c \uc131\ub2a5\uc744 \ubc1c\ud718\ud558\uc5ec \ud2b9\ud788 \ucca8\ub2e8 \uace0\uc804\uc555 \ubc0f \uace0\uc804\ub825 \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"1973\" data-end=\"2214\">\ub610\ud55c \ucd5c\uc801\ud654\ub41c \uc6d0\uc790\ub85c \uc124\uacc4\ub85c \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4, \ud5a5\uc0c1\ub41c \uc218\uc728, \uc18c\uc720 \ube44\uc6a9 \uc808\uac10\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4. \uacac\uace0\ud55c \uad6c\uc870\uc640 \uc720\uc9c0\ubcf4\uc218 \uce5c\ud654\uc801\uc778 \uc124\uacc4\ub85c \uc7a5\uae30\uc801\uc778 \uc2e0\ub8b0\uc131\uacfc \uc6b4\uc601 \uc548\uc815\uc131\uc744 \ub354\uc6b1 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<h2 data-section-id=\"qpn8c9\" data-start=\"2221\" data-end=\"2252\"><span role=\"text\"><img decoding=\"async\" class=\"size-medium wp-image-2078 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Integrated-Silicon-Carbide-Epitaxy-Equipment-with-Vertical-Airflow2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\uc8fc\uc694 \uae30\uc220\uc801 \uc774\uc810<\/span><\/h2>\n<ul data-start=\"2254\" data-end=\"2704\">\n<li data-section-id=\"1q2t12k\" data-start=\"2254\" data-end=\"2321\">\uade0\uc77c\ud55c \uac00\uc2a4 \ubd84\ubc30\ub97c \uc704\ud55c \uc218\uc9c1 \uae30\ub958 \uc0e4\uc6cc\ud5e4\ub4dc \ub514\uc790\uc778<\/li>\n<li data-section-id=\"1lzu0dd\" data-start=\"2322\" data-end=\"2387\">\uc815\ubc00\ud55c \uc5f4 \uad00\ub9ac\ub97c \uc704\ud55c \ub2e4\uc911 \uad6c\uc5ed \uc628\ub3c4 \uc81c\uc5b4<\/li>\n<li data-section-id=\"1emeqzr\" data-start=\"2388\" data-end=\"2449\">\ub192\uc740 \ucc98\ub9ac\ub7c9 \uc0dd\uc0b0\uc744 \uc704\ud55c \ub4c0\uc5bc \ucc54\ubc84 \uad6c\uc131<\/li>\n<li data-section-id=\"rs6yfl\" data-start=\"2450\" data-end=\"2499\">\ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4 \ubc0f \ub192\uc740 \uc218\uc728 \uc131\ub2a5<\/li>\n<li data-section-id=\"h9m4ox\" data-start=\"2500\" data-end=\"2550\">EFEM \ud1b5\ud569\uc744 \ud1b5\ud55c \uc790\ub3d9\ud654\ub41c \uc6e8\uc774\ud37c \ucc98\ub9ac<\/li>\n<li data-section-id=\"bze71o\" data-start=\"2551\" data-end=\"2594\">6\u201d \ubc0f 8\u201d SiC \uc6e8\uc774\ud37c\uc640\uc758 \ud638\ud658\uc131<\/li>\n<li data-section-id=\"xhhop\" data-start=\"2595\" data-end=\"2655\">\ub450\uaebc\uc6b4 \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \ud2b8\ub80c\uce58 \ucda9\uc804 \uacf5\uc815\uc5d0 \ucd5c\uc801\ud654\ub428<\/li>\n<li data-section-id=\"1a3549x\" data-start=\"2656\" data-end=\"2704\">\uac04\uc18c\ud654\ub41c \uc720\uc9c0\ubcf4\uc218\ub85c \ub192\uc740 \uc2e0\ub8b0\uc131 \uc81c\uacf5<\/li>\n<\/ul>\n<h2 data-section-id=\"ca04ra\" data-start=\"2711\" data-end=\"2737\"><span role=\"text\">\ud504\ub85c\uc138\uc2a4 \uc131\ub2a5<\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2739\" data-end=\"3287\">\n<thead data-start=\"2739\" data-end=\"2768\">\n<tr data-start=\"2739\" data-end=\"2768\">\n<th class=\"\" data-start=\"2739\" data-end=\"2751\" data-col-size=\"sm\">\ub9e4\uac1c\ubcc0\uc218<\/th>\n<th class=\"\" data-start=\"2751\" data-end=\"2768\" data-col-size=\"md\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2796\" data-end=\"3287\">\n<tr data-start=\"2796\" data-end=\"2884\">\n<td data-start=\"2796\" data-end=\"2809\" data-col-size=\"sm\">\ucc98\ub9ac\ub7c9<\/td>\n<td data-start=\"2809\" data-end=\"2884\" data-col-size=\"md\">\u2265\uc6d4 1100\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c(\ub4c0\uc5bc \ucc54\ubc84), \ucd5c\ub300 1200\uac1c \uc6e8\uc774\ud37c\/\uc6d4(\ucd5c\uc801\ud654)<\/td>\n<\/tr>\n<tr data-start=\"2885\" data-end=\"2938\">\n<td data-start=\"2885\" data-end=\"2912\" data-col-size=\"sm\">\uc6e8\uc774\ud37c \ud06c\uae30 \ud638\ud658\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"2912\" data-end=\"2938\">6\u201d \/ 8\u201d SiC \uc5d0\ud53c \uc6e8\uc774\ud37c<\/td>\n<\/tr>\n<tr data-start=\"2939\" data-end=\"2975\">\n<td data-start=\"2939\" data-end=\"2961\" data-col-size=\"sm\">\uc628\ub3c4 \uc81c\uc5b4<\/td>\n<td data-start=\"2961\" data-end=\"2975\" data-col-size=\"md\">\ub2e4\uc911 \uc601\uc5ed<\/td>\n<\/tr>\n<tr data-start=\"2976\" data-end=\"3035\">\n<td data-start=\"2976\" data-end=\"2993\" data-col-size=\"sm\">\uacf5\uae30 \ud750\ub984 \uc2dc\uc2a4\ud15c<\/td>\n<td data-start=\"2993\" data-end=\"3035\" data-col-size=\"md\">\uc218\uc9c1\uc73c\ub85c \uc870\uc808 \uac00\ub2a5\ud55c \ub2e4\uc911 \uad6c\uc5ed \uacf5\uae30 \ud750\ub984<\/td>\n<\/tr>\n<tr data-start=\"3036\" data-end=\"3067\">\n<td data-start=\"3036\" data-end=\"3053\" data-col-size=\"sm\">\ud68c\uc804 \uc18d\ub3c4<\/td>\n<td data-start=\"3053\" data-end=\"3067\" data-col-size=\"md\">0-1000 rpm<\/td>\n<\/tr>\n<tr data-start=\"3068\" data-end=\"3101\">\n<td data-start=\"3068\" data-end=\"3086\" data-col-size=\"sm\">\ucd5c\ub300 \uc131\uc7a5\ub960<\/td>\n<td data-start=\"3086\" data-end=\"3101\" data-col-size=\"md\">\u226560 \u03bcm\/\uc2dc\uac04<\/td>\n<\/tr>\n<tr data-start=\"3102\" data-end=\"3163\">\n<td data-start=\"3102\" data-end=\"3125\" data-col-size=\"sm\">\ub450\uaed8 \uade0\uc77c\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"3125\" data-end=\"3163\">\u22642%(\ucd5c\uc801\ud654\ub41c \u22641%, \u03c3\/\ud3c9\uade0, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3164\" data-end=\"3224\">\n<td data-start=\"3164\" data-end=\"3184\" data-col-size=\"sm\">\ub3c4\ud551 \uade0\uc77c\uc131<\/td>\n<td data-col-size=\"md\" data-start=\"3184\" data-end=\"3224\">\u22643%(\ucd5c\uc801\ud654\ub41c \u22641.5%, \u03c3\/\ud3c9\uade0, EE 5mm)<\/td>\n<\/tr>\n<tr data-start=\"3225\" data-end=\"3287\">\n<td data-start=\"3225\" data-end=\"3249\" data-col-size=\"sm\">\ud0ac\ub7ec \uacb0\ud568 \ubc00\ub3c4<\/td>\n<td data-col-size=\"md\" data-start=\"3249\" data-end=\"3287\">\u22640.2cm-\u00b2(0.01cm-\u00b2\ub85c \ucd5c\uc801\ud654\ub428)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"1w46w82\" data-start=\"3294\" data-end=\"3322\"><span role=\"text\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158 \uc2dc\ub098\ub9ac\uc624<\/span><\/h2>\n<p data-start=\"3324\" data-end=\"3514\">\uc774 \uc7a5\ube44\ub294 \ud2b9\ud788 \uace0\ud6a8\uc728, \uace0\uc804\uc555, \ub192\uc740 \uc5f4 \uc131\ub2a5\uc774 \uc694\uad6c\ub418\ub294 \uc0b0\uc5c5\uc5d0\uc11c \ucca8\ub2e8 SiC \uae30\ubc18 \ubc18\ub3c4\uccb4 \uc7a5\uce58 \uc0dd\uc0b0\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n<ul data-start=\"3516\" data-end=\"4364\">\n<li data-section-id=\"qrtaas\" data-start=\"3516\" data-end=\"3707\">\uc804\uae30 \uc790\ub3d9\ucc28(EV)<br data-start=\"3545\" data-end=\"3548\" \/>\uc778\ubc84\ud130, \uc628\ubcf4\ub4dc \ucda9\uc804\uae30, DC-DC \ucee8\ubc84\ud130\uc6a9 SiC MOSFET \ubc0f \uc804\ub825 \ubaa8\ub4c8 \uc0dd\uc0b0\uc5d0 \uc0ac\uc6a9\ub418\uc5b4 \uc5d0\ub108\uc9c0 \ud6a8\uc728\uacfc \uc8fc\ud589 \uac70\ub9ac\ub97c \uac1c\uc120\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1j97evh\" data-start=\"3709\" data-end=\"3867\">\uc7ac\uc0dd \uc5d0\ub108\uc9c0 \uc2dc\uc2a4\ud15c<br data-start=\"3739\" data-end=\"3742\" \/>\ud0dc\uc591\uad11 \uc778\ubc84\ud130 \ubc0f \uc5d0\ub108\uc9c0 \uc800\uc7a5 \uc2dc\uc2a4\ud15c\uc5d0 \uc801\uc6a9\ub418\uc5b4 \ubcc0\ud658 \ud6a8\uc728\uacfc \uc2dc\uc2a4\ud15c \uc548\uc815\uc131\uc744 \ub192\uc785\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"8pfhmh\" data-start=\"3869\" data-end=\"4041\">\uc0b0\uc5c5\uc6a9 \uc804\ub825 \uc804\uc790<br data-start=\"3903\" data-end=\"3906\" \/>\uc548\uc815\uc801\uc774\uace0 \ud6a8\uc728\uc801\uc778 \uc791\ub3d9\uc774 \ud544\uc694\ud55c \uace0\ucd9c\ub825 \ubaa8\ud130 \ub4dc\ub77c\uc774\ube0c, \uc0b0\uc5c5 \uc790\ub3d9\ud654 \uc2dc\uc2a4\ud15c, \uc804\uc6d0 \uacf5\uae09 \uc7a5\uce58\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"frfj8s\" data-start=\"4043\" data-end=\"4206\">\ucca0\ub3c4 \uc6b4\uc1a1 \ubc0f \uc804\ub825\ub9dd<br data-start=\"4075\" data-end=\"4078\" \/>\uc2a4\ub9c8\ud2b8 \uadf8\ub9ac\ub4dc, \uacac\uc778 \uc2dc\uc2a4\ud15c, \uc1a1\uc804 \uc778\ud504\ub77c\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uace0\uc804\uc555 \ubc0f \uace0\uc8fc\ud30c \uc7a5\uce58\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1k6eb43\" data-start=\"4208\" data-end=\"4364\">\ud558\uc774\uc5d4\ub4dc \uc804\ub825 \uc7a5\uce58<br data-start=\"4236\" data-end=\"4239\" \/>\uc1fc\ud2b8\ud0a4 \ub2e4\uc774\uc624\ub4dc, MOSFET \ubc0f \ucc28\uc138\ub300 \uace0\uc804\uc555 \ubd80\ud488\uacfc \uac19\uc740 \uace0\uae09 SiC \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"wp-image-2080 size-large aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png\" alt=\"\" width=\"1024\" height=\"578\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-1024x578.png 1024w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-768x433.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application-600x339.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/application.png 1285w\" sizes=\"(max-width: 1024px) 100vw, 1024px\" \/><\/p>\n<h2 data-section-id=\"elc90z\" data-start=\"4371\" data-end=\"4381\"><span role=\"text\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/span><\/h2>\n<h3 data-section-id=\"1f731tm\" data-start=\"4383\" data-end=\"4453\"><span role=\"text\">1. \uc774 \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 \uc5b4\ub5a4 \uc6e8\uc774\ud37c \ud06c\uae30\ub97c \uc9c0\uc6d0\ud558\ub098\uc694?<\/span><\/h3>\n<p data-start=\"4454\" data-end=\"4606\">\uc774 \uc2dc\uc2a4\ud15c\uc740 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc6e8\uc774\ud37c\ub97c \ubaa8\ub450 \uc9c0\uc6d0\ud558\ubbc0\ub85c \uc81c\uc870\uc5c5\uccb4\ub294 \ud604\uc7ac\uc758 \uc0dd\uc0b0 \uc218\uc694\ub97c \ucda9\uc871\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ud5a5\ud6c4 \ud655\uc7a5\uc5d0 \ub300\ube44\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<h3 data-section-id=\"8a4v60\" data-start=\"4613\" data-end=\"4683\"><span role=\"text\">2. \uc218\uc9c1 \uacf5\uae30 \ud750\ub984 \uc124\uacc4\ub294 \uc5b4\ub5a4 \uc774\uc810\uc744 \uc81c\uacf5\ud558\ub098\uc694?<\/span><\/h3>\n<p data-start=\"4684\" data-end=\"4858\">\uc218\uc9c1 \uae30\ub958 \uc2dc\uc2a4\ud15c\uc740 \uc6e8\uc774\ud37c \uc804\uccb4\uc5d0 \uade0\uc77c\ud55c \uac00\uc2a4 \ubd84\ud3ec\ub97c \ubcf4\uc7a5\ud558\uc5ec \ub450\uaed8 \uc77c\uad00\uc131\uc744 \uac1c\uc120\ud558\uace0 \uacb0\ud568\uc744 \uc904\uc774\uba70 \uc804\ubc18\uc801\uc778 \uc5d0\ud53c\ud0dd\uc15c \ud488\uc9c8\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n<h3 data-section-id=\"1rbmoqb\" data-start=\"4865\" data-end=\"4935\"><span role=\"text\">3. \uc774 \uc7a5\ube44\ub294 \ub300\ub7c9 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud55c\uac00\uc694?<\/span><\/h3>\n<p data-start=\"4936\" data-end=\"5110\">\uc608, \uc774 \uc2dc\uc2a4\ud15c\uc740 \ub4c0\uc5bc \ucc54\ubc84 \uad6c\uc131\uacfc \uc5f0\uc18d \uc791\ub3d9 \ubaa8\ub4dc\ub97c \uac16\ucd94\uace0 \uc788\uc73c\uba70 \uc6d4 \ucc98\ub9ac\ub7c9\uc774 1100\uac1c \uc774\uc0c1\uc758 \uc6e8\uc774\ud37c\ub97c \ucc98\ub9ac\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc548\uc815\uc801\uc778 \ub300\uaddc\ubaa8 \uc0b0\uc5c5 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud558\uba70 \uc77c\uad00\ub41c \uc0dd\uc0b0\ub7c9, \ub192\uc740 \uc218\uc728 \uc548\uc815\uc131 \ubc0f \uc7a5\uae30\uc801\uc778 \uc6b4\uc601 \ud6a8\uc728\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>\ud1b5\ud569 \uc218\uc9c1 \uacf5\uae30 \ud750\ub984 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub294 6\uc778\uce58 \ubc0f 8\uc778\uce58 SiC \uc5d0\ud53c \uc6e8\uc774\ud37c\uc758 \uace0\ud6a8\uc728 \uc0dd\uc0b0\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucca8\ub2e8 \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2078,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[730],"product_tag":[734,735,737,738,745,740,744,739,733,731,603,732,742,741,736,743],"class_list":{"0":"post-2077","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-epitaxy-equipment","7":"product_tag-6-inch-sic-wafer","8":"product_tag-8-inch-sic-wafer","9":"product_tag-cvd-epitaxy-system","10":"product_tag-epitaxial-growth-system","11":"product_tag-ev-power-semiconductors","12":"product_tag-high-voltage-sic-devices","13":"product_tag-industrial-power-electronics","14":"product_tag-semiconductor-manufacturing-equipment","15":"product_tag-sic-epi-wafer-production","16":"product_tag-sic-epitaxy-equipment","17":"product_tag-sic-power-devices","18":"product_tag-silicon-carbide-epitaxy-reactor","19":"product_tag-thick-epitaxy-growth","20":"product_tag-trench-filling-epitaxy","21":"product_tag-vertical-airflow-epitaxy","22":"product_tag-wafer-epitaxy-reactor","23":"desktop-align-left","24":"tablet-align-left","25":"mobile-align-left","26":"ast-product-gallery-layout-horizontal-slider","27":"ast-product-tabs-layout-horizontal","29":"first","30":"instock","31":"shipping-taxable","32":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2077","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/comments?post=2077"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2077\/revisions"}],"predecessor-version":[{"id":2082,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/2077\/revisions\/2082"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media\/2078"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media?parent=2077"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_brand?post=2077"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_cat?post=2077"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_tag?post=2077"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}