{"id":2048,"date":"2026-04-01T05:59:16","date_gmt":"2026-04-01T05:59:16","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2048"},"modified":"2026-04-01T06:04:59","modified_gmt":"2026-04-01T06:04:59","slug":"microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/microfluidic-laser-equipment-for-high-precision-semiconductor-wafer-processing\/","title":{"rendered":"\uace0\uc815\ubc00 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uac00\uacf5\uc744 \uc704\ud55c \ubbf8\uc138 \uc720\uccb4 \ub808\uc774\uc800 \uc7a5\ube44"},"content":{"rendered":"

\"\"\ubbf8\uc138 \uc720\uccb4 \ub808\uc774\uc800 \uc7a5\ube44\ub294 \ucca8\ub2e8 \ub9c8\uc774\ud06c\ub85c\uc82f \ub808\uc774\uc800 \uae30\uc220\uc744 \ud65c\uc6a9\ud558\uc5ec \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \ubc0f \uae30\ud0c0 \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc\ub098 \ub113\uc740 \ubc34\ub4dc\uac2d \uc7ac\ub8cc\ub97c \uace0\uc815\ubc00, \uc800\uc5f4 \uc190\uc0c1\uc73c\ub85c \uac00\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc11c\ube0c\ub9c8\uc774\ud06c\ub860 \uc6cc\ud130\uc82f\uacfc \ub808\uc774\uc800 \ube54\uc744 \uacb0\ud569\ud558\uc5ec \ub808\uc774\uc800 \uc5d0\ub108\uc9c0\ub97c \uacf5\uc791\ubb3c \ud45c\uba74\uc73c\ub85c \uc815\ud655\ud558\uac8c \uc548\ub0b4\ud558\ub294 \ub3d9\uc2dc\uc5d0 \ubb3c\uc904\uae30\uac00 \uc9c0\uc18d\uc801\uc73c\ub85c \ub0c9\uac01\ub418\uc5b4 \uc774\ubb3c\uc9c8\uc744 \uc81c\uac70\ud569\ub2c8\ub2e4. \uc774 \uae30\uc220\uc740 \uc5f4 \uc190\uc0c1, \ubbf8\uc138 \uade0\uc5f4, \uc624\uc5fc, \ud14c\uc774\ud37c, \ubcc0\ud615 \ub4f1 \uae30\uc874 \ub808\uc774\uc800 \ubc0f \uae30\uacc4 \uac00\uacf5\uc758 \uc77c\ubc18\uc801\uc778 \ubb38\uc81c\ub97c \ud6a8\uacfc\uc801\uc73c\ub85c \ud574\uacb0\ud569\ub2c8\ub2e4.<\/p>\n

\"\"\uc8fc\uc694 \uae30\ub2a5<\/strong><\/span><\/h2>\n
    \n
  • \ub808\uc774\uc800 \uc720\ud615:<\/strong> \ub2e4\uc774\uc624\ub4dc \ud38c\ud551 \uace0\uccb4 Nd:YAG \ub808\uc774\uc800, \ud30c\uc7a5 532\/1064nm, \ud384\uc2a4 \ud3ed \u03bcs\/ns, \ud3c9\uade0 \uc804\ub825 10-200W<\/li>\n
  • \uc6cc\ud130\uc82f \uc2dc\uc2a4\ud15c:<\/strong> \uc800\uc555, \ud0c8\uc774\uc628\ud654\ub41c \uc5ec\uacfc\uc218; \ucd08\ubbf8\uc138 \ub9c8\uc774\ud06c\ub85c\uc82f\uc740 300bar\uc5d0\uc11c 1L\/h\ub9cc \uc18c\ube44\ud558\uba70, \ubb34\uc2dc\ud560 \uc218 \uc788\ub294 \ud798(<0.1N)\uc744 \uc0ac\uc6a9\ud569\ub2c8\ub2e4.<\/li>\n
  • \ub178\uc990:<\/strong> \uc815\ubc00\ud55c \ub808\uc774\uc800 \uc548\ub0b4\ub97c \uc704\ud55c \uc0ac\ud30c\uc774\uc5b4 \ub610\ub294 \ub2e4\uc774\uc544\ubaac\ub4dc, \uc9c1\uacbd 30-150\u03bcm<\/li>\n
  • \ubcf4\uc870 \uc2dc\uc2a4\ud15c:<\/strong> \uace0\uc555 \ud38c\ud504\uc640 \uc218\ucc98\ub9ac \uc7a5\uce58\uac00 \uc548\uc815\uc801\uc778 \uc81c\ud2b8 \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n
  • \uc815\ud655\uc131:<\/strong> \uc704\uce58 \uc815\ud655\ub3c4 \u00b15\u03bcm, \ubc18\ubcf5 \uc704\uce58 \uc815\ud655\ub3c4 \u00b12\u03bcm<\/li>\n
  • \ucc98\ub9ac \ub2a5\ub825:<\/strong> \ud45c\uba74 \uac70\uce60\uae30 Ra \u22641.2-1.6 \u03bcm, \uc120\ud615 \uc808\ub2e8 \uc18d\ub3c4 \u226550 mm\/s, \uac1c\ubc29 \uc18d\ub3c4 \u22651.25 mm\/s, \uc6d0\uc8fc \uc808\ub2e8 \u22656 mm\/s<\/li>\n<\/ul>\n

    \uae30\uc220 \uc0ac\uc591<\/strong><\/span><\/h2>\n
    \n
    \n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
    \uc0ac\uc591<\/th>\n\uc635\uc158 1<\/th>\n\uc635\uc158 2<\/th>\n<\/tr>\n<\/thead>\n
    \uc870\ub9ac\ub300 \ubcfc\ub968(mm)<\/td>\n300\u00d7300\u00d7150<\/td>\n400\u00d7400\u00d7200<\/td>\n<\/tr>\n
    \uc120\ud615 \ucd95 XY<\/td>\n\ub9ac\ub2c8\uc5b4 \ubaa8\ud130<\/td>\n\ub9ac\ub2c8\uc5b4 \ubaa8\ud130<\/td>\n<\/tr>\n
    \uc120\ud615 \ucd95 Z<\/td>\n150<\/td>\n200<\/td>\n<\/tr>\n
    \uc704\uce58 \uc815\ud655\ub3c4(\u03bcm)<\/td>\n\u00b15<\/td>\n\u00b15<\/td>\n<\/tr>\n
    \ubc18\ubcf5 \uc704\uce58 \uc815\ud655\ub3c4(\u03bcm)<\/td>\n\u00b12<\/td>\n\u00b12<\/td>\n<\/tr>\n
    \uac00\uc18d\ub3c4(G)<\/td>\n1<\/td>\n0.29<\/td>\n<\/tr>\n
    \uc218\uce58 \uc81c\uc5b4<\/td>\n3\ucd95 \/ 3+1 \/ 3+2 \ucd95<\/td>\n3\ucd95 \/ 3+1 \/ 3+2 \ucd95<\/td>\n<\/tr>\n
    \ud30c\uc7a5(nm)<\/td>\n532\/1064<\/td>\n532\/1064<\/td>\n<\/tr>\n
    \uc815\uaca9 \uc804\ub825(W)<\/td>\n50\/100\/200<\/td>\n50\/100\/200<\/td>\n<\/tr>\n
    \uc6cc\ud130\uc82f \uc555\ub825(\ubc14)<\/td>\n50-100<\/td>\n50-600<\/td>\n<\/tr>\n
    \ub178\uc990 \ud06c\uae30(\u03bcm)<\/td>\n30-150<\/td>\n30-150<\/td>\n<\/tr>\n
    \uae30\uacc4 \uce58\uc218(mm)<\/td>\n1445\u00d71944\u00d72260<\/td>\n1700\u00d71500\u00d72120<\/td>\n<\/tr>\n
    \ubb34\uac8c(T)<\/td>\n2.5<\/td>\n3<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

    \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong><\/span><\/h2>\n
      \n
    1. \uc6e8\uc774\ud37c \ub2e4\uc774\uc2f1 \ubc0f \uc808\ub2e8<\/strong>\n
        \n
      • \uc7ac\ub8cc: \uc2e4\ub9ac\ucf58(Si), \ud0c4\ud654\uaddc\uc18c(SiC), \uc9c8\ud654\uac08\ub968(GaN) \ubc0f \uae30\ud0c0 \uacbd\uc9c8\/\ucde8\uc131 \uc6e8\uc774\ud37c<\/li>\n
      • \uc7a5\uc810: \uae30\uc874 \ub2e4\uc774\uc544\ubaac\ub4dc \ube14\ub808\uc774\ub4dc \ub300\uccb4, \uac00\uc7a5\uc790\ub9ac \ud30c\uc190 \uac10\uc18c(5\u03bcm \ubbf8\ub9cc \ub300 20\u03bcm \uc774\uc0c1), \uc808\ub2e8 \uc18d\ub3c4 30% \uc99d\uac00, \ucd08\ubc15\ud615 \uc6e8\uc774\ud37c(50\u03bcm \ubbf8\ub9cc)\uc5d0 \uc2a4\ud154\uc2a4 \ub2e4\uc774\uc2f1 \uac00\ub2a5<\/li>\n<\/ul>\n<\/li>\n
      • \uce69 \ub4dc\ub9b4\ub9c1 \ubc0f \ub9c8\uc774\ud06c\ub85c \ud640 \uac00\uacf5<\/strong>\n
          \n
        • \uc560\ud50c\ub9ac\ucf00\uc774\uc158: \uc2e4\ub9ac\ucf58 \uad00\ud1b5\uc804\uadf9(TSV) \ub4dc\ub9b4\ub9c1, \uc804\ub825 \uc7a5\uce58\uc6a9 \uc5f4 \ub9c8\uc774\ud06c\ub85c\ud640 \uc5b4\ub808\uc774<\/li>\n
        • \ud2b9\uc9d5: \uc870\ub9ac\uac1c 10-200 \u03bcm, \uae4a\uc774 \ub300 \ub108\ube44 \ube44\uc728 \ucd5c\ub300 10:1, \ud45c\uba74 \uc870\ub3c4 Ra <0.5 \u03bcm<\/li>\n<\/ul>\n<\/li>\n
        • \uace0\uae09 \ud328\ud0a4\uc9d5<\/strong>\n
            \n
          • \uc560\ud50c\ub9ac\ucf00\uc774\uc158: RDL \ucc3d \uc5f4\uae30, \uc6e8\uc774\ud37c \ub808\ubca8 \ud328\ud0a4\uc9d5(\ud32c\uc544\uc6c3 WLP)<\/li>\n
          • \uc774\uc810: \uae30\uacc4\uc801 \uc2a4\ud2b8\ub808\uc2a4 \ubc29\uc9c0, 99.5% \uc774\uc0c1\uc73c\ub85c \uc218\uc728 \ud5a5\uc0c1<\/li>\n<\/ul>\n<\/li>\n
          • \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4 \uacf5\uc815<\/strong>\n
              \n
            • \uc7ac\ub8cc GaN, SiC \ubc0f \uae30\ud0c0 \uc640\uc774\ub4dc \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4<\/li>\n
            • \ud2b9\uc9d5: \uac8c\uc774\ud2b8 \ub178\uce58 \uc5d0\uce6d, \ub808\uc774\uc800 \uc5b4\ub2d0\ub9c1, \uc5f4 \ubd84\ud574\ub97c \ubc29\uc9c0\ud558\ub294 \uc815\ubc00\ud55c \uc5d0\ub108\uc9c0 \uc81c\uc5b4<\/li>\n<\/ul>\n<\/li>\n
            • \uacb0\ud568 \uc218\ub9ac \ubc0f \ubbf8\uc138 \uc870\uc815<\/strong>\n
                \n
              • \uc560\ud50c\ub9ac\ucf00\uc774\uc158: \uba54\ubaa8\ub9ac \ud68c\ub85c\uc6a9 \ub808\uc774\uc800 \ud4e8\uc9d5, \uad11\ud559 \uc13c\uc11c\uc6a9 \ub9c8\uc774\ud06c\ub85c\ub80c\uc988 \uc5b4\ub808\uc774 \ud29c\ub2dd<\/li>\n
              • \uc815\ud655\ub3c4: \uc5d0\ub108\uc9c0 \uc81c\uc5b4 \u00b11%, \uc218\ub9ac \uc704\uce58 \uc624\ucc28 <0.1\u03bcm<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n

                \"\"<\/p>\n

                \uc8fc\uc694 \ud2b9\uc9d5 \ubc0f \uc7a5\uc810<\/strong><\/span><\/h2>\n
                  \n
                • \ucc28\uac11\uace0 \uae68\ub057\ud558\uba70 \uc81c\uc5b4\ub41c \ucc98\ub9ac\ub85c \uc5f4 \uc190\uc0c1, \ubbf8\uc138 \uade0\uc5f4 \ubc0f \ud14c\uc774\ud37c \ucd5c\uc18c\ud654<\/li>\n
                • \ucd08\ubbf8\uc138 \uc6cc\ud130 \uc81c\ud2b8\ub85c \uc815\ubc00\ud55c \ub808\uc774\uc800 \uc548\ub0b4\uc640 \ud6a8\uc728\uc801\uc778 \uc774\ubb3c\uc9c8 \uc81c\uac70 \ubcf4\uc7a5<\/li>\n
                • SiC, GaN, \ub2e4\uc774\uc544\ubaac\ub4dc, LTCC \ubc0f \ud0dc\uc591\uad11 \uacb0\uc815\uacfc \uac19\uc774 \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \ud22c\uba85\ud55c \uc7ac\ub8cc\uc5d0 \uc801\ud569<\/li>\n
                • \uace0\uc815\ubc00 \ubc18\ub3c4\uccb4 \uc81c\uc870, \ucca8\ub2e8 \ud328\ud0a4\uc9d5, \ud56d\uacf5\uc6b0\uc8fc \ubd80\ud488 \ubc0f \ub9c8\uc774\ud06c\ub85c\uc77c\ub809\ud2b8\ub85c\ub2c9\uc2a4\uc640 \ud638\ud658 \uac00\ub2a5<\/li>\n
                • \uc218\uc728 \ud5a5\uc0c1, \uc7ac\ub8cc \ub0ad\ube44 \uac10\uc18c, \uc7ac\ub8cc \ud2b9\uc131 \ubcf4\uc874<\/li>\n<\/ul>\n

                  \uc778\uc99d \ubc0f \uaddc\uc815 \uc900\uc218<\/strong><\/span><\/h2>\n
                    \n
                  • RoHS \uc900\uc218<\/li>\n
                  • \uace0\uc815\ubc00 \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc744 \uc704\ud55c \uc124\uacc4<\/li>\n
                  • \uc7ac\ud604 \uac00\ub2a5\ud558\uace0 \ubc18\ubcf5 \uac00\ub2a5\ud558\uba70 \uc790\ub3d9\ud654\ub41c \ucc98\ub9ac \uc9c0\uc6d0<\/li>\n<\/ul>\n

                    \uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/strong><\/span><\/h2>\n

                    1. \ubbf8\uc138 \uc720\uccb4 \ub808\uc774\uc800 \uc7a5\ube44\ub85c \uac00\uacf5\ud560 \uc218 \uc788\ub294 \uc7ac\ub8cc\uc758 \uc885\ub958\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/strong>
                    \ubbf8\uc138\uc720\uccb4 \ub808\uc774\uc800 \uae30\uc220\uc740 \uc2e4\ub9ac\ucf58(Si), \ud0c4\ud654\uaddc\uc18c(SiC), \uc9c8\ud654\uac08\ub968(GaN), \ub2e4\uc774\uc544\ubaac\ub4dc, LTCC \ud0c4\uc18c \uc138\ub77c\ubbf9 \uae30\ud310, \ud0dc\uc591\uad11 \uacb0\uc815 \ubc0f \uae30\ud0c0 \ucca8\ub2e8 \uc18c\uc7ac\ub97c \ud3ec\ud568\ud558\uc5ec \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \ub113\uc740 \ubc34\ub4dc\uac2d \ubc18\ub3c4\uccb4 \uc18c\uc7ac\ub97c \uc815\ubc00\ud558\uac8c \uac00\uacf5\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \ucd5c\uc18c\ud55c\uc758 \uc5f4 \uc190\uc0c1\uacfc \ub192\uc740 \ud45c\uba74 \ud488\uc9c8\uc774 \ud544\uc694\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n

                    2. \ub9c8\uc774\ud06c\ub85c\uc82f \ub808\uc774\uc800 \uae30\uc220\uc740 \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \uc81c\uc870\ub97c \uc5b4\ub5bb\uac8c \uac1c\uc120\ud558\ub098\uc694?<\/strong>
                    \uc774 \uae30\uc220\uc740 \uc11c\ube0c \ub9c8\uc774\ud06c\ub860 \uc6cc\ud130\uc82f\uacfc \ub808\uc774\uc800 \ube54\uc744 \uacb0\ud569\ud558\uc5ec \uc5f4 \uc601\ud5a5 \uc601\uc5ed, \uc624\uc5fc \ubc0f \ubaa8\uc11c\ub9ac \ud30c\uc190\uc744 \ucd5c\uc18c\ud654\ud558\uba74\uc11c \uc11c\ube0c \ub9c8\uc774\ud06c\ub860 \uc218\uc900\uc758 \uc815\ud655\ub3c4\ub97c \ub2ec\uc131\ud569\ub2c8\ub2e4. \uc774 \uae30\uc220\uc740 \ub2e4\uc774\uc2f1, \ub4dc\ub9b4\ub9c1 \ubc0f \ubbf8\uc138 \uad6c\uc870\ud654\ub97c \uc704\ud55c \uae30\uc874\uc758 \uae30\uacc4\uc2dd \ube14\ub808\uc774\ub4dc\ub97c \ub300\uccb4\ud558\uc5ec \uc218\uc728\uc744 \uac1c\uc120\ud558\uace0 \uc7ac\ub8cc \ub0ad\ube44\ub97c \uc904\uc785\ub2c8\ub2e4.<\/p>\n

                    3. \ubbf8\uc138 \uc720\uccb4 \ub808\uc774\uc800 \uc7a5\ube44\ub294 \uc5b4\ub5a4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uac00\uc7a5 \uc801\ud569\ud569\ub2c8\uae4c?<\/strong>
                    \uc774 \uc7a5\ube44\ub294 \ub110\ub9ac \uc0ac\uc6a9\ub429\ub2c8\ub2e4:<\/p>\n

                      \n
                    • \ucd08\ubc15\ud615 \uc6e8\uc774\ud37c(50\u03bcm \ubbf8\ub9cc)\uc758 \uc6e8\uc774\ud37c \ub2e4\uc774\uc2f1 \ubc0f \uc2a4\ud154\uc2a4 \ub2e4\uc774\uc2f1<\/li>\n
                    • 3D IC \ubc0f \uc804\ub825 \uc18c\uc790\ub97c \uc704\ud55c \uc2e4\ub9ac\ucf58 \uad00\ud1b5\uc804\uadf9(TSV) \ub4dc\ub9b4\ub9c1 \ubc0f \ub9c8\uc774\ud06c\ub85c\ud640 \uc5b4\ub808\uc774<\/li>\n
                    • RDL \ucc3d \uc5f4\uae30, \uc6e8\uc774\ud37c \ub808\ubca8 \ud328\ud0a4\uc9d5(\ud32c\uc544\uc6c3 WLP), GaN \ubc0f SiC \ubc18\ub3c4\uccb4\ub97c \uc704\ud55c \uac8c\uc774\ud2b8 \uc5d0\uce6d\/\ub808\uc774\uc800 \uc5b4\ub2d0\ub9c1\uacfc \uac19\uc740 \uace0\uae09 \ud328\ud0a4\uc9d5<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                      \ubbf8\uc138\uc720\uccb4 \ub808\uc774\uc800 \uc7a5\ube44\ub294 \ucca8\ub2e8 \ub9c8\uc774\ud06c\ub85c\uc82f \ub808\uc774\uc800 \uae30\uc220\uc744 \ud65c\uc6a9\ud558\uc5ec \ubc18\ub3c4\uccb4 \uc6e8\uc774\ud37c \ubc0f \uae30\ud0c0 \ub2e8\ub2e8\ud558\uace0 \ubd80\uc11c\uc9c0\uae30 \uc26c\uc6b4 \uc7ac\ub8cc \ub610\ub294 \ub113\uc740 \ubc34\ub4dc\uac2d \uc7ac\ub8cc\uc5d0 \ub300\ud574 \uace0\uc815\ubc00, \uc800\uc5f4 \uc190\uc0c1 \ucc98\ub9ac\ub97c \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2049,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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