{"id":2021,"date":"2026-03-27T01:46:43","date_gmt":"2026-03-27T01:46:43","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2021"},"modified":"2026-03-27T01:46:45","modified_gmt":"2026-03-27T01:46:45","slug":"high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/high-precision-wafer-bonding-equipment-for-si-si-sic-sic-heterogeneous-integration\/","title":{"rendered":"\uc2e4\ub9ac\ucf58-\uc2e4\ub9ac\ucf58, \uc2e4\ub9ac\ucf58-\uc2e4\ub9ac\ucf58 \ubc0f \uc774\uae30\uc885 \ud1b5\ud569\uc744 \uc704\ud55c \uace0\uc815\ubc00 \uc6e8\uc774\ud37c \ubcf8\ub529 \uc7a5\ube44"},"content":{"rendered":"

\uc6e8\uc774\ud37c \ubcf8\ub529 \uc7a5\ube44\ub294 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5, MEMS \uc81c\uc870 \ubc0f 3\uc138\ub300 \ubc18\ub3c4\uccb4 \ud1b5\ud569\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4. 2\uc778\uce58\uc5d0\uc11c 12\uc778\uce58 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud558\uba70 \uc0c1\uc628 \uc9c1\uc811 \ubcf8\ub529 \ubc0f \uce5c\uc218\uc131 \ubcf8\ub529\uc774 \uac00\ub2a5\ud558\uc5ec \ud2b9\ud788 Si-Si, SiC-SiC \ubc0f \uc774\uc885 \uc7ac\ub8cc \ubcf8\ub529(Si-SiC, GaN, \uc0ac\ud30c\uc774\uc5b4 \ub4f1)\uc5d0 \uc801\ud569\ud569\ub2c8\ub2e4.<\/p>\n

\"\"<\/p>\n

R&D \ud658\uacbd\uacfc \ub300\ub7c9 \uc0dd\uc0b0 \ubaa8\ub450\ub97c \uc704\ud574 \uc124\uacc4\ub41c \uc774 \uc2dc\uc2a4\ud15c\uc740 \ucd08\uc815\ubc00 \uc815\ub82c, \ud3d0\uc1c4 \ub8e8\ud504 \uc555\ub825 \ubc0f \uc628\ub3c4 \uc81c\uc5b4, \ucd08\uace0\uc9c4\uacf5 \ubcf8\ub529 \uc870\uac74\uc744 \ud1b5\ud569\ud558\uc5ec \ub192\uc740 \uc811\ucc29 \uac15\ub3c4, \uc6b0\uc218\ud55c \uc778\ud130\ud398\uc774\uc2a4 \uade0\uc77c\uc131, \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n

\uc8fc\uc694 \uae30\ub2a5<\/span><\/h1>\n

\"\"1. \uace0\uae09 \uc0c1\uc628 \ubcf8\ub529 \uae30\uc220<\/span><\/h3>\n
    \n
  • \uc5f4 \uc751\ub825 \ubc0f \uc6e8\uc774\ud37c \ub4a4\ud2c0\ub9bc \uc81c\uac70<\/li>\n
  • \uc628\ub3c4\uc5d0 \ubbfc\uac10\ud558\uace0 \uc11c\ub85c \ub2e4\ub978 \uc7ac\ub8cc\uc758 \uc811\ucc29 \uac00\ub2a5<\/li>\n
  • \uce5c\uc218\uc131 \uacb0\ud569 \ubc0f \ud50c\ub77c\uc988\ub9c8 \ud65c\uc131\ud654 \uacb0\ud569 \uc9c0\uc6d0<\/li>\n<\/ul>\n

    2. \ucd08\uc815\ubc00 \uc815\ub82c<\/span><\/h3>\n
      \n
    • \ub9c8\ud06c \uc815\ub82c \uc815\ud655\ub3c4: \u2264 \u00b12\u03bcm<\/li>\n
    • \uc5d0\uc9c0 \uc815\ub82c \uc815\ud655\ub3c4: \u2264 \u00b150\u03bcm<\/li>\n
    • \uc11c\ube0c\ubbf8\ud06c\ub860 \uc815\ub82c \uc2dc\uc2a4\ud15c\uc73c\ub85c \uc5c5\uadf8\ub808\uc774\ub4dc(\uc635\uc158)<\/li>\n<\/ul>\n

      3. \ub192\uc740 \uacb0\ud569 \uac15\ub3c4 \ubc0f \uc778\ud130\ud398\uc774\uc2a4 \ud488\uc9c8<\/span><\/h3>\n
        \n
      • \u2265 2.0 J\/m\u00b2 \uc774\uc0c1(\uc2e4\uc628\uc5d0\uc11c Si-Si \uc9c1\uc811 \uacb0\ud569)<\/li>\n
      • \ud50c\ub77c\uc988\ub9c8 \ud45c\uba74 \ud65c\uc131\ud654\ub85c \ucd5c\ub300 \u22655 J\/m\u00b2 \ub2ec\uc131<\/li>\n
      • UHV \uc870\uac74\uc5d0\uc11c \ub6f0\uc5b4\ub09c \uc778\ud130\ud398\uc774\uc2a4 \uccad\uacb0\ub3c4<\/li>\n<\/ul>\n

        4. \ud3ed\ub113\uc740 \uc18c\uc7ac \ud638\ud658\uc131<\/span><\/h3>\n

        \ubcf8\ub529\uc744 \uc9c0\uc6d0\ud569\ub2c8\ub2e4:<\/p>\n

          \n
        • \ubc18\ub3c4\uccb4 Si, SiC, GaN, GaAs, InP<\/li>\n
        • \uad11\ud559 \uc7ac\ub8cc: \uc0ac\ud30c\uc774\uc5b4, \uc720\ub9ac<\/li>\n
        • \uae30\ub2a5\uc131 \uc18c\uc7ac: LiNbO\u2083, \ub2e4\uc774\uc544\ubaac\ub4dc<\/li>\n<\/ul>\n

          5. \uc720\uc5f0\ud55c \ud504\ub85c\uc138\uc2a4 \uae30\ub2a5<\/span><\/h3>\n
            \n
          • \uc6e8\uc774\ud37c \ud06c\uae30: 2\uc778\uce58 - 12\uc778\uce58<\/li>\n
          • \ubd88\uaddc\uce59\ud55c \ubaa8\uc591\uc758 \uc0d8\ud50c\uacfc \ud638\ud658<\/li>\n
          • \uc635\uc158 \ubaa8\ub4c8: \uc608\uc5f4\/\uc5b4\ub2d0\ub9c1(RT-500\u00b0C)<\/li>\n<\/ul>\n

            \uae30\uc220 \uc0ac\uc591<\/span><\/h1>\n
            \n
            \n\n\n\n\n\n\n\n\n\n\n\n\n
            \ub9e4\uac1c\ubcc0\uc218<\/th>\n\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n
            \ubcf8\ub529 \ubc29\ubc95<\/td>\n\uc9c1\uc811 \uacb0\ud569 \/ \ud50c\ub77c\uc988\ub9c8 \ud65c\uc131\ud654 \uacb0\ud569<\/td>\n<\/tr>\n
            \uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n2\u2033 - 12\u2033<\/td>\n<\/tr>\n
            \uc555\ub825 \ubc94\uc704<\/td>\n0 - 10 MPa<\/td>\n<\/tr>\n
            \ucd5c\ub300 \ud798<\/td>\n100 kN<\/td>\n<\/tr>\n
            \uc628\ub3c4 \ubc94\uc704<\/td>\n\uc2e4\ub0b4 \uc628\ub3c4 - 500\u00b0C(\uc635\uc158)<\/td>\n<\/tr>\n
            \uc9c4\uacf5 \ub808\ubca8<\/td>\n\u2264 5 \u00d7 10-\u2076 Torr<\/td>\n<\/tr>\n
            \uc815\ub82c \uc815\ud655\ub3c4<\/td>\n\u2264 \u00b12\u03bcm(\ub9c8\ud06c), \u2264 \u00b150\u03bcm(\uac00\uc7a5\uc790\ub9ac)<\/td>\n<\/tr>\n
            \uacb0\ud569 \uac15\ub3c4<\/td>\n\u2265 2.0 J\/m\u00b2(RT Si-Si)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n

            \"\"\uc9c0\ub2a5\ud615 \uc81c\uc5b4 \uc2dc\uc2a4\ud15c<\/span><\/h1>\n
              \n
            • \uc0b0\uc5c5\uc6a9 \ub4f1\uae09 \ud130\uce58\uc2a4\ud06c\ub9b0 HMI<\/li>\n
            • 50\uac1c \uc774\uc0c1\uc758 \ud504\ub85c\uc138\uc2a4 \ub808\uc2dc\ud53c \uc800\uc7a5 \uc9c0\uc6d0<\/li>\n
            • \uc2e4\uc2dc\uac04 \uc555\ub825-\uc628\ub3c4 \ud3d0\uc1c4 \ub8e8\ud504 \uc81c\uc5b4<\/li>\n
            • \uc548\uc815\uc801\uc774\uace0 \ubc18\ubcf5 \uac00\ub2a5\ud55c \ud504\ub85c\uc138\uc2a4 \uc131\ub2a5<\/li>\n<\/ul>\n

              \uc548\uc804 \ubc0f \uc2e0\ub8b0\uc131<\/span><\/h1>\n
                \n
              • 3\uc911 \uc778\ud130\ub85d \ubcf4\ud638(\uc555\ub825\/\uc628\ub3c4\/\uc9c4\uacf5)<\/li>\n
              • \ube44\uc0c1 \uc815\uc9c0 \uc2dc\uc2a4\ud15c<\/li>\n
              • \ud074\ub798\uc2a4 100 \ud074\ub9b0\ub8f8 \ud638\ud658\uc131\uc744 \uc704\ud55c \uc124\uacc4<\/li>\n<\/ul>\n

                \uc120\ud0dd\uc801 \uad6c\uc131<\/span><\/h1>\n
                  \n
                • \ub85c\ubd07 \uc6e8\uc774\ud37c \ucc98\ub9ac \uc2dc\uc2a4\ud15c<\/li>\n
                • SECS\/GEM \ud1b5\uc2e0 \uc778\ud130\ud398\uc774\uc2a4(\ud339 \ud1b5\ud569 \uc900\ube44 \uc644\ub8cc)<\/li>\n
                • \uc778\ub77c\uc778 \uac80\uc0ac \ubaa8\ub4c8<\/li>\n
                • \ud50c\ub77c\uc988\ub9c8 \ud45c\uba74 \ud65c\uc131\ud654 \uc7a5\uce58<\/li>\n<\/ul>\n

                  \uc77c\ubc18\uc801\uc778 \uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/span><\/h1>\n

                  1. MEMS \ud328\ud0a4\uc9d5<\/span><\/h3>\n

                  \uac00\uc18d\ub3c4\uacc4 \ubc0f \uc790\uc774\ub85c\uc2a4\ucf54\ud504\uc640 \uac19\uc740 \uc13c\uc11c\ub97c \uc704\ud55c \ubc00\ud3d0 \ubc00\ubd09<\/p>\n

                  2. 3D IC \ud1b5\ud569<\/span><\/h3>\n

                  TSV \ubc0f \ucca8\ub2e8 \ud328\ud0a4\uc9d5\uc744 \uc704\ud55c \uc6e8\uc774\ud37c \uc801\uce35<\/p>\n

                  3. \ud654\ud569\ubb3c \ubc18\ub3c4\uccb4 \uc18c\uc790<\/span><\/h3>\n

                  GaN\/SiC \uc804\ub825 \uc18c\uc790 \ubcf8\ub529 \ubc0f \uce35 \uc774\ub3d9<\/p>\n

                  4. CMOS \uc774\ubbf8\uc9c0 \uc13c\uc11c(CIS)<\/span><\/h3>\n

                  CMOS \uc6e8\uc774\ud37c \ubc0f \uad11\ud559 \uae30\ud310\uc758 \uc800\uc628 \uc811\ucc29<\/p>\n

                  5. \ubc14\uc774\uc624\uce69 \ubc0f \ub9c8\uc774\ud06c\ub85c\uc720\uccb4\ud559<\/span><\/h3>\n

                  \ub7a9\uc628\uce69 \ub514\ubc14\uc774\uc2a4\ub97c \uc704\ud55c \uc548\uc815\uc801\uc778 \ubcf8\ub529<\/p>\n

                  \ud504\ub85c\uc138\uc2a4 \uc608\uc2dc<\/span><\/h1>\n

                  LiNbO\u2083 - SiC \uc6e8\uc774\ud37c \ubcf8\ub529(\uc0c1\uc628)<\/p>\n

                    \n
                  • \uac15\ub825\ud558\uace0 \uade0\uc77c\ud55c \ubcf8\ub529 \uc778\ud130\ud398\uc774\uc2a4 \uad6c\ud604<\/li>\n
                  • \ub2e8\uba74 TEM \uc774\ubbf8\uc9d5\uc744 \ud1b5\ud55c \uac80\uc99d<\/li>\n
                  • \uace0\uc8fc\ud30c \ubc0f \uad11\uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc801\ud569<\/li>\n<\/ul>\n

                    Q&A<\/span><\/h1>\n

                    Q1: \uc5f4 \ubcf8\ub529 \ub300\uc2e0 \uc0c1\uc628 \uc6e8\uc774\ud37c \ubcf8\ub529\uc744 \uc120\ud0dd\ud558\ub294 \uc774\uc720\ub294 \ubb34\uc5c7\uc778\uac00\uc694?<\/span><\/h3>\n

                    \uc0c1\uc628 \uc811\ucc29\uc740 \uc5f4 \ubd88\uc77c\uce58 \ubc0f \uc751\ub825\uc744 \ubc29\uc9c0\ud558\uc5ec \uc774\uc9c8\uc801\uc778 \uc7ac\ub8cc\uc5d0 \uc774\uc0c1\uc801\uc774\uba70 \uace0\uae09 \ud328\ud0a4\uc9d5\uc758 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/p>\n

                    Q2: \uc5b4\ub5a4 \uc7ac\ub8cc\ub97c \uc811\ucc29\ud560 \uc218 \uc788\ub098\uc694?<\/span><\/h3>\n

                    \uc774 \uc2dc\uc2a4\ud15c\uc740 \ub2e4\uc74c\uacfc \uac19\uc740 \ub2e4\uc591\ud55c \uc790\ub8cc\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4:<\/p>\n

                      \n
                    • \ubc18\ub3c4\uccb4 Si, SiC, GaN<\/li>\n
                    • \uc0b0\ud654\ubb3c SiO\u2082, LiNbO\u2083<\/li>\n
                    • \uae08\uc18d: Cu, Au<\/li>\n<\/ul>\n

                      \uc774 \uc2dc\uc2a4\ud15c\uc744 \uc120\ud0dd\ud574\uc57c \ud558\ub294 \uc774\uc720<\/span><\/h1>\n
                        \n
                      • SiC \uc804\ub825 \uc18c\uc790 \uc81c\uc870\uc5d0\uc11c \uc785\uc99d\ub41c \uc131\ub2a5<\/li>\n
                      • \uc2e4\ud5d8\uc2e4 \ud14c\uc2a4\ud2b8 \ubc0f TEM \ubd84\uc11d\uc744 \ud1b5\ud55c \uacb0\ud569 \uac15\ub3c4 \uac80\uc99d<\/li>\n
                      • \uc5f0\uad6c \uae30\uad00\uacfc \uc0b0\uc5c5 \ud339 \ubaa8\ub450\ub97c \uc704\ud55c \uc124\uacc4<\/li>\n
                      • \ubaa8\ub4c8\uc2dd \uc544\ud0a4\ud14d\ucc98\ub85c \uc7a5\uae30\uc801\uc778 \ud655\uc7a5\uc131 \ubc0f \uc5c5\uadf8\ub808\uc774\ub4dc \uac00\ub2a5\uc131 \ubcf4\uc7a5<\/li>\n<\/ul>","protected":false},"excerpt":{"rendered":"

                        \uc6e8\uc774\ud37c \ubcf8\ub529 \uc7a5\ube44\ub294 \ucca8\ub2e8 \ubc18\ub3c4\uccb4 \ud328\ud0a4\uc9d5, MEMS \uc81c\uc870 \ubc0f 3\uc138\ub300 \ubc18\ub3c4\uccb4 \ud1b5\ud569\uc744 \uc704\ud574 \uc124\uacc4\ub41c \uace0\uc131\ub2a5 \uc2dc\uc2a4\ud15c\uc785\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":2024,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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