{"id":1968,"date":"2026-03-23T06:01:20","date_gmt":"2026-03-23T06:01:20","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=1968"},"modified":"2026-03-23T06:03:52","modified_gmt":"2026-03-23T06:03:52","slug":"lpcvd-oxidation-furnace","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ko\/product\/lpcvd-oxidation-furnace\/","title":{"rendered":"\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870\ub97c \uc704\ud55c 6\/8\/12\uc778\uce58 LPCVD \uc0b0\ud654 \uc6a9\uad11\ub85c \uace0\uade0\uc77c \ubc15\ub9c9 \uc99d\ucc29"},"content":{"rendered":"<p data-start=\"295\" data-end=\"716\">6\/8\/12\uc778\uce58 LPCVD \uc0b0\ud654\ub85c\ub294 \uc815\ubc00\ud558\uace0 \uade0\uc77c\ud55c \ubc15\ub9c9 \uc99d\ucc29\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucd5c\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud234\uc785\ub2c8\ub2e4. \uc6e8\uc774\ud37c\uc5d0 \uace0\ud488\uc9c8 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58, \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c \ubc0f \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c \uce35\uc744 \uc131\uc7a5\uc2dc\ud0a4\ub294 \ub370 \ub110\ub9ac \uc801\uc6a9\ub418\uc5b4 \uc804\ub825 \ubc18\ub3c4\uccb4, \uace0\uae09 \uae30\ud310 \ubc0f \uae30\ud0c0 \uace0\uc815\ubc00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc77c\uad00\ub41c \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n<p data-start=\"718\" data-end=\"1176\">\uc774 \uc7a5\ube44\ub294 \ucca8\ub2e8 \uc800\uc555 \uc99d\ucc29 \uae30\uc220, \uc9c0\ub2a5\ud615 \uc628\ub3c4 \uc81c\uc5b4, \ucd08\uc815\ubc00 \uacf5\uc815 \uc124\uacc4\ub97c \uacb0\ud569\ud558\uc5ec \ud0c1\uc6d4\ud55c \ubc15\ub9c9 \uade0\uc77c\uc131\uacfc \ub192\uc740 \ucc98\ub9ac\ub7c9\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4. \uc218\uc9c1\ud615 \ub9ac\uc561\ud130 \uad6c\uc131\uc73c\ub85c \ud6a8\uc728\uc801\uc778 \ubc30\uce58 \ucc98\ub9ac\uac00 \uac00\ub2a5\ud558\uba70 \uc5f4 \uc99d\ucc29 \uacf5\uc815\uc73c\ub85c \ud50c\ub77c\uc988\ub9c8\ub85c \uc778\ud55c \uc190\uc0c1\uc744 \ubc29\uc9c0\ud558\uc5ec \uac8c\uc774\ud2b8 \uc720\uc804\uccb4 \ud615\uc131, \uc751\ub825 \uc644\ucda9\uce35, \ubcf4\ud638 \uc0b0\ud654\ubb3c\uacfc \uac19\uc740 \uc911\uc694\ud55c \uacf5\uc815\uc5d0 \uc774\uc0c1\uc801\uc785\ub2c8\ub2e4.<\/p>\n<p data-start=\"718\" data-end=\"1176\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignnone wp-image-1978 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/20250422163156_56112.png\" alt=\"\" width=\"680\" height=\"382\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/20250422163156_56112.png 680w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/20250422163156_56112-300x169.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/20250422163156_56112-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/20250422163156_56112-600x337.png 600w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\n<p data-start=\"718\" data-end=\"1176\">\n<h2 data-section-id=\"52xoay\" data-start=\"1183\" data-end=\"1206\"><span role=\"text\"><strong data-start=\"1186\" data-end=\"1204\">\uc8fc\uc694 \uc774\uc810<\/strong><\/span><\/h2>\n<ul data-start=\"1207\" data-end=\"2119\">\n<li data-section-id=\"5aaqq\" data-start=\"1207\" data-end=\"1402\"><strong data-start=\"1209\" data-end=\"1250\">\uace0\uade0\uc77c \ubc15\ub9c9 \uc99d\ucc29:<\/strong> \uc800\uc555 \ud658\uacbd(0.1-10 Torr)\uc740 \uace0\uc131\ub2a5 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc5d0 \ud544\uc218\uc801\uc778 \uc6e8\uc774\ud37c \uac04 \ubc0f \uc6e8\uc774\ud37c \ub0b4 \u00b11.5%\uc758 \uade0\uc77c\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1gd7krr\" data-start=\"1403\" data-end=\"1564\"><strong data-start=\"1405\" data-end=\"1433\">\uc218\uc9c1 \ub9ac\uc561\ud130 \ub514\uc790\uc778:<\/strong> \ubc30\uce58\ub2f9 150~200\uac1c\uc758 \uc6e8\uc774\ud37c\ub97c \ucc98\ub9ac\ud558\uc5ec \uc0b0\uc5c5 \uaddc\ubaa8\uc758 \ubc18\ub3c4\uccb4 \uc81c\uc870\ub97c \uc704\ud55c \ucc98\ub9ac\ub7c9\uacfc \uc0dd\uc0b0 \ud6a8\uc728\uc131\uc744 \uac1c\uc120\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"k1g5ie\" data-start=\"1565\" data-end=\"1716\"><strong data-start=\"1567\" data-end=\"1610\">\uc5f4 \uc99d\ucc29 \uacf5\uc815(500-900\u00b0C):<\/strong> \ubbfc\uac10\ud55c \uae30\ud310\uc744 \ubcf4\ud638\ud558\uace0 \ub192\uc740 \ud544\ub984 \ud488\uc9c8\uc744 \uc720\uc9c0\ud558\uae30 \uc704\ud574 \ud50c\ub77c\uc988\ub9c8 \uc5c6\uc774 \ubd80\ub4dc\ub7fd\uac8c \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"15vtswb\" data-start=\"1717\" data-end=\"1844\"><strong data-start=\"1719\" data-end=\"1755\">\uc9c0\ub2a5\ud615 \uc628\ub3c4 \uc81c\uc5b4:<\/strong> \uc548\uc815\uc801\uc774\uace0 \ubc18\ubcf5 \uac00\ub2a5\ud55c \uacb0\uacfc\ub97c \uc704\ud574 \u00b11\u00b0C \uc815\ud655\ub3c4\ub85c \uc2e4\uc2dc\uac04 \ubaa8\ub2c8\ud130\ub9c1 \ubc0f \uc870\uc815\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"5qswig\" data-start=\"1845\" data-end=\"1966\"><strong data-start=\"1847\" data-end=\"1879\">\ucd08\uccad\uc815 \ud504\ub85c\uc138\uc2a4 \ucc54\ubc84:<\/strong> \uc785\uc790 \uc624\uc5fc\uc744 \ucd5c\uc18c\ud654\ud558\uc5ec SiC \ubc0f \uae30\ud0c0 \uace0\uae09 \uc6e8\uc774\ud37c \uc7ac\ub8cc\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"13dmie4\" data-start=\"1967\" data-end=\"2119\"><strong data-start=\"1969\" data-end=\"2000\">\uc0ac\uc6a9\uc790 \uc9c0\uc815 \uac00\ub2a5\ud55c \uad6c\uc131:<\/strong> \uac74\uc2dd \ub610\ub294 \uc2b5\uc2dd \uc0b0\ud654, \ub2e4\uc591\ud55c \uc6e8\uc774\ud37c \ud06c\uae30 \ub4f1 \ub2e4\uc591\ud55c \uacf5\uc815 \uc694\uad6c \uc0ac\ud56d\uc744 \uc218\uc6a9\ud558\ub294 \uc720\uc5f0\ud55c \uc124\uacc4\uac00 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2 data-section-id=\"10oaxfc\" data-start=\"2126\" data-end=\"2159\"><span role=\"text\"><strong data-start=\"2129\" data-end=\"2157\">\uae30\uc220 \uc0ac\uc591<\/strong><\/span><\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2161\" data-end=\"2686\">\n<thead data-start=\"2161\" data-end=\"2188\">\n<tr data-start=\"2161\" data-end=\"2188\">\n<th class=\"\" data-start=\"2161\" data-end=\"2171\" data-col-size=\"sm\">\uae30\ub2a5<\/th>\n<th class=\"\" data-start=\"2171\" data-end=\"2188\" data-col-size=\"md\">\uc0ac\uc591<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2217\" data-end=\"2686\">\n<tr data-start=\"2217\" data-end=\"2245\">\n<td data-start=\"2217\" data-end=\"2230\" data-col-size=\"sm\">\uc6e8\uc774\ud37c \ud06c\uae30<\/td>\n<td data-col-size=\"md\" data-start=\"2230\" data-end=\"2245\">6\/8\/12 \uc778\uce58<\/td>\n<\/tr>\n<tr data-start=\"2246\" data-end=\"2316\">\n<td data-start=\"2246\" data-end=\"2269\" data-col-size=\"sm\">\ud638\ud658\ub418\ub294 \uc790\ub8cc<\/td>\n<td data-col-size=\"md\" data-start=\"2269\" data-end=\"2316\">\ud3f4\ub9ac\uc2e4\ub9ac\ucf58, \uc9c8\ud654\uaddc\uc18c, \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c<\/td>\n<\/tr>\n<tr data-start=\"2317\" data-end=\"2372\">\n<td data-start=\"2317\" data-end=\"2334\" data-col-size=\"sm\">\uc0b0\ud654 \uc720\ud615<\/td>\n<td data-col-size=\"md\" data-start=\"2334\" data-end=\"2372\">\uac74\uc2dd \uc0b0\uc18c\/\uc2b5\uc2dd \uc0b0\uc18c(DCE, HCL)<\/td>\n<\/tr>\n<tr data-start=\"2373\" data-end=\"2416\">\n<td data-start=\"2373\" data-end=\"2401\" data-col-size=\"sm\">\uacf5\uc815 \uc628\ub3c4 \ubc94\uc704<\/td>\n<td data-col-size=\"md\" data-start=\"2401\" data-end=\"2416\">500\u00b0C-900\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2417\" data-end=\"2456\">\n<td data-start=\"2417\" data-end=\"2445\" data-col-size=\"sm\">\ud56d\uc628 \uad6c\uc5ed<\/td>\n<td data-col-size=\"md\" data-start=\"2445\" data-end=\"2456\">\u2265800mm<\/td>\n<\/tr>\n<tr data-start=\"2457\" data-end=\"2496\">\n<td data-start=\"2457\" data-end=\"2488\" data-col-size=\"sm\">\uc628\ub3c4 \uc81c\uc5b4 \uc815\ud655\ub3c4<\/td>\n<td data-col-size=\"md\" data-start=\"2488\" data-end=\"2496\">\u00b11\u00b0C<\/td>\n<\/tr>\n<tr data-start=\"2497\" data-end=\"2573\">\n<td data-start=\"2497\" data-end=\"2516\" data-col-size=\"sm\">\ud30c\ud2f0\ud074 \uc81c\uc5b4<\/td>\n<td data-col-size=\"md\" data-start=\"2516\" data-end=\"2573\">0.32\u03bcm), 0.32\u03bcm), 0.226\u03bcm)<\/td>\n<\/tr>\n<tr data-start=\"2574\" data-end=\"2608\">\n<td data-start=\"2574\" data-end=\"2591\" data-col-size=\"sm\">\ud544\ub984 \ub450\uaed8<\/td>\n<td data-col-size=\"md\" data-start=\"2591\" data-end=\"2608\">NIT1500 \u00b150 \u00c5<\/td>\n<\/tr>\n<tr data-start=\"2609\" data-end=\"2686\">\n<td data-start=\"2609\" data-end=\"2622\" data-col-size=\"sm\">\uade0\uc77c\uc131<\/td>\n<td data-start=\"2622\" data-end=\"2686\" data-col-size=\"md\">\uc6e8\uc774\ud37c \ub0b4 &lt;2.5%, \uc6e8\uc774\ud37c \ub300 \uc6e8\uc774\ud37c &lt;2.5%, \ubc30\uce58 \ub300 \ubc30\uce58 &lt;2% \ubbf8\ub9cc<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h2 data-section-id=\"5mln0p\" data-start=\"2693\" data-end=\"2718\"><span role=\"text\"><strong data-start=\"2696\" data-end=\"2716\">\uc81c\ud488 \ud2b9\uc9d5<\/strong><\/span><\/h2>\n<ul data-start=\"2719\" data-end=\"3240\">\n<li data-section-id=\"1npssef\" data-start=\"2719\" data-end=\"2795\">\uc790\ub3d9\ud654\ub41c \uc6e8\uc774\ud37c \ucde8\uae09\uc73c\ub85c \ub192\uc740 \uc548\uc804\uc131\uacfc \uc6b4\uc601 \ud6a8\uc728\uc131\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1viv597\" data-start=\"2796\" data-end=\"2893\">\ucd08\uccad\uc815 \ud504\ub85c\uc138\uc2a4 \ucc54\ubc84\ub294 \uc624\uc5fc \uc704\ud5d8\uc744 \uc904\uc774\uace0 \uc77c\uad00\ub41c \ud544\ub984 \ud488\uc9c8\uc744 \uc720\uc9c0\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"h2e7ah\" data-start=\"2894\" data-end=\"2970\">\uc6b0\uc218\ud55c \ud544\ub984 \ub450\uaed8 \uade0\uc77c\uc131\uc740 \uace0\uae09 \ub178\ub4dc \uc81c\uc870\ub97c \uc9c0\uc6d0\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"i9qs80\" data-start=\"2971\" data-end=\"3065\">\uc2e4\uc2dc\uac04 \uc9c0\ub2a5\ud615 \uc628\ub3c4 \ubc0f \uc555\ub825 \uc81c\uc5b4\ub85c \uc815\ubc00\ud55c \uacf5\uc815 \uc870\uc815\uc774 \uac00\ub2a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1vojhz5\" data-start=\"3066\" data-end=\"3155\">SiC \uc6e8\uc774\ud37c \uc11c\ud3ec\ud2b8\ub294 \ub9c8\ucc30\uacfc \uc785\uc790 \ubc1c\uc0dd\uc744 \uc904\uc5ec \uc6e8\uc774\ud37c \uc218\uba85\uc744 \uc5f0\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1efwava\" data-start=\"3156\" data-end=\"3240\">\ubaa8\ub4c8\uc2dd \uc124\uacc4\ub85c \ub2e4\uc591\ud55c \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uacfc \ud504\ub85c\uc138\uc2a4 \uc694\uad6c \uc0ac\ud56d\uc5d0 \ub9de\uac8c \ub9de\ucda4\ud654\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<h2 data-section-id=\"1s7c0bk\" data-start=\"3247\" data-end=\"3284\"><span role=\"text\"><strong data-start=\"3250\" data-end=\"3282\">\uc99d\ucc29 \ud504\ub85c\uc138\uc2a4 \uc6d0\uce59<img decoding=\"async\" class=\"size-medium wp-image-1972 alignleft\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/LPCVD-deposition-principle-300x246.png\" alt=\"\" width=\"300\" height=\"246\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/LPCVD-deposition-principle-300x246.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/LPCVD-deposition-principle-15x12.png 15w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/LPCVD-deposition-principle-600x492.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/LPCVD-deposition-principle.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/strong><\/span><\/h2>\n<ol data-start=\"3285\" data-end=\"3910\">\n<li data-section-id=\"1jepk0v\" data-start=\"3285\" data-end=\"3400\"><strong data-start=\"3288\" data-end=\"3309\">\uac00\uc2a4 \uc18c\uac1c:<\/strong> \ubc18\uc751\uc131 \uac00\uc2a4\ub294 \uc800\uc555 \uc870\uac74(0.25-1 Torr)\uc5d0\uc11c \ud29c\ube0c\uc5d0 \ub3c4\uc785\ub429\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"bjphum\" data-start=\"3401\" data-end=\"3506\"><strong data-start=\"3404\" data-end=\"3426\">\ud45c\uba74 \ud655\uc0b0:<\/strong> \ubd84\uc790\uac00 \uc6e8\uc774\ud37c \ud45c\uba74\uc744 \uc790\uc720\ub86d\uac8c \ud655\uc0b0\ud558\uc5ec \uade0\uc77c\ud55c \ucee4\ubc84\ub9ac\uc9c0\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"yyrb2x\" data-start=\"3507\" data-end=\"3591\"><strong data-start=\"3510\" data-end=\"3525\">\ud761\ucc29:<\/strong> \ubc18\uc751\ubb3c\uc740 \ud654\ud559 \ubc18\uc751 \uc804\uc5d0 \uc6e8\uc774\ud37c \ud45c\uba74\uc5d0 \ubd80\ucc29\ub429\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"17r2njo\" data-start=\"3592\" data-end=\"3696\"><strong data-start=\"3595\" data-end=\"3617\">\ud654\ud559 \ubc18\uc751:<\/strong> \uc5f4\ubd84\ud574\ub294 \uae30\ud310\uc5d0 \uc9c1\uc811 \uc6d0\ud558\ub294 \ubc15\ub9c9\uc744 \ud615\uc131\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"joswp0\" data-start=\"3697\" data-end=\"3802\"><strong data-start=\"3700\" data-end=\"3722\">\ubd80\uc0b0\ubb3c \uc81c\uac70:<\/strong> \uc21c\ub3c4\ub97c \uc720\uc9c0\ud558\uace0 \uac04\uc12d\uc744 \ubc29\uc9c0\ud558\uae30 \uc704\ud574 \ube44\ubc18\uc751\uc131 \uac00\uc2a4\ub97c \ubc30\ucd9c\ud569\ub2c8\ub2e4.<\/li>\n<li data-section-id=\"1nf7uqd\" data-start=\"3803\" data-end=\"3910\"><strong data-start=\"3806\" data-end=\"3825\">\ud544\ub984 \ud615\uc131:<\/strong> \ubc18\uc751 \uc0dd\uc131\ubb3c\uc774 \uc11c\uc11c\ud788 \ucd95\uc801\ub418\uc5b4 \uade0\uc77c\ud558\uace0 \uc548\uc815\uc801\uc778 \ubc15\ub9c9\uce35\uc744 \ud615\uc131\ud569\ub2c8\ub2e4.<\/li>\n<\/ol>\n<h2 data-section-id=\"3f2aoc\" data-start=\"3917\" data-end=\"3938\"><span role=\"text\"><strong data-start=\"3920\" data-end=\"3936\">\uc560\ud50c\ub9ac\ucf00\uc774\uc158<\/strong><\/span><\/h2>\n<ul data-start=\"3939\" data-end=\"4341\">\n<li data-section-id=\"88axke\" data-start=\"3939\" data-end=\"4064\"><strong data-start=\"3941\" data-end=\"3967\">\ucc28\ud3d0 \uc0b0\ud654\ubb3c \uce35:<\/strong> \uc2e4\ub9ac\ucf58 \uc6e8\uc774\ud37c\ub97c \uc624\uc5fc\uc73c\ub85c\ubd80\ud130 \ubcf4\ud638\ud558\uace0 \ub3c4\ud551 \uacf5\uc815 \uc911 \uc774\uc628 \ucc44\ub110\ub9c1\uc744 \uc904\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img decoding=\"async\" class=\"wp-image-1973 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process1.png\" alt=\"\" width=\"671\" height=\"273\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process1.png 671w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process1-300x122.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process1-18x7.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process1-600x244.png 600w\" sizes=\"(max-width: 671px) 100vw, 671px\" \/><\/p>\n<ul data-start=\"3939\" data-end=\"4341\">\n<li data-section-id=\"1o3mmvz\" data-start=\"4065\" data-end=\"4204\"><strong data-start=\"4067\" data-end=\"4087\">\ud328\ub4dc \uc0b0\ud654\ubb3c \uce35:<\/strong> \uc2e4\ub9ac\ucf58\uacfc \uc9c8\ud654\uaddc\uc18c \uce35 \uc0ac\uc774\uc758 \uc751\ub825 \uc644\ucda9\uc81c \uc5ed\ud560\uc744 \ud558\uc5ec \uc6e8\uc774\ud37c \uade0\uc5f4\uc744 \ubc29\uc9c0\ud558\uace0 \uc218\uc728\uc744 \ud5a5\uc0c1\uc2dc\ud0b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-1974 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process2.png\" alt=\"\" width=\"602\" height=\"307\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process2.png 602w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process2-300x153.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process2-18x9.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process2-600x306.png 600w\" sizes=\"(max-width: 602px) 100vw, 602px\" \/><\/p>\n<ul data-start=\"3939\" data-end=\"4341\">\n<li data-section-id=\"10l973e\" data-start=\"4205\" data-end=\"4341\"><strong data-start=\"4207\" data-end=\"4228\">\uac8c\uc774\ud2b8 \uc0b0\ud654\ubb3c \ub808\uc774\uc5b4:<\/strong> MOS \uad6c\uc870\uc5d0 \uc720\uc804\uccb4 \uce35\uc744 \uc81c\uacf5\ud558\uc5ec \uc815\ubc00\ud55c \uc804\ub958 \uc804\ub3c4 \ubc0f \uc804\uacc4 \ud6a8\uacfc \uc81c\uc5b4\ub97c \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-1975 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process3.png\" alt=\"\" width=\"680\" height=\"297\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process3.png 680w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process3-300x131.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process3-18x8.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/application-of-oxidation-process3-600x262.png 600w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\n<h2 data-section-id=\"19sbner\" data-start=\"4348\" data-end=\"4378\"><span role=\"text\"><strong data-start=\"4351\" data-end=\"4376\">\uc2dc\uc2a4\ud15c \uad6c\uc131<\/strong><\/span><\/h2>\n<ul data-start=\"4379\" data-end=\"4685\">\n<li data-section-id=\"29z8e\" data-start=\"4379\" data-end=\"4496\"><strong data-start=\"4381\" data-end=\"4400\">\uc218\uc9c1 LPCVD:<\/strong> \uacf5\uc815 \uac00\uc2a4\uac00 \uc704\uc5d0\uc11c \uc544\ub798\ub85c \ud750\ub974\uba74\uc11c \ubc30\uce58\uc758 \ubaa8\ub4e0 \uc6e8\uc774\ud37c\uc5d0 \uade0\uc77c\ud55c \uc99d\ucc29\uc744 \ub2ec\uc131\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-1976 aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Vertical-LPCVD-Systems-300x280.png\" alt=\"\" width=\"300\" height=\"280\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Vertical-LPCVD-Systems-300x280.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Vertical-LPCVD-Systems-13x12.png 13w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Vertical-LPCVD-Systems-600x560.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Vertical-LPCVD-Systems.png 680w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"4379\" data-end=\"4685\">\n<li data-section-id=\"1dvx71j\" data-start=\"4497\" data-end=\"4685\"><strong data-start=\"4499\" data-end=\"4520\">\uc218\ud3c9 LPCVD:<\/strong> \uac00\uc2a4\ub294 \uae30\ud310\uc758 \uae38\uc774\ub97c \ub530\ub77c \ud750\ub974\uae30 \ub54c\ubb38\uc5d0 \uc5f0\uc18d\uc801\uc778 \ub300\ub7c9 \uc0dd\uc0b0\uc5d0 \uc801\ud569\ud558\uc9c0\ub9cc, \uc99d\ucc29 \ub450\uaed8\ub294 \uc785\uad6c \ucabd \uadfc\ucc98\uc5d0\uc11c \uc57d\uac04 \ub2e4\ub97c \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"wp-image-1977 size-full aligncenter\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Horizontal-LPCVD-Systems.png\" alt=\"\" width=\"680\" height=\"361\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Horizontal-LPCVD-Systems.png 680w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Horizontal-LPCVD-Systems-300x159.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Horizontal-LPCVD-Systems-18x10.png 18w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/03\/Horizontal-LPCVD-Systems-600x319.png 600w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\n<h2 data-section-id=\"4co5vj\" data-start=\"4692\" data-end=\"4727\"><span role=\"text\"><strong data-start=\"4695\" data-end=\"4725\">\uc790\uc8fc \ubb3b\ub294 \uc9c8\ubb38<\/strong><\/span><\/h2>\n<p data-start=\"4728\" data-end=\"5009\"><strong data-start=\"4728\" data-end=\"4769\">Q1: LPCVD\ub294 \uc8fc\ub85c \uc5b4\ub5a4 \uc6a9\ub3c4\ub85c \uc0ac\uc6a9\ub418\ub098\uc694?<\/strong><br data-start=\"4769\" data-end=\"4772\" \/>A: LPCVD\ub294 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58, \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c, \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c \uc99d\ucc29\uc744 \uc704\ud574 \ubc18\ub3c4\uccb4 \uc81c\uc870\uc5d0 \ub110\ub9ac \uc0ac\uc6a9\ub418\ub294 \uc800\uc555 \ubc15\ub9c9 \uc99d\ucc29 \uacf5\uc815\uc73c\ub85c, \ucca8\ub2e8 \ub514\ubc14\uc774\uc2a4 \uc81c\uc791\uc744 \uc704\ud55c \uade0\uc77c\ud558\uace0 \uace0\ud488\uc9c8\uc758 \ud544\ub984\uc744 \uc81c\uc791\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"5011\" data-end=\"5252\"><strong data-start=\"5011\" data-end=\"5052\">Q2: LPCVD\ub294 PECVD\uc640 \uc5b4\ub5bb\uac8c \ub2e4\ub985\ub2c8\uae4c?<\/strong><br data-start=\"5052\" data-end=\"5055\" \/>A: LPCVD\ub294 \uc800\uc555\uc5d0\uc11c \uc5f4 \ud65c\uc131\ud654\uc5d0 \uc758\uc874\ud558\uc5ec \uace0\uc21c\ub3c4 \ud544\ub984\uc744 \uc0dd\uc0b0\ud558\ub294 \ubc18\uba74, PECVD\ub294 \ub354 \ub0ae\uc740 \uc628\ub3c4\uc5d0\uc11c \ud50c\ub77c\uc988\ub9c8\ub97c \uc0ac\uc6a9\ud558\uc5ec \ub354 \ube60\ub974\uac8c \uc99d\ucc29\ud558\uc9c0\ub9cc \ud544\ub984 \ud488\uc9c8\uc774 \uc57d\uac04 \ub5a8\uc5b4\uc9c0\ub294 \uacbd\uc6b0\uac00 \ub9ce\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"50\" data-end=\"348\"><strong data-start=\"50\" data-end=\"138\">Q3: \uc5b4\ub5a4 \uc6e8\uc774\ud37c \ud06c\uae30\uc640 \uc7ac\ub8cc\uac00 \uc774 LPCVD \uc0b0\ud654\ub85c\uc640 \ud638\ud658\ub418\ub098\uc694?<\/strong><br data-start=\"138\" data-end=\"141\" \/>A: \uc774 \ud37c\ub2c8\uc2a4\ub294 6\uc778\uce58, 8\uc778\uce58, 12\uc778\uce58 \uc6e8\uc774\ud37c\ub97c \uc9c0\uc6d0\ud558\uba70 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58, \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c, \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c, SiC \uc6e8\uc774\ud37c\uc640 \ud638\ud658\ub418\ubbc0\ub85c \ub2e4\uc591\ud55c \ubc18\ub3c4\uccb4 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc720\uc5f0\ud558\uac8c \uc0ac\uc6a9\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>\n<p data-start=\"350\" data-end=\"673\"><strong data-start=\"350\" data-end=\"427\">Q4: LPCVD \uc0b0\ud654\ub85c\ub97c \ud2b9\uc815 \uacf5\uc815\uc5d0 \ub9de\uac8c \ub9de\ucda4\ud654\ud560 \uc218 \uc788\ub098\uc694?<\/strong><br data-start=\"427\" data-end=\"430\" \/>A: \uc608, \uc774 \uc2dc\uc2a4\ud15c\uc740 \uc870\uc815 \uac00\ub2a5\ud55c \uc628\ub3c4 \uc601\uc5ed, \uac00\uc2a4 \ud750\ub984 \uc81c\uc5b4, \uc0b0\ud654 \ubaa8\ub4dc(\uac74\uc2dd \ub610\ub294 \uc2b5\uc2dd) \ub4f1 \ubaa8\ub4c8\uc2dd \uad6c\uc131\uc744 \uc81c\uacf5\ud558\uc5ec \uc5f0\uad6c \ubc0f \uc0b0\uc5c5 \uaddc\ubaa8\uc758 \uc0dd\uc0b0\uc5d0 \ud544\uc694\ud55c \ub2e4\uc591\ud55c \uacf5\uc815 \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud560 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/p>","protected":false},"excerpt":{"rendered":"<p>6\/8\/12\uc778\uce58 LPCVD(\uc800\uc555 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29) \uc0b0\ud654\ub85c\ub294 \uc815\ubc00\ud558\uace0 \uade0\uc77c\ud55c \ubc15\ub9c9 \uc99d\ucc29\uc744 \uc704\ud574 \uc124\uacc4\ub41c \ucd5c\ucca8\ub2e8 \ubc18\ub3c4\uccb4 \uc81c\uc870 \ud234\uc785\ub2c8\ub2e4. \uc6e8\uc774\ud37c\uc5d0 \uace0\ud488\uc9c8 \ud3f4\ub9ac\uc2e4\ub9ac\ucf58, \uc2e4\ub9ac\ucf58 \uc9c8\ud654\ubb3c \ubc0f \uc2e4\ub9ac\ucf58 \uc0b0\ud654\ubb3c \uce35\uc744 \uc131\uc7a5\uc2dc\ud0a4\ub294 \ub370 \ub110\ub9ac \uc801\uc6a9\ub418\uc5b4 \uc804\ub825 \ubc18\ub3c4\uccb4, \uace0\uae09 \uae30\ud310 \ubc0f \uae30\ud0c0 \uace0\uc815\ubc00 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc77c\uad00\ub41c \uc131\ub2a5\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>","protected":false},"featured_media":1969,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[15],"product_tag":[468,485,488,480,484,479,476,469,477,470,481,472,110,475,482,102,473,474,486,471,487,478,483],"class_list":{"0":"post-1968","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-crystal-growth-furnace","7":"product_tag-6-8-12-inch-lpcvd-oxidation-furnace","8":"product_tag-automated-wafer-handling","9":"product_tag-customizable-lpcvd","10":"product_tag-gate-oxide","11":"product_tag-high-uniformity-thin-film","12":"product_tag-horizontal-lpcvd","13":"product_tag-low-pressure-chemical-vapor-deposition","14":"product_tag-lpcvd","15":"product_tag-lpcvd-vs-pecvd","16":"product_tag-oxygen-furnace","17":"product_tag-pad-oxide","18":"product_tag-polysilicon","19":"product_tag-semiconductor-equipment","20":"product_tag-semiconductor-manufacturing","21":"product_tag-shielding-oxide","22":"product_tag-sic-wafer","23":"product_tag-silicon-nitride","24":"product_tag-silicon-oxide","25":"product_tag-temperature-control","26":"product_tag-thin-film-deposition","27":"product_tag-ultra-clean-chamber","28":"product_tag-vertical-lpcvd","29":"product_tag-wafer-processing","30":"desktop-align-left","31":"tablet-align-left","32":"mobile-align-left","33":"ast-product-gallery-layout-horizontal-slider","34":"ast-product-tabs-layout-horizontal","36":"first","37":"instock","38":"shipping-taxable","39":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/1968","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/comments?post=1968"}],"version-history":[{"count":3,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/1968\/revisions"}],"predecessor-version":[{"id":1999,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product\/1968\/revisions\/1999"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media\/1969"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/media?parent=1968"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_brand?post=1968"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_cat?post=1968"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ko\/wp-json\/wp\/v2\/product_tag?post=1968"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}