{"id":2112,"date":"2026-04-03T05:44:04","date_gmt":"2026-04-03T05:44:04","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?p=2112"},"modified":"2026-04-03T05:44:13","modified_gmt":"2026-04-03T05:44:13","slug":"silicon-carbide-sic-epitaxy-equipment-and-industry-overview","status":"publish","type":"post","link":"https:\/\/www.zmsh-semitech.com\/ko\/silicon-carbide-sic-epitaxy-equipment-and-industry-overview\/","title":{"rendered":"\uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44 \ubc0f \uc0b0\uc5c5 \uac1c\uc694"},"content":{"rendered":"<p>\ubc18\ub3c4\uccb4 \uc5d0\ud53c\ud0dd\uc2dc\ub294 \uc2e4\ub9ac\ucf58 \ub610\ub294 \uc2e4\ub9ac\ucf58 \uce74\ubc14\uc774\ub4dc(SiC) \uae30\ud310 \uc704\uc5d0 \ub2e8\uacb0\uc815 \ubc15\ub9c9\uc744 \uc131\uc7a5\uc2dc\ud0a4\ub294 \uacf5\uc815\uc744 \ub9d0\ud569\ub2c8\ub2e4. \uc5d0\ud53c\ud0dd\uc2dc \uce35\uc740 \uae30\ud310\uacfc \ub3d9\uc77c\ud55c \uacb0\uc815 \ubc29\ud5a5\uc744 \uacf5\uc720\ud558\uba70 \ub3d9\uc77c\ud55c \uc7ac\ub8cc(\ub3d9\uc885 \uc5d0\ud53c\ud0dd\uc2dc) \ub610\ub294 \ub2e4\ub978 \uc7ac\ub8cc(\uc774\uc885 \uc5d0\ud53c\ud0dd\uc2dc)\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc131\uc7a5\uc2dc\ud0ac \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uace0\uc8fc\ud30c \ubc0f \uace0\uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc758 \uacbd\uc6b0, \uace0\uc800\ud56d \uc5d0\ud53c\ud0dd\uc15c \uce35\uc740 \ub192\uc740 \ud56d\ubcf5 \uc804\uc555\uc744 \uc81c\uacf5\ud558\uace0 \uc800\uc800\ud56d \uae30\ud310\uc740 \uc9c1\ub82c \uc800\ud56d\uc744 \uc904\uc5ec \ud3ec\ud654 \uc804\uc555\uc744 \ub0ae\ucd94\ub294 \ub4f1 \uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc740 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uc744 \ucd5c\uc801\ud654\ud558\ub294 \ub370 \ub3c4\uc6c0\uc774 \ub429\ub2c8\ub2e4. \uc5d0\ud53c\ud0dd\uc15c \ub808\uc774\uc5b4\ub294 P\ud615 \ub610\ub294 N\ud615\uc73c\ub85c \ub3c4\ud551\ub418\uc5b4 \ub2e8\ubc29\ud5a5 \uc804\ub958 \ud750\ub984\uc744 \ud5c8\uc6a9\ud558\ub294 PN \uc811\ud569\uc744 \ud615\uc131\ud558\uc5ec \uc815\ub958\uac00 \uac00\ub2a5\ud569\ub2c8\ub2e4. SiC \uc5d0\ud53c\ud0dd\uc2dc\ub294 \uc804\ub825 \uc804\uc790, \ubb34\uc120 \uc8fc\ud30c\uc218(RF) \uc7a5\uce58 \ubc0f \uad11\uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \ub110\ub9ac \uc801\uc6a9\ub429\ub2c8\ub2e4.<\/p>\n\n\n\n<figure class=\"wp-block-image aligncenter size-full\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1000\" height=\"1000\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png\" alt=\"\" class=\"wp-image-2091\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1.png 1000w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Split-Type-Vertical-Airflow-SiC-Epitaxy-Equipment-for-68-Epi-Wafers-3-1-100x100.png 100w\" sizes=\"(max-width: 1000px) 100vw, 1000px\" \/><\/figure>\n\n\n\n<h3 class=\"wp-block-heading\">1. SiC \uc0b0\uc5c5 \uccb4\uc778 \ubc0f \uac00\uce58 \ubd84\ubc30<\/h3>\n\n\n\n<p>SiC \ub514\ubc14\uc774\uc2a4 \uc0b0\uc5c5 \uccb4\uc778\uc740 \uae30\ud310, \uc5d0\ud53c\ud0dd\uc2dc, \ub514\ubc14\uc774\uc2a4 \uc81c\uc870(\uc124\uacc4, \uc81c\uc870, \ud328\ud0a4\uc9d5)\uc758 \uc138 \uac00\uc9c0 \uc8fc\uc694 \ubd80\ubb38\uc73c\ub85c \uad6c\uc131\ub429\ub2c8\ub2e4. \uae30\ud310\uacfc \uc5d0\ud53c\ud0dd\uc2dc \ub2e8\uacc4\ub294 \uac00\uce58 \uc0ac\uc2ac\uc5d0\uc11c \uc57d 70%\ub97c \ucc28\uc9c0\ud558\ub294 \ubc18\uba74, \ub2e4\uc6b4\uc2a4\ud2b8\ub9bc \ub514\ubc14\uc774\uc2a4 \ud504\ub85c\uc138\uc2f1\uc740 30%\uc5d0 \ubd88\uacfc\ud569\ub2c8\ub2e4. \uc774\ub294 \uc6e8\uc774\ud37c \ud6c4 \uacf5\uc815\uc774 \uc0dd\uc0b0 \ube44\uc6a9\uc758 \ub300\ubd80\ubd84\uc744 \ucc28\uc9c0\ud558\ub294 \uae30\uc874 \uc2e4\ub9ac\ucf58 \ub514\ubc14\uc774\uc2a4\uc640\ub294 \ub300\uc870\uc801\uc785\ub2c8\ub2e4. \uc5c5\uc2a4\ud2b8\ub9bc\uc758 \ub192\uc740 \uac00\uce58 \uc9d1\uc911\ub3c4\ub294 \uae30\ud310 \ubc0f \uc5d0\ud53c\ud0dd\uc2dc \uae30\uc220\uc758 \uc804\ub7b5\uc801 \uc911\uc694\uc131\uc744 \uac15\uc870\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<p><strong>\uae30\ud310 \uc138\uadf8\uba3c\ud2b8<\/strong> \uacb0\uc815 \uc131\uc7a5, \uc6e8\uc774\ud37c \uc2ac\ub77c\uc774\uc2f1, \uc5f0\uc0ad \ubc0f \uc5f0\ub9c8\uac00 \ud3ec\ud568\ub429\ub2c8\ub2e4. \uacb0\uc815 \uc131\uc7a5\uc740 \ubb3c\ub9ac\uc801 \uc99d\uae30 \uc218\uc1a1(PVT), \uace0\uc628 \ud654\ud559 \uae30\uc0c1 \uc99d\ucc29(HTCVD) \ub610\ub294 \uc561\uc0c1 \uc5d0\ud53c\ud0dd\uc2dc(LPE)\ub97c \ud1b5\ud574 \uc774\ub8e8\uc5b4\uc9c8 \uc218 \uc788\uc2b5\ub2c8\ub2e4. \uc6e8\uc774\ud37c \uc2ac\ub77c\uc774\uc2f1\uc740 \uc640\uc774\uc5b4 \ud1b1, \ub2e4\uc774\uc544\ubaac\ub4dc \uc640\uc774\uc5b4, \ub808\uc774\uc800 \ub610\ub294 \ub0c9\uac04 \ubd84\ub9ac \ubc29\ubc95\uc744 \uc0ac\uc6a9\ud558\uba70, \ud654\ud559\uc801 \uae30\uacc4\uc801 \uc5f0\ub9c8(CMP)\ub294 \uc5d0\ud53c\ud0dd\uc2dc \uc131\uc7a5\uc5d0 \uc801\ud569\ud55c \ud3c9\ud3c9\ud558\uace0 \uacb0\ud568 \uc5c6\ub294 \ud45c\uba74\uc744 \ubcf4\uc7a5\ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">2. SiC \uae30\ud310 \uc0dd\uc0b0 \uacf5\uc815<\/h3>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\ud06c\ub9ac\uc2a4\ud0c8 \uc131\uc7a5:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>PVT:<\/strong> SiC \uacb0\uc815 \uc131\uc7a5\uc744 \uc704\ud55c \uc8fc\ub958 \ubc29\ubc95\uc785\ub2c8\ub2e4. \uc7a5\ube44\uac00 \ube44\uad50\uc801 \uac04\ub2e8\ud558\uace0 \uc6b4\uc601 \ube44\uc6a9\uc774 \ub0ae\uc73c\uba70 \uacf5\uc815 \uc81c\uc5b4\uac00 \uac04\ub2e8\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>HTCVD:<\/strong> \uace0\uc21c\ub3c4 \uacb0\uc815\uc744 \uc0dd\uc0b0\ud558\uc9c0\ub9cc \uc131\uc7a5 \uc18d\ub3c4\uac00 \ub290\ub9ac\uace0 \uc218\uc728\uc774 \ub0ae\uc73c\uba70 \ube44\uc6a9\uc774 \ub192\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> \uace0\ud488\uc9c8\uc758 \uacb0\ud568\uc774 \uc801\uc740 \uacb0\uc815\uc744 \uc0dd\uc131\ud558\uc9c0\ub9cc \uc131\uc7a5 \uc18d\ub3c4\uc640 \ud06c\uae30\uac00 \uc81c\ud55c\uc801\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc6e8\uc774\ud37c \uc2ac\ub77c\uc774\uc2f1:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\uc640\uc774\uc5b4 \ud1b1:<\/strong> \ub192\uc740 \uc218\uc728\uacfc \uc800\ub834\ud55c \ube44\uc6a9\uc758 \ud45c\uc900 \ubc29\uc2dd\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ub2e4\uc774\uc544\ubaac\ub4dc \uc640\uc774\uc5b4 \ubc0f \ub808\uc774\uc800 \uc2ac\ub77c\uc774\uc2f1:<\/strong> \ub354 \ub192\uc740 \ud6a8\uc728\uc131, \uc790\uc7ac \uc190\uc2e4 \uac10\uc18c, \ud658\uacbd\uc801 \uc774\uc810\uc744 \uc81c\uacf5\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ub0c9\uac04 \ubd84\ub9ac:<\/strong> \ub0b4\ubd80 \uc7ac\ub8cc \uc751\ub825\uc744 \uc0ac\uc6a9\ud558\uc5ec \ucd5c\uc18c\ud55c\uc758 \uc190\uc2e4\ub85c \uc6e8\uc774\ud37c\ub97c \ubd84\ub9ac\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc5f0\ub9c8 \ubc0f \uc5f0\ub9c8\ud558\uae30:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CMP:<\/strong> \uace0\ud488\uc9c8 \uc5d0\ud53c\ud0dd\uc2dc\uc5d0 \ud544\uc218\uc801\uc778 \ub9e4\uc6b0 \ud3c9\ud3c9\ud558\uace0 \uacb0\ud568\uc774 \uc5c6\ub294 \uc6e8\uc774\ud37c \ud45c\uba74\uc744 \uad6c\ud604\ud558\ub294 \uc8fc\uc694 \ubc29\ubc95\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">3. \uc5d0\ud53c\ud0dd\uc2dc \uacf5\uc815 \ubc0f \uc7a5\ube44<\/h3>\n\n\n\n<p>\uc5d0\ud53c\ud0dd\uc15c \uc131\uc7a5\uc740 SiC \uc18c\uc790 \uc81c\uc791\uc5d0\uc11c \ub9e4\uc6b0 \uc911\uc694\ud55c \ub2e8\uacc4\uc785\ub2c8\ub2e4. \uae30\uc874 \uc2e4\ub9ac\ucf58 \ub514\ubc14\uc774\uc2a4\uc640 \ub2ec\ub9ac SiC \ub514\ubc14\uc774\uc2a4\ub294 \uae30\ud310\uc5d0\uc11c \uc9c1\uc811 \uac00\uacf5\ud560 \uc218 \uc5c6\uc2b5\ub2c8\ub2e4. \uc18c\uc790 \uc81c\uc791 \uc804\uc5d0 \uae30\ud310 \uc704\uc5d0 \uace0\ud488\uc9c8 \ub2e8\uacb0\uc815 \uc5d0\ud53c\ud0dd\uc15c \uce35\uc744 \uc131\uc7a5\uc2dc\ucf1c\uc57c \ud569\ub2c8\ub2e4.<\/p>\n\n\n\n<ol class=\"wp-block-list\">\n<li><strong>\uc5d0\ud53c\ud0dd\uc2dc \uc720\ud615:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\ud638\ubaa8\uc5d0\ud53c\ud0dd\uc2dc:<\/strong> \uc800\uc804\ub825 \ub514\ubc14\uc774\uc2a4, RF \ubc0f \uad11\uc804\uc790 \uc560\ud50c\ub9ac\ucf00\uc774\uc158\uc5d0 \uc0ac\uc6a9\ub418\ub294 \uc804\ub3c4\uc131 SiC \uae30\ud310\uc5d0\uc11c \uc131\uc7a5\ud558\ub294 SiC.<\/li>\n\n\n\n<li><strong>\ud5e4\ud14c\ub85c\ud53c\ud0dd\uc2dc:<\/strong> \uace0\uc804\ub825 \uc7a5\uce58\uc5d0 \uc0ac\uc6a9\ub418\ub294 \ubc18\uc808\uc5f0 SiC \uae30\ud310\uc5d0\uc11c GaN\uc744 \uc131\uc7a5\uc2dc\ud0b5\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>CVD(\ud654\ud559 \uae30\uc0c1 \uc99d\ucc29):<\/strong> \uae30\uccb4 \uc804\uad6c\uccb4\ub294 \uac00\uc5f4\ub41c SiC \uae30\ud310\uc5d0\uc11c \ubc18\uc751\ud558\uc5ec \uc5d0\ud53c\ud0dd\uc15c \uce35\uc744 \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>MOCVD(\uae08\uc18d-\uc720\uae30\ubb3c CVD):<\/strong> \uae08\uc18d-\uc720\uae30 \uc804\uad6c\uccb4\ub97c \uc0ac\uc6a9\ud558\uc5ec \uc800\uc628 \uc99d\ucc29\uc774 \uac00\ub2a5\ud558\uace0 \ubcf5\uc7a1\ud55c \uad6c\uc870\uc758 \ucd08\ubc15\ud615 \uce35\uc744 \ub9cc\ub4e4 \uc218 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>LPE:<\/strong> \uc6a9\uc735 \uae08\uc18d \uc6a9\ub9e4\uc5d0 \uc18c\uc2a4 \uc7ac\ub8cc\ub97c \uc6a9\ud574\ud558\uace0 \ub0c9\uac01 \uc2dc \uae30\ud310\uc5d0 \uc99d\ucc29\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>MBE(\ubd84\uc790 \ube54 \uc5d0\ud53c\ud0dd\uc2dc):<\/strong> \ucd08\uace0\uc9c4\uacf5 \uc0c1\ud0dc\uc5d0\uc11c \uc6d0\uc790\uce35\uc744 \uc99d\ucc29\ud558\uc5ec \ud544\ub984 \ub450\uaed8\uc640 \uad6c\uc131\uc744 \uc815\ubc00\ud558\uac8c \uc81c\uc5b4\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n\n\n\n<li><strong>\uc5d0\ud53c\ud0dd\uc2dc \uc774\ud6c4 \uc6e8\uc774\ud37c \ub2e4\uc774\uc2f1:<\/strong>\n<ul class=\"wp-block-list\">\n<li><strong>\uae30\uacc4\uc2dd \ub2e4\uc774\uc2f1<\/strong> \uadf8\ub9ac\uace0 <strong>\ub808\uc774\uc800 \ub2e4\uc774\uc2f1<\/strong> \uac00 \uc77c\ubc18\uc801\uc785\ub2c8\ub2e4.<\/li>\n\n\n\n<li><strong>\ub808\uc774\uc800 \ub2e4\uc774\uc2f1<\/strong> \ub294 \uc791\uc740 \uc601\uc5ed\uc5d0 \uace0\uc5d0\ub108\uc9c0 \ud384\uc2a4\ub97c \uc9d1\uc911\uc2dc\ucf1c \uc7ac\ub8cc\ub97c \uc2b9\ud654 \ub610\ub294 \ubcc0\ud615\uc2dc\ucf1c \ucee4\ud504 \uc190\uc2e4\uacfc \uade0\uc5f4 \ud615\uc131\uc744 \uc904\uc785\ub2c8\ub2e4.<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n\n\n\n<h3 class=\"wp-block-heading\">4. \uc2dc\uc7a5 \ubc0f \uae30\uc220 \ub3d9\ud5a5<\/h3>\n\n\n\n<p>SiC \uc5d0\ud53c\ud0dd\uc2dc \ubc0f \uae30\ud310 \uc0dd\uc0b0\uc740 \uae00\ub85c\ubc8c \ubc18\ub3c4\uccb4 \uc0b0\uc5c5\uc5d0\uc11c \uc5ec\uc804\ud788 \uae30\uc220 \uc9d1\uc57d\uc801\uc778 \ubd84\uc57c\uc785\ub2c8\ub2e4. \ud5a5\ud6c4 \ud2b8\ub80c\ub4dc\ub294 \ub2e4\uc74c\uacfc \uac19\uc2b5\ub2c8\ub2e4:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>\uc778\uc1c4\ubb3c \ud06c\uae30\ub97c 6\uc778\uce58\uc5d0\uc11c 8\uc778\uce58 \uc774\uc0c1\uc73c\ub85c \ub298\ub824 \ub2e8\uac00\ub97c \ub0ae\ucda5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\uace0\uc815\ubc00, \ub0ae\uc740 \uacb0\ud568 \ubc00\ub3c4 \ubc0f \uc6d0\uc790\uce35 \uc81c\uc5b4\ub97c \uc704\ud55c \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44\ub97c \uac1c\uc120\ud558\uc5ec \uace0\uc804\ub825 \ubc0f \uace0\uc8fc\ud30c \uc694\uad6c \uc0ac\ud56d\uc744 \ucda9\uc871\ud569\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ube44\uc811\ucd09\uc2dd, \uc800\uc190\uc2e4 \ub808\uc774\uc800 \ubc0f \uc800\uc628 \ubd84\ub9ac \ubc29\uc2dd\uc73c\ub85c \ub2e4\uc774\uc2f1 \uae30\uc220\uc744 \ubc1c\uc804\uc2dc\ud0a4\uace0 \uc788\uc2b5\ub2c8\ub2e4.<\/li>\n\n\n\n<li>\ud2b9\ud788 \uc5d0\ud53c\ud0dd\uc2dc\ub85c\uc640 \uace0\uc815\ubc00 \ub2e4\uc774\uc2f1 \uc2dc\uc2a4\ud15c\uc5d0\uc11c \uad6d\ub0b4 \ubc0f \uae00\ub85c\ubc8c \uc7a5\ube44 \uc790\ub9bd\uc744 \ucd09\uc9c4\ud569\ub2c8\ub2e4.<\/li>\n<\/ul>\n\n\n\n<h3 class=\"wp-block-heading\">5. \uacb0\ub860<\/h3>\n\n\n\n<p><a href=\"https:\/\/www.zmsh-semitech.com\/ko\/product\/integrated-vertical-airflow-sic-epitaxy-equipment-for-6-8-epi-wafers\/\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-1-color\">SiC \uc5d0\ud53c\ud0dd\uc2dc \uc7a5\ube44 <\/mark><\/a>\ub294 \uace0\uc804\ub825, RF \ubc0f \uad11\uc804\uc790 \ub514\ubc14\uc774\uc2a4 \uc81c\uc870\uc5d0 \ud544\uc218\uc801\uc785\ub2c8\ub2e4. \uae30\ud310, \uc5d0\ud53c\ud0dd\uc2dc \ub808\uc774\uc5b4, \ub2e4\uc774\uc2f1 \uc7a5\ube44\uc758 \ud488\uc9c8\uc740 \ub514\ubc14\uc774\uc2a4 \uc131\ub2a5\uacfc \uc0b0\uc5c5 \uacbd\uc7c1\ub825\uc5d0 \uc9c1\uc811\uc801\uc778 \uc601\ud5a5\uc744 \ubbf8\uce69\ub2c8\ub2e4. \uace0\uc804\ub825 \ub514\ubc14\uc774\uc2a4\uc5d0 \ub300\ud55c \uc218\uc694\uac00 \uc99d\uac00\ud568\uc5d0 \ub530\ub77c \uc5d0\ud53c\ud0dd\uc2dc \uae30\uc220\uc758 \uc9c0\uc18d\uc801\uc778 \ubc1c\uc804\uacfc \uad6d\uc0b0\ud654\ub294 \ubc18\ub3c4\uccb4 \uac00\uce58 \uc0ac\uc2ac\uc5d0\uc11c \uc810\uc810 \ub354 \uc911\uc694\ud55c \uc5ed\ud560\uc744 \ud558\uac8c \ub420 \uac83\uc785\ub2c8\ub2e4.<\/p>\n\n\n\n<p><\/p>","protected":false},"excerpt":{"rendered":"<p>Semiconductor epitaxy refers to the process of growing single-crystal thin films on silicon or silicon carbide (SiC) substrates. The epitaxial layer shares the same crystal orientation as the substrate and can be grown using either the same material (homoepitaxy) or different materials (heteroepitaxy). For high-frequency and high-power devices, epitaxial growth helps optimize device performance: high-resistivity 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