{"id":2426,"date":"2026-04-27T05:56:44","date_gmt":"2026-04-27T05:56:44","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2426"},"modified":"2026-07-23T05:09:42","modified_gmt":"2026-07-23T05:09:42","slug":"%e3%83%81%e3%82%bf%e3%83%b3%e9%8a%85%e3%82%b9%e3%83%91%e3%83%83%e3%82%bf%e3%82%a6%e3%82%a7%e3%83%bc%e3%83%8f-%e3%83%9e%e3%82%a4%e3%82%af%e3%83%ad%e3%82%a8%e3%83%ac%e3%82%af%e3%83%88%e3%83%ad%e3%83%8b","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/ti-cu-metal-coated-silicon-wafer-titanium-copper-sputtered-wafer-for-mems-microelectronics-conductive-substrate\/","title":{"rendered":"Ti\/Cu\u30e1\u30bf\u30eb\u30b3\u30fc\u30c8\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u30fc MEMS\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u7528\u30c1\u30bf\u30f3\u9285\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u30a6\u30a7\u30cf\u30fc \u5c0e\u96fb\u6027\u57fa\u677f"},"content":{"rendered":"<p 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https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-3.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u5178\u578b\u7684\u306a\u69cb\u9020<\/strong><\/span><\/h2>\n<p data-start=\"2250\" data-end=\"2315\"><strong data-start=\"2250\" data-end=\"2315\">\u57fa\u677f\uff0b\u30c1\u30bf\u30f3\u63a5\u7740\u5c64\uff0b\u9285\u5c0e\u96fb\u5c64<\/strong><\/p>\n<ul data-start=\"2317\" data-end=\"2471\">\n<li data-section-id=\"wt95ma\" data-start=\"2317\" data-end=\"2365\">\u57fa\u677f\u30b7\u30ea\u30b3\u30f3\uff0f\u77f3\u82f1\uff0f\u30ac\u30e9\u30b9\uff08\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/li>\n<li data-section-id=\"rsr2x5\" data-start=\"2366\" data-end=\"2397\">\u63a5\u7740\u5c64\uff1a\u30c1\u30bf\u30f3\uff08Ti\uff09<\/li>\n<li data-section-id=\"b6l0gz\" data-start=\"2398\" data-end=\"2429\">\u5c0e\u96fb\u5c64\uff1a\u9285\uff08Cu\uff09<\/li>\n<li data-section-id=\"1mrq7wz\" 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data-col-size=\"md\">\u30b7\u30ea\u30b3\u30f3\u3001\u77f3\u82f1\u3001BF33\u30ac\u30e9\u30b9\uff08\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/td>\n<\/tr>\n<tr data-start=\"2872\" data-end=\"2916\">\n<td data-start=\"2872\" data-end=\"2894\" data-col-size=\"sm\">\u30af\u30ea\u30b9\u30bf\u30eb\u306e\u5411\u304d<\/td>\n<td data-start=\"2894\" data-end=\"2916\" data-col-size=\"md\">\u3001\u306a\u3069\u3002.<\/td>\n<\/tr>\n<tr data-start=\"2917\" data-end=\"2969\">\n<td data-start=\"2917\" data-end=\"2931\" data-col-size=\"sm\">\u62b5\u6297\u7387<\/td>\n<td data-col-size=\"md\" data-start=\"2931\" data-end=\"2969\">\u4f4e\uff0f\u4e2d\uff0f\u9ad8\uff08\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\uff09<\/td>\n<\/tr>\n<tr data-start=\"2970\" data-end=\"3013\">\n<td data-start=\"2970\" data-end=\"2985\" data-col-size=\"sm\">\u30c1\u30bf\u30f3\u306e\u539a\u3055<\/td>\n<td data-start=\"2985\" data-end=\"3013\" data-col-size=\"md\">10-50 nm\uff08\u5178\u578b\u7684\u306a\u7bc4\u56f2\uff09<\/td>\n<\/tr>\n<tr data-start=\"3014\" data-end=\"3085\">\n<td data-start=\"3014\" data-end=\"3029\" data-col-size=\"sm\">\u9285\u306e\u539a\u3055<\/td>\n<td data-start=\"3029\" data-end=\"3085\" data-col-size=\"md\">50 nm - 1 \u00b5m\uff08\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\uff09\u3001\u96fb\u6c17\u3081\u3063\u304d\u306b\u3088\u308b\u539a\u819c\u5316<\/td>\n<\/tr>\n<tr data-start=\"3086\" data-end=\"3127\">\n<td data-start=\"3086\" data-end=\"3103\" data-col-size=\"sm\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u65b9\u6cd5<\/td>\n<td data-start=\"3103\" data-end=\"3127\" data-col-size=\"md\">\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0<\/td>\n<\/tr>\n<tr data-start=\"3128\" data-end=\"3173\">\n<td data-start=\"3128\" data-end=\"3143\" data-col-size=\"sm\">\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u5074<\/td>\n<td data-start=\"3143\" data-end=\"3173\" data-col-size=\"md\">\u7247\u9762\u307e\u305f\u306f\u4e21\u9762<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"3175\" data-end=\"3178\" \/>\n<h2 data-section-id=\"1alkwpa\" data-start=\"3180\" data-end=\"3208\"><span role=\"text\"><strong data-start=\"3183\" data-end=\"3208\"><img loading=\"lazy\" decoding=\"async\" class=\"size-medium wp-image-2427 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/Ti-Cu-Metal-Coated-Silicon-Wafer-Titanium-Copper-Sputtered-Wafer-for-MEMS-Microelectronics-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>\u88fd\u9020\u5de5\u7a0b<\/strong><\/span><\/h2>\n<p data-start=\"3210\" data-end=\"3484\">Ti\/Cu\u30e1\u30bf\u30eb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u30fb\u30a6\u30a7\u30cf\u30fc\u306f\u3001\u771f\u7a7a\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30fb\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u3092\u7528\u3044\u3066\u88fd\u9020\u3055\u308c\u308b\u3002\u307e\u305a\u3001\u6d17\u6d44\u3057\u305f\u30b7\u30ea\u30b3\u30f3\u8868\u9762\u306b\u30c1\u30bf\u30f3\u5c64\u3092\u84b8\u7740\u3057\u3001\u5bc6\u7740\u6027\u3092\u5411\u4e0a\u3055\u305b\u308b\u3002\u6b21\u306b\u3001\u30c1\u30bf\u30f3\u819c\u306e\u4e0a\u306b\u9285\u5c64\u3092\u84b8\u7740\u3057\u3001\u5747\u4e00\u306a\u5c0e\u96fb\u9762\u3092\u5f62\u6210\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"3486\" data-end=\"3708\">\u3088\u308a\u539a\u3044\u9285\u819c\u3092\u5fc5\u8981\u3068\u3059\u308b\u7528\u9014\u3067\u306f\u3001\u30b9\u30d1\u30c3\u30bf\u3055\u308c\u305f\u9285\u5c64\u3092\u96fb\u6c17\u30e1\u30c3\u30ad\u306e\u30b7\u30fc\u30c9\u5c64\u3068\u3057\u3066\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u5f37\u529b\u306a\u5bc6\u7740\u6027\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u30df\u30af\u30ed\u30f3\u30ec\u30d9\u30eb\u306e\u539a\u3055\u3092\u9054\u6210\u3059\u308b\u305f\u3081\u306e\u3055\u3089\u306a\u308b\u91d1\u5c5e\u6210\u9577\u304c\u53ef\u80fd\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\n<p data-start=\"3710\" data-end=\"3800\">\u3053\u306e\u7d44\u307f\u5408\u308f\u305b\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308a\u3001\u9ad8\u3044\u30d5\u30a3\u30eb\u30e0\u54c1\u8cea\u3068\u67d4\u8edf\u306a\u6a5f\u80fd\u62e1\u5f35\u306e\u4e21\u65b9\u304c\u4fdd\u8a3c\u3055\u308c\u308b\u3002.<\/p>\n<hr data-start=\"3802\" data-end=\"3805\" \/>\n<h2 data-section-id=\"k0zlak\" data-start=\"3807\" data-end=\"3826\"><span role=\"text\"><strong data-start=\"3810\" data-end=\"3826\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/strong><\/span><\/h2>\n<ul data-start=\"3828\" data-end=\"4242\">\n<li data-section-id=\"ufn29u\" data-start=\"3828\" data-end=\"3877\">\u534a\u5c0e\u4f53\u30c7\u30d0\u30a4\u30b9\u306e\u7814\u7a76\u3068\u8a66\u4f5c<\/li>\n<li data-section-id=\"jnb8n8\" data-start=\"3878\" data-end=\"3921\">\u30aa\u30fc\u30df\u30c3\u30af\u30b3\u30f3\u30bf\u30af\u30c8\u3068\u96fb\u6975\u88fd\u9020<\/li>\n<li data-section-id=\"amhiqe\" data-start=\"3922\" data-end=\"3968\">MEMS\u5fae\u7d30\u69cb\u9020\u30b7\u30fc\u30c9\u5c64\u958b\u767a<\/li>\n<li data-section-id=\"kkxae0\" data-start=\"3969\" data-end=\"4028\">RDL\u304a\u3088\u3073\u539a\u9285\u69cb\u9020\u7528\u96fb\u89e3\u3081\u3063\u304d\u4e0b\u5730<\/li>\n<li data-section-id=\"p4inkr\" data-start=\"4029\" data-end=\"4075\">\u8584\u819c\u304a\u3088\u3073\u30ca\u30ce\u6750\u6599\u306e\u6210\u9577\u7814\u7a76<\/li>\n<li data-section-id=\"4azdd2\" data-start=\"4076\" data-end=\"4130\">\u8868\u9762\u5c0e\u96fb\u7387\u8a66\u9a13\u3068\u6750\u6599\u5206\u6790<\/li>\n<li data-section-id=\"1wa4yo4\" data-start=\"4131\" data-end=\"4185\">SEM\u3001AFM\u3001\u8868\u9762\u5f62\u72b6\u6e2c\u5b9a\u7528\u30b5\u30f3\u30d7\u30eb\u306e\u524d\u51e6\u7406<\/li>\n<li data-section-id=\"1s1aa6a\" data-start=\"4186\" data-end=\"4242\">\u30d0\u30a4\u30aa\u96fb\u6c17\u5316\u5b66\u30bb\u30f3\u30b5\u30fc\u3068\u30de\u30a4\u30af\u30ed\u30a2\u30ec\u30a4\u30d7\u30e9\u30c3\u30c8\u30d5\u30a9\u30fc\u30e0<\/li>\n<\/ul>\n<hr data-start=\"4244\" data-end=\"4247\" \/>\n<h2 data-section-id=\"1m0hhqv\" data-start=\"4249\" data-end=\"4299\"><span role=\"text\"><strong data-start=\"4252\" data-end=\"4299\">\u30b7\u30f3\u30b0\u30eb\u30e1\u30bf\u30eb\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3068\u6bd4\u8f03\u3057\u305f\u5229\u70b9<\/strong><\/span><\/h2>\n<p data-start=\"4301\" data-end=\"4378\">\u30b7\u30ea\u30b3\u30f3\u306b\u76f4\u63a5\u9285\u3092\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3059\u308b\u306e\u306b\u6bd4\u3079\u3001Ti\/Cu\u69cb\u9020\u306f\u4ee5\u4e0b\u3092\u63d0\u4f9b\u3059\u308b\uff1a<\/p>\n<ul data-start=\"4380\" data-end=\"4657\">\n<li data-section-id=\"631e5u\" data-start=\"4380\" data-end=\"4443\">\u71b1\u304a\u3088\u3073\u5316\u5b66\u7684\u30b9\u30c8\u30ec\u30b9\u4e0b\u3067\u306e\u512a\u308c\u305f\u63a5\u7740\u5b89\u5b9a\u6027<\/li>\n<li data-section-id=\"iu92ys\" data-start=\"4444\" data-end=\"4490\">\u9285\u306e\u5265\u96e2\u3084\u3072\u3073\u5272\u308c\u306e\u30ea\u30b9\u30af\u3092\u4f4e\u6e1b<\/li>\n<li data-section-id=\"aldlo\" data-start=\"4491\" data-end=\"4543\">\u5fae\u7d30\u52a0\u5de5\u5de5\u7a0b\u306b\u304a\u3051\u308b\u6b69\u7559\u307e\u308a\u306e\u5411\u4e0a<\/li>\n<li data-section-id=\"tyryal\" data-start=\"4544\" data-end=\"4592\">\u3088\u308a\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u6027\u80fd<\/li>\n<li data-section-id=\"1qj1cxg\" data-start=\"4593\" data-end=\"4657\">\u591a\u6bb5\u968e\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u3088\u308a\u826f\u3044\u4e92\u63db\u6027<\/li>\n<\/ul>\n<p data-start=\"4659\" data-end=\"4761\">\u305d\u306e\u305f\u3081\u3001\u7814\u7a76\u5ba4\u3084\u7523\u696d\u7528R&amp;D\u74b0\u5883\u306b\u304a\u3044\u3066\u3001\u3088\u308a\u4fe1\u983c\u6027\u306e\u9ad8\u3044\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n<hr data-start=\"4763\" data-end=\"4766\" \/>\n<h2 data-section-id=\"elc90z\" data-start=\"4768\" data-end=\"4778\"><span role=\"text\"><strong data-start=\"4771\" data-end=\"4778\">\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/strong><\/span><\/h2>\n<p data-start=\"4780\" data-end=\"4979\"><strong data-start=\"4780\" data-end=\"4830\">Q1: \u306a\u305c\u30c1\u30bf\u30f3\u306f\u9285\u306e\u76ae\u819c\u306e\u4e0b\u306b\u4f7f\u7528\u3055\u308c\u308b\u306e\u3067\u3059\u304b\uff1f<\/strong><br data-start=\"4830\" data-end=\"4833\" \/>\u30c1\u30bf\u30f3\u306f\u3001\u9285\u3068\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u9593\u306e\u63a5\u7740\u3092\u5411\u4e0a\u3055\u305b\u308b\u63a5\u7740\u5c64\u3068\u3057\u3066\u6a5f\u80fd\u3057\u3001\u52a0\u5de5\u4e2d\u3084\u4f7f\u7528\u4e2d\u306e\u5265\u96e2\u3092\u9632\u304e\u307e\u3059\u3002.<\/p>\n<p data-start=\"4981\" data-end=\"5165\"><strong data-start=\"4981\" data-end=\"5023\">Q2: \u9285\u306e\u539a\u307f\u3092\u5897\u3084\u3059\u3053\u3068\u306f\u3067\u304d\u307e\u3059\u304b\uff1f<\/strong><br data-start=\"5023\" data-end=\"5026\" \/>\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u3055\u308c\u305f\u9285\u306f\u3001\u96fb\u6c17\u3081\u3063\u304d\u306e\u30b7\u30fc\u30c9\u5c64\u3068\u3057\u3066\u4f7f\u7528\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u7528\u9014\u306b\u5fdc\u3058\u3066\u3088\u308a\u539a\u3044\u91d1\u5c5e\u5c64\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<p data-start=\"5167\" data-end=\"5291\"><strong data-start=\"5167\" data-end=\"5213\">Q3: \u30a6\u30a7\u30cf\u30fc\u306e\u4e21\u9762\u306b\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3067\u304d\u307e\u3059\u304b\uff1f<\/strong><br data-start=\"5213\" data-end=\"5216\" \/>\u3054\u8981\u671b\u306b\u5fdc\u3058\u3066\u3001\u7247\u9762\u307e\u305f\u306f\u4e21\u9762\u30b3\u30fc\u30c6\u30a3\u30f3\u30b0\u3082\u53ef\u80fd\u3067\u3059\u3002.<\/p>\n<p data-start=\"5293\" data-end=\"5470\"><strong data-start=\"5293\" data-end=\"5338\">Q4: \u3069\u306e\u3088\u3046\u306a\u57fa\u677f\u30aa\u30d7\u30b7\u30e7\u30f3\u304c\u3042\u308a\u307e\u3059\u304b\uff1f<\/strong><br data-start=\"5338\" data-end=\"5341\" \/>\u6a19\u6e96\u7684\u306a\u30b7\u30ea\u30b3\u30f3\u304c\u6700\u3082\u4e00\u822c\u7684\u3060\u304c\u3001\u7279\u6b8a\u306a\u5149\u5b66\u7528\u9014\u3084\u5316\u5b66\u7528\u9014\u306b\u306f\u77f3\u82f1\u3084\u30ac\u30e9\u30b9\u57fa\u677f\u3082\u5229\u7528\u3067\u304d\u308b\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>Ti\/Cu\u30e1\u30bf\u30eb\u30b3\u30fc\u30c8\u30b7\u30ea\u30b3\u30f3\u30a6\u30a8\u30cf\u30fc\u306f\u3001\u30de\u30b0\u30cd\u30c8\u30ed\u30f3\u30b9\u30d1\u30c3\u30bf\u30ea\u30f3\u30b0\u6280\u8853\u306b\u3088\u308a\u3001\u30b7\u30ea\u30b3\u30f3\u57fa\u677f\u4e0a\u306b\u30c1\u30bf\u30f3\u5bc6\u7740\u5c64\u3068\u9285\u5c0e\u96fb\u5c64\u3092\u6210\u819c\u3057\u305f\u9ad8\u54c1\u8cea\u306a\u6a5f\u80fd\u6027\u30a6\u30a8\u30cf\u30fc\u3067\u3059\u3002\u30c1\u30bf\u30f3\u5c64\u306f\u819c\u306e\u5bc6\u7740\u6027\u3068\u5b89\u5b9a\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u9285\u5c64\u306f\u512a\u308c\u305f\u5c0e\u96fb\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u3053\u306e\u88fd\u54c1\u306f\u3001\u30de\u30a4\u30af\u30ed\u30a8\u30ec\u30af\u30c8\u30ed\u30cb\u30af\u30b9\u3001MEMS\u88fd\u9020\u3001\u5b9f\u9a13\u5ba4\u7814\u7a76\u3001\u8584\u819c\u30d7\u30ed\u30bb\u30b9\u958b\u767a\u306a\u3069\u306b\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":2428,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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