SiC\u96fb\u6975\uff08\u70ad\u5316\u30b1\u30a4\u7d20\u96fb\u6975\uff09\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u3001\u84b8\u7740\u88c5\u7f6e\u3001\u8868\u9762\u51e6\u7406\u88c5\u7f6e\u306a\u3069\u306e\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u90e8\u54c1\u3067\u3059\u3002SiC\u96fb\u6975\u306f\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u3068\u6bd4\u8f03\u3057\u3066\u3001\u4ee5\u4e0b\u306e\u7279\u9577\u304c\u3042\u308a\u307e\u3059\u3002![\"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u88c5\u7f6e\u7528CVD\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-1-300x300.png\")
\u904e\u9177\u306a\u51e6\u7406\u6761\u4ef6\u4e0b\u3067\u3001\u8010\u4e45\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u3001\u8010\u30d7\u30e9\u30ba\u30de\u6027\u306b\u512a\u308c\u3001\u52d5\u4f5c\u5bff\u547d\u304c\u9577\u304f\u306a\u308b\u3002.<\/p>\n
\u5316\u5b66\u6c17\u76f8\u6210\u9577\u6cd5\uff08CVD\uff09\u70ad\u5316\u30b1\u30a4\u7d20\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u305f\u3053\u306e\u96fb\u6975\u306f\u3001\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u3068\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3092\u5099\u3048\u305f\u7dfb\u5bc6\u3067\u9ad8\u7d14\u5ea6\u306a\u69cb\u9020\u3092\u7279\u5fb4\u3068\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306e\u305f\u3081\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30d7\u30e9\u30ba\u30de\u3001CF\u2084\u3001SF\u2086\u3001NF\u2083\u3001Cl\u2082\u306a\u3069\u306e\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u30ac\u30b9\u3001\u9ad8\u6e29\u3092\u4f34\u3046\u74b0\u5883\u306b\u7279\u306b\u9069\u3057\u3066\u3044\u308b\u3002.<\/p>\n
\u30d7\u30e9\u30ba\u30de\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u304a\u3044\u3066\u3001\u96fb\u6975\u306f\u96fb\u754c\u3001\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5747\u4e00\u6027\u3092\u5236\u5fa1\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002SiC\u96fb\u6975\u306f\u3001\u9577\u671f\u306b\u308f\u305f\u3063\u3066\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u7279\u6027\u3092\u7dad\u6301\u3057\u3001\u30c9\u30ea\u30d5\u30c8\u3092\u4f4e\u6e1b\u3057\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6c5a\u67d3\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u4e00\u8cab\u3057\u305f\u30a6\u30a7\u30fc\u30cf\u51e6\u7406\u7d50\u679c\u3092\u4fdd\u8a3c\u3057\u307e\u3059\u3002.<\/p>\n
\u305d\u306e\u8010\u4e45\u6027\u3068\u6027\u80fd\u304b\u3089\u3001SiC\u96fb\u6975\u306f\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u534a\u5c0e\u4f53\u6d88\u8017\u54c1\uff08\u9577\u5bff\u547d\u6d88\u8017\u90e8\u54c1\uff09\u306b\u5206\u985e\u3055\u308c\u3001\u5148\u7aef\u534a\u5c0e\u4f53\u30ce\u30fc\u30c9\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u751f\u7523\u74b0\u5883\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002.<\/p>\n
<\/p>\n SiC\u96fb\u6975\u306f\u3001\u9ad8\u3044\u8010\u4e45\u6027\u3068\u5b89\u5b9a\u6027\u304c\u8981\u6c42\u3055\u308c\u308b\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u74b0\u5883\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\uff1a<\/p>\n \u7279\u306b\u6b21\u306e\u3088\u3046\u306a\u7528\u9014\u306b\u9069\u3057\u3066\u3044\u308b\u3002 \u904e\u9177\u306a\u30d7\u30e9\u30ba\u30de\u6761\u4ef6\u3068\u9577\u3044\u751f\u7523\u30b5\u30a4\u30af\u30eb<\/strong>, \u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u3067\u306f\u5bff\u547d\u8981\u4ef6\u3092\u6e80\u305f\u3059\u3053\u3068\u304c\u3067\u304d\u306a\u3044\u3002.<\/p>\n \u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306b\u6bd4\u3079\u3001SiC\u96fb\u6975\u306f\u5927\u5e45\u306a\u6027\u80fd\u5411\u4e0a\u3092\u5b9f\u73fe\u3057\u3066\u3044\u308b\uff1a<\/p>\n \u521d\u671f\u30b3\u30b9\u30c8\u306f\u9ad8\u304f\u306a\u308b\u304c\u3001SiC\u96fb\u6975\u306f\u30cf\u30a4\u30a8\u30f3\u30c9\u306e\u534a\u5c0e\u4f53\u7528\u9014\u306b\u304a\u3044\u3066\u7dcf\u6240\u6709\u30b3\u30b9\u30c8\uff08TCO\uff09\u3092\u4f4e\u304f\u6291\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002.<\/p>\n Q1\uff1aSiC\u96fb\u6975\u306f\u6d88\u8017\u54c1\u3067\u3059\u304b\uff1f<\/strong> Q2: \u306a\u305c\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u3067\u306f\u306a\u304fSiC\u306a\u306e\u3067\u3059\u304b\uff1f<\/strong> Q3: \u96fb\u6975\u306f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u304b\uff1f<\/strong> Q4: SiC\u96fb\u6975\u306f\u3069\u306e\u3088\u3046\u306a\u7523\u696d\u3067\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u304b\uff1f<\/strong> SiC Electrode (Silicon Carbide Electrode)\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u3001\u84b8\u7740\u3001\u8868\u9762\u51e6\u7406\u88c5\u7f6e\u306a\u3069\u306e\u5148\u7aef\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u7528\u306b\u8a2d\u8a08\u3055\u308c\u305f\u9ad8\u6027\u80fd\u30b3\u30f3\u30dd\u30fc\u30cd\u30f3\u30c8\u3067\u3059\u3002\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306b\u6bd4\u3079\u3001SiC\u96fb\u6975\u306f\u8010\u4e45\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u3001\u512a\u308c\u305f\u30d7\u30e9\u30ba\u30de\u8010\u6027\u3068\u904e\u9177\u306a\u51e6\u7406\u6761\u4ef6\u4e0b\u3067\u306e\u9577\u5bff\u547d\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u70ad\u5316\u30b1\u30a4\u7d20\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u305f\u3053\u306e\u96fb\u6975\u306f\u3001\u512a\u308c\u305f\u71b1\u4f1d\u5c0e\u6027\u3068\u5316\u5b66\u7684\u5b89\u5b9a\u6027\u3092\u5099\u3048\u305f\u7dfb\u5bc6\u3067\u9ad8\u7d14\u5ea6\u306a\u69cb\u9020\u3092\u7279\u5fb4\u3068\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":2414,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[],"class_list":{"0":"post-2411","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"desktop-align-left","8":"tablet-align-left","9":"mobile-align-left","10":"ast-product-gallery-layout-horizontal-slider","11":"ast-product-tabs-layout-horizontal","13":"first","14":"instock","15":"shipping-taxable","16":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2411","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/comments?post=2411"}],"version-history":[{"count":2,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2411\/revisions"}],"predecessor-version":[{"id":2416,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2411\/revisions\/2416"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media\/2414"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media?parent=2411"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_brand?post=2411"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_cat?post=2411"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_tag?post=2411"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}![\"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u88c5\u7f6e\u7528CVD\u70ad\u5316\u30b1\u30a4\u7d20\uff08SiC\uff09\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Electrode-for-Semiconductor-Plasma-Systems-2-300x300.png\")
<\/strong><\/p>\n\n
\n\u6280\u8853\u4ed5\u69d8<\/h2>\n
\n\n\n\n
\n \n\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n \u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n \n \u7d20\u6750<\/td>\n CVD\u70ad\u5316\u30b1\u30a4\u7d20(SiC)<\/td>\n<\/tr>\n \n \u7d14\u5ea6<\/td>\n \u2265 99.9%<\/td>\n<\/tr>\n \n \u5bc6\u5ea6<\/td>\n \u2265 3.1 g\/cm\u00b3 \u4ee5\u4e0a<\/td>\n<\/tr>\n \n \u76f4\u5f84\uff08\u6700\u5927\uff09<\/td>\n 330mm\u307e\u3067<\/td>\n<\/tr>\n \n \u539a\u3055<\/td>\n \u30ab\u30b9\u30bf\u30e0\uff08\u901a\u5e385\uff5e50mm\uff09<\/td>\n<\/tr>\n \n \u62b5\u6297\u7387\uff08\u4f4e\uff09<\/td>\n < 0.02 \u03a9-cm<\/td>\n<\/tr>\n \n \u62b5\u6297\u7387\uff08\u4e2d\uff09<\/td>\n 0.2 - 25 \u03a9-cm<\/td>\n<\/tr>\n \n \u62b5\u6297\u7387\uff08\u9ad8\uff09<\/td>\n > 100 \u03a9-cm<\/td>\n<\/tr>\n \n \u62b5\u6297\u7387\u306e\u5747\u4e00\u6027 (RRG)<\/td>\n < 5%<\/td>\n<\/tr>\n \n \u30ac\u30b9\u30db\u30fc\u30eb\u5f84<\/td>\n 0.2\uff5e0.8mm\uff08\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\uff09<\/td>\n<\/tr>\n \n \u8868\u9762\u72b6\u614b<\/td>\n \u7814\u78e8\uff08\u7814\u78e8\u30aa\u30d7\u30b7\u30e7\u30f3\uff09<\/td>\n<\/tr>\n \n \u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n \u2264 1.6 \u03bcm<\/td>\n<\/tr>\n \n \u52a0\u5de5\u7cbe\u5ea6<\/td>\n < 10 \u03bcm<\/td>\n<\/tr>\n \n \u71b1\u4f1d\u5c0e\u7387<\/td>\n 120 - 200 W\/m-K<\/td>\n<\/tr>\n \n \u786c\u5ea6<\/td>\n ~9.2\u30e2\u30fc\u30b9<\/td>\n<\/tr>\n \n \u6700\u9ad8\u4f7f\u7528\u6e29\u5ea6<\/td>\n > 1000\u00b0C (\u30d7\u30ed\u30bb\u30b9\u306b\u3088\u308b)<\/td>\n<\/tr>\n \n \u54c1\u8cea\u7ba1\u7406<\/td>\n \u3072\u3073\u3001\u6b20\u3051\u3001\u6c5a\u67d3\u306a\u3057<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n
\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/KYQhvr8H6fiJzv0Gyv0QBbnTGAn0D-jgL0afJ2QhVSsVzaDSfEEx4D1Qc9Qg9IxXDOCUhnYHl82TwzfZ-OQMZzQa5u3KF6R1mE3QPYDfCW4ltwvgZ5uecKGM7VBlj-f5ppfWrANQSR4kHdIoBW-vOxmtu56kJnlmCndnFjtFqasApRq1EpNs3nKzmFQFM9WF-300x225.jpg\")
<\/p>\n<\/li>\n
\n\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u3092\u8d85\u3048\u308b\u5229\u70b9<\/h2>\n
\n
![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\")
<\/p>\n
\n\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\n
\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306b\u6bd4\u3079\u3001\u8010\u7528\u5e74\u6570\u306f\u306f\u308b\u304b\u306b\u9577\u3044\u3002.<\/p>\n
SiC\u306f\u8010\u30d7\u30e9\u30ba\u30de\u6027\u306b\u512a\u308c\u3001\u5bff\u547d\u304c\u9577\u304f\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u5c11\u306a\u3044\u305f\u3081\u3001\u904e\u9177\u306a\u52a0\u5de5\u74b0\u5883\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n
\u30b5\u30a4\u30ba\u3001\u539a\u3055\u3001\u62b5\u6297\u7387\u3001\u30ac\u30b9\u7a74\u306e\u30c7\u30b6\u30a4\u30f3\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u306f\u3059\u3079\u3066\u304a\u5ba2\u69d8\u306e\u3054\u8981\u671b\u306b\u5fdc\u3058\u3066\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u3002.<\/p>\n
\u4e3b\u306b\u534a\u5c0e\u4f53\u88fd\u9020\u3001\u7279\u306b\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u3068\u84b8\u7740\u30b7\u30b9\u30c6\u30e0\u3002.<\/p>","protected":false},"excerpt":{"rendered":"