{"id":2389,"date":"2026-04-24T05:55:23","date_gmt":"2026-04-24T05:55:23","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&#038;p=2389"},"modified":"2026-04-24T05:55:25","modified_gmt":"2026-04-24T05:55:25","slug":"cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/cvd-silicon-carbide-sic-ring-for-semiconductor-plasma-etching\/","title":{"rendered":"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u7528CVD\u70ad\u5316\u30b1\u30a4\u7d20SiC\u30ea\u30f3\u30b0"},"content":{"rendered":"<p data-start=\"213\" data-end=\"577\"><img fetchpriority=\"high\" decoding=\"async\" class=\"alignright wp-image-2392 size-medium\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png\" alt=\"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u7528CVD\u70ad\u5316\u30b1\u30a4\u7d20SiC\u30ea\u30f3\u30b0\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-1.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/>SiC\u30ea\u30f3\u30b0\uff08\u70ad\u5316\u30b1\u30a4\u7d20\u30ea\u30f3\u30b0\uff09\u306f\u3001\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3001\u7279\u306b\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u3084\u84b8\u7740\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u9ad8\u6027\u80fd\u90e8\u54c1\u3067\u3059\u3002\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u70ad\u5316\u30b1\u30a4\u7d20\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u305f\u3053\u306e\u88fd\u54c1\u306f\u3001\u30d7\u30e9\u30ba\u30de\u6d78\u98df\u3001\u9ad8\u6e29\u3001\u904e\u9177\u306a\u5316\u5b66\u74b0\u5883\u306b\u5bfe\u3057\u3066\u5353\u8d8a\u3057\u305f\u8010\u6027\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"579\" data-end=\"989\">\u534a\u5c0e\u4f53\u88fd\u9020\u3067\u306f\u3001\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1\u306f\u30d5\u30c3\u7d20\u3084\u5869\u7d20\u30d9\u30fc\u30b9\u306e\u5316\u5b66\u7269\u8cea\uff08CF\u2084\u3001SF\u2086\u3001Cl\u2087\uff09\u3084\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30a4\u30aa\u30f3\u7832\u6483\u306a\u3069\u306e\u53cd\u5fdc\u6027\u30ac\u30b9\u306b\u9023\u7d9a\u7684\u306b\u3055\u3089\u3055\u308c\u308b\u3002\u3053\u306e\u3088\u3046\u306a\u6761\u4ef6\u4e0b\u3067\u306f\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u90e8\u54c1\u306f\u3088\u308a\u6025\u901f\u306b\u52a3\u5316\u3059\u308b\u50be\u5411\u304c\u3042\u308a\u307e\u3059\u3002\u5bfe\u7167\u7684\u306b\u3001SiC\u30ea\u30f3\u30b0\u306f\u8010\u4e45\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u3001\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u304c\u6e1b\u5c11\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u304c\u5411\u4e0a\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"991\" data-end=\"1355\">\u305d\u306e\u512a\u308c\u305f\u6a5f\u68b0\u7684\u5f37\u5ea6\u3001\u71b1\u4f1d\u5c0e\u6027\u3001\u5316\u5b66\u7684\u4e0d\u6d3b\u6027\u306b\u3088\u308a\u3001CVD SiC\u306f\u6b21\u4e16\u4ee3\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u3068\u3063\u3066\u6700\u3082\u4fe1\u983c\u3067\u304d\u308b\u6750\u6599\u306e\u4e00\u3064\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u307e\u3059\u3002SiC\u30ea\u30f3\u30b0\u306f\u901a\u5e38\u3001\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\u3001\u30a8\u30c3\u30b8\u30ea\u30f3\u30b0\u3001\u307e\u305f\u306f\u30c1\u30e3\u30f3\u30d0\u30fc\u4fdd\u8b77\u30ea\u30f3\u30b0\u3068\u3057\u3066\u8a2d\u7f6e\u3055\u308c\u3001\u30d7\u30e9\u30ba\u30de\u5206\u5e03\u3092\u5236\u5fa1\u3057\u3001\u91cd\u8981\u306a\u30c1\u30e3\u30f3\u30d0\u30fc\u90e8\u54c1\u3092\u4fdd\u8b77\u3059\u308b\u306e\u306b\u5f79\u7acb\u3061\u307e\u3059\u3002.<\/p>\n<p data-start=\"1357\" data-end=\"1595\">\u3053\u308c\u3089\u306e\u30ea\u30f3\u30b0\u306f\u30af\u30ea\u30c6\u30a3\u30ab\u30eb\u306a\u534a\u5c0e\u4f53\u6d88\u8017\u54c1\u306b\u5206\u985e\u3055\u308c\u3001\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u306b\u6bd4\u3079\u3066\u306f\u308b\u304b\u306b\u9577\u3044\u8010\u7528\u5e74\u6570\u3092\u63d0\u4f9b\u3059\u308b\u305f\u3081\u3001\u5148\u7aef\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3084\u9ad8\u30b9\u30eb\u30fc\u30d7\u30c3\u30c8\u88fd\u9020\u74b0\u5883\u306b\u6700\u9069\u3067\u3059\u3002.<\/p>\n<hr data-start=\"1597\" data-end=\"1600\" \/>\n<h2 data-section-id=\"1wht24f\" data-start=\"1602\" data-end=\"1622\">\u4e3b\u306a\u7279\u5fb4<\/h2>\n<p><img decoding=\"async\" class=\"size-medium wp-image-2390 alignright\" src=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png\" alt=\"\" width=\"300\" height=\"300\" srcset=\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-300x300.png 300w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-150x150.png 150w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-768x768.png 768w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-12x12.png 12w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-600x600.png 600w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2-100x100.png 100w, https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/CVD-Silicon-Carbide-SiC-Ring-for-Semiconductor-Plasma-Etching-2.png 1000w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<ul data-start=\"1623\" data-end=\"2189\">\n<li data-section-id=\"185xteb\" data-start=\"1623\" data-end=\"1725\">\u9ad8\u7d14\u5ea6CVD SiC\u6750\u6599\uff1a\u512a\u308c\u305f\u69cb\u9020\u7684\u5b8c\u5168\u6027\u3068\u6700\u5c0f\u9650\u306e\u6c5a\u67d3\u3092\u4fdd\u8a3c<\/li>\n<li data-section-id=\"103qh1t\" data-start=\"1726\" data-end=\"1822\">\u5353\u8d8a\u3057\u305f\u30d7\u30e9\u30ba\u30de\u8010\u6027\uff1a\u30d5\u30c3\u7d20\u304a\u3088\u3073\u5869\u7d20\u7cfb\u30d7\u30e9\u30ba\u30de\u306b\u5bfe\u3059\u308b\u512a\u308c\u305f\u8010\u6027<\/li>\n<li data-section-id=\"19jl5gi\" data-start=\"1823\" data-end=\"1924\">\u9ad8\u6e29\u5b89\u5b9a\u6027\uff1a\u9ad8\u6e29\u51e6\u7406\u74b0\u5883\u3067\u3082\u6027\u80fd\u3092\u7dad\u6301<\/li>\n<li data-section-id=\"ixqmoc\" data-start=\"1925\" data-end=\"2002\">\u4f4e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u767a\u751f\uff1a\u30a6\u30a7\u30cf\u30fc\u306e\u6b69\u7559\u307e\u308a\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u6e05\u6d44\u5ea6\u3092\u5411\u4e0a<\/li>\n<li data-section-id=\"nx34my\" data-start=\"2003\" data-end=\"2084\">\u9577\u5bff\u547d\uff1a\u901a\u5e38\u3001\u30b7\u30ea\u30b3\u30f3\u90e8\u54c1\u3088\u308a\u6570\u500d\u9577\u3044<\/li>\n<li data-section-id=\"14jsdwf\" data-start=\"2085\" data-end=\"2189\">\u7cbe\u5bc6\u52a0\u5de5\uff1a\u534a\u5c0e\u4f53\u30c4\u30fc\u30eb\u3078\u306e\u30b7\u30fc\u30e0\u30ec\u30b9\u306a\u7d71\u5408\u306e\u305f\u3081\u306e\u53b3\u3057\u3044\u516c\u5dee(&lt;10\u03bcm)<\/li>\n<\/ul>\n<hr data-start=\"2191\" data-end=\"2194\" \/>\n<h2 data-section-id=\"1vgwxle\" data-start=\"2196\" data-end=\"2228\">\u6280\u8853\u4ed5\u69d8<\/h2>\n<div class=\"TyagGW_tableContainer\">\n<div class=\"group TyagGW_tableWrapper flex flex-col-reverse w-fit\" tabindex=\"-1\">\n<table class=\"w-fit min-w-(--thread-content-width)\" data-start=\"2230\" data-end=\"2883\">\n<thead data-start=\"2230\" data-end=\"2259\">\n<tr data-start=\"2230\" data-end=\"2259\">\n<th class=\"\" data-start=\"2230\" data-end=\"2242\" data-col-size=\"sm\">\u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n<th class=\"\" data-start=\"2242\" data-end=\"2259\" data-col-size=\"md\">\u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2287\" data-end=\"2883\">\n<tr data-start=\"2287\" data-end=\"2327\">\n<td data-start=\"2287\" data-end=\"2298\" data-col-size=\"sm\">\u7d20\u6750<\/td>\n<td data-col-size=\"md\" data-start=\"2298\" data-end=\"2327\">CVD\u70ad\u5316\u30b1\u30a4\u7d20(SiC)<\/td>\n<\/tr>\n<tr data-start=\"2328\" data-end=\"2348\">\n<td data-start=\"2328\" data-end=\"2337\" data-col-size=\"sm\">\u7d14\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2337\" data-end=\"2348\">\u2265 99.9%<\/td>\n<\/tr>\n<tr data-start=\"2349\" data-end=\"2374\">\n<td data-start=\"2349\" data-end=\"2359\" data-col-size=\"sm\">\u5bc6\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2359\" data-end=\"2374\">\u2265 3.1 g\/cm\u00b3 \u4ee5\u4e0a<\/td>\n<\/tr>\n<tr data-start=\"2375\" data-end=\"2408\">\n<td data-start=\"2375\" data-end=\"2392\" data-col-size=\"sm\">\u76f4\u5f84\uff08\u6700\u5927\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2392\" data-end=\"2408\">370mm\u307e\u3067<\/td>\n<\/tr>\n<tr data-start=\"2409\" data-end=\"2451\">\n<td data-start=\"2409\" data-end=\"2421\" data-col-size=\"sm\">\u539a\u3055<\/td>\n<td data-col-size=\"md\" data-start=\"2421\" data-end=\"2451\">\u30ab\u30b9\u30bf\u30e0\uff08\u901a\u5e385\uff5e30mm\uff09<\/td>\n<\/tr>\n<tr data-start=\"2452\" data-end=\"2487\">\n<td data-start=\"2452\" data-end=\"2472\" data-col-size=\"sm\">\u62b5\u6297\u7387\uff08\u4f4e\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2472\" data-end=\"2487\">&lt; 0.02 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2488\" data-end=\"2528\">\n<td data-start=\"2488\" data-end=\"2511\" data-col-size=\"sm\">\u62b5\u6297\u7387\uff08\u4e2d\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2511\" data-end=\"2528\">0.2 - 25 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2529\" data-end=\"2564\">\n<td data-start=\"2529\" data-end=\"2550\" data-col-size=\"sm\">\u62b5\u6297\u7387\uff08\u9ad8\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2550\" data-end=\"2564\">&gt; 100 \u03a9-cm<\/td>\n<\/tr>\n<tr data-start=\"2565\" data-end=\"2604\">\n<td data-start=\"2565\" data-end=\"2596\" data-col-size=\"sm\">\u62b5\u6297\u7387\u306e\u5747\u4e00\u6027 (RRG)<\/td>\n<td data-col-size=\"md\" data-start=\"2596\" data-end=\"2604\">&lt; 5%<\/td>\n<\/tr>\n<tr data-start=\"2605\" data-end=\"2670\">\n<td data-start=\"2605\" data-end=\"2625\" data-col-size=\"sm\">\u8868\u9762\u72b6\u614b<\/td>\n<td data-col-size=\"md\" data-start=\"2625\" data-end=\"2670\">\u30b0\u30e9\u30a6\u30f3\u30c9\uff08\u3054\u8981\u671b\u306b\u5fdc\u3058\u3066\u7814\u78e8\u3082\u53ef\u80fd\uff09<\/td>\n<\/tr>\n<tr data-start=\"2671\" data-end=\"2723\">\n<td data-start=\"2671\" data-end=\"2696\" data-col-size=\"sm\">\u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n<td data-col-size=\"md\" data-start=\"2696\" data-end=\"2723\">\u2264 1.6 \u03bcm\uff08\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\uff09<\/td>\n<\/tr>\n<tr data-start=\"2724\" data-end=\"2757\">\n<td data-start=\"2724\" data-end=\"2746\" data-col-size=\"sm\">\u52a0\u5de5\u7cbe\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2746\" data-end=\"2757\">&lt; 10 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2758\" data-end=\"2799\">\n<td data-start=\"2758\" data-end=\"2781\" data-col-size=\"sm\">\u71b1\u4f1d\u5c0e\u7387<\/td>\n<td data-col-size=\"md\" data-start=\"2781\" data-end=\"2799\">~120-200 W\/m-K<\/td>\n<\/tr>\n<tr data-start=\"2800\" data-end=\"2824\">\n<td data-start=\"2800\" data-end=\"2811\" data-col-size=\"sm\">\u786c\u5ea6<\/td>\n<td data-col-size=\"md\" data-start=\"2811\" data-end=\"2824\">~9.2\u30e2\u30fc\u30b9<\/td>\n<\/tr>\n<tr data-start=\"2825\" data-end=\"2883\">\n<td data-start=\"2825\" data-end=\"2843\" data-col-size=\"sm\">\u54c1\u8cea\u7ba1\u7406<\/td>\n<td data-col-size=\"md\" data-start=\"2843\" data-end=\"2883\">\u3072\u3073\u3001\u6b20\u3051\u3001\u6c5a\u67d3\u306a\u3057<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<hr data-start=\"2885\" data-end=\"2888\" \/>\n<h2 data-section-id=\"1gggyhy\" data-start=\"2890\" data-end=\"2910\">\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n<p data-start=\"2911\" data-end=\"3025\">SiC\u30ea\u30f3\u30b0\u306f\u3001\u8010\u4e45\u6027\u3068\u8010\u30d7\u30e9\u30ba\u30de\u6027\u304c\u91cd\u8981\u306a\u534a\u5c0e\u4f53\u88c5\u7f6e\u306b\u4e0d\u53ef\u6b20\u306a\u90e8\u54c1\u3067\u3059\uff1a<\/p>\n<ul data-start=\"3027\" data-end=\"3241\">\n<li data-section-id=\"qzqq98\" data-start=\"3027\" data-end=\"3065\">\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\uff08ICP \/ RIE\uff09<\/li>\n<li data-section-id=\"1iourx1\" data-start=\"3066\" data-end=\"3109\">\u5316\u5b66\u84b8\u7740\uff08CVD \/ PECVD\uff09<\/li>\n<li data-section-id=\"yfc3l\" data-start=\"3110\" data-end=\"3149\">\u30d5\u30a9\u30fc\u30ab\u30b9\u30ea\u30f3\u30b0\/\u30a8\u30c3\u30b8\u30ea\u30f3\u30b0\u306e\u7528\u9014<\/li>\n<li data-section-id=\"14j8f1u\" data-start=\"3150\" data-end=\"3193\">\u30c1\u30e3\u30f3\u30d0\u30fc\u30e9\u30a4\u30ca\u30fc\u3068\u4fdd\u8b77\u90e8\u54c1<\/li>\n<li data-section-id=\"1l8pbfg\" data-start=\"3194\" data-end=\"3241\">\u9ad8\u5bc6\u5ea6\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u74b0\u5883<\/li>\n<\/ul>\n<p data-start=\"3243\" 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data-end=\"3436\">\u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u3088\u308aSiC\u30ea\u30f3\u30b0\u3092\u9078\u3076\u7406\u7531<\/h2>\n<p data-start=\"3437\" data-end=\"3702\">\u5f93\u6765\u306e\u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u306b\u6bd4\u3079\u3001SiC\u30ea\u30f3\u30b0\u306f\u8010\u7528\u5e74\u6570\u3068\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u3066\u3044\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u30ea\u30f3\u30b0\u306f\u521d\u671f\u8cbb\u7528\u5bfe\u52b9\u679c\u306f\u9ad8\u3044\u3082\u306e\u306e\u3001\u30a2\u30b0\u30ec\u30c3\u30b7\u30d6\u306a\u30d7\u30e9\u30ba\u30de\u6761\u4ef6\u4e0b\u3067\u306f\u6469\u8017\u304c\u901f\u304f\u3001\u4ea4\u63db\u983b\u5ea6\u304c\u9ad8\u304f\u306a\u308a\u307e\u3059\u3002.<\/p>\n<p data-start=\"3704\" data-end=\"3742\">\u4e00\u65b9\u3001SiC\u30ea\u30f3\u30b0\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306a\u7279\u5fb4\u304c\u3042\u308b\uff1a<\/p>\n<ul data-start=\"3743\" data-end=\"3903\">\n<li data-section-id=\"17mv8nk\" data-start=\"3743\" data-end=\"3772\">3\uff5e10\u500d\u306e\u9577\u5bff\u547d<\/li>\n<li data-section-id=\"16lo0t8\" data-start=\"3773\" data-end=\"3820\">\u5316\u5b66\u8150\u98df\u306b\u5bfe\u3059\u308b\u3088\u308a\u512a\u308c\u305f\u8010\u6027<\/li>\n<li data-section-id=\"19uuz0f\" data-start=\"3821\" data-end=\"3857\">\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u6c5a\u67d3\u306e\u4f4e\u6e1b<\/li>\n<li data-section-id=\"uhpkja\" data-start=\"3858\" data-end=\"3903\">\u30c0\u30a6\u30f3\u30bf\u30a4\u30e0\u3068\u30e1\u30f3\u30c6\u30ca\u30f3\u30b9\u30b3\u30b9\u30c8\u306e\u524a\u6e1b<\/li>\n<\/ul>\n<p data-start=\"3905\" 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data-end=\"4283\">Q1\uff1aSiC\u30ea\u30f3\u30b0\u306f\u6d88\u8017\u54c1\u3067\u3059\u304b\uff1f<br data-start=\"4121\" data-end=\"4124\" \/>\u306f\u3044\u3001\u91cd\u8981\u306a\u534a\u5c0e\u4f53\u306e\u6d88\u8017\u54c1\u3068\u8003\u3048\u3089\u308c\u3066\u3044\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u90e8\u54c1\u3088\u308a\u3082\u5bff\u547d\u306f\u9577\u3044\u306e\u3067\u3059\u304c\u3001\u30d7\u30e9\u30ba\u30de\u306b\u3055\u3089\u3055\u308c\u308b\u3068\u3044\u305a\u308c\u6469\u8017\u3057\u307e\u3059\u3002.<\/p>\n<p data-start=\"4285\" data-end=\"4492\">Q2: CVD SiC\u6750\u6599\u306e\u5229\u70b9\u306f\u4f55\u3067\u3059\u304b\uff1f<br data-start=\"4335\" data-end=\"4338\" \/>CVD SiC\u306f\u3001\u6975\u3081\u3066\u9ad8\u7d14\u5ea6\u3067\u7dfb\u5bc6\u306a\u69cb\u9020\u3092\u6301\u3061\u3001\u30d7\u30e9\u30ba\u30de\u3084\u5316\u5b66\u85ac\u54c1\u306b\u5bfe\u3059\u308b\u8010\u6027\u306b\u512a\u308c\u3066\u3044\u308b\u305f\u3081\u3001\u534a\u5c0e\u4f53\u7528\u9014\u306b\u6700\u9069\u3067\u3042\u308b\u3002.<\/p>\n<p data-start=\"4494\" data-end=\"4668\">Q3: SiC\u30ea\u30f3\u30b0\u306f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u304b\uff1f<br data-start=\"4533\" data-end=\"4536\" \/>\u306f\u3044\u3002\u76f4\u5f84\u3001\u539a\u3055\u3001\u62b5\u6297\u7387\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u306f\u3059\u3079\u3066\u3001\u304a\u5ba2\u69d8\u306e\u56f3\u9762\u307e\u305f\u306f\u88c5\u7f6e\u306e\u8981\u4ef6\u306b\u57fa\u3065\u3044\u3066\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n<p data-start=\"4670\" data-end=\"4814\">Q4: 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\/>\u30c7\u30b6\u30a4\u30f3\u306e\u8907\u96d1\u3055\u3084\u6570\u91cf\u306b\u3082\u3088\u308a\u307e\u3059\u304c\u3001\u751f\u7523\u306b\u306f\u901a\u5e384\uff5e8\u9031\u9593\u304b\u304b\u308a\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"<p>SiC\u30ea\u30f3\u30b0\uff08\u70ad\u5316\u30b1\u30a4\u7d20\u30ea\u30f3\u30b0\uff09\u306f\u3001\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3001\u7279\u306b\u30a8\u30c3\u30c1\u30f3\u30b0\u30c1\u30e3\u30f3\u30d0\u30fc\u3084\u84b8\u7740\u30c1\u30e3\u30f3\u30d0\u30fc\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u308b\u9ad8\u6027\u80fd\u90e8\u54c1\u3067\u3059\u3002\u5316\u5b66\u6c17\u76f8\u6210\u9577\uff08CVD\uff09\u70ad\u5316\u30b1\u30a4\u7d20\u3092\u4f7f\u7528\u3057\u3066\u88fd\u9020\u3055\u308c\u305f\u3053\u306e\u88fd\u54c1\u306f\u3001\u30d7\u30e9\u30ba\u30de\u6d78\u98df\u3001\u9ad8\u6e29\u3001\u904e\u9177\u306a\u5316\u5b66\u74b0\u5883\u306b\u5bfe\u3057\u3066\u5353\u8d8a\u3057\u305f\u8010\u6027\u3092\u767a\u63ee\u3057\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":2392,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center 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