{"id":2379,"date":"2026-04-24T05:38:15","date_gmt":"2026-04-24T05:38:15","guid":{"rendered":"https:\/\/www.zmsh-semitech.com\/?post_type=product&p=2379"},"modified":"2026-06-11T09:57:44","modified_gmt":"2026-06-11T09:57:44","slug":"%e5%8d%8a%e5%b0%8e%e4%bd%93%e3%83%97%e3%83%a9%e3%82%ba%e3%83%9e%e3%82%a8%e3%83%83%e3%83%81%e3%83%b3%e3%82%b0%e8%a3%85%e7%bd%ae%e7%94%a8%e9%ab%98%e7%b4%94%e5%ba%a6%e5%8d%98%e7%b5%90%e6%99%b6%e3%82%b7","status":"publish","type":"product","link":"https:\/\/www.zmsh-semitech.com\/ja\/product\/high-purity-single-crystal-silicon-electrode-for-semiconductor-plasma-etching-systems\/","title":{"rendered":"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u7528\u9ad8\u7d14\u5ea6\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u96fb\u6975"},"content":{"rendered":"![\"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u7528\u9ad8\u7d14\u5ea6\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/qdOjBmoV8IvfXCCZyP_TScsFcvsnf_rXpW086f8iuioCNO5yQDt0Z9y7ezVD__Z9xzJIqXRfLcHey9Fywi2oJzAWqcbFTEAZfR8g7LsL3RbSqPh8llkzHKhu9Nukj7rB22Gxq5U3xKXDSW2VQzm-N5hCDNWN3CSGBxRIWYEm0DeDO8KSIBMjrAfKNQtx2jyA-300x262.jpg\")
\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u3001\u6210\u819c\u88c5\u7f6e\u3001\u8868\u9762\u6539\u8cea\u88c5\u7f6e\u306a\u3069\u3001\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3067\u4f7f\u7528\u3055\u308c\u308b\u4e2d\u6838\u7684\u306a\u6a5f\u80fd\u90e8\u54c1\u3067\u3059\u3002\u9ad8\u7d14\u5ea6\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u304b\u3089\u88fd\u9020\u3055\u308c\u3001\u5b89\u5b9a\u3057\u305f\u30d7\u30e9\u30ba\u30de\u751f\u6210\u3001\u5747\u4e00\u306a\u96fb\u754c\u5206\u5e03\u3001\u6b63\u78ba\u306a\u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u3092\u4fdd\u8a3c\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002.<\/p>\n
\u73fe\u4ee3\u306e\u534a\u5c0e\u4f53\u88fd\u9020\u306b\u304a\u3044\u3066\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u5b89\u5b9a\u6027\u3068\u6b69\u7559\u307e\u308a\u306f\u3001\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u90e8\u90e8\u54c1\u306e\u6027\u80fd\u306b\u76f4\u63a5\u5f71\u97ff\u3055\u308c\u307e\u3059\u3002\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u30d9\u30fc\u30b9\u306e\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u512a\u308c\u305f\u9069\u5408\u6027\u306b\u3088\u308a\u3001\u6c5a\u67d3\u30ea\u30b9\u30af\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u7d14\u5ea6\u3092\u7dad\u6301\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u5e83\u304f\u597d\u307e\u308c\u3066\u3044\u307e\u3059\u3002\u91d1\u5c5e\u96fb\u6975\u3068\u6bd4\u8f03\u3057\u3066\u3001\u30b7\u30ea\u30b3\u30f3\u6750\u6599\u306f\u30d7\u30e9\u30ba\u30de\u306b\u3088\u308b\u6c5a\u67d3\u306b\u5bfe\u3057\u3066\u512a\u308c\u305f\u8010\u6027\u3092\u793a\u3057\u3001\u3088\u308a\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u7279\u6027\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002.<\/p>\n
\u3053\u308c\u3089\u306e\u96fb\u6975\u306f\u901a\u5e38\u3001\u9ad8\u30a8\u30cd\u30eb\u30ae\u30fc\u30d7\u30e9\u30ba\u30de\u3001CFN_2084\u3001SFN_2086\u3001Cl_20\u306a\u3069\u306e\u53cd\u5fdc\u6027\u30ac\u30b9\u3001\u9ad8\u6e29\u3092\u4f34\u3046\u904e\u9177\u306a\u74b0\u5883\u3067\u4f7f\u7528\u3055\u308c\u307e\u3059\u3002\u6642\u9593\u306e\u7d4c\u904e\u3068\u3068\u3082\u306b\u5f90\u3005\u306b\u4fb5\u98df\u3055\u308c\u308b\u305f\u3081\u3001\u6b21\u306e\u3088\u3046\u306b\u5206\u985e\u3055\u308c\u307e\u3059\u3002 \u91cd\u8981\u534a\u5c0e\u4f53\u6d88\u8017\u54c1<\/strong>, \u30e9\u30a4\u30d5\u30b5\u30a4\u30af\u30eb\u3092\u901a\u3058\u3066\u9ad8\u3044\u6027\u80fd\u3092\u7dad\u6301\u3057\u306a\u304c\u3089\u3001\u5b9a\u671f\u7684\u306a\u4ea4\u63db\u3092\u5fc5\u8981\u3068\u3059\u308b\u3002.<\/p>\n
\n\u4e3b\u306a\u7279\u5fb4<\/h2>\n\n- \u9ad8\u7d14\u5ea6\u7d20\u6750<\/strong>:\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\u306e\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u3092\u4f7f\u7528\u3057\u3001\u4e0d\u7d14\u7269\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u3001\u5b89\u5b9a\u3057\u305f\u96fb\u6c17\u6027\u80fd\u3092\u78ba\u4fdd
![\"\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u7528\u9ad8\u7d14\u5ea6\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/53ijDEI-Hbi31uz0t_L-DHLJsiyWWfRJlHlxVX1VI2hoHMMjCcOYgDxAcs06M_S4FBCl-zPueLgyH54wg3KtodiwkAok0zCME57k1CV0QE0UhxXuTtBJZpJPZ2eY9AembejJC0C5gN2j4R_87GHMZu-o2kMW4owmMIgDwzwwhM5_TvnzGqj9V0JcNVswUNE-300x281.jpg\")
<\/li>\n- \u8907\u6570\u306e\u62b5\u6297\u7387\u30aa\u30d7\u30b7\u30e7\u30f3<\/strong>:\u4f4e\u3001\u4e2d\u3001\u9ad8\u6bd4\u62b5\u6297\u30b0\u30ec\u30fc\u30c9\u304c\u3042\u308a\u3001\u30d7\u30e9\u30ba\u30de\u5236\u5fa1\u306e\u8981\u6c42\u306b\u5fdc\u3058\u3066\u9078\u629e\u3067\u304d\u308b\u3002<\/li>\n
- \u512a\u308c\u305f\u30d7\u30e9\u30ba\u30de\u9069\u5408\u6027<\/strong>:\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u767a\u751f\u3092\u6291\u3048\u3001\u30a6\u30a7\u30fc\u30cf\u306e\u6b69\u7559\u307e\u308a\u3092\u5411\u4e0a<\/li>\n
- \u7cbe\u5bc6\u6a5f\u68b0\u52a0\u5de5<\/strong>:\u30cf\u30a4\u30a8\u30f3\u30c9\u534a\u5c0e\u4f53\u88c5\u7f6e\u7d71\u5408\u306e\u305f\u3081\u306e\u53b3\u3057\u3044\u516c\u5dee(<10\u03bcm)<\/li>\n
- \u30ab\u30b9\u30bf\u30e0\u30fb\u30ac\u30b9\u30db\u30fc\u30eb\u30c7\u30b6\u30a4\u30f3<\/strong>:\u5747\u4e00\u306a\u30ac\u30b9\u5206\u5e03\u3068\u30d7\u30e9\u30ba\u30de\u5bc6\u5ea6\u306e\u6700\u9069\u5316\u306b\u5bfe\u5fdc<\/li>\n
- \u8868\u9762\u306e\u67d4\u8edf\u6027<\/strong>:\u7528\u9014\u306b\u5fdc\u3058\u3066\u3001\u30dd\u30ea\u30c3\u30b7\u30e5\u4ed5\u4e0a\u3052\u3001\u30e9\u30c3\u30d7\u4ed5\u4e0a\u3052\u3001\u7814\u78e8\u4ed5\u4e0a\u3052\u304c\u53ef\u80fd\u3002<\/li>\n<\/ul>\n
\n\u6280\u8853\u4ed5\u69d8<\/h2>\n\n
\n
\n\n\n| \u30d1\u30e9\u30e1\u30fc\u30bf<\/th>\n | \u4ed5\u69d8<\/th>\n<\/tr>\n<\/thead>\n |
\n\n| \u7d20\u6750<\/td>\n | \u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3<\/td>\n<\/tr>\n |
\n| \u7d14\u5ea6<\/td>\n | \u2265 99.999%\uff085N\u534a\u5c0e\u4f53\u30b0\u30ec\u30fc\u30c9\uff09<\/td>\n<\/tr>\n |
\n| \u76f4\u5f84\uff08\u6700\u5927\uff09<\/td>\n | 480mm\u307e\u3067<\/td>\n<\/tr>\n |
\n| \u539a\u3055<\/td>\n | \u30ab\u30b9\u30bf\u30e0\uff08\u30c7\u30b6\u30a4\u30f3\u306b\u3088\u308a\u901a\u5e385\uff5e50mm\uff09<\/td>\n<\/tr>\n |
\n| \u62b5\u6297\u7387\uff08\u4f4e\uff09<\/td>\n | < 0.02 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u62b5\u6297\u7387\uff08\u4e2d\uff09<\/td>\n | 1 - 4 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u62b5\u6297\u7387\uff08\u9ad8\uff09<\/td>\n | 70 - 90 \u03a9-cm<\/td>\n<\/tr>\n |
\n| \u62b5\u6297\u7387\u306e\u5747\u4e00\u6027 (RRG)<\/td>\n | < 5%<\/td>\n<\/tr>\n |
\n| \u30ac\u30b9\u30db\u30fc\u30eb\u5f84<\/td>\n | 0.2\uff5e0.8mm\uff08\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u53ef\u80fd\uff09<\/td>\n<\/tr>\n |
\n| \u8868\u9762\u72b6\u614b<\/td>\n | \u30dd\u30ea\u30c3\u30b7\u30e5\uff0f\u30e9\u30c3\u30d7\uff0f\u7814\u78e8<\/td>\n<\/tr>\n |
\n| \u8868\u9762\u7c97\u3055\uff08Ra\uff09<\/td>\n | \u2264 0.8 \u03bcm\uff08\u7814\u78e8\u30aa\u30d7\u30b7\u30e7\u30f3\u306f\u4e0b\u5074\uff09<\/td>\n<\/tr>\n |
\n| \u52a0\u5de5\u7cbe\u5ea6<\/td>\n | < 10 \u03bcm<\/td>\n<\/tr>\n |
\n| \u5e73\u5766\u6027<\/td>\n | \u2264 30 \u03bcm\uff08\u30b5\u30a4\u30ba\u306b\u3088\u308b\uff09<\/td>\n<\/tr>\n |
\n| \u30a8\u30c3\u30b8\u30fb\u30d7\u30ed\u30d5\u30a3\u30fc\u30eb<\/td>\n | \u30ab\u30b9\u30bf\u30e0\u9762\u53d6\u308a\/\u534a\u5f84<\/td>\n<\/tr>\n |
\n| \u54c1\u8cea\u7ba1\u7406<\/td>\n | \u6b20\u3051\u3001\u3072\u3073\u3001\u50b7\u3001\u6c5a\u67d3\u306a\u3057<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
\n\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3<\/h2>\n\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u3001\u30d7\u30e9\u30ba\u30de\u76f8\u4e92\u4f5c\u7528\u304c\u5fc5\u8981\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u88c5\u7f6e\u3067\u5e83\u304f\u4f7f\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u4ee3\u8868\u7684\u306a\u7528\u9014\u306f\u4ee5\u4e0b\u306e\u901a\u308a\u3067\u3059\uff1a<\/p>\n \n- \u30d7\u30e9\u30ba\u30de\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\uff08ICP\u3001RIE\uff09<\/li>\n
- \u5316\u5b66\u84b8\u7740\uff08CVD \/ PECVD\uff09<\/li>\n
- \u30a6\u30a7\u30cf\u30fc\u8868\u9762\u51e6\u7406\u30d7\u30ed\u30bb\u30b9<\/li>\n
- \u534a\u5c0e\u4f53\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u90e8\u90e8\u54c1<\/li>\n
- \u9759\u96fb\u307e\u305f\u306f\u30d7\u30e9\u30ba\u30de\u5206\u914d\u30b7\u30b9\u30c6\u30e0<\/li>\n<\/ul>\n
\u30d7\u30e9\u30ba\u30de\u306e\u5747\u4e00\u6027\u3092\u7dad\u6301\u3057\u3001\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u3092\u4f4e\u6e1b\u3059\u308b\u80fd\u529b\u306b\u3088\u308a\u3001\u6210\u719f\u3057\u305f\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3067\u3082\u5148\u9032\u7684\u306a\u30d7\u30ed\u30bb\u30b9\u30ce\u30fc\u30c9\u3067\u3082\u4e0d\u53ef\u6b20\u306a\u3082\u306e\u3068\u306a\u3063\u3066\u3044\u308b\u3002.<\/p>\n
\n\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u3092\u9078\u3076\u7406\u7531<\/h2>\n\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u3001\u30b3\u30b9\u30c8\u52b9\u7387\u3068\u6027\u80fd\u306e\u30e6\u30cb\u30fc\u30af\u306a\u30d0\u30e9\u30f3\u30b9\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002SiC\u90e8\u54c1\u306b\u6bd4\u3079\u3001\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u7d4c\u6e08\u7684\u3067\u6a5f\u68b0\u52a0\u5de5\u304c\u5bb9\u6613\u3067\u3042\u308b\u305f\u3081\u3001\u4ea4\u63db\u30b5\u30a4\u30af\u30eb\u304c\u8a31\u5bb9\u3055\u308c\u308b\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u6700\u9069\u3067\u3059\u3002\u3055\u3089\u306b\u3001\u30b7\u30ea\u30b3\u30f3\u30a6\u30a7\u30cf\u30fc\u30d7\u30ed\u30bb\u30b9\u3068\u306e\u672c\u8cea\u7684\u306a\u4e92\u63db\u6027\u306b\u3088\u308a\u3001\u9ad8\u3044\u30c7\u30d0\u30a4\u30b9\u6b69\u7559\u307e\u308a\u3092\u7dad\u6301\u3059\u308b\u305f\u3081\u306b\u91cd\u8981\u306a\u30af\u30ed\u30b9\u30b3\u30f3\u30bf\u30df\u30cd\u30fc\u30b7\u30e7\u30f3\u306e\u30ea\u30b9\u30af\u3092\u6700\u5c0f\u9650\u306b\u6291\u3048\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n \u3088\u308a\u9577\u3044\u5bff\u547d\u3084\u9ad8\u3044\u8010\u98df\u6027\u304c\u8981\u6c42\u3055\u308c\u308b\u7528\u9014\u3067\u306f\u3001SiC\u96fb\u6975\u304c\u691c\u8a0e\u3055\u308c\u308b\u304b\u3082\u3057\u308c\u307e\u305b\u3093\u3002\u3057\u304b\u3057\u3001\u5e45\u5e83\u3044\u6a19\u6e96\u7684\u306a\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u3067\u306f\u3001\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u304c\u696d\u754c\u6a19\u6e96\u306e\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3067\u3042\u308a\u7d9a\u3051\u3066\u3044\u307e\u3059\u3002.<\/p>\n ![\"\"](\"https:\/\/www.zmsh-semitech.com\/wp-content\/uploads\/2026\/04\/\u5fae\u4fe1\u56fe\u7247_20260423181006_366_381-1024x486.png\") <\/p>\n
\n\u3088\u304f\u3042\u308b\u3054\u8cea\u554f<\/h2>\nQ1: \u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u6d88\u8017\u54c1\u3067\u3059\u304b\uff1f<\/strong>
\u306f\u3044\u3001\u91cd\u8981\u306a\u534a\u5c0e\u4f53\u6d88\u8017\u54c1\u306b\u5206\u985e\u3055\u308c\u307e\u3059\u3002\u30d7\u30e9\u30ba\u30de\u3078\u306e\u66b4\u9732\u3084\u5316\u5b66\u53cd\u5fdc\u306b\u3088\u308a\u3001\u5f90\u3005\u306b\u6469\u8017\u3057\u3001\u5b9a\u671f\u7684\u306a\u4ea4\u63db\u304c\u5fc5\u8981\u306b\u306a\u308a\u307e\u3059\u3002.<\/p>\nQ2: \u3069\u306e\u62b5\u6297\u7387\u3092\u9078\u3079\u3070\u3088\u3044\u3067\u3059\u304b\uff1f<\/strong>
\u304a\u5ba2\u69d8\u306e\u30d7\u30ed\u30bb\u30b9\u8981\u4ef6\u306b\u3088\u308a\u307e\u3059\u3002\u4f4e\u62b5\u6297\u7387\u306f\u4e00\u822c\u7684\u306b\u9ad8\u3044\u5c0e\u96fb\u6027\u304c\u5fc5\u8981\u306a\u5834\u5408\u306b\u4f7f\u7528\u3055\u308c\u3001\u9ad8\u62b5\u6297\u7387\u306f\u7d76\u7e01\u3084\u5236\u5fa1\u3055\u308c\u305f\u30d7\u30e9\u30ba\u30de\u74b0\u5883\u306b\u9069\u3057\u3066\u3044\u307e\u3059\u3002.<\/p>\nQ3: \u96fb\u6975\u306f\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u304b\uff1f<\/strong>
\u306f\u3044\u3002\u5bf8\u6cd5\u3001\u539a\u3055\u3001\u30ac\u30b9\u30db\u30fc\u30eb\u30d1\u30bf\u30fc\u30f3\u3001\u62b5\u6297\u7387\u3001\u8868\u9762\u4ed5\u4e0a\u3052\u306f\u3059\u3079\u3066\u3001\u304a\u5ba2\u69d8\u306e\u56f3\u9762\u3084\u88c5\u7f6e\u306e\u8981\u4ef6\u306b\u5fdc\u3058\u3066\u30ab\u30b9\u30bf\u30de\u30a4\u30ba\u3067\u304d\u307e\u3059\u3002.<\/p>","protected":false},"excerpt":{"rendered":"\u30b7\u30ea\u30b3\u30f3\u96fb\u6975\u306f\u3001\u30a8\u30c3\u30c1\u30f3\u30b0\u88c5\u7f6e\u3001\u6210\u819c\u88c5\u7f6e\u3001\u8868\u9762\u6539\u8cea\u88c5\u7f6e\u306a\u3069\u3001\u6700\u5148\u7aef\u306e\u534a\u5c0e\u4f53\u30d7\u30e9\u30ba\u30de\u51e6\u7406\u88c5\u7f6e\u3067\u4f7f\u7528\u3055\u308c\u308b\u4e2d\u6838\u7684\u306a\u6a5f\u80fd\u90e8\u54c1\u3067\u3059\u3002\u9ad8\u7d14\u5ea6\u5358\u7d50\u6676\u30b7\u30ea\u30b3\u30f3\u304b\u3089\u88fd\u9020\u3055\u308c\u3001\u5b89\u5b9a\u3057\u305f\u30d7\u30e9\u30ba\u30de\u751f\u6210\u3001\u5747\u4e00\u306a\u96fb\u754c\u5206\u5e03\u3001\u6b63\u78ba\u306a\u30a6\u30a7\u30cf\u30fc\u51e6\u7406\u3092\u4fdd\u8a3c\u3059\u308b\u4e0a\u3067\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u307e\u3059\u3002.<\/p>","protected":false},"featured_media":2397,"comment_status":"open","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"default","adv-header-id-meta":"","stick-header-meta":"default","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}}},"product_brand":[],"product_cat":[1212],"product_tag":[1226,1222,1224,1230,1220,1229,1223,1216,1219,1221,1218,1214,1232,1225,1213,1231,1227,1228,1217,1215],"class_list":{"0":"post-2379","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-semiconductor-consumables","7":"product_tag-custom-silicon-electrode","8":"product_tag-cvd-electrode","9":"product_tag-high-purity-silicon","10":"product_tag-high-resistivity-silicon","11":"product_tag-icp-electrode","12":"product_tag-low-resistivity-silicon","13":"product_tag-pecvd-electrode","14":"product_tag-plasma-etching-electrode","15":"product_tag-plasma-processing-components","16":"product_tag-rie-electrode","17":"product_tag-semiconductor-consumables","18":"product_tag-semiconductor-electrode","19":"product_tag-semiconductor-equipment-parts","20":"product_tag-semiconductor-grade-silicon","21":"product_tag-silicon-electrode","22":"product_tag-silicon-electrode-manufacturer","23":"product_tag-silicon-gas-distribution-plate","24":"product_tag-silicon-showerhead-electrode","25":"product_tag-silicon-wafer-electrode","26":"product_tag-single-crystal-silicon-electrode","27":"desktop-align-left","28":"tablet-align-left","29":"mobile-align-left","30":"ast-product-gallery-layout-horizontal-slider","31":"ast-product-tabs-layout-horizontal","33":"first","34":"instock","35":"shipping-taxable","36":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2379","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/types\/product"}],"replies":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/comments?post=2379"}],"version-history":[{"count":3,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2379\/revisions"}],"predecessor-version":[{"id":2387,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product\/2379\/revisions\/2387"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media\/2397"}],"wp:attachment":[{"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/media?parent=2379"}],"wp:term":[{"taxonomy":"product_brand","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_brand?post=2379"},{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_cat?post=2379"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/www.zmsh-semitech.com\/ja\/wp-json\/wp\/v2\/product_tag?post=2379"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}} |